VHK

(mm) Model H 1(P) 2(A) L3 L4 L5 L6 M1 Q L1 L2 C D E F G J K 1(P) R 2(A) 2(A) R 3(R)* VHK-M5-04F VHK-M5-06F 2.0 1.2 19 49 11 21 50 13 M5 4 6 VHK-B1A 44.5 14.5 1 27 22 16.5 26 29.1 53.9 24.3 29.6 52.9 23.8 15.8 16.8 3.5 11 18 41 16.5 VHK-01S-04F VHK-01S-06F VHK-01S-08F 62.2 26.2 36 18.7 31 58 17 18 41 55.4 23.8 31.6 56.9 24.3 32.6 16.5 3.5 15.8 16.8 11 7.2 9.7 3.4 1.2 21 51 11 23 53 13 4 6

One-touch Fittings

16.5 10 13.9 11 4.5 19.5 3/8 KQ2LU06-03GS 17 10.4 9.7 16.5 29.8 35 29.9 13.3 10.4 6 4.2 16.5 10 13.9 11 4.5 31.5 N Q1 O 8 1/8 KQ2LU08-01GS 14 13.2 13 18.2 25.7 32.3 29.2 14.2 13.2 8 4.2 18.2 13.1 26.3 18.2 6 16.4 1/4 KQ2LU08-02GS 14 13.2 13 18.2 30.1 36.7 32 14.2 13.2 8 4.2 18.2 13.1 26.3 18.2 6 21.5 3/8 KQ2LU08-03GS 17 13.2 13 18.2 31.5 38.1 33 14.2 13.2 8 4.2 18.2 13.1 26.3 18.2 6 33.3

VSA4

2 position single: VSA4140 2 position double: VSA4240 3 position closed center: VSA4340 3 position exhaust center: VSA4440 4-9 (11) Mounting hole 4-9 (11) Mounting hole 4-9 (11) Mounting hole ( ): Valve for Rc 3/4 5-3-36 7 Series VSA40 Manifold Specifications Specifications Valve manifold with the same body size Valve manifold with the same body size Value manifold with the different body

Air Slide Table ø 4, ø 6, ø 8 Series MXJ

Axial piping type (P) Functional option IN OUT Theoretical Output (N) Operating pressure (MPa) Piston area (mm2) Bore size (mm) Rod size (mm) Operating direction Model 0.2 0.3 0.4 0.5 0.6 0.7 3 5 OUT 16 6 8 10 11 MXJ4 2 4.5 3 4 5 13 6 IN 8 9 6 8 11 28 14 OUT 17 20 MXJ6 3 6 4 6 8 21 11 IN 13 15 10 15 20 50 25 30 OUT 35 MXJ8 4 8 8 11 15 38 19 23 IN 26 Note) Theoretical output (N) = Pressure

SI Unit for Vacuum Manifold

Settable range : 10...988 (1.0 kPa...98.8 kPa) Combination conditions with other parameters : 10 H1 P1-1 (50) ... ... ... ... ... 16 2 R/W 0x0032 Vacuum confirmation hysteresis (H1) of CH15 (50) 3.4.3. Pressure P2 (Index 66) Table 3-11.

212

] 15 [0.10] 15 [0.10] 7.3 [0.05] 7.3 [0.05] 7.3 [0.05] 0.00 0 1.3 [5] 2.6 [10] 4.0 [15] 5.3 [20] 7.9 [30] 9.2 [35] 11 [40] 12 [45] 6.6 [25] 0.00 0 1.3 [5] 2.6 [10] 4.0 [15] 5.3 [20] 7.9 [30] 9.2 [35] 11 [40] 12 [45] 13 [50] 15 [55] 16 [60] 6.6 [25] 0.00 0 0.1 [0.5] 0.3 [1] 0.4 [1.5] 0.5 [2] 0.8 [3] 0.9 [3.5] 1.1 [4] 1.2 [4.5] 1.3 [5] 0.7 [2.5] Flow rate gal/min [L/min] Flow rate gal/min [

PFxx-OMU0002

PF3A703H (For 3000 L/min) PF3A706H (For 6000 L/min) PF3A712H (For 12000 L/min) 74 No.PF-OMU0002-D Dimensions Symbol Models A B D E F H K L N PF3A703H 130 45 79.1 55.3 22.5 25 35 60 30 4 x M4 x 0.7 depth 7 PF3A706H 170 60 94.1 70.3 30 68 45 80 40 4 x M5 x 0.8 depth 8 PF3A712H 200 70 104.1 80.3 35 85 50 100 50 4 x M6 x 1.0 depth 9 75 No.PF-OMU0002-D Lead wire with M12 connector (ZS-37-A) Pin

Digital Flow Switch Series PFA For Air Series PFW For Water

to 500l/min 10 50 11 21 51 Thread type Wiring specification Note) Fixed units: Real-time flow rate: l/min Accumulated flow: l Rc NPT G Nil N F 3m lead wire with connector Without lead wire Nil N Output specification Port size Size Applicable model Flow rate (l/min) Nil Output specification Applicable model Symbol 10 50 100 200 500 PFA710, 750 PFA711, 721, 751 PFA711, 721, 751 NPN open

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

Power supply terminal Power supply terminal The circuits above are for the double wiring specification with up to 11 or 12 stations. Connect to SOL.A for a single solenoid.

Digital Flow Switch (Integrated display type)

(no condensation) Temperature characteristics 2%F.S. max. (0 to 50 C, 25 C reference) Withstand voltage 1000 VAC, for 1 minute between the external terminals and case Insulation resistance 50 M or more (at 500 VDC) between external terminals and case Standards and regulations CE, RoHS Port size (Rc, NPT, G) 1 11/2 2 Materials of parts in contact with fluid A6063, H-NBR, SUS, PPS, PBT, Leaded

Model Selection 1

VNA Single unit Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 7, 11, 15, 14, 20, 16, 25, 22, 32, 28, 40, 33, 50 Low vacuum to 1 Pilot pressure: 0.1 to 0.7 Single unit 1/8 to 2 (2B) 17-4-13 VNB N.C./N.O./C.O.

Multistage Ejector Series ZL112/212 1

MPa Supply pressure: 0.4 MPa 100 90 100 90 ZQ Vacuum pressure (kPa) Vacuum pressure (kPa) 80 80 70 70 ZF 60 60 50 50 ZP 40 40 30 30 ZCU 20 20 10 10 AMJ 0 0 10 20 30 40 50 60 70 80 90 100 110 120 20 60 100 140 180 220 260 300 130 Suction flow rate (/min(ANR)) Suction flow rate (/min(ANR)) Misc.

Multistage Ejector Series ZL112.212

50 75 40 40 100 50 ZX 30 30 20 20 50 25 ZR 10 10 0 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0.1 0.2 0.3 0.4 0.5 0.6 ZM Supply pressure (MPa) Supply pressure (MPa) ZMA Flow Characteristics Flow Characteristics Supply pressure: 0.4 MPa Supply pressure: 0.4 MPa 100 90 100 90 ZQ Vacuum pressure (kPa) Vacuum pressure (kPa) 80 80 ZH 70 70 60 60 ZU 50 50 40 40 30 30 ZL 20 20 10 10 ZY 0 0 10 20 30 40 50 60 70

PFxx-OMO0004CN

L 1 L/min 1 L LED 3 7 ON (OUT1:OUT2 IP40 AC1000 V 1 50 M (DC500 V ) 050 -1060 () 3585RH() CE(EMC ROHS )ULCSA Rc1/4NPT1/4G1/48 FKMSUS304PPSPBT ()HNBRSiAuGE4F Rc1/4 NPT1/4 70 g 85 g G1/4 115 g 130 g 8 50 g 65 g +45 g +35 g +20 g +15 g DIN +65 g -66No.PF-OMO0004CN-E 1 () 2()10024 551005009.5 221002003.8 3OUT 40()90% ON(OFF) 5 6 70()90% 8 9 10 ZS-33-D AWG26 1.00 mm +

Electric Slide Table / High Precision Type 《 Battery-less absolute 》

If a product different from the one ordered is installed, injury or damage can result. -11- 2.5 Operating Environment Warning 1.

Air cylinder

Table 10 Bore size(mm) Hexagon socket head cap screw Width across flats Tightening torque(Nm) A 32,40 MB-32-48-C1247A 4 5.1 B 50,63 MB-50-48-C1249A 5 11 Foot MB-80-48AC1251A 6 25 Other MB-80-48BC1251A 80,100 125 Foot M12X1.75X25(thin socket head) 8 30.1 Other M12X1.75X28(thin socket head) 5)When replacing mounting brackets, tie-rod nuts on the cylinder body become loosened.

PSxx-OMU0002CN

No.PS-OMU0002CN-D // ZSE20A(F) ISE20A 2 8 10 11 15 15 17 19 [] 22 23 3 24 26 28 28 28 F0 30 F1 OUT1 31 F2 OUT2 34 F3 36 F4 37 F5 FUNC 39 F6 41 F10 42 F11 48 F80 49 F81 50 F82 52 F90 53 F96 55 F97 56 F98 58 F99 60 61 65 65 66 75 75 78 -1No.PS-OMU0002CN-D 1 (ISO/IEC)(JIS) *1) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO

Dedicated Controller Series LC1 Uniaxial Type

BUSY (11) Operating signal COM +24V 1 COM 11 GND NO.0 When this signal is off, an alarm is being generated for the actuator/controller.

PFxx-OMS0001CN

No.PF-OMS0001CN-A // PFMC7501 PFMC7102 PFMC7202 2 10 11 12 14 15 17 18 [] 22 OU1OUT2 {3 ] 23 [] 25 26 F0 27 F1 OUT1 29 F2 OUT2 37 F3 42 F10 43 F20 47 F22 48 F30 49 F31 50 F80 OFF 51 F81 52 F82 53 F90 54 F98 56 F99 57 58 62 63 65 66 66 69 71 -1No.PF-OMS0001CN-A (ISO/IEC)(JIS) *1) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO

Transfer

Applicable cylinder ML2B25 ML2B32 ML2B40 MY-S25A 35 50 8 5 9.5 5.5 M6 x 1 B MY-S32A 45 64 11.7 6 11 6.6 M8 x 1.25 B Guide for Side Support Application For long stroke operation, the cylinder tube may be deflected depending on its own weight and the load. In such a case, use a side support in the middle section.