COQ2BP

Max 1.25 9 80 92 108 8 M1 OX 1.S 15 18 M1 Oxl .5 9 63 103.5 MIOx l .S 11 99 116 13' 10 M1 6X2.0 21 22 M12xl .7S 11 123 Ml 2x 1.75 80 Clevis Mount: C0020P 0 -0 OM-DO Special cap bolt (mm) eo.. _ N CD CL ew ev A 0 R CU ex cz RR Ll H H Thread e I (mm) C Depth M8xl .2S M8x l .25 14 117 I .

ZMA

Refer to pages 13-15-3 to 13-15-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to page 13-1-5 for Precautions on every series. Mounting Warning 1. Do not drop or bump. Do not drop, bump or apply excessive impact (1,000 m/s2) when handling.

Compact Vacuum Unit

Table 1 7 Supply valve ZB1-VQ1108 Release valve With fitting and filter element (page 9) (Case material: Special clear nylon) ZB1-VPN3--A 9 V-port assembly KJ-C1 ZB1-FE3-A ZB1-SE1-A ZB1-PS-A ZB1-ZS-A ZZB10 11 12 13 14 15 One-touch fitting Filter element Sound absorbing material Pressure sensor assembly It is required when replacing the fitting only.

Compact Slide Series MXH

19 11 LA LB J x M4 x 0.7 Depth 8 3 x M5 x 0.8 through Bottom hole dia 4.3 6 x 7.5 counterbore depth 4.4 Plug for port (Hexagon socket head set screw) 4 x M5 x 0.8 x 4 l 2 x M5 x 0.8 Guide rail width 7 4 x M4 x 0.7 Depth 7.5 4 x M4 x 0.7 Depth 6 23 5 13 8 18 21.5 46 47 20 20 23 5 6.5 6.5 5 NS 12.5 13 11 7.5 35 + Stroke 46.5 + Stroke 11.5 20 4 x M4 x 0.7 Depth 6 5 + Stroke 12 LT NS LB J LA

3 Port Air Operated Valve Series SYJA300 1

-2 to 5-11-6. 0.6 1 (P) 3 (R) 1 (P) 3 (R) Pilot pressure (MPa) Pilot pressure range 0.5 N.C.

High Vacuum L Type Valve

XL-OMS0001-B 5-2.Dimensions C E C E E (KF flange) Fd (K flange) Fn D H B A G A Unit: mm Model A B C D E Fn Fd G H XLA-16-2 40 108 38 20 30 17 44 XLA-25-2 50 121 48 27 12 40 26 44 XLA-40-2 65 171 66 39 11 55 41 67 XLA-50-2 70 185 79 46 11 75 52 72 XLA-63-2 88 212 100 55 11 87 95 70 76 XLA-80-2 90 257 117 65 11 114 110 83 104 12 XL-OMS0001-B 6.

Series AS Elbow Type/Universal Type Speed Controller with One-touch Fitting 1

Type Metric size Inch size Elbow Universal 2 3 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 01 23 3.2 4 6 8 10 12 03 05 07 09 11 13 04 06 08 10 12 Control type Meter-out Meter-in 0 1 Use 1/8" tube.

Power Valve: Economy Valve Series VEX5

VEX5511-062EZ-BG Body size 5, Select, External pilot solenoid Port size 3/4 200 VAC, Grommet terminal, with light/surge voltage suppressor OptionBracket, with pressure gauge 5 3 4 200 VAC 50/60 Hz 1 1 1 110 VAC 50/60 Hz 4 7 220 VAC 50/60 Hz 24 VDC 12 VDC 11 4 11 4 5 6 11 2 9 2 2 7 240 VAC 50/60 Hz Other 9 Option Thread type Nil F N T Rc G(1) NPT NPTF Note 1) Not conforming to ISO1179-1.

Compressed Air Preparation Filter

13 15 16 2 1 3 4 5 6 7 8 9 10 11 12 0 Air flow rate [m3/min (ANR)] Air flow rate [m3/min (ANR)] Air flow rate [m3/min (ANR)] 7 Compressed Air Preparation Filter AFF/AM/AMD Series Dimensions: AFF, AM, AMD H Bracket K L N O J M D C I E P Bracket (Accessory) F B OUT IN Option H: Auto drain (1.6 MPa) Flange drop prevention stopper (Do not apply force when removing the bowl.)

Series CDU 10-/11- 21-/22- ø6, ø10, ø16, ø20, ø25 Free Mount Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators Relief port 2 x M5 x 0.8 2 x P through M5 x 0.8 R GC GB E GA MM D C J 2.8 2 x P through A 4 x T counterbore E 0.5 B H S Z (mm) 6 depth 4.8 5 S 10 15 20 25 30 5 Z 10 15 20 25 30 Bore size B C D E GA GB GC H J MM P R T A 13 22 3 23 16 15 13 10 3.2 7 M3 x 0.5 31 10 7 6 10 15 24 4 24 33.5 16 15.5 16 11 M4 x 0.7 3.2 9 6 depth 5 64 69 74 79 84 89

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

EXH Diagrams (a) to (d) show the combination with peripherals. 13-5-9

Speed Controller with Uni One-touch Fitting Series AS Elbow Type/Universal Type 1

M Weight (g) AS221F-U01-01 AS221F-U01-03 AS221F-U01-05 AS221F-U01-07 AS221F-U01-09 AS221F-U02-03 AS221F-U02-05 AS221F-U02-07 AS221F-U02-09 AS221F-U02-11 AS321F-U02-07 AS321F-U02-09 AS321F-U02-11 AS321F-U03-07 AS321F-U03-09 AS321F-U03-11 AS421F-U04-11 AS421F-U04-13 1 8" 5 32" 20.8 21.1 23.1 23.9 25.3 23.3 24.9 25.2 27.2 33.9 27.8 29.5 31.8 27.8 29.5 31.8 33.6 35.2 7.8 8.9 11.4 13.2 15.2 8.9

SI Unit for Vacuum Manifold

Wiring 11 2.1. Communication/Power connector 11 2.2. FE terminal 11 3. Configuration 12 3.1. IODD file 12 3.2. Direct Parameter page 1 12 3.3. IO-Link defined parameters 13 3.4. Vendor defined parameters 15 4. Process data 22 4.1. Input process data 22 4.2 Output process data 26 5. Example of energy saving operation of ejector 28 6. LED indication 29 7. Event 30 8. Specification 31 8.1.

Compact Guide Cylinder with One-way Lock Series MLGP ø40, ø50, ø63

PA + Stroke GB Q G J K IE S XAH7 depth XL (mm) MLGPM, MLGPL common dimensions Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB GC H HA IA IB IC ID IE 14 11 100 44 16 12 44 54 10 120 M6 34 52 14 4 14 40 25, 50, 75 100, 125, 150, 175 200, 250, 300, 350 12 13 107 44 20 16 47 64 148 M8 35 64 19 50 11 7 14 115 49 20 16 50 78 162 M10 38 77 19 63 16.5 16.5 13.5 6.5 16.5 Bore size (mm) J

RS2H-OM0045P

M4 M41.5Nm -6 11 - 4. A GR-S-010(10g) -7 5. -8-9 -8 -9 12 - , 3 6. 6-1. 1) 2) 3) 4) 5) 6) 7) 8) 9) 10) 11) 12) 13 - / 6-2. (M4),90 , -9 M4 1.5Nm -10 14 - 6-3. 5080 O 6-3-1. 4 50 : 12.5Nm 63 : 24.5Nm 80 : 42.0Nm -11 6-3-2. 1) -12 -12 2) 15 - 6-3-3. GR-S-010(10g),GR-S-020(20g) 1) 2) 3)O 4) -13 -13 6-3-4. 1)() -14 2)() -14 16 - 6-4. 6-4-1. B , 1 6-4-2. 7. 7-1.

MHx-OMM0057

1.5~2 SMC AF AR 4. 4-1 13 - 4-2 1 15 2 16 3 17 B 4 18 5 19 6 20 7 21 U 8 22 R 9 A 23 C 10 B 24 11 A 25 12 13 14 MHL2-10D MHL2-16D MHL2-20D MHL2-25D MHL2-32D MHL2-40D 26 27 28 29 30 NBR MHL10-PS MHL16-PS MHL20-PS MHL25-PS MHL32-PS MHL40-PS ) 262627282930 1 14 - 4-3 1 U U 2 R B B R 3 15 - 4-4 1 2 O O O 3 16 - Revision history 4-14-1, Sotokanda, Chiyoda-ku

HEAVY DUTY STOPPER CYLINDER

(Figure-13) Pick and pull. Figure-13 2) Tube gasket Pry it out with a precision screwdriver. 15 - 6-3-3. Grease application Caution Use SMC standard grease.

Fan Type Ionizer

Wiring . 11 3-2-1. Connection Circuit . 11 3-2-2. Wiring of the power supply cable . 13 3-2-3. Wiring of the AC adapter . 13 3-3. Timing chart . 14 4. Function . 14 4-1. Name of Parts . 14 4-2. Adjustment of offset voltage (ion balance) . 15 4-3. Adjustment of air flow . 15 4-4. Maintenance Warning Function and Cleaning . 15 4-5. Replacement of Cartridge Case . 17 4-6.

Lock unit

(Refer to Page 13 to 14) 22 - Change to recommended balanced circuit. (Refer to Page 13 to 14) b. Adjust the regulator valve. Check if the locked status is balanced. c. Install an air tank so that pressure fluctuation does not occur when supplying air to the lock unit and cylinder. d. After stopping by locking, release the lock after waiting for 0.5sec or longer. a.

Series VCS

When connecting piping to a valve, be sure to tighten while holding the valve with a wrench or other tool. 11 Series VCS Direct Operated 2 Port for Steam 2 Port Solenoid Valve for Fluid Control/Precautions 3 Be sure to read before handling Operating Environment Wiring Warning Caution 1. As a rule, use electrical wire of 0.5 to 1.25mm for wiring.