XM, XY

9-1A AS568-016V XLD50-2-9-1A AS568-016V XLD63-2-9-1A XLD80-2-9-1A Standard AS568-009V S Valve seal assembly r XGT XLD80-2-9-1A XMD XYD XLD40-2-9-1A AS568-016 XLD50-2-9-1A AS568-016 XLD63-2-9-1A AS568-009 Special CYV Note 1) List the optional seal material symbol (refer to Table 1 below) after the model number, except for the standard seal material (FKM: compound no. 1349-80, produced by Mitsubishi

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

Flow Rate and Sonic Conductance Universal type Symbol AS121FG AS221FG-02 AS321FG AS421FG AS221FG-01 Model AS131FG AS231FG-02 AS331FG AS431FG AS231FG-01 3.2 6 8 10 12 3.2 6 4 6 8 10 4 4 8 10 12 Metric size 6 10 Tubing Flow Direction Symbols on Body 1/8" 3/16" 5/32" 3/16" 1/4" 5/16" 3/8" 3/8" 1/2" 1/4" 1/8" O.D. 5/32" 5/16" 5/32" 1/4" Meter-out type Meter-in type Inch size 3/16" 5/16" 3/8"

Slider Type Ball Screw Drive/11-LEFS Series

mm] L4 [mm] L4 1000 1000 1000 1000 X Motorless 500 500 500 500 LAT 0 0 0 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 16 0 4 8 12 16 20 24 0 10 20 30 40 50 60 LZ Work load [kg] Work load [kg] Work load [kg] Work load [kg] 2000 2000 2000 2000 LC3F2 Mey 1500 1500 1500 1500 L5 [mm] L5 [mm] L5 [mm] L5 [mm] m 1000 1000 1000 1000 Wall L5 Y 500 500 500 500 0 0 0 0 4 8 12 16 20 24 0 10 20 30 40 50 0 0 2

CLQ

x 2-9 counter bore depth 7 H effective thread depth C 2-5.4 through M5 x 0.8 unlocking port 5.5 (unlocks when pressurized) U I 6.5 VV D M E M5 x 0.8 Rear cylinder port K M E S 3.2 2 x 2-M5 x 0.8 3.2 16 16 Dust cover (manual unlocking unit) W L G B + Stroke A + Stroke Retraction locking LOCK VH1 W1 Dust cover (manual unlocking unit) M5 x 0.8 unlocking port (unlocks when pressurized) Rod end

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

SOL.A 1 station 2 stations 3 stations 4 stations 1 () SOL.A 14 () SOL.A 2 () 1 SOL.A 14 15 () 2 SOL.A 15 3 () 3 4 5 6 7 8 9 10 11 12 13 5 stations 16 17 18 19 20 21 22 23 24 25 SOL.B 16 () SOL.A 4 () 6 stations SOL.B 17 () SOL.A 5 () 7 stations SOL.B 18 () SOL.A 6 () 8 stations SOL.B 19 () COM. 13 (+) Connector terminal no.

CNS

(Different sides, Same side), 1 25 135 125 (n 2) 2 (n 4) 2 (n 4) 2 25 + 55 135 + 55 125 + 55 n = 4, 8, 12, 16 n = 2, 4, 6, 8 n (Same side) n = 4, 8, 12, 16 2 (Different sides, Same side), 1 155 35 145 D-F5NTL (n 4) 2 (n 4) 2 (n 2) 2 155 + 55 35 + 55 145 + 55 n (Same side) n = 4, 8, 12, 16 n = 2, 4, 6, 8 n = 4, 8, 12, 16 2 Different sides 110 35 Same side 110 100 D-A3 D-G39 D-K39 Different

Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS

Elbow type Universal type Port size Metric size Inch size 3.2 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 2 (2) AS121F-M3 AS131F-M3 M3 x 0.5 (2) AS121F-M5 AS131F-M5 M5 x 0.8 AS121F-U10/32 AS131F-U10/32 10-32UNF Tube swivels 360 Universal type permits 360 piping swivel. (2) AS221F-01 AS231F-01 R1/8 AS221F-02 AS231F-02 R1/4 2 size added to applicable tubing sizes Metric size (Release

NCA1

NI-325 NI-800 NI-1000 A 1 1/8 1 5/8 2 CA 2 1/16 2 13/16 3 7/16 CB 1 1/4 1 1/2 2 CD 3/4 1 1 3/8 ER 7/8 1 3/16 1 9/16 KK 3/4-16 1-14 1 1/4-12 Weight (lbs) 0.39 1.04 2.37 Part No.

MXH

4 @2 u o !3 @4 e !5 !1 r u @2 @3 !3 @4 e !2 MXH16/20 (16, 20) @0 y @1 !7 w q!9 t !8 i !0 !1 r u @2 @3 !3 @4 e !2 Component Parts Description Material Note Description Material No. q w No. !2 !3 !4 !5 !

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

80.5 100 110.5 L1 L2 L3 L4 1.12-48 VQZ1000/2000/3000 Base Mounted VQZ2000 VV5QZ25 C Station Port size 41 (12) Grommet (G) (35) (5.5) 33 (7.5) 2n-C4, C6, C8 44.5 Mounting holes 15 7.7 C4: One-touch fitting for 4 C6: One-touch fitting for 6 (2) DIN rail clamp screw C8: One-touch fitting for 8 U side n A 4 B 2 Manual override SY 5 4 P=16 23.9 (L4) (L3) P=16 SYJ L1 L2 3 2n-Rc(PT)1/8 2 P=16 20.4

ISA2

With regulator + 2 port solenoid valve With 2 port solenoid valve 16-8-2 3 Air catch sensor Series ISA2 Optimum position is known at a glance.

Table of Contents

5.5 through 2-M5 x 0.8 through 11.5 25h9 0 -0.052 10g6 -0.005 -0.014 2 4h9 (New JIS key dimension) 0 0.030 (4P9 Keyway dimension) 0.012 0.042 20 30 2-5.5 through 2-5.5 through 38 3 5 5 16 14 20 (114) 53 B port A port 2-M5 x 0.8 (Connection port) 5.5 31 25.5 (34.5: Connector type) Switch unit ( 3 m) 0.5 m 31 63 R 22.5 3 2. 5 11-3-14 49 CRB2 CRBU2 CRB1 MSU CRJ Courtesy of Steven Engineering

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

0.030 4 20 0 0.030 4 15 2-M5 x 0.8 Connection port for side port 9 4.5 1 CRB2BW40-SE/DE 10 g6 -0.005 -0.014 0 -0.052 25h9 20 A port B port 63 2-M5 x 0.8 Connection port for axial port 21 3-5.5 depth(Through) (Body A side only) 3-5.5 depth(Through) (Body A side only) 11-2-16 16 Series CDRB2 Rotary Actuator Vane Style Dimensions: 10, 15, 20, 30 (With auto switch

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

5.5 through 2-M5 x 0.8 through 11.5 25h9 0 -0.052 10g6 -0.005 -0.014 2 4h9 (New JIS key dimension) 0 0.030 (4P9 Keyway dimension) 0.012 0.042 20 30 2-5.5 through 2-5.5 through 38 3 5 5 16 14 20 (114) 53 B port A port 2-M5 x 0.8 (Connection port) 5.5 31 25.5 (34.5: Connector type) Switch unit ( 3 m) 0.5 m 31 63 R 22.5 3 2. 5 11-3-14 49 CRB2 CRBU2 CRB1 MSU CRJ Courtesy of Steven Engineering

LEH_C

LEHF10K2-16 3 - 3.3 9 13 16 10 18 15 8 11 6 ( 12 4 5 7 2 1 3 17 14 1 2 A 3 B 4 + 5 6 + 7 + 8 9 10 A 11 B 12 13 NBR 14 15 16 17 18 ( DC24V) 4 - 4.

Table of Contents

(A contact) 1 2 1 pc. 2 pcs. 6 6 pcs.

HRX-OM-X071

Facility water outlet (For water-cooled type) HRR Series 2.3 Function of Parts 2-5 HRX-OM-X071 Chapter 2 Name and Function of Parts 2.4 Operation display panel The operation panel on the front of the product controls the basic operation of the product 1 3 2-5 RUN 8 MPa 4 ALM 9 WRN 10 LPM 5 11 2 12 RMT 13 6 H 7 SEC 14 16 18 15 MENU RUN/ STOP 17 19 20 ENT RESET Table 2-4 Operation display

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

/Basic type (Through hole & Double end tapped): MQQLB 10, 16, 20 H effective thread depth C 2-M5 x 0.8 2 x 4-OB 2 x 4-OA effective depth RA Y Q F Depth of counterbore RB I 4-N through 4-N through M0.2 D E K B + Stroke L M0.2 A + Stroke E 25, 30, 40 H effective thread depth C 2 x 4-OA effective depth RA 2-Rc1/8 (NPT1/8, G1/8) 2 x 4-OB Y Q F Depth of counterbore RB E J I M0.2 D W K B + Stroke

VQ7-6/7-8

(initial value) 1 (P) 5 (R1) 3 (R2) 3 position pressure center (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 18 Series VQ7-8 DIN Connector Type 2 position/Single : VQ7-8-FG-S Single (reverse pressure) : VQ7-8-YZ-S 154 56 (71) 82.5 71.5 154 49 (64) 49 (64) 82.5 56 (71) 31 (42) 31 (42) 2-7.5 Mounting hole 16 (20) (port A) 16 (20) (port B) R1 R2 P Manual override A B PB (22) 16 16 (23) 12 (16) (11) 10 75

4-channel Flow Monitor ( compatible)

08 09 0A 0B 0C 0D 0E 0F 7seg Display letter 11seg Value (16 Hex number) 10 11 12 13 14 15 16 17 18 19 1A 1B 1C 1D 1E 1F 7seg Display letter 11seg Value (16 Hex number) 20 21 22 23 24 25 26 27 28 29 2A 2B 2C 2D 2E 2F 7seg Display letter 11seg Supplementary information : Do not work [Toggle output command] Value Item Remarks CH1 0 1 CH2 Measurement value 2 CH3 3 CH4 CH1_OUT1 16 17 CH1_OUT2