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~:;:--l' VAC Vacuum load lock chamber Digital pressure switch Digital Pressure Switch Series ZSE6/ISE6 (For vacuum) (For positive pressure) Model 1~SV(S % F ,S, ) ".

HRX-OM-X010

Circulating Fluid: Fluorinated Fluid Operating Temperature: 20 deg C At maximum frequency operation by inverter HRZ008-L-F [ 6 0 H z ] 1.2 [ 6 0 H z ] 1.1 1.0 [Supply Port] [ 5 0 H z ] 0.9 Pressure [MPa] 0.8 [ 5 0 H z ] 0.7 0.6 0.5 0.4 0.3 [Return Port] 0.2 0.1 0.0 0 5 10 15 20 25 30 35 40 Flow Rate [L/min] Fig. 8-14 Pump Performance Curve ( HRZ008-L-F ) When circulating fluid flow rate lowers

Air cylinder

Construction 6 For CDJ2B6-*Z-B For CDJ2B10&16-*Z-B Fig. 4 Standard product: Double acting/single rod No.

3 Port Direct Operated Solenoid Valve Rubber Seal Series SY100 For details about certified products conforming to international standards, visit us at www.smcworld.com.

Add 1 g for AC. ( ): Without sub-plate. 4-3-4 Series SY100 How to Order Standard type (Cv0.008) Light/Surge voltage suppressor Nil S Z R U Without light/surge voltage suppressor With surge voltage suppressor With light/surge voltage suppressor With surge voltage suppressor (Non-polar type) With light/surge voltage suppressor (Non-polar type) For AC voltage valves there is no S option.

Series SY100 3 Port Solenoid Valve Rubber Seal

Note 1) At rated voltage 2.1-4 Series SY100 How to Order Light and surge voltage suppressor Standard (Cv0.008) Without light and surge voltage suppressor S Z R U With surge voltage suppressor With light and surge voltage suppressor With surge voltage suppressor (Non-polar-style) With light and surge voltage suppressor (Non-polar style) "S" type does not apply to AC model because rectifier

Stroke Reading Rodless Cylinder with Brake ML2B Series ø 25, ø 32, ø 40

D-X 709 ML2B Series Cylinder Specifications Bore size (mm) Fluid 25 32 40 Air Double acting Spring and pneumatic 0.1 to 0.8 MPa 0.3 to 0.5 MPa 1.2 MPa 0.75 MPa 5 to 60C (No freezing) 100 to 1500 mm/s (During the positioning 100 to 500 mm/s) Air cushion on both sides Non-lube 0 to 1.8 Action Cylinder Brake Operating pressure range Cylinder Brake Proof pressure Cylinder Brake Ambient and fluid

3 Position Cylinder Series RZQ

Load mass (kg) 40 50 40 32 E = 2 M + m 2 30 20 E = Kinetic energy (J) M = Mass of non-moving part (kg) m = Mass of moving part (kg) = Piston speed (m/s) 10 5 150 100 200 300 Model Selection Maximum speed (mm/s) RZQ Moving Part Mass Unit (kg) 2. Use the cylinder in applications in which the overrun will not cause any problem.

IDX-OM-V022

Refrigerant type and amount * Example: IDF60-20 Front Structure of the product number W R 0001 (2018 April) W R 0001 Year Symbol Note Month Symbol Note Serial No. 2018 2019 2020 2021 W Repeated from A to Z in alphabetical order 1 2 3 4 o Repeated from A to Z in alphabetical order, with o assigned for January and Z for December.

IDX-OM-V020

Front Structure of the product number W R 0001 (2018 April) W R 0001 Year Symbol Note Month Symbol Note Serial No. 2018 2019 2020 2021 W Repeated from A to Z in alphabetical order 1 2 3 4 o P Repeated from A to Z in alphabetical order, with o assigned for January and Z for December.

Digital Pressure Switch

(Pattern for 3 digits on the right) Characters Q, X, Z, /, or cannot be displayed. (Pattern for 1 digit on the left) Characters A to Z can be displayed (the same as the 3 digits on the right). Display OFF The Sub display is not displayed. -46No.PS-OMX1005 [F11] Display resolution setting This function is to change the pressure display resolution.

Compact Hydraulic Cylinder Double Acting/Single Rod Series CH
QB ø 20, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

U Connector type I 13 Connector auto switch 26 20 (22) D Z M E 10 (11) Approx. U Min. bending radius of lead wire 10 Auto switch K M L B + Stroke A + Stroke E J S Note) This drawings above show type D-A7 and D-A8 reed switches. The values shown inside ( ) are for switches other than types D-A7 and D-A8.

Compact Hydraulic Cylinder Double Acting/Double Rod Series CH
QWB ø 20, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

Z (Example) A80CZ 3 m . L (Example) A80CL None .

Clean Rodless Cylinder Series CYP

Operating direction: Right Operating direction: Left a b c d e f g Nil Reed switch L R Solid state switch S h Nil L R S Operating direction Left Right a b h g d c f e Note) Lead wire length symbols 0.5m .

Hydraulic Cylinders

Z (Example) F9NWZ Bore sizes 32 to 100 Lead wire length (m) Auto switch type Type Special function Load voltage Indicator light Electrical entry Wiring (output) 0.5 (Nil) 3 (L) 5 (Z) Electrical entry direction Applicable load DC AC Perpendicular Y69A Y7PV Y69B Y7NWV Y7PWV Y7BWV In-line Z76 Z73 Z80 Y59A Y7P Y59B Y7NW Y7PW Y7BW Y7BA 3-wire (NPN equiv.)

Pin Clamp Cylinder Series CKQ/CLKQ

(Example) Nil Lead wire length 0.5 m 3 m L 5 m Z None N Applicable for the connector type (D-C) only. Note 1) Applicable auto switch with 5 m lead wire (Z) Reed switch: D-A73(C)(H)/A80C Solid state switch: Manufactured upon receipt of order as standard.

Digital Flow Switch Series PFA For Air Series PFW For Water

in X, Y, Z directions, 2 hours each 490m/s in X, Y, Z directions, 3 times each 290g (without lead wire) 250g (without lead wire) Equivalent to IP65 3/8 1/2 1/8, 1/4 Note 1) For the type with unit switching function [The type without the unit switching function will have a fixed SI unit (l/min or l).]

Miniature Guide Rod Cylinder Series MGJ

Z (Example) F8NZ Auto switches marked with u are produced upon receipt of order.

PF-OMM0004_C

1090 2 -67No.PF-OMM0004-D (PVC ) PF3W711 PF3W721 (3 mPas(3 cP)) 1 10100 L/min 30250 L/min 7140 L/min(7 L/min 0) 20350 L/min(20 L/min 0) 7140 L/min 20350 L/min 1 L/min 2 L/min (50 ms) 1 L/pulse 070 () L/minL 3F.S. 3F.S. 2F.S. 2 5%F.S.(25 ) 3 3 9 L 4 1L NPN PNP 80 mA DC28 V NPN1 V (80 mA ) PNP1.5 V (80 mA ) 25 0.5 s/1 s/2 s 6 0.5 s/1 s/2 s 15 V 1 k 420 mA DC12 V 300

Rotary Cylinder Series MRQ

an isometric acceleration movement. 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 Rotation time (s/90) Moment of inertia0.0025 kgm2 Rotation time0.7 s/90, size 40 will be selected.

Body Size: 40, Thread: F (G), Port Size: 04 (1/2), Handle/Bonnet Material: B (Aluminum)