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(Example) 2000mm lead wire length Cover Groove Pin 300mm 600mm 1000mm 1500mm 2000mm 2500mm 3000mm 5000mm Lever 6 10 15 20 25 30 50 DC indicator Socket DXT170-71-1 For DC SY114-5LOZ SY100-30-4A-20 For AC SY114-1LOZ SY100-30-1A-20 Connector Hook Lead wire 10 World Wide Support... Europe ENGLAND SMC Pneumatics (U.K.) Ltd.

READY POWER OUT VALVE OUTPUT DC24V OV COM SOL.a SOL.b +24V SIG OV 7 10 4 20-M3 x 0.5 65 72 A view 82 0.2 92 87.6 58.4 62 8 35.5 A 1.15-39

Power supply 20 3-phase 200 VAC (50 Hz) 3-phase 200 to 230 VAC (60 Hz) 40 3-phase 380 to 415 VAC (50/60 Hz) Specications Model HRSH090-Al-20-l HRSH090-Al-40-l Cooling method Air-cooled refrigeration Refrigerant R410A (HFC) (GWP1975) Refrigerant charge kg 1.32 Control method PID control Ambient temperature/humidity Note 1), 9) C/% 5 to 45/30 to 70% Circulating uid Note 2) Tap water, 15% Ethylene

8)2 to 10 stations: W = 47n + 15611 to 20 stations: W = 47n + 190

-531 8 Germany (49) 6103 4020 Sweden (46) 8-603 12 00 (420) 5-414 24611 Norway (47) 67 12 90 20 Austria (43) 2262-62 280 Italy (39) 02-927 11 Country Telephone Country Telephone SMC Corporation www.smcworld.com Kingdom Ireland (351) 1-403 9000 United SMC Europe www.smceu.com 12.European Contact List *SMC Corporation *Websites Republic Czech For the emission noise reduction, ground to the

Referential viscosity of various fluidat 20 OC Caution The viscosity of fluid is affected by operating conditions (temperature, transporting distance etc.)and fluctuation of ambient temperature. Viscosities up to 1000 mPa s can be used.

Writing registers.3-13 3.11.3 Function code: 16 Writing multiple registers .3-15 3.12 Negative response . 3-16 3.13 Register map . 3-18 HRS400-A-46 DOC1003626 Contents 3.13.1 Circulating fluid discharge temperature . 3-19 3.13.2 Circulating fluid flow rate . 3-19 3.13.3 Circulating fluid discharge pressure . 3-19 3.13.4 Circulating fluid electrical conductivity . 3-19 3.13.5 Status flag . 3-20

Writing registers .3-14 3.11.3 Function code16 Writing multiple registers .3-15 3.12 Negative response . 3-16 3.13 Register Map . 3-18 HRL Series HRX-OM-W069 Contents 3.13.1 Circulating fluid discharge temperature . 3-19 3.13.2 Circulating fluid electrical conductivity . 3-19 3.13.3 Circulating fluid discharge pressur . 3-19 3.13.4 Circulating fluid flow rate . 3-19 3.13.5 Status flag . 3-20

Option Rated voltage Voltage symbol Part no. 100 VAC 100V VK300-82-2-01 110 VAC 110V VK300-82-2-03 200 VAC 200V VK300-82-2-02 Note) When requiring a gauge different than that mentioned above, specify the model number. 220 VAC 220V VK300-82-2-04 Option is packed with it.

Example) 10-ARP30K-03BG-1RY Clean room compliant, copperfree, fluorine-free, silicone-free Clean room compliant Symbol Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without mounting option With bracket With set nut (For

Pipe thread type Nil Rc F G (with Rc-G conversion tting) N NPT (with Rc-NPT conversion tting) Power supply 20 3-phase 200 VAC (50 Hz) 3-phase 200 to 230 VAC (60 Hz) 40 3-phase 380 to 415 VAC (50/60 Hz) Specications Model HRS090-Al-20-l HRS090-Al-40-l Cooling method Air-cooled refrigeration Refrigerant R410A (HFC) Refrigerant charge kg 1.15 Control method PID control Ambient temperature1 C

Specications Power supply 20 3-phase 200 VAC (50 Hz) 3-phase 200 to 230 VAC (60 Hz) Model HRS100-Al-20-l HRS150-Al-20-l Cooling method Air-cooled refrigeration Refrigerant R410A (HFC) Refrigerant charge kg 1.3 1.65 Control method PID control Ambient temperature Note 1) C 5 to 45 Circulating uid Note 2) Tap water, 15% ethylene glycol aqueous solution, Deionized water Set temperature range

Example) 10-ARP30K-03BG-1RY Clean room compliant, copperfree, fluorine-free, silicone-free Clean room compliant Symbol Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without mounting option With bracket With set nut (For

Symbol Power supply 20 Single-phase 200 to 230 VAC (50/60 Hz) Specications There are different values from standard specications. Refer to page 15 for details.

Example) IS10E-30N03-6PRZ 0.1 0.3 0.2 0.4 MPa q V C Description Symbol Body size B 30 40 20 Left Right Nil Rc V V V V V V V V V w N F V Thread type NPT G + A D Port size 01 02 03 04 06 1/8 1/4 3/8 1/2 3/4 V V V V V V V V V V Filter regulator e V Port size A B C D E Applicable model Model Port size IS10E-2001 IS10E-2002 IS10E-2003 IS10E-3002 IS10E-3003 IS10E-3004 IS10E-4002 IS10E-4003

Special Application: 10-AF (Clean Series), Body Size: 20, Thread: Rc, Port Size: 02 [1/4 (Size 20, 30, 40)], Bracket: None, Bowl Type: 2 [Metal (Size 20 to 60)], Option: J [Drain Guide (Size 20 to 60)]

Special Application: 10-AF (Clean Series), Body Size: 20, Thread: N (NPT), Port Size: 02 [1/4 (Size 20, 30, 40)], Bracket: B (Bracket, Not Attached), Bowl Type: 2 [Metal (Size 20 to 60)], Option: JZ [J+Nameplate/Caution Plate for Bowl in Imperial Units (Size 20 to 60)]

Special Application: 10-AF (Clean Series), Body Size: 20, Thread: Rc, Port Size: 02 [1/4 (Size 20, 30, 40)], Bracket: None, Bowl Type: 6 [Nylon (Size 20 to 60)], Option: CJ [Bowl Guard+Drain Guide (Size 20)]

Special Application: 10-AF (Clean Series), Body Size: 20, Thread: N (NPT), Port Size: 02 [1/4 (Size 20, 30, 40)], Bracket: B (Bracket, Not Attached), Bowl Type: 6 [Nylon (Size 20 to 60)], Option: CJZ [CJ+Nameplate/Caution Plate for Bowl in Imperial Units (Size 20)]