Industrial Filters

Main applications Cotton Stainless steel 304 20 to 100 0.5, 1, 5, 10, 20, 50, 75, 100 0.2 MPa 0.1 MPa Polypropylene Polypropylene 0 to 60 0.5, 1, 5, 10, 20, 50, 75, 100 Glass fiber Stainless steel 316 1, 5, 10, 20 0 to 400 Note) Size for all is 65 x L250. Different lengths are available as a special order up to 750 mm, only for cotton and polypropylene. Elements Part No.

Profile Design ISO/VDMA Air Cylinder Series CP95

Piston speed [mm/s] Maximum air consumption Q [Nl/min.] 100 125 2 300 400 500 300 400 500 80 150 200 150 200 63 50 100 100 32 40 30 40 50 30 40 50 25 20 20 20 15 15 16 10 10 8 2000 10 5 4 1500 3 1000 2 6 500 400 300 1 1 200 0.5 100 0.2 0.3 0.4 0.5 0.6 0.7 0.8 Working pressure [MPa] 1.8-26 Series CP95 Average air consumption of compressed air cylinders and piping Thermal loss is not represented

MGG

35 M6 x 1 depth 12 35 20 25 32 40 129 135 29 80 118 6.6 M10 x 1.5 depth 18 40 73 27 5.5 6 8 4 75, 100, 125, 150, 200 11 depth 8 16 19 19 120 40 M8 x 1.25 depth 16 45 149 170 29 100 150 9 50 93 M12 x 1.75 depth 21 34 6.5 9 10 7 75, 100, 125 14 depth 10 16 19 19 120 40 45 M8 x 1.25 depth 16 149 170 29 100 150 9 50 93 M12 x 1.75 depth 21 34 6.5 9 10 7 150, 200, 250 14 depth 10 19 21 22 150

Rotary Table/

B B When D-F8 is used Size: 10 to 200 B A Reed switch Solid state switch Size 10 20 30 50 70 100 200 Rotation A B Actuation range A B Rotation range m Actuation range Rotation range m 36 50 66 68 78 91 115 10 190 90 10 90 40 54 60 72 82 95 19 21 27 31 37 41 48 61 17 23 27 33 37 44 57 190 80 10 80 10 10 65 10 190 65 10 10 50 190 50 10 190 45 10 45 Operating range at proper mounting position

7ND9071en

Error 0.1 % 8 Actuator Reversals 10 [>=0] 5 Setpoint at Error 66.1 % 9 Spool Total Travel 10 [>=0] Valve Analysis Test Key Figures: Spool Reversals 10 [>=0] Setpoint Reversals Trend 10 [>=0] 1 Target Position 50.0 % Steady State Dev. 3.0 % [0..100%] 2 Steady Time 12.0 sec. Dynamic State Dev. 20.0 % [0..100%] 3 Ramp Time 8.0 sec.

25

back direction [mm] 150 100 50 0 50 100 150 150 100 50 0 50 100 150 250 200 150 100 50 0 50 100 150 200 250 0 0 50 50 0.5 s 100 100 0.5 s 150 150 1 s 200 200 2 s 1 s 250 250 5 s 2 s 5 s 300 300 3) With energy saving type de-ionizing cartridge, Supply pressure: 0.3 MPa Installation distance in height from ionizer to workpiece (Charged object location) [mm] Installation distance in height

Square Tube Type Air Cylinder Series MB1

Bore size (mm) Z DA DB DL DU DC DX DE DR DO DT DS DH Z DD H10 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.084 0 +0.084 0 32 40 50 63 80 100 32 40 50 63 80 100 6.6 6.6 9 9 11 11 46 52 65 75 95 114 32 32 43 43 64 64 22 22 30 30 45 45 10 10 11.5 11.5 14 14 44 44 60 60 86 86 14 14 20 20 30 30 62 62 81 81 111 111 15 15 18 18 22 22 7 7 8 8 10 10 33 33 45 45 65 65 154 158 182 182 228 228 10 10 14 14

Ionizer

mA Residual voltage: 1 V or less (Load current at 100 mA) Max. applied voltage: 28 VDC Max. load current: 100 mA Residual voltage: 1 V or less (Load current at 100 mA) Output signal Voltage output 1 to 5 V (Connect a 10 k or larger load.) 50 to 2000 mm (Sensing DC mode: 200 to 2000 mm) 0 to 50C 35 to 80% Rh (No condensation) Cover of ionizer: ABS, Emitter: Tungsten, Single crystal silicon

VQZ1000/2000/3000

part number consists of 10 units.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

40 35 190 190 190 190 190 190 190 10 10 10 10 10 10 10 10 10 10 10 10 10 10 90 80 65 50 45 40 35 60 50 50 40 40 30 20 17 23 27 33 37 44 57 36 50 66 68 78 91 115 40 54 60 72 82 95 19 40 54 60 72 82 95 19 21 27 31 37 41 48 61 21 27 31 37 41 48 61 10 20 30 50 70 100 200 Operating angle m: Value of the operating range Lm of a single auto switch converted to an axial rotation angle.

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

10 ISO Class 8 10 10 0 L/min (ANR) ISO Class 7 ISO Class 7 10 10 Particle concentration [particles/m3] Particle concentration [particles/m3] ISO Class 6 ISO Class 6 10 10 0 L/min (ANR) 50 L/min (ANR) ISO Class 5 ISO Class 5 10 10 1000 1000 20 L/min (ANR) ISO Class 4 ISO Class 4 100 100 70 L/min (ANR) 30 L/min (ANR) 10 10 1 1 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0.1 0.2 0.3 0.4 0.5 0.6 Particle diameter

SYJ300/500/700

M5 x 0.8 (P, R port) 10 8.6 7.5 VQ 17.5 23 VKF VQZ L plug connector (L): SYJ34-L-M5 M plug connector (M): SYJ34-M-M5 M8 connector (WO): SYJ34-WO-M5 VZ VS VFN Approx. 300 (Lead wire length) 41.5 [48.5] 26.1 46 M8 x 1 28.5 52.6 [59.6] Approx. 300 (Lead wire length) 58.5 [60.7] 48.7 [50.9] 57.6 50.2 43.7 R P R P R P 10 8.6 10 8.6 10 8.6 23 23 23 5 5 5 28.5 28.5 28.5 35.6 35.6 35.6 Refer to

ISO Standard Hydraulic Cylinder

(CHSD) (CHSG) 212 40 231 50 257 63 Cylinder with built-in cover and mounting bracket allows easy disassembly and assembly. 295 80 325 100 Conforming to ISO 10762 (JIS B 8367-5:2002) CHSD Series/10 MPa 40, 50, 63, 80, 100 Conforming to ISO 6020-2 (JIS B 8367-2:2002) CHSG Series/16 MPa 32, 40, 50, 63, 80, 100 332 ISO Standard Hydraulic Cylinder 40, 50, 63, 80, 100 CHSD Series 10 MPa CHQ How

air-filter-e

, 100 Fiber 65 x L250 1, 5, 10, 20 5, 10, 20, 40 74, 105 Micromesh 65 x L250 Refer to pages 256 and 257 for the replacement element type.

Air Preparation Equipment

, 100 Fiber 65 x L250 1, 5, 10, 20 5, 10, 20, 40 74, 105 Micromesh 65 x L250 Refer to pages 256 and 257 for the replacement element type.

100

ANR)] 200 100 400 300 600 500 700 0 Time to Reach Vacuum (Representative value) ZL1 Series ZL3/ZL6 Series ZL3m ZL6m (Tank capacity: 1 L) (Tank capacity: 1 L) 100 90 80 70 60 50 40 30 20 10 0 100 90 80 70 60 50 40 30 20 10 0 Vacuum pressure in tank [kPa] Vacuum pressure in tank [kPa] ZL6H ZL6M ZL3H ZL3M Time to reach vacuum [S] 1 2 3 4 5 6 0 Time to reach vacuum [S] 1 2 3 4 5 6 7 8 9 10 0

Compact Hydraulic Cylinder

Standard Strokes Bore size (mm) Standard strokes (mm) 20 32 40 50 63 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Hydraulic Fluid Compatibility 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 80 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Hydraulic fluid Compatibility

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

For analog voltage output of 0 to 10 V Can be changed Can be changed 10 5 At the time of shipment At the time of shipment Analog output [V] Analog output [V] 1 0 105 10 0 105 10 10% of the rated flow range 1 100 1 100 10% of the rated flow range 100% of the rated Max. value of 100% of the rated flow range Max. value of the display range flow range the display range Flow [L/min] Flow [L/min

Rotary Actuator

Size Current model [kg] Reduction rate [%] CRA1 [kg] Angle adjustable type 30 50 63 80 100 0.3 10 0.27 Size: 50, 63, 80, 100 Size: 50, 63, 80, 100 1.5 13 1.3 D50 to 100 50 to 100 Rotating angle 2.5 12 2.2 90, 180, 100, 190 90, 180, 100, 190 4.3 10 3.9 8.5 14 7.3 With solenoid valve Size: 50, 63, 80, 100 Size: 50, 63, 80, 100 Mounting interchangeable with the current model 50 to 100 50 to

7

9 100 12 100 12 100 15 100 15 100 Note 1) Power consumption: The value at ambient temperature of 20C and when the rated voltage is applied.