Quick Exhaust Valve Series AQ

1 8 AQ3000 AQ1510 45 33 25 4 21 15 25 8 11 4.3 56 50 12.5 56 , , 1 2 3 4 AQ5000 85 75 18 85 15-12-2

[Option] 3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

How to Order Compact yet provides a large flow capacity Dimensions (W x H x D)45 x 89.5 x 45 (Grommet) C: 2.6 dm3/(sbar) (Passage 2 3) Suitable for use in vacuum applications 101.2 kPa (For vacuum specifications: VT/VO317V) A single valve with 6 valve functions (Universal porting type) Selective porting can provide 6 valve functions, such as N.C. valve, N.O. valve, Divider valve, Selector

In-line Air Filter

Nil None B With bracket Symbol IN port OUT port 11 2 3.2 32 3.2 4 53 4 6 Series Part no. ZFC1l-l-X03 ZFC-EL019 ZFC3l-l-X03 ZFC-EL020 ZFC5l-l-X03 ZFC-EL015 ZFC7l-l-X03 ZFC-EL016 OUT side IN side Symbol -X04 Filtration: 10 m 4 X04 Standard product Filtration: 10 m Replacement Element Part No. (Element: 1 pc.) Series Part no.

KK/KK13

-02MS 54.7 9 1/4 25.4 50 40.4 48.1 R 3/8 47.2 43.5 -03MS 53.7 11 49.7 22 42.7 58.4 R 1/2 45.4 41.7 -04MS 53.4 13 71.7 85.5 R 3/8 59 53.7 KK6S-03MS 11 24 60.2 80.1 87.7 R 1/2 57.5 52.2 -04MS 65.5 31.2 1/2 13 27 81.6 110.9 R 3/4 56 50.7 -06MS 15 Reference dimension for R threads after installation.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

Otherwise, chattering will occur. *9 When using a product with an analog output *10 When selecting 0 to 10 V, refer to the analog output graph for the allowable load current. *11 Standard condition (STD): 20 [C], 101.3 [kPa] (Absolute pressure), 65 [% RH] (The flow rate given in the specifications is the value under standard conditions.)

4/5 Port Solenoid Valve Rubber Seal Series SYJ3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

(Value in the initial state) Vibration resistance: No malfunction occurred in one sweep test between 45 and 2000 Hz. Test was performed to axis and right angle directions of the main valve when pilot signal is ON and OFF.

Common Supply Regulator

Product (14) Plug assembly -21- 11. Disassembly Drawing 11-1. AR20M-D AR30M-D AR40M-D Cross recessed round head screws (4 pcs.) (10) Valve assembly Bonnet Valve spring Pressure regulating screw assembly (12) Valve guide assembly Pressure regulating spring Cover (11) Diaphragm assembly Cap Body -22- 11-2.

Digital Gap Checker ( compatible)

"Line name communication data" Value (16 decimal 00 01 02 03 04 05 06 07 08 09 0A 0B 0C 0D 0E 0F number) 7 seg Display digit 11 seg Value (16 decimal 10 11 12 13 14 15 16 17 18 19 1A 1B 1C 1D 1E 1F number) 7 seg Display digit 11 seg Value (16 decimal 20 21 22 23 24 25 26 27 28 29 2A 2B 2C 2D 2E 2F number) 7 seg Display digit 11 seg Remark The value of cannot be displayed -105No.PS-OMW0009

S Couplers Series KK/KK13

-02MS 54.7 9 1/4 25.4 50 40.4 48.1 R 3/8 47.2 43.5 -03MS 53.7 11 49.7 22 42.7 58.4 R 1/2 45.4 41.7 -04MS 53.4 13 71.7 85.5 R 3/8 59 53.7 KK6S-03MS 11 24 60.2 80.1 87.7 R 1/2 57.5 52.2 -04MS 65.5 31.2 1/2 13 27 81.6 110.9 R 3/4 56 50.7 -06MS 15 Reference dimension for R threads after installation.

Speed Controller with

Applicable model D5 L9 L10 L11 L12 L13 L14 L15 L16 L17 t1 AS-10L AS1002F3.4 14.8 18.3 11 27.5 19.5 3.4 4.9 7.3 12 1 AS-20L AS2002F 15.6 19.6 12.6 29 21 1.2 AS-25L AS2052F 4.5 19.6 24.6 17 38 28 4.5 6.5 9.5 15.5 AS-30L AS3002F 24.8 29.8 22 43 33 1.4 AS-40L AS4002F 25.7 30.7 28 49 39 3.5 18.2 23.2 11 3.5 18 11.3 1.6 AS-20D AS2002F 18.6 23.6 12.6 19.6 AS-25D AS2052F 4.5 4.4 22 27 17 4.4 25.8

Speed Controller with One-touch Fittings

L4 Note) Weight (g) 5 5.5 6.5 8.5 9.5 19 22 35 38 52 86 95 Model Applicable tubing O.D. d AS1002F-01 AS1002F-03 AS1002F-07 AS2002F-03 AS2002F-07 AS2052F-07 AS2052F-09 AS3002F-07 AS3002F-09 AS3002F-11 AS4002F-11 AS4002F-13 MIN.

S Couplers Series KK/KKH/KK13

KK3P-50N -60N -65N KK4P-50N -60N -65N -80N -85N KK6P-80N -85N -110N KK3S-50N -60N -65N KK4S-50N -60N -65N -80N -85N KK6S-80N -85N -110N 5/8 6/9 6.5/10 5/8 6/9 6.5/10 8/12 8.5/12.5 8/12 8.5/12.5 11/16 5/8 6/9 6.5/10 5/8 6/9 6.5/10 8/12 8.5/12.5 8/12 8.5/12.5 11/16 1/8 1/8 1/4 1/4 1/2 1/2 Straight type with One-touch fitting Straight type with One-touch fitting Body size Applicable tubing O.D

XL-OMY0002

C D (KF) KF (K) KF G I H H V Fn Fd A C C U U M E V V A L E B K S H J M G A A A B C D E Fn Fd G H J K XLD-25 50 123 48 1 12 40 26 41 16 7.5 XLD-40 65 170 66 2 11 55 41 63 20 15 XLD-50 70 183 79 2 11 75 52 68 20 17.5 XLD-63 88 217 100 3 11 87 95 70 72 20 20 XLD-80 90 256 117 3 11 114 110 83 98 20 26.5 XLD-100 108 321 154 3 11 134 130 102 133 20 38 XLD-160 138 335 200 3 11 190 180 153 114

LEH_C

6 ( 12 4 5 7 2 1 3 17 14 1 2 A 3 B 4 + 5 6 + 7 + 8 9 10 A 11 B 12 13 NBR 14 15 16 17 18 ( DC24V) 4 - 4.

Auto Switch Guide Reed Switches/Solid State Switches For Air Grippers (Rotary Actuators) 1

D-Y7NW(V) D-Y7PW(V) D-Y7BW(V) Auto switch model D-Y7PW, D-Y7PWV 0.5 11 11 11 DLead wire length (m) 3 54 54 54 DC (+) Brown 205 88 88 88 Main circuit of switch Main circuit of switch Dimensions OUT Black D-Y7W Mounting screw M2.5 x 4l Slotted set screw Indicator light DC () Blue 3.4 2.5 D-Y7BW, D-Y7BWV SMC SMC 6.2 5 29 OUT (+) Brown Most sensitive position 12.5 OUT () Blue D-Y7WV Mounting

Auto Switch Guide Reed Switches/Solid State Switches For Air Grippers (Rotary Actuators) 1

D-Y7NW(V) D-Y7PW(V) D-Y7BW(V) Auto switch model D-Y7PW, D-Y7PWV 0.5 11 11 11 DLead wire length (m) 3 54 54 54 DC (+) Brown 205 88 88 88 Main circuit of switch Main circuit of switch Dimensions OUT Black D-Y7W Mounting screw M2.5 x 4l Slotted set screw Indicator light DC () Blue 3.4 2.5 D-Y7BW, D-Y7BWV SMC SMC 6.2 5 29 OUT (+) Brown Most sensitive position 12.5 OUT () Blue D-Y7WV Mounting

Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS

40 21 20.2 38.7 31 46.5 18.5 44.9 55.7 22 3/8" 34.4 23 20.9 12 69 19 AS331F-03-06 AS331F-02-07 60 12.9 17 20.6 25.6 38.7 46.9 13.2 38.5 45 17 1/4" 25.2 20.6 12.8 6 12.9 56 AS331F-03-08 AS331F-02-09 63 12.9 18.5 48.3 43.3 49.5 15.2 39.7 20.6 37.8 42.8 39.7 23 28.2 48 18.5 5/16" 28.2 20.6 15.2 8 12.9 59 23 45.4 40.4 40 35 3/8 AS331F-03-10 AS331F-02-11 69 21 16.2 43.7 23 32.6 53.9 18.5 43.7

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

area (mm2) 01, 03, 04 05, 06 03, 04 Number of needle rotations Number of needle rotations Number of needle rotations AS321FG AS331FG AS421FG AS431FG Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 12, 13 10, 11 10, 11, 12 Flow rate (/min (ANR)) Flow rate (/min (ANR)) Effective area (mm2) Effective area (mm2) 08, 09 06, 07 Number of needle rotations Number of needle rotations 15-9-44 3 Speed

Rotary Table: High Precision Type

Fig.11 Component parts of MSUA1/3 switch unit No.

OMR0031

Monitor and Test Mode of the Controller . 41 11. Operation . 44 11.1 Return to origin position . 44 11.2 Positioning operation . 46 11.3.