Process Valve Series VNA

28 40 33 50 33 50 0.7 0.5 1 2 3 4 1.0 0.8 1.4 1.2 1 1 4 1 2.4 2.2 5.2 5.0 32 1 2 1 3.8 3.6 JIS Symbol 7.0 6.8 40 Valve type Operation N.C.

4-channel Flow Monitor ( compatible)

Normal output Reversed output -100No.PF-OMA1011-A Specifications Model PFG20# series PF2A5 PF3W5 PF2D5 Applicable flow sensor 10 50 11 21 51 04 20 40 11 25 04 20 40 Rated flow range 1 to 10 5 to 50 10 to 100 20 to 200 50 to 500 0.5 to 4 2 to 16 5 to 40 10 to 100 50 to 250 0.4 to 4 1.8 to 20 4 to 40 L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min 0.35 to 1.7 to

PFxx-OMY0005

Min. to Max. 1,000 L/min 10 to 1000 10 to 1050 Flow rate 2,000 L/min 20 to 2000 20 to 2100 Temperature 50 oC 0 to 50.0 -10.0 to 60.0 Pressure 1 MPa 0 to 1.000 -0.050 to 1.050 Accumulated flow 9,999,999,990 L 0 to 9,999,999,990 0 to 9,999,999,990 PD value Measured object Range Rated range Display/settable range A to B C to D 1,000 L/min 40 to 4000 40 to 4200 Flow rate 2,000 L/min 40 to 4000

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

Flow Characteristics (Conditions: Inlet pressure 0.7 MPa 2 position solenoid valve mounting) SJ3000 P port regulation (PA, B) SJ2000 P port regulation (PA, B) 0.8 0.8 0.7 0.7 0.6 0.6 Outlet pressure (MPa) Outlet pressure (MPa) 0.5 0.5 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 20 40 60 80 100 120 140 160 0 20 40 60 80 100 120 140 160 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Pneumatic circuit

VZ5000

Applicable base VV5Z5-40 VV5Z5-41 VV5Z5-42 Adapter plate ARBZ5000-00-P Gasket Individual SUP Spacer Assembly Round head combination screw DXT199-35-1A ( ) With spring washer Applicable base VV5Z5-40 VV5Z5-41 VV5Z5-42 Round head combination screw ( ) M3 x 47 With spring washer Gasket Individual SUP spacer Applicable base VV5Z5-40 VV5Z5-41 VV5Z5-42 Before using, refer to page 3-3-8.

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AW20 (K) to 40 (KJ !

Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

20 10 0 100 Suction flow [L/min(ANR)] Air consumption [L/min(ANR)] Vacuum pressure Vacuum pressure [kPa] Vacuum pressure [kPa] 80 60 Suction flow 40 20 Air consumption 0 0 10 20 30 40 Supply pressure [MPa] Suction flow [L/min(ANR)] ZHP-10 ZHP-10 (Supply pressure: 0.35 MPa) 100 90 80 70 60 50 40 30 20 10 0 0 0.1 0.2 0.3 0.4 0.5 0.6 100 90 80 70 60 50 40 30 20 10 0 100 Suction flow [L/min(

LG1H

Mitsubishi Electric Corporation Yaskawa Electric Corporation 02 03 04 05 05 5m Cable length 2m 3m 4m 5m Applicable cables Model Manufacturer part no.

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

Double acting single rod only 35, 40, 45, 50, 75, 100 5, 10, 15, 20, 25, 30 12, 16 5, 10, 15, 20, 25, 30 75, 100, 125, 150, 175, 200 75, 100, 125, 150, 175, 200, 250, 300 20 5, 10 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 25 Applicable Auto Switches Mounting Bracket Part No.

2/3 Port Valve for Various

LVC Refer to pages 17-3-40 and 17-3-41 for specifications and models.

One-touch Fittings

28.4 6 14 1/4 KQ2Y10-02GS 17 15.9 15.6 17 20.6 28.6 20.6 44.6 15.6 40 28.4 7.5 24.5 3/8 KQ2Y10-03GS 17 15.9 15.6 17 20.6 29.5 20.6 45.1 15.6 40 28.4 7.5 25 1/2 KQ2Y10-04GS 22 15.9 15.6 17 20.6 33.5 20.6 47.8 15.6 40 28.4 7.5 47.4 Connection thread (With sealant) 10 Release button dimensions 12 1/4 KQ2Y12-02GS 17 18.5 18.2 17 23 29.9 23 48.3 17 57.4 45.4 9 27.6 3/8 KQ2Y12-03GS 17 18.5

Digital Flow Switch ( compatible)

50 PF2MC7202 30 30 42 48 58 -99No.PF-OMZ0002-A Lead wire with M8 connector (ZS-40-A) M12-M8 conversion lead wire (ZS-40-M12M8-A) -100No.PF-OMZ0002-A Revision history A: Contents revised in several places.

Digital Flow Switch ( compatible)

50 PFMC7202 30 30 42 48 58 -95No.PF-OMY0002 Lead wire with M8 connector (ZS-40-A) M12-M8 conversion lead wire (ZS-40-M12M8-A) -96No.PF-OMY0002 Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer

Series VCS

For sonic range Where P1 = 0.10132 (P2 + 0.1013) Formula based on Cv factor Q = 98.9Cv (P1 + 0.1013) kg/h Formula based on effective area Q = 5.5S (P1 + 0.1013) kg/h 1 5 20 3 4 20 1 0 30 40 30 20 40 20 30 30 40 20 50 60 60 50 40 30 20 3 4 30 40 50 Figures inside [ ] indicate the saturated steam holding heat (kcal/kg). Figures inside ( ) indicate the saturation temperature (C).

Manifold Specifications

Applicable base VV5Z5-40 VV5Z5-41 VV5Z5-42 Adapter plate ARBZ5000-00-P Gasket Individual SUP Spacer Assembly Round head combination screw DXT199-35-1A ( ) With spring washer Applicable base VV5Z5-40 VV5Z5-41 VV5Z5-42 Round head combination screw ( ) M3 x 47 With spring washer Gasket Individual SUP spacer Applicable base VV5Z5-40 VV5Z5-41 VV5Z5-42 Before using, refer to page 3-3-8.

HRX-OM-W032

When the ambient temperature is out of the range between the temperatures set for AS.04 and AS.06, AL.03 or AL.04 may be generated at the same time when the product is turned ON.

Antibacterial Filter (5μm) Antibacterial Filter (0.1μm) Odor Removal Filter Bacteria Removal Filter

/8, 1/2 70 156.2 25.5 35.5 38.4 40 35.5 HF2-BFD40 1/4, 3/8, 1/2 70 180.9 25.5 35.5 38.4 40 35.5 16 Document No.AMX-OMZ0106 Revision history Rev.

VFR3000-OMJ0001

) 40) 40) 40) VFR3 VFR3 VFR3 VFR3 00,VFR3 00,VFR3 00,VFR3 00,VFR3 10 10 10 10 VFR3 VFR3 VFR3 VFR3 40 40 40 40 (N.C.)N.O.3 3 B A N.C.

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

Note2) ( ): Without sub-plate Note3) Model number for 5 port base mounted type without sub-plate is SYJA3 40. With Bracket Air operated valve part No. SYJA3 20-M3-F The mounting bracket for the 2 position double solenoid and 3 position is supplied unattached.

Series VC, Series VCS, Direct Operated 2 Port Solenoid Valve for Steam

For sonic range Where P1 = 0.10132 (P2 + 0.1013) Formula based on Cv factor Q = 98.9Cv (P1 + 0.1013) kg/h Formula based on effective area Q = 5.5S (P1 + 0.1013) kg/h 1 5 20 3 4 20 1 0 30 40 30 20 40 20 30 30 40 20 50 60 60 50 40 30 20 3 4 30 40 50 Figures inside [ ] indicate the saturated steam holding heat (kcal/kg). Figures inside ( ) indicate the saturation temperature (C).