IDX-OM-W025

IDF Series 6-1 Specifications 6 1 IDX-OM-W025 Air Dryer 6 References 6-3 Dimentions IDF22E, IDF37E AIR OUTLET PORT SIZE AIR INLET PORT SIZE B A E D G SWITCH WITH LAMP EVAPORATION THERMOMETER DRAFT BALL VALVE AIR OUTLET F VENTILATION VENTILATION C TERMINAL BLOCK DRAIN TUBE (O.D.10) (820) K L P J H N M 413 POWER SUPPLY ENTRY( 17) [OTHER SIDE] measure mm Model Port size A B C D E F G H J

EX250-SPR_eng

Side D Side U (SI unit side) Communication connector Output No. 1 3 5 7 9 17 29 31 Solenoid on side B Accessories M12 5-pin Plug A-code 7 5 7 5 Bit No. 1 1 1 3 No. Description Function Valve manifold 2 3 SV24 V 1 +24 V for valve : Output numbers are assigned to stations from side D to U of manifold in order.

Large Type Vacuum Unit Series ZR

10 2 10 2 23 PS PE Note) 1 indicates the dimension when bracket A is mounted.

High Purity Chemical Valve/Air Operated/Compact Type Series LVD LVC LVA Space saving, compact type is available. Space saving, compact type is available. Space saving, compact type is available. LVH LVD Compact type is introduced as a new series to comple

(mm) Dimensions G H J K A B C D E F L M N P Q R V Model LVD1m-Sm LVD2m-Sm LVD3m-Sm LVD4m-Sm LVD5m-Sm 4 20 20 45 39 9.5 46 23 11.5 4.5 11 30 5 21 28 22.5 M5 x 0.8 (5/32") 30 30 54.4 56 11 67 28.5 13 4 20 44 7 23 31.5 17 M5 x 0.8 6 35 35 79.5 62 17.5 83 45.5 14.5 6 22 50 7 37 36 21 M5 x 0.8 6 35 35 82 62 20 93 48 14.5 6 22 50 7 39 36 21 M5 x 0.8 6 8 76 25 17.5 45 45 105.5 114 65 32 64 7 52

INFORMATION Step Motor Controller 5 types of communication protocols New New

E EtherCAT 9 EtherNet/IP P PROFINET D DeviceNet L IO-Link Mounting 7 Screw mounting 8*1 DIN rail *1 The DIN rail is not included. It must be ordered separately. (Refer to page 7.) * Only the step motor type is applicable.

HRS100/150

-phase 200 VAC 3-phase 400 VAC [mm] [mm] 93 Environmental friendly R410A as refrigerant Thermo-chiller Standard Type HRS100/150 Series Circulating Fluid Temperature Controller Fan Triple controller Air-cooled condenser fan control Cooling valve Heating valve Circuit diagram Ventilation Cooling valve control Fan Facility water outlet Dryer Air-cooled condenser D

53

Inverter pump Triple inverter HRZD HRW 0.6 kW 1.8 kW Water-cooled refrigeration Air-cooled refrigeration HECR 377 [mm] 970 HEC 2.4 kW HEB Triple inverter HRSH090 HED *1 Under the conditions shown on page 128 HEA Cooling capacity 9.5 kW IDH 1080 0.1C Temperature stability (when a load is stable) Set temperature range 5C to 40C W 377 x H 1080 x D 970 mm Compact, Space-saving Low-noise design

Series 12-REA Sine rodless cylinder

1.0 x8 M6 x 1.0 x10 12REA 50/63 0 -0.2 L NA 33 2-Rc, NPT, G 1/4 14 14 E(h8) E(h8) X D I 4-TC 14 14 Effective thread depth R 23 22 K W 23 25 2 4-M8 x 1.25 25 8-Q 14.5 C 0.1 + Effective thread depth 12 Effective thread depth R B S + Stroke 2 ZZ + Stroke Q x R S TC x R Model L 122 110 K 38 32 C 70 60 X ZZ NA E D B 72.2 58.2 I 70 60 W 12-REA63 12-REA50 100 86 66 53 30-0.033 69 55 M10 x 1.5 x

Compact manifold regulator ARM5 Series

L dimension 1 23 2 35.5 3 48 4 60.5 5 73 6 85.5 7 98 8 110.5 9 123 10 135.5 No. L dimension 11 148 12 160.5 13 173 14 185.5 15 198 16 210.5 17 223 18 235.5 19 248 20 260.5 No. L dimension 21 273 22 285.5 23 298 24 310.5 25 323 26 335.5 27 348 28 360.5 29 373 30 385.5 No.

60

SUP. 3 1 2 3 1 2 3 1 2 E Padlock mounting position D C SUP J 2 2 x K A T IN OUT AA 3 L 2 x P1 (Port size) B V BB U Built-in silencer (Option) M (Width across flats) 3 N P2 (Port size) Q EXH Y Bracket (Option) R S X W Dimensions (mm) Standard specifications Model P1 P2 A B C D E F G H I J K L M 1/8, 1/4 1/4, 3/8 1/8 1/4 3/8 1/2 1/2 66.4 80.3 104.9 110.4 134.3 22.3 29.4 38.5 42 53 40 53 70

Vacuum Saving Valve

D-DN This catalog is printed on recycled paper with concern for the global environment.

ZSM1-115/121

The signal has to be converted by an A/D converter for pressure display or switch output. Current output signal is a current signal in the range of 4 to 20 [mA]. The signal is transformed into a voltage signal before being converted by a A/D converter for pressure display or switch output.

HRX-OM-Z002

Fig. 3-17 Wiring for cable communication (400V) HRLE Series 3.3Installation Procedure 3-23 HRX-OM-Z002 Chapter 3 Transport and Set Up 3. Turn on the breaker switch located on the back of the product. ON Fig. 3-18 Powered 4. Attach the power supply terminal cover using 4 screws.

Metal One-touch Fittings

Length TH0402 TJ-0402 18 5/32" TH0425 TJ-0425 18 TL0403 TJ-0403 18 1/4" TIHB07 TIL07 TJ-0604 19 TIHA07 TJ-0746 19 5/16" TH0806 TL0806 TJ-0806 20.5 3/8" TIHB11 TIL11 TJ-1065 23 TIHA11 TJ-1107 23 1/2" TIH13 TIL13 TJ-1395 24 *C2700 + Electroless nickel plated is used for the TJ series. Spare Parts Description Tubing O.D. Part no.

AS-FG

AS-D AS-T Made to Order ASP Lubricant: Vaseline 1 X12 Grease-free (Seal: Fluorine Coated) + Throttle Valve (Without Check Valve) 2 X21 ASN Ex.) AS1201FG-M5-23-X12 AQ Ex.) AS1201FG-M5-23-X21 Note 1) Not particle-free Note 2) Throttle valve is only compatible with the part no. of the meter-out type. Throttle Valve (Without Check Valve) 3 X214 ASV Ex.)

AS-FM

Thread type AS-D Port size Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT M5 U10/32 01 02 M5 x 0.8 AS-T 10-32 UNF 1/8 N ASP 1/4 ASN Made to Order AQ ASV Grease-free (Seal: Fluorine Coated) + Throttle Valve (Without Check Valve) X21 Lubricant: Vaseline X12 AK Ex.) AS1201FM-M5-23-X12 Ex.)

AS-FG

AS-FM Made to Order AS-D Lubricant: Vaseline 1 X12 Grease-free (Seal: Fluorine Coated) + Throttle Valve (Without Check Valve) 2 X21 AS-T Ex.) AS1201FG-M5-23-X12 ASP Ex.) AS1201FG-M5-23-X21 Note 1) Not particle-free Note 2) Throttle valve is only compatible with the part no. of the meter-out type. Throttle Valve (Without Check Valve) 3 X214 ASN Ex.)

3 Port Solenoid Valve

D-DN This catalog is printed on recycled paper with concern for the global environment. Series 10-V100 Rubber seal 3 port direct operated solenoid valve Specifications Air Fluid Ambient and fluid temperature (C) 10 to 50 (With no freezing. Refer to page 714.)

Series H, DL, L, LL Self-align Fittings

Weight (g) M L2 L1 A 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 DL04-01 15 3.5 23 DL04-02 17 19 4 10 10 23.5 19.6 30 DL06-01 9 25 17 10 19.6 23.5 6 DL06-02 16 19 31 14 12 DL06-03 22 53 26.5 24.5 21.6 22.6 24.5 25.8 24.5 29.4 29.6 30.3 29.4 91 DL08-01 18 32 19 8 14 DL08-02 16 21 38 14 12 24.5 DL08-03 22 54 26.5 31 10 17 DL10-02 23 51 14 26.5 DL10-03 17 22 57 DL10-04 27 28.5 100

Thermo-chiller

D-G