ISO/VDMA Cylinder: Standard Type Double Acting, Single/Double Rod Series C95 ø32, ø40, ø50, ø63, ø80, ø100

switch No Grommet Diagnostic indication (2-color) Z76 Z73 Z80 F59 F5P J51 J59 F59W F5PW J59W F5BAL 5 V IC IC 3-wire Yes 12 V 5 V, 12 V AC 100 100 V or less Relay, PLC No PLC 24 V 2-wire Terminal conduit 12 V Yes 100 V, 200 V Relay, PLC DIN terminal 3-wire (NPN) 3-wire (PNP) 5 V, 12 V IC 24 V 100 V, 200 V 2-wire 12 V 3-wire (NPN) 3-wire (PNP) 5 V, 12 V IC Diagnostic indication (

LEY-OM007

d. e. f. -46- 7.5. 1. 2. (1mm ) 3. 4. N Nm LEY16 LE-D-2-1 10 0.36 LEY25 LE-D-2-2 19 0.63 LEY32 LE-D-2-3 30 1.5 5. LEY32 Nm LEY16 0.63 LEY25 1.5 LEY32 5.2 6. -47- 8.

ZP3

B C D E Y q Pad dia.

Digital Flow Switch (Integrated display type) ( compatible)

For example, when analogue output is 1 to 5 V, F.S. = 5[V] 1[V] = 4[V], (ref. 1%F.S. = 4[V] x 1% = 0.04[V]) F.S. (Full span, Full scale) H A function to store the accumulated flow value in the products internal memory. The flow value will be stored at a set time interval of either 2 or 5 minutes.

Compact and Lightweight

ZA A B t 2 x D ZX C ZM ZL ZH ZH ZH ZH -X267 ZH13 to 20DA 2 x D B ZHP A F E C ZU VQD-V Long clamping screw set for 1 station required for assembly needs to be ordered separately.

PROFIBUS DP Compatible Fieldbus System

Green OFF COM D has no received data. COM D Green ON COM D is receiving data. NOTE When connecting manifold valve only without connecting Input unit manifold, LEDs of COM A D do not light.

Digital Flow Switch

PFMC7--CNPN (1 output) + Analogue (4 to 20 mA) output type PFMC7--DMaximum applied voltage: 28 V Maximum load current: 80 mA Internal voltage drop: 1 V or less C: Analogue output: 1 to 5 V Output impedance: 1 k D: Analogue output: 4 to 20 mA Maximum load impedance: 600 Minimum load impedance: 50 NPN (1 output) + External input type PFMC7--GMaximum applied voltage: 28 V Maximum load current

CG5-S

d Dd9 D C t m t l m L H1 B1 Metric (mm) (mm) Part no.

Process Valve

Applicable cable O.D. 6 to 8 (D, DZ) P Pg9 J (DIN terminal: D, DZ) I (Grommet: G) F (Air operated) Pilot port 12 (P1) 2 x (Back side 10 (P2)) 4 x M 8 1 Manual override (Non-locking push type) P1 D S Q E 15 B A H (DIN terminal: D, DZ) G (Grommet: G) A R B C Main port 1 (A) (Back side 2 (B)) Port side: refer to table below Model Main port 1(A), 2(B) A B C D E F G H I J K L M N P Q R S VNB2V

Air Pilot Operated

DIMENSIONS A B c D E 1.11 (114 268 @) 0.98 (25) o.17 (12t 0.31 o TOOiDEt A8 PAnTOF v tvExANrFotDAaS'V ADOSutllx "M" to p.n numb.r. Ellmplr: Pe't Numbr, t{Va at34. oanoM = A t Nva 4134{0090 vds mo0nt.d on I SP @2 &bDt.t. wlh |, SP 0300 Inl.rt.o.

PFxx-OMS0001CN

DC(+) (OUT) 2 OUT2// 3 DC(-) 4 OUT1 (IN) M8 M8 IN OUT (UP) (SET) (DOWN) () OUT1OUT2 ON (1 ) (UP) ON/OFF (SET) (DOWN) ON/OFF -11No.PF-OMS0001CN-A F.S. ( 15 V F.S.=5[V]1[V]4[V] 1F.S.4[V]10.04[V] 15 V 15 V 420 mA ON OFF () (0100)() 90 () (0100) ()90ON(OFF) 0 1 atm()[nor] () 10 L/min 10 L ON OFF ON OFF 0 -12No.PF-OMS0001CN-A , , 2 5 10 L/min 5 ,51050 L ON-OFF () 1 L

LG1H

A: Acceleration time B: Constant velocity time C: Deceleration time D: Resting time (0.4sec.)

Air Pilot Operated Series NVSA

DIMENSIONS A B c D E 1.11 (114 268 @) 0.98 (25) o.17 (12t 0.31 o TOOiDEt A8 PAnTOF v tvExANrFotDAaS'V ADOSutllx "M" to p.n numb.r. Ellmplr: Pe't Numbr, t{Va at34. oanoM = A t Nva 4134{0090 vds mo0nt.d on I SP @2 &bDt.t. wlh |, SP 0300 Inl.rt.o.

0.4

or D.

Fieldbus System

(Only for units compatible with M12 PROFIBUS DP , CC-Link communication connectors) SY3000/5000 VQC1000/2000/4000 S0700 SV1000/2000/3000 D D D D Note) The SY3000/5000, VQC1000/2000/4000, and S0700 are not yet UL-compatible.

Card Motor

Maximum current rating Voltage without load (V peak) 5.0 0 to 20 [V] 100 Peak voltage Over 20 [V] up to 30 [V] (2) Circuit (of class 2) which is of maximum 30 Vrms (42.4 V peak) or less, with UL 1310 class 2 power supply unit or UL 1585 class 2 transformer. Grounding Warning 1. Make sure the product is grounded to ensure the noise tolerance of the controller.

Smooth Cylinder Series CQSY ø 12, ø 16, ø 20, ø 25

circuit Reed auto switch Solid state auto switch 12 V 5 V, 12 V IC circuit Diagnostic indication (2-color) Relay, PLC Yes Yes Grommet 24 V 12 V 5 V, 12 V IC circuit Water resistant (2-color indication) M9PAV M9PA M9BAV M9BA 12 V P3DW Magnetic field resistant (2-color indication) 2-wire (Non-polar) 3-wire (Equiv.

2/3 Port Valve

212 X Q/d2 (Symbol) v: Flow speed(m/s) Q: Flow rate(l/min) d: Piping bore size(mm) 4.2-22 VNC Port size: 6A, 8A, 10A Thread connection VX VN VQ Port size Rc(PT) Model 1 8 1 4 3 8 VNC1-6A VNC1-8A VNC1-10A EZ, TZ, DZ: 9mm longer 4.2-23 VNC Port size: 10A, 15A, 20A, 25A Thread connection MainPort Rc(PT) A Model C D E F H J K L M N P Q R S T B 63 63 80 55 55 60.5 73 1 28 28 35 40 14 14 17.5

CEx-OMG0106

Operating Conditions Model : ML2B32 Load : 15N Speed , Va : 0.25m/s Pressure : 0.5MPa L1 : 0.05m L2 : 0.05m W W L1 L1 Loading Static Loading Dynamic Loading A Load due to W W3 B Momentum due to W M2 C Momentum due to we when stopping M3 V D M1 V 2.

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

Series SYJ T Coil rated voltage (V) 12, 24DC Inrush 0.55 Power consumption (W) Electrical circuit (For power saver) Holding 0.22 Red (+) Specifications other than above are the same as standard models.