HRL

Temperature stability: 0.1C (CH1) When a load is stable When a load is stable 0.1C By controlling the inverter compressor, inverter fan, and electronic expansion valve simultaneously, it maintains the good temperature stability when the heat load fluctuates. 22 Circulating fluid temperature [C] Circulating fluid temperature [C] CH1 21 20 19 26 kW load 18 0 kW load 17 0 10 20 30 40 When a

Slider Type Ball Screw Drive/11-LEFS Series

AC Servo Motor Clean Room Specification Dimensions: Ball Screw Drive 11-LEFS40 Encoder cable (7) 4 x M8 x 1.25 thread depth 13 (170) Motor cable (6) 106 60 Body mounting reference plane Note 1) 74 58 6H9 ( ) depth 7 7 +0.030 0 +0.030 0 6H9 ( ) depth 7 13 L (3.1) A (Table traveling distance) Note 2) 86 86 (223.5) Stroke (88) (90) 61 90 Encoder Z-phase detecting position Note 3) 48.5 (4) 21

AMR3000 to 6000

Refer to pages 14-21-3 to 14-21-4 for Safety Instructions and Common Precautions. AMR3000/3100 Rc 4 1 Outlet pressure (MPa) Outlet pressure (MPa) Mounting/Adjustment Set point Set point Warning F.R.L. 1. Do not place a magnetic object near the pressure switch. Unintended operation may result. 2.

AR20-B to AR60-B

Clean series t Copper, Fluorine and Silicone-free + Low Particle Generation For details, refer to the Clean Series/Low Particle Generation section of the Web Catalog. 21 Standard model no. Copper, fluorine and silicone-free + Low particle generation 80

! Contact our sales office for delivery dates and prices as this is a special model. SP133X-010E P: RU P.G.Information (Specialized Product) SMC CORPORATION Pilot Operated Check Valve 4-14-1,SOTO-KANDA, CHIYODA

Model d T1 T2 H1 H2 D1 D2 L1 L2 L3 L4 A * M ASP330F-01-06S-X369 R1/8 M5X0.8 12 8 14.2 20.4 27.5 13.6 38.6 35.2 13.5 6 11.6 ASP430F-02-06S-X369 25.2 34.4 18.3 16.8 R1/4 17 18.5 48.7 42.4 ASP430F-02-08S-X369 27.2 36.4 18.4 18.5 Rc1/8 12 8 15.2 ASP530F-03-08S-X369 29.7 41.2 18.7 R3/8 19 23 21 56.2 50 ASP530F-03-10S-X369 31.6 43.1 20.8 10 18.5 ASP630F-04-10S-X369 33.6 47.9 25.6 20.8 R1/2 Rc1/

AZ1000

pressure: 600 psig (4.1 MPa) 1.5 (38.1) 80 0.55 0.48 70 2.62 (66.5) Delivery pressure (MPa) Delivery pressure (psig) 0.41 60 0.34 50 0.27 40 0.69 (17.5) 0.21 30 0.14 20 2.5 (63.5) 0.07 10 A 0.00 0 0 100 200 300 400 500 600 700 800 Flow rate (slpm, N2) 0.88 (22.4) 2 x 10-32 UNF depth 0.25 (6.3) (Mounting hole) AZ1402TA Inlet pressure: 2 psig (14 kPa) 760 0 -8 700 Delivery pressure (mm Hg) -21

Stroke Reading Cylinder and Counter

steel Aluminum alloy Hard chrome plated Head cover Hexagon socket head cap screw 3 17 Stainless steel Aluminum alloy Hard anodized Piston A Hexagon nut 4 18 Chromated Carbon steel Aluminum alloy Hard anodized Piston B Spring washer 5 19 Chromated Steel wire Aluminum alloy Hard anodized Piston rod Spring washer 6 20 Chromated Steel wire Carbon steel Hard chrome plated Tie-rod Hexagon nut 7 21

Cylinder

NN I.~ 6 7 12 13.9 6 12.5 19.5 26.5 85 9 3.5 M3XO.5 Ml0X 1.Q 9 18.5 25.5 32.5 3 27.5 34.5 41 .5 3 10 ' h-~o 19 22 6" 14\5 21 28 12 12 3.5 I M4 XO.7 I MI5 X 1.5 1.1 ~ 2075 27 34 4 32.5 39 ~46 5 Series CJP How To Order Pin cylinder e-' '-. Rod end thread J Nil-With thread BWithout thread Mountin9 ~ BPanel mount type ..

39

4Small round flat washer 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 50 CKZ3N-S050T Note 1) 63 CKZ3N-S063T Note 1) eSwitch holder uProximity switch (P&F) iHelical torsion spring oHexagon nut type 3 !0Switch holder gasket !1Hexagon socket head cover cap screw qDetection plate !2Hexagon socket head cover cap screw !3Hexagon socket head cap screw !

CXS

9 from the chart above CXSM32-PS CXSL15APS CXSL20APS CXSL25APS CXSL32APS 8-28-21 21 Series CXSJ Construction: Axial Piping CXSJ6P, CXSJ10P e q t w r u y i o Component Parts No.

VZM500

VH Push button (Extended) VZM550-01-32R/B/G/Y Panel mounting hole VHS JIS symbol (Pilot exhaust port) 0.5 MPa supply 4.8 mm P.T. 21 N F.O.F. 2-3.2 mounting hole 1.7 mm O.T. 6.5 mm T.T.

Vacuum Pad

Front matter 21 Symbol/Type Compact Pad U: Flat UM: Flat with groove B: Bellows Pad diameter 1.5, 2, 3.5, 4, 6, 8, 10, 13, 16 How to Order ZP3 015 U N Pad unit Pad diameter Symbol Pad material Material Symbol NBR Silicone rubber Urethane rubber FKM Conductive NBR Conductive silicone rubber Pad diameter 015 02 035 04 06 08 10 13 16 N S U F GN GS 1.5 2 3.5 4 6 8 10 13 16 Pad typePad diameter

ML2B

7.15 x 3.75 x 1.7 P-5 SO-015-16 P-7 SO-010-16 Nickel plated REC CX M2L040-07B82108 SO-010-24 M2L032-07B82107 SO-010-21 M2L025-07B82106 SO-010-20 CY 28 x 30 x 1 22.2 x 24 x 0.9 17.6 x 19.4 x 0.9 Since there is a possibility of improper operation, please contact SMC regarding the replacement of seals.

Diaphragm Style Flow Switch Series IFW5 For details about certified products conforming to international standards, visit us at www.smcworld.com.

Box 3385 Al-Amir Majed Street, Jeddah-21471, Saudi Arabia TEL: 02-6761574 FAX: 02-6708173 16-14-21

Conforming to OSHA Standard Pressure Relief 3 Port Valve With Locking Holes Series VHS20/30/40/50

H 28 30 36 44 54 E 22 21 26 F 45 55 58 65 76 G 33 42 44 50 61 D 34 46 63 67 78 A 59 78 107 110 134 B 20 29 39 42 53 C 40 53 70 75 90 I 45 55 63 69 81 Model Piping port VHS20 VHS30 VHS40 VHS40-06 VHS50 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1938 Series VHS20/30/40/50 Specific Product Precautions Be sure to read before handling.

ML2B

7.15 x 3.75 x 1.7 P-5 SO-015-16 P-7 SO-010-16 Nickel plated REC CX M2L040-07B82108 SO-010-24 M2L032-07B82107 SO-010-21 M2L025-07B82106 SO-010-20 CY 28 x 30 x 1 22.2 x 24 x 0.9 17.6 x 19.4 x 0.9 Since there is a possibility of improper operation, please contact SMC regarding the replacement of seals.

Auto Switch Guide

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX General Purpose Type P. 8-30-10 Band, Rail, Tie-rod, Direct Mounting 2-color Indication Type P. 8-30-18 Band, Rail, Tie-rod Mounting D-X 20Data P. 8-30-20 Solid State Switches General Purpose Type P. 8-30-21 Band, Rail, Tie-rod, Direct Mounting

CXS

9 from the chart above CXSM32-PS CXSL15APS CXSL20APS CXSL25APS CXSL32APS 8-28-21 21 Series CXSJ Construction: Axial Piping CXSJ6P, CXSJ10P e q t w r Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com u y i o Component Parts No.

MLU

Size 25 32 40 50 l 18.2 22.2 26.2 32.2 d 7.6 9.6 9.6 13.4 L 23 27 31 38 d M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 D 16.5 18 21 26 Dd9 C 19.6 21.9 25.4 31.2 B 17 19 22 27 H 6 7 8 11 Size 25 32 40 50 Part no.

MNB

There may be the case it will vary substantially depending on an ambient environment. 9-6-21 22 Series MNB Minimum Stroke for Auto Switch Mounting (mm) Mounting brackets other than center trunnion 32, 40, 50, 63 80, 100 32 40 50 63 Center trunnion 80 100 60 65 75 80 85 90 95 100 105 110 No. of auto switches mounted Auto switch model 2 (Different sides) 2 (Same side) 35 100 35 + 30 (n 2)