VP(A)300/500/700 Series (PILOT VALVE : V200)

Leakage voltage Take note that the leakage voltage will increase when a resistor is used in parallel with switching element or a C-R circuit (surge voltage suppressor) is used for protecting a switching device because of the passing leakage voltage through the C-R circuit. The suppressor residual leakage voltage should be as follows. Design / Selection 1.

High Vacuum L Type Valve

Chemraz R is a registered trademark of Greene, Tweed Technologies, Inc.

High Vacuum L Type Valve

R Chemraz is a registered trademark of Greene, Tweed Technologies, Inc.

High Vacuum L Type Valve

XL1A16-2-101-XN1 Suffix for seal materials Seal material EPDM Barrel Perfluoro R Kalrez R Chemraz R VMQ FKM for PLASMA Combination No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 Symbol -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 Note 1) Barrel Perfluoro R is a registered trademark of MATSUMURA OIL Co.,Ltd. Kalrez R is a registered trademark of E.

Electro-pneumatics Hybrid Regulator

Please check that each wire and cable is not broken. 6 Open the 3 (R) port. 7 Open the P2 port. 8 Input signal, and supply air to port 2 (A).

INFORMATION Modular Connection Type Residual Pressure Relief 3 Port Solenoid Valve For connecting to F.R.L. units AC25-A AC30-A AC40-A VP500 IN OUT VP700 Allows for space saving and reduced piping labor. Power consumption: 0.35 W (Without light) EXH Exam

A 67 G1/2 [3(R) port] (25.5) Type E 66.9 LOCK PUSH 5

Series AP3100

q e r q e r q e r q e r w w w w 125 Process Gas Equipment / Diaphragm Valve Specific Product Precautions Be sure to read before handling.

Sine Rodless Cylinder Series REA

When used without a guide for a light load. When space is very limited. Series REAS Size: 10, 15, 20, 25, 32, 40 Smooth operation is possible through the use of a special slide bearing. To ensure a permanent path. When used for general transporting. A load can be carried directly by the integrated guide type.

PSE57  Series Pressure Sensor for General Fluids

Note q Lead wire and M12 connector (3 m), Straight ZS-37-A 1 pc. w Lead wire and M12 connector (3 m), Right angle ZS-37-B 1 pc. e Assembly-type connector PCA-1557743 1 pc. r Adapter with restrictor Rc1/4 ZS-31-X175 1 pc. t Adapter with restrictor Rc1/8 ZS-31-X188 1 pc. y Orice M5 ZS-48-A 1 pc. u q + e ZS-37-A-X448 The lead wire and connector are Nil Voltage output type 1 to 5 V 28 Current

VFA3000

3 x , 18 14 VZA (P , A, B port) VFA VFRA 2 x 4.3 VA (Mounting hole for manifold) 2 x 4.2 (Mounting hole) 2 x 18 (Pilot port) 2 x M5 x 0.8 (Breathing port) 2 x 18 (R1, R2 port) 1765 Series VFA3000 Dimensions: Base Mounted 2 position single: VFA3140-02 03 2 position double: VFA3240-02 03 2 x 4.3 2 x 4.3 (Mounting hole) (Mounting hole) 2 x 18 (Pilot port) (Pilot port) Max. 3 Max. 3 3 (Breathing

Series 12-REA ø25, ø32, ø40, ø50, ø63 Sine Rodless Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators 0 L0.1 4 x MM Thread depth J 2 x P (Piping port) A G E H G B NN Effective thread length T (R) D X Mounting nut Width across flats C F N ZZ + Stroke S + Stroke W K N F I NA TT 6 T Model MM L K J I H G F E D C B A S NN NA 34 N R 12-REA25 12-REA32 12-REA40 8 46 32 26.4 2 13 7.5 20.5 8 10 70 15 M5 x 0.8 18.5 30 M26 x 1.5 111 10 8 60 32 33.6 2 16

Series 12-REA Sine rodless cylinder

The cylinder should be operated using a connection method which allows for shaft alignment variations and deflection due to the cylinder's own weight. A drawing of a recommended mounting method is shown in Figure 1.

D

TMH M5 Port size ASD M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2 Applicable tubing O.D. Note) Type 01 02 03 04 Inch size Metric size Elbow Universal 2 3 1/8" AS 23 01 3.2 03 05 07 09 11 13 04 06 08 10 12 4 5/32" 6 3/16" Control AS-FE U10/32 N01 N02 N03 N04 8 1/4" Meter-out Meter-in 0 1 10 5/16" Made to Order Refer to the below for details.

VFR2000-OMM0001

01-1,2 VVFS2000-R-02-1,2) ( ) ( ) 3 1 DC 3 () -4No.VFR2000-OMM0001 5 5 5 5 0.1 2 C-R () C-R DC 3% AC 20% (SSR )AC 1) (C-R )OFF 2)() ZNR 1V -10 -5No.VFR2000-OMM0001 5 5 5 5 1.5~2 1) 2)1 ()ISO VG32 MSDS 3)2 ()ISO VG32 M5 1/61/4 1.5Nm Rc Rc1/8 79 Rc1/4 1214 -6No.VFR2000-OMM0001 5 5 5 5 ( ( ( ( ) ) ) ) 5m 3 30 () 1 VG32 2 ()ISO VG32 -7No.VFR2000-OMM0001 G : DC +(+)(-) E T D Y

Vacuum Gripper

TQ1230001-OM105-A

Digital Pressure Switch

Normal output Reversed output P_1 = A (A B)/4 n_1 = B + (A B)/4 A = Maximum pressure H_1 = (A B)/2 H_1 = (A B)/2 B = Minimum pressure If setting is not necessary press the and buttons simultaneously for 1 second or longer. -34No.PS-OMS0007-H [F 6] Fine adjustment of display value This function is to manually perform a fine adjustment of the displayed pressure value.

Vacuum gripper

Caution Caution indicates a hazard with a low level of risk which, if not avoided, could result in minor or moderate injury. Warning Warning indicates a hazard with a medium level of risk which, if not avoided, could result in death or serious injury. Danger Danger indicates a hazard with a high level of risk which, if not avoided, will result in death or serious injury. Warning 1.

Vacuum Gripper

Plate A Plug (M-3P) (2 pcs.)

MICRO MIST SEPARATOR

AF-OMR0021-C PRODUCT NAME MICRO MIST SEPARATOR MODEL / Series / Product Number AFD20-(F,N)01(F,N)02(B,C)(-2,6,C,J,R,Z)-A AFD30-(F,N)02(F,N)03(B,C,D)(-2,6,8,J,R,W,Z)-A AFD40-(F,N)02(F,N)04(B,C,D)(-2,6,8,J,R,W,Z)-A AFD40-(F,N)06(B,C,D)(-2,6,8,J,R,W,Z)-A Contents Page 1. SAFETY INSTRUCTIONS 1-5 2. APPLICATION 6 3. SPECIFICATIONS 6 4. HOW TO ORDER 7 5. OPTIONAL BRACKET ASSEMBLY 8 6.

MIST SEPARATOR

AF-OMR0020-C PRODUCT NAME MIST SEPARATOR MODEL / Series / Product Number AFM20-(F,N)01(F,N)02(B,C)(-2,6,C,J,R,Z)-A AFM30-(F,N)02(F,N)03(B,C,D)(-2,6,8,J,R,W,Z)-A AFM40-(F,N)02(F,N)04(B,C,D)(-2,6,8,J,R,W,Z)-A AFM40-(F,N)06(B,C,D)(-2,6,8,J,R,W,Z)-A Contents Page 1. SAFETY INSTRUCTIONS 1-5 2. APPLICATION 6 3. SPECIFICATIONS 6 4. HOW TO ORDER 7 5. OPTIONAL BRACKET ASSEMBLY 8 6.