3 Port Solenoid Valve

03-3502-2740 Fax: 03-3508-2480 URL http://www.smcworld.com 2002 SMC Corporation All Rights Reserved 1st printing GT D-036 P-650(DN) * Printed in Japan.

2-Color Display

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 URL http://www.smcworld.com 2010 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing LY printing OZ 7150SZ Printed in Japan. D-DN

ACG

Series ACG How to Order ACG 30 A 03 G1 Option Symbol Description Applicable model Body size Nil 1 2 3 6 8 C J N R ACG20 to 40 Port size Symbol (8) 0.02 to 0.2 MPa setting ACG20 to 40 20 30 40 1/8 Metal bowl ACG20 to 40 3/8 Lubricator with drain cock ACG20 to 40 1/2 Nylon bowl ACG30, 40 Metal bowl with level gauge ACG20 With bowl guard Model combination ACG20 to 40 (9) Filter case with drain

3 Port Solenoid Valve

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 URL http://www.smcworld.com 2008 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing MV printing MV 16400DN Printed in Japan.

9.8

OZ Edition B Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 URL http://www.smcworld.com 2010 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing NR printing OZ 7150SZ Printed in Japan. D-DN

Vacuum Pad with Ejector

This phenomenon occurs earlier if pushing or the high vacuum pressure is used. 27 - Revision history Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 http://www.smcworld.com 2016 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 28 -

Valve; w/Stop Valve), Supply/Return Port Size: 03 (3/8), Return Unit Flow Switch Output Specifications: BT (Out 1: PNP; Out 2: Flow Rate: PNP; Temp.: PNP; Temperature Sensor: Yes), Lead Wire: Q (w/M12 -M8 Conversion Lead Wire, 0.1 m), Return Unit Flow Switch Unit Specifications: J (Integrated Display: L/min; Accumulated Flow: L; Temp.: °F)

Valve: None; Stop Valve: None, Return Port Size: 03 (3/8), Flow Switch Output Specifications: C (Out 1: NPN; Out 2: Flow Rate: Analog 1 to 5 V; Temp.: None; Temperature Sensor: None), Lead Wire: w/Lead Wire and M8 Connector, 3 m, Flow Switch Unit Specifications: J (Integrated Display: L/min; Accumulated Flow: L; Temp.: °F)

Valve: None; Stop Valve: None, Return Port Size: 03 (3/8), Flow Switch Output Specifications: CT (Out 1: NPN; Out 2: Flow Rate: Analog 1 to 5 V ⇔ Analog 1 to 5 V; Temperature Sensor: Yes), Lead Wire: w/Lead Wire and M8 Connector, 3 m, Flow Switch Unit Specifications: J (Integrated Display: L/min; Accumulated Flow: L; Temp.: °F)

Material: T (SCS14 Cover, SS 316 Case, Fluororesin Gasket/O-ring, Fluororesin Seal), Element Length: A (ℓ250), Port Size: 06 (3/4 Rc), Element Type: J (HepoII, Polyester/Polypropylene), Nominal Filtration Accuracy: 2 μm, Element Seal Material: T (Fluororesin), Accessory: B (Bracket)

Body Size: 300 (Element Length: ℓ496, Applicable Element: EJ901S, ED901S), Port Size: 06 (Rc 3/4), Element Classification: J (HEPO II), Filtration Accuracy: 4μm, 99% Filtration Efficiency

Body Size: 200 (Element Length: ℓ246, Applicable Element: EJ801S, ED801S), Port Size: 06 (Rc 3/4), Element Classification: J (HEPO II), Filtration Accuracy: 2μm, 99% Filtration Efficiency

Body Size: 200 (Element Length: ℓ246, Applicable Element: EJ801S, ED801S), Port Size: 06 (Rc 3/4), Element Classification: J (HEPO II), Filtration Accuracy: 4μm, 99% Filtration Efficiency

Body Size: 200 (Element Length: ℓ246, Applicable Element: EJ801S, ED801S), Port Size: 06 (Rc 3/4), Element Classification: J (HEPO II), Filtration Accuracy: 6μm, 99% Filtration Efficiency

Body Size: 300 (Element Length: ℓ496, Applicable Element: EJ901S, ED901S), Port Size: 06 (Rc 3/4), Element Classification: J (HEPO II), Filtration Accuracy: 6μm, 99% Filtration Efficiency

Body Size: 300 (Element Length: ℓ496, Applicable Element: EJ901S, ED901S), Port Size: 06 (Rc 3/4), Element Classification: J (HEPO II), Filtration Accuracy: 13μm, 99% Filtration Efficiency

Body Size: 200 (Element Length: ℓ246, Applicable Element: EJ801S, ED801S), Port Size: 06 (Rc 3/4), Element Classification: J (HEPO II), Filtration Accuracy: 13μm, 99% Filtration Efficiency

Adjustment: J (Vacuum Break Flow Adjustment Needle Round Lock Nut Type), Manifold Individual Supply: w/o Option, Manifold Common Release Pressure Supply: w/o Option, Exhaust Interference Prevention Valve: W (With Exhaust Interference Prevention Valve)

Adjustment: J (Vacuum Break Flow Adjustment Needle Round Lock Nut Type), Manifold Individual Supply: w/o Option, Manifold Common Release Pressure Supply: w/o Option, Exhaust Interference Prevention Valve: W (With Exhaust Interference Prevention Valve)

Pad Diameter: ø32, Pad Material: N (NBR), Buffer: J (Rotating), Buffer Stroke: 30mm, Vacuum Entry: 06 (One-touch Fitting Ø6), Mounting Thread: A14 (M14X1)