 
15 15 15 15 19 37 41 19 H 45 45 45 55 35 35 35 38 44 NN 2 2 2 2 3 4 5 6 7 I 10 10 10 10 10 10 58 70 87 J 44 44 44 54 69 108 113 155 190 K 31 41 51 61 71 96 121 146 171 Z 81.5 81.5 81.5 91.5 106.5 145.5 198.5 252.5 304.5 MXS20-10 MXS20-20 MXS20-30 MXS20-40 MXS20-50 MXS20-75 MXS20-100 MXS20-125 MXS20-150 169 223 275 62 Air Slide Table MXS Series Dimensions MXS 20 With shock absorber (20)
20 15 5 A A B B 20 1 5 15 (Pitch) P = 10.5 M5 x 0.8 (A, B port) A A 17.5 One-touch fitting (A, B port) Applicable tubing O.D.: 4, 5/32" (Pitch) P = 10.5 18 1.5 SS5YJ3-32, S32Stations -M5 Station n L1 L2 Station 2 41.5 33.5 Station 20 230.5 222.5 3 52 44 4 62.5 54.5 5 73 65 6 83.5 75.5 7 94 86 8 104.5 96.5 9 115 107 10 125.5 117.5 11 136 128 12 146.5 138.5 13 157 149 14 167.5 159.5 15 178
14 0.070 0 20 25 32 40 11 13 15 18 3.2 3.2 4.5 4.5 28 28 28 30 44 52.5 57.5 66 29 33 40 49 14 16 20 22 10 10 10 10 5.5 5.5 6.6 6.6 25 30 35 40 35.8 39.8 49.4 58.4 42 42 48 56 16 20 22 30 43.4 48 59.4 71.4 Clevis pin and snap ring are attached.
D-F9N(V)/D-F9P(V)/D-F9B(V) Applicable Actuator Series Grommet Series Bore size (mm) Series Bore size (mm) CDU MXS, MXQ 6, 10, 16, 20, 25, 32 6, 8, 12, 16, 20, 25 MXP CDQ2 32, 40, 50, 63, 80, 100 10, 12, 16 * MTS CDQS 12, 16, 20, 25 20, 25, 32, 40 CY1R MY1 16, 20 6, 10, 15, 20 ; MK MXW 8, 12, 16, 20, 25 12, 16 MK2 MXF 8, 12, 16, 20 32, 40, 50, 63 6, 10, 16 *Not available for series CDQP2
200 200 200 0 0 0 0 0 5 10 15 20 25 30 35 40 0 10 20 30 40 50 60 70 0 5 10 15 20 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 1000 800 800 800 800 Mep L3 [mm] L3 [mm] L3 [mm] L3 [mm] m 600 600 600 600 L3 Z 400 400 400 400 200 200 200 200 0 0 0 0 0 5 10 15 20 25 30 35 40 0 10 20 30 40 50 60 70 0 5 10 15 20 0 10 20 30 40 50 60 Work load [kg
15 16 32 10 85 15 52 16 12 12 10 8 Up to 500 0.1 0.3 35 32 70 27 108 1/4 1/8 52 12 18 20 40 10 95 17 56.5 20 13 15 12 11 Up to 600 200.1 0.3 35 32 86 27 115 1/4 1/4 64 16 25 20 40 10 102 17 67 20 18 12 15 11 Up to 600 0.1 0.3 40 37 102 32 139 1/4 1/4 78 20 31.5 25 52 14 123 21 83 20 23 18 17 13 Up to 750 Data 0.1 0.3 40 37 116 41 160 1/4 1/4 92 25 35.5 30 52 14 144 21 98 22 25 20 19 16 Up
30 27 60 22 96 1/8 1/8 44 10 16 32 10 85 15 52 16 12 12 10 8 Up to 500 0.1 0.3 18 35 32 70 27 108 1/4 1/8 52 12 20 40 10 95 17 56.5 20 13 15 12 11 Up to 600 200.1 0.3 25 35 32 86 27 115 1/4 1/4 64 16 20 40 10 102 17 67 20 18 12 15 11 Up to 600 0.1 0.3 40 37 102 32 139 1/4 1/4 78 20 31.5 25 52 14 123 21 83 20 23 18 17 13 Up to 750 Data 0.1 0.3 40 37 116 41 160 1/4 1/4 92 25 35.5 30 52 14
4 Parts list No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 No.
15 40 19 11 43 35 1/2 46 155 13 14 50 8 58 37 35 15 220 225 55 52 15 15 25 to 1400 63 M12 x 1.5 90 98 63 15 42 19 14 43 35 1/2 52 163 15 18 60 10 65 45 42 18 240 247 65 55 15 20 25 to 1500 80 M16 x 1.5 110 118 80 17 40 22 16 44 44 3/4 65 184 18 18 72 12 87 50 50 20 269 284 65 17 20 80 25 to 1800 1/4 stroke 100 M18 x 1.5 135 150 102 19 42 22 18 44 44 3/4 75 192 20 22 85 12 109 55 55 23 287
[ ] for AC L plug connector (L): SYJ5120-lLll-M 5 M plug connector (M): SYJ5120-lMll-M 5 63.4[64.7] 59.4 42.2 42.2 300 (Lead wire length) A B A B 11 5 11 5 10 10 (Lead wire length) 19 2-2.6 (Mounting holes for manifold) 19 2-2.6 (Mounting holes for manifold) 300 40.6[47.1] 29.5[36] 26.6 26.6 23 20 20 23 17.1 10.5 10.5 3 3 11 2-2.6 11 10 10 2-2.6 15 (Mounting holes) (Mounting holes) 19.5
MHC Axial Ported (with M5 Port) [M] MHT (mm) Auto switch mounting groove (4 locations) (Except 10) A B D2 E D1 Model MHY M5 x 0.8 Piping port S C S C S C S C 0.016 0.043 MHZ2-10 M 12f8 15 11 52.8 7 MHW MHZ2-16 M 0.016 0.043 16f8 20 15 58.7 10 End boss assembly MHZ2-20 M 0.020 0.053 20f8 22 19 70.5 12 MRHQ D2 0.020 0.053 MHZ2-25 M 25f8 25 24 82.9 15 Misc.
MHC Axial Ported (with M5 Port) [M] MHT (mm) Auto switch mounting groove (4 locations) (Except 10) A B D2 E D1 Model MHY M5 x 0.8 Piping port S C S C S C S C 0.016 0.043 MHZ2-10 M 12f8 15 11 52.8 7 MHW MHZ2-16 M 0.016 0.043 16f8 20 15 58.7 10 End boss assembly MHZ2-20 M 0.020 0.053 20f8 22 19 70.5 12 MRHQ D2 0.020 0.053 MHZ2-25 M 25f8 25 24 82.9 15 Misc.
A B V W XG Y ADD STROKE MM SM LB P 1 1/2 5/8 7/16-20 3/4 1.125 1/4 5/8 1 3/4 1 15/16 4 2 1/4 1 1/2 1 3/4-16 1 1/8 1.5 1/2 1 2 1/8 2 5/16 4 2 1/4 2 5/8 7/16-20 3/4 1.125 1/4 5/8 1 3/4 1 15/16 4 2 1/4 2 1 3/4-16 1 1/8 1.5 1/2 1 2 1/8 2 5/16 4 2 1/4 2 1 3/8 1-14 1 5/8 2 5/8 1 1/4 2 3/8 2 9/16 4 2 1/4 2 1/2 5/8 7/16-20 3/4 1.125 1/4 5/8 1 3/4 1 15/16 4 1/8 2 3/8 2 1/2 1 3/4-16 1 1/8 1.5 1/2 1
A B V W XG Y ADD STROKE MM SM LB P 1 1/2 5/8 7/16-20 3/4 1.125 1/4 5/8 1 3/4 1 15/16 4 2 1/4 1 1/2 1 3/4-16 1 1/8 1.5 1/2 1 2 1/8 2 5/16 4 2 1/4 2 5/8 7/16-20 3/4 1.125 1/4 5/8 1 3/4 1 15/16 4 2 1/4 2 1 3/4-16 1 1/8 1.5 1/2 1 2 1/8 2 5/16 4 2 1/4 2 1 3/8 1-14 1 5/8 2 5/8 1 1/4 2 3/8 2 9/16 4 2 1/4 2 1/2 5/8 7/16-20 3/4 1.125 1/4 5/8 1 3/4 1 15/16 4 1/8 2 3/8 2 1/2 1 3/4-16 1 1/8 1.5 1/2 1
12 16 5, 10, 15, 20 25, 30 2.2-10 20 25 5, 10, 15, 20 25, 30, 35, 40 45, 50 Series CQS 12, 16 20, 25 12 16 20 25 5, 10 2.2-16 Solid state switch D-F9N, F9NV D-F9P, F9PV D-F9B, F9BV D-F9NW, F9NWV D-F9PW, F9PWV D-F9BW, F9BWV Series CQSK 12 16 5, 10, 15, 20 25, 30 20 25 5, 10, 15, 20 25, 30, 35, 40 45, 50 2.2-24 Series CQSlS 12 16 5, 10, 15, 20 25, 30 20 25 5, 10, 15, 20 25, 30, 35, 40 45,
FH11 H 0.5 L M N P 32 CS5032 32.5 10.5 22 10 6.6 14 15 30 45 10.5 5.5 5 40 CS5040 38 12 25 12 6.6 16 18 35 55 11 5.5 5 50 CS5050 46.5 15 27 16 9 21 20 40 51 65 15 6.5 5 63 CS5063 56.5 15 32 16 9 21 23 45 75 15 6.5 5 80 CS5080 72 18 36 20 11 25 27 45 70 95 18 10 5 100 CS5100 89 18 41 20 11 25 30 55 115 18 10 5 * Supplied with 4 mounting screws 20 CP96N/C96N Series Dimensions: Pivot Brackets
P. 20 Gasket/10-32 UNF seal on thread Part no.: M-10/32G Material: Stainless steel 304, NBR 15-4-12 5 Inch-size One-touch Fittings Series KQ2 Male Connector: KQ2H Applicable tubing O.D.
to 500 30 27 60 22 96 1/4 1/4 44 10 +0.058 0 15 0.1 0.3 16 32 10 85 15 26 54 10 10 8 50 Up to 600 20 to 600 35 32 70 27 108 1/4 1/4 52 12 +0.070 0 18 0.1 0.3 20 40 10 95 17 27 59 13 12 11 63 Up to 600 20 to 600 35 32 86 27 115 1/4 1/4 64 16 +0.070 0 25 0.1 0.3 20 40 10 102 17 26 67 18 15 11 80 Up to 750 20 to 750 40 37 102 32 129 1/4 1/4 78 20 +0.084 0 31.5 0.1 0.3 25 52 14 113 21 30 72
200 10 125 15 15 + 55(n-2)/2 n = 2, 4, 6, 8 20 20 + 55(n-2)/2 n = 2, 4, 6, 8 20 20 20 + 55(n-2)/2 n = 2, 4, 6, 8 25 25 + 55(n-2)/2 n = 2, 4, 6, 8 10 100 35 100 + 100(n-2) n = 2, 3, 4, 5 35 + 30(n-2) n = 2, 3, 4, 5 10 55 35 55 + 55(n-2) n = 2, 3, 4, 5 35 + 30(n-2) n = 2, 3, 4, 5 10 10 + 40(n-2)/2 n = 2, 4, 6, 8 10 10 + 40(n-2)/2 n = 2, 4, 6, 8 10 10 + 30(n-2)/2 n = 2, 4, 6, 8 15 10 + 45(n
A -20. 9-10 9.4.4 HRR010-W-20. 9-10 9.5 Heating capacity . 9-11 9.5.1 HRR010-A-10. 9-11 9.5.2 HRR010-W-10. 9-11 9.5.3 HRR010-A-20. 9-12 9.5.4 HRR010-W-20. 9-12 9.6 Pump capacity. 9-13 9.6.1 HRR010-A/W-10 . 9-13 9.6.2 HRR010-A/W-10-T1 . 9-13 9.7 Required facility water flow (for water-cooled type) . 9-14 9.7.1 HRR010-W-10/20. 9-14 9.8 Types of Hazard Labels . 9-15 9.8.1 Locations of Hazard