HEC-OM-S019

B Display/Operation panel G RemoteAlarm output connector D Compressed air INOUT I Temperature sensor connector D C Heat radiating air suction port H Communication connector D A Power switch F ACDC connector C E Power connector 6 Outline Dimensions (mm) Controller Heat exchanger G H I 8 Maintenance 7 Key Parts C E F A C B

3 Way,3 Port Solenoid Valve NVZ Series

NW3Z5-41 C'r C) Nvz5l4-ooo NVZ5r4M-OOO .NW3Z5-41R-Or-O NVZ5l4R-OOO NW3zs4lR-ot-O Blank Plt asdt DXT201-15-1A lflhere are more than g stations, supply air and exhaust lrom both sides ol manifoldBottom Dorted irw3zs4{to2-c} Nvv3zs-4o-@6)z-orr Apdlcable valvsc NVz5l4-OoO Nvzsl4M-OOO Stalionsl [there are mor rhan 6 Blank pbte asdy DXT201-15-rA eTZ=tatio* ststions, suppry air and |.i : exhausl

3 Port Air Operated Valve

Doc. no.VT315-OMH0004-C PRODUCT NAME 3 Port Air Operated Valve MODEL / Series / Product Number VTA/VOA315 Series Contents Safety Instructions -2,3 Design/Selection -4 Mounting -4 Piping -4,5 Lubrication -5 Air Supply -5 Operating Environment -6 Maintenance -6 Specific Product Precautions -7 Troubleshooting -8 1 No.VT315-OMH0004-C Safety Instructions These safety instructions are intended

Air Cylinder Series MB

1 1.5 0 40 12 11 7 4.5 0 0.5 3.5 4 0.5 9.5 8.5 4.5 2 1 1.5 0 50 12.5 11.5 7.5 5 0 1 4 4.5 1 10 9 5 2.5 1.5 2 0 63 12.5 11.5 7.5 5 0 1 4 4.5 1 10 9 5 2.5 1.5 2 0 80 15.5 14.5 10.5 8 2.5 4 7 7.5 4 14 13 9 6.5 5.5 6 2.5 100 15.5 14.5 10.5 8 2.5 4 7 7.5 4 14 13 9 6.5 5.5 6 2.5 125 17.5 16.5 12.5 10 6 6 9 9.5 6 17.5 16.5 12.5 10 9 9.5 6 Types without air cushion have different values for auto

DOC1003077

For example, if 0.1 C is set here, the actual reference temperature for control is lower than the indicated SV by 0.1 C.

1

type 20-CBM2 End lock type Air cylinder Series M(D)B 20-M(D)B Standard type 20-M(D)BW Double rod type End lock type 20-M(D)BB 6-18-2 3 Copper-free Air Cylinders Air Cylinders Bore size (mm) Series Application 6 8 12 (10) 16 (15) 20 25 32 40 50 63 80 100 125 140 160 Standard Copper-free Series variations Air cylinder Series C(D)A1 20-CA1N Standard type CJ1 20-CA1WN Double rod type CJP 20-

0.01

Description Note Material Element set 1 SFD-EL200 With 3 O-rings 323 SFD Series Dimensions SFD100-C SFD100-C Dimensions Model A 81 B SFD100C04 C06 C08 4 23 6 81 8 82 26.2 SMC 23 14.7 51 17 Bracket mounting dimensions Applicable tubing O.D.

4

Flow-rate Characteristics/Weight Flow-rate characteristics 1 2 (P A) 2 3 (A R) 3 2 (R A) 2 1 (A P) Port size Weight Valve model Grommet C[dm 3/(sbar)] b Cv C[dm 3/(sbar)] b Cv C[dm 3/(sbar)] b Cv C[dm 3/(sbar)] b Cv VT307 VT307V (Vacuum spec. type) VT307E (Continuous duty type) VT307Y (Energy-saving type) VT307W (Energy-saving, Vacuum spec. type) VT307 VT307V (Vacuum spec. type) VT307E

Air Preparation Equipment Degrees of quality Max. particle diameter ( µ m) Min. pressure dew point ( ° C) Max. oil density (mg/m 3 ) International Standard ISO 8573-1: 1991 Degrees of Quality Japanese Industrial Standard JIS B 8392-1: 2000 Degrees of Qual

Trace the intersection E upward, and C leftward to obtain the intersection D. 6. The intersection C is the amount of water included in the compressed air 1 m3 at 0.7 MPa with the pressure dew point of 62C. The amount of water is 18.2 g/m3. 7.

MONOSASHI-KUN WITH BRAKE CONTROLLER

Monosashi-kun with Brake 5-2. Controller 5-3. Extension Cable 6. Part Identification 22 6-1. Monosashi-kun with brake 6-2. Controller 7. Installation & Wiring 23 7-1. Installation 7-1-1 Installation of Cylinder 7-1-2 Installation of Controller 7-2. Wiring 7-2-1 The connection of Power Supply 7-2-2 The connection of Extension Cable 7-3.

Parallel Type Air Gripper

Specifications 2. Operating method or operation 2-1. Design 2-2. Selection 2-3. Installation 2-4. Air supply 2-5. Piping 2-6. Operating environment 2-7. Lubrication 3. Maintenance 3-1. Precautions 3-2. Disassembly drawing 3-3. Finger assembly set replacement procedure 3-4. Seal replacement procedure 3-5.

MHx-OMU0057

&/Best Pneumatics 2. 2-6. 1. 2. 3. 4. 5. 2-7. 1. 1 ()ISO VG32 MSDS 10 - 3. 3-1. 1. 2. 3. 4. 5., 6. 7. 11 - 3-2. 1025 Nm 10 1.5 0.27 16 2 0.54 20 2.5 0.95 25 3 2.25 Assy O O O NC () NO O C Assy Assy 12 - 32,40 Assy Nm 32 3 1.37 40 4 2.84 Nm 32 2 1.37 40 2.5 2.84 NC () Assy NO O C 13 - 3-3.Assy 1025 (1)Assy 2 (2),0.2mm , , () Nm 10 1.5 0.27 16 2 0.54

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported/Base Mounted

AC PB0111-3 (PB0111) DC Manual override (With lock) PB0111-1 Manual override (Non-locking) PB0101 PB0101-1 Note) There is polarity of (1) +, (2) . ( ): With indicator light 4-16-2 Series VS3115/3110 Dimensions Body ported VS3115-G VS3115-D 2-6 mounting hole 2-6 mounting hole V100 SY SYJ G 1/2 (Cable 8 to 10) Manual override Manual override VK VZ 89.5 (114) [92.5] 1 8, 1 4 [92.5] 3-Rc 3-Rc

Angle Seat Valve /

Indicator 45 22.5 27 1/8 Pilot port 5 17 D E OUT IN E C B 2 x P Port size A A Dimensions [mm] Model Port size P A B C D E VXB215A D 3/8 23 55 99.8 88.3 11.5 VXB215B E 1/2 27 65 106.8 90.8 13.5 VXB215C F 3/4 32 75 111.5 93.2 16 6 VXB Series For Steam Replacement Parts How to order the maintenance kit Maintenance Kit Insulated Adapter (for Individual Parts) VXB021-20-1A (1 set) VXB215 KT *

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

Refer to page 8-16-9 and 8-16-10 for detailed selection procedures. 8-16-6 6 Model Selection Series CY1F (2) CY1F/M2 (1) CY1F/M1 (3) CY1F/M3 30 30 30 MX CY1F25 20 20 20 MTS CY1F25 CY1F25 MY 10 10 10 CY MG 5 5 5 Moment Nm Moment Nm Moment Nm 4 4 4 CX CY1F15 3 3 3 DCY1F10 2 2 2 -X CY1F15 CY1F15 20CY1F10 CY1F10 1 1 1 Data 0.5 0.5 0.5 500 100 300 50 500 100 300 50 500 100 300 50 Piston speed

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

6 @9 r MTS $0 #6 MY A' CY $1 !1 !2 !0 !8 w $4 t e $2 !5 $3 y!7 @8 !4 !

High Vacuum L Type Valve

Doc. no.XL*-OMI0011-E PRODUCT NAME High Vacuum L Type Valve MODEL/ Series XLD Series Doc. no.XL*-OMI0011-E Contents Safety Instructions 2 1. Product Specific Precautions 1 4 (Precautions on Design, Selection, Mounting, Piping, Wiring, Maintenance) 2. Product Specific Precautions 2 6 (Maintenance parts) 3. Specifications 8 4. Construction --10 5. Operation 11 6. Dimensions 12 7.

Turntable Cylinder Series MGT

U X PW VA H NL HB HA: T groove for hex. bolt XAH7depth XL DB 2-P GB GA GC 6+0.05depth 6 o PB K J G (Plug) 30 S PA + Stroke C + Stroke FA FB SB SA FC B + Stroke A + Stroke AA + Stroke 60 Turntable angle detection switch 2-P E (mm) Bore size (mm) FB FC G GA GB GC H HA HB J K L MM ML NN NL OA B C DA FA Standard stroke (mm) 77 96.5 116 63 80 100 20 25 30 10 12 15 39 45.5 55.5 103 121.5 145 M10

Vacuum Gripper

Plate A Plug (M-3P) (2 pcs.)

VXA21/22

LVH LVD Table (1) Port/Orifice Size Table (2) Bracket Part No. Model Orifice size (No.) 2 (3 mm) 3 (4.5 mm) 4 (6 mm) 5 (8 mm) 6 (10 mm) Part no.