SMC Corporation of America
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High pressure type (1.0 MPa) Negative COM External pilot Low wattage type (0.5 W) Nil K N R Y Seal type 3 position closed center Note) For rubber seal type only.

Indicator light (AC) When solenoid gets energized, indicator light illuminates, thus electrical states of the solenoid can be seen from the outside. 51 VA (64 VA ) 50 Hz Inrush Apparent power (VA) (Power consumption (W)) 45 VA (55 VA ) 60 Hz AC 17 VA (5.3/5.5 W) 50 Hz Holding 11 VA (2.9/3.2 W) 60 Hz 5.5 DC Power consumption (W) In the case of 3 position type.

Condition Condition Inlet air temperature 35 C Outlet air pressure dew point 10 C Ambient temperature 35 C Inlet air pressure 0.5MPa Air flow 1200 l/min (ANR) Inlet air temperature 55 C Outlet air pressure dew point 10 C Ambient temperature 35 C Inlet air pressure 0.7MPa Air flow 350 l/min (ANR) A = 0.75 based on conditions q, w and e 1 B = 0.95 based on conditions q, w and e 1 C = 1.00 based

IDH Component Parts ID Threaded type Threaded type IDG Manual operation valve (with lever lock) IDK AMG Lead wire with L-type connector AFF With flow adjuster With differential pressure indicator AM PB AMD One-touch fitting One-touch fitting PA AMH AME u t q w e r y AMF No. Description Individual part no.

2 u t u w w i !9 i !9 q q !7 !7 IN OUT IN1 OUT1 !0 !6 !3 o !3 q !8 !6 IN2 OUT2 !8 !7 !6 o IL220 !3 r e !2 w u y i !9 !5 @1 OUT IN1 !1 q @2 @0 IN2 !4 q Component Parts Replacement Parts No. Description Material Note 1 Body Aluminum alloy Silver baking finish Model Order no. Contents IL201 KT-IL201 Set of left nos. u, i, o, !2, !3, !6, !7, !8, !9 IL211 KT-IL211 Set of left nos. u, i, o, !

0 PVQ y q q IN !1 VY1 w IN !1 Bleed Bleed VBA VBAT y !2 @2 Bleed Bleed r !3 !2 !5 w AP100 @4 !7 u @3 OUT (2) SUP (1) SUP (1) OUT (2) !8 @3 !6 e @1 @1 e tValve guide tValve guide Working principle (For IR2000) When the setting knob is turned, the nozzle is closed by the flapper allowing the supply air that flows in from the upstream side to pass through the fixed throttle.

0 y u o q Air release Fluid release FGE Retainer Handle FGG Guide slit Center bolt Bracket for V-band Air release valve FGA !1 t Inlet i FGC i Inlet Drain port FGF FGF r Pressure gauge !2 r FGH Pressure gauge e Outlet FQ1 Outlet e FN y EB ES w w Fluid release Component Parts and Seal List Component Parts/Replacement Parts Part No. No. Description Material Qty.

'trllrF I s NPrF NCME 150 'Noter For Din hole location see NCMC dimensions lfrw XK A a I K L LB N Nll w l Y 7A 0.250 Y4-24 0.50 o.624 0.86 0.38 0.251 o.34 3.75 o.75 Va-18 0.50 0.95 o.62 4.03 w& 1a.50 o.sc 034 o.t51 o.34 3.56 o.?5 7*tA 0.50 io.95 o.62 3.84 106 (17e) 0.312 5.+24 0.50 o.6240.25 1.12 0.38 0.251 0.12 0.34 3.84 0.84 Ve-18 0.62 t.17 0.62 4.12 o.4sl1*n o?

Output Specification: Y (PNP Open Collector 2 Outputs + Copy Function), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: N01 (NPT 1/8), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: D (Panel Mount Adapter + Front Protection Cover), Operation Manual: Y (w/o Operation Manual, w/o

Output Specification: Y (PNP Open Collector 2 Outputs + Copy Function), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: N01 (NPT 1/8), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: None, Operation Manual: Y (w/o Operation Manual, w/o Calibration Certificate)

LED level meter LED level meter ZSE ISE Above set position NG PSE Easy-to-operate large dial Extraneous material Z I SE3 W PS Z I SE1 2 Set position OK Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZSP W ISA2 Scale provides guidelines for set position.

Standard Option Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Stainless steel q Clip y Stainless steel/Cu Stainless steel/Ag w Tube assembly Class H e Coil assembly u Stainless steel/FKM Stainless steel/EPDM r Armature assembly IN FKM EPDM t Seal Stainless steel

Flat finger [3] 4 x MM thread depth L Thread for mounting attachment K J A A D G B D B K J F C S W O (mm) Weight (g) F G Open Closed 2 2.5 3 4 L MM J K D C B Model A W MHZ2-10D3 1), 2) 11221122112211220 -0.05 0 -0.05 0 -0.05 0 -0.05 +0.5 +0.3 +0.5 +0.3 +0.5 +0.3 +0.5 +0.3 +0.025 0 +0.025 0 +0.025 0 +0.030 0 +2.2 0 +2.2 0 +2.3 0 +2.5 0 60 125 250 450 5 6 8 10 M2.5 x 0.45 M3 x 0.5 M4 x 0.7

(without light), 2 W (with light) 4 W (without light), 4.2 W (with light) Non-locking push type Other (Semi-standard) Non-locking push type Power consumption DC Holding Inrush Apparent power AC VNB11V VNB12V TQ 12 (P1) 12 (P1) External pilot solenoid Manual override Note 1) For How to Order pilot solenoid valves, refer to page 570.

MGTM MGTL MGPM63 to 100-Carbon steel Flat cylinder w/turntable q MGPL63 to 100-White anodized White anodized White anodized Chromated Chromated Nickel plated High carbon chromium bearing steel Guide plate Bearing guide A Bearing guide B Bearing guide C Bearing guide D Aluminum alloy Aluminum alloy Aluminum alloy Aluminum alloy Aluminum alloy Carbon steel Carbon steel w e r t y u i o !

Power supply ON/Servo OFF: Green flashes. q q PWR Power supply LED y w With alarm : Red turns on. Parameter setting : Red flashes. w ALM Alarm LED Change and protection of the mode switch (Close the cover after changing switch.) u i e Cover o !0 Frame ground (Tighten the bolt with the nut when mounting the controller. Connect the ground wire.) r FG !1 !2 t y u i o !0 !1 !2 !3 !4 !5 !

This is not a clean room series product. 4 MACM Series Dimensions W (Workpiece loadable range) 4 x D At maximum offset (A + 2 x S) S F DB DA C X114 X115, X116 U B W A H T H Q PB E PA PD P (Unlocking port) PE P (Locking port) P (Relief port) (Option V only) MACM4, MACM6 MACM2, MACM10 PC PC PC PC PE P (Relief port) (Option V only) PD [mm] Dimensions Model A B C D DA DB E F H P PA PB PC PD

Description of LEDs q w e No. Description LED Color Contents q Power supply display PWR Green Lights up when the power supply is turned on. w Discharge/Irregular high voltage display ION/HV Green/Red Lights up when static electricity is discharged. (Green)/Lights up if an abnormal high voltage discharge occurs.

20 to 60C0 to 85%R.H.10 to 55 Hz 1.5 mm amplitude X, Y, Z directions for 2 hrs. each100 m/s2 (approx. 10 G) X, Y, Z directionOnly display unit with cover is equivalent to IP65.

20 to 60C0 to 85%R.H.10 to 55 Hz 1.5 mm amplitude X, Y, Z directions for 2 hrs. each100 m/s2 (approx. 10 G) X, Y, Z directionOnly display unit with cover is equivalent to IP65.