High Vacuum Angle Valve

0 Body Valve side exhaust Refer to the back of page 465 for Maintenance Parts. 457 A XLS Series Dimensions XLS/Without control power supply D Lead wire AWG20, O.D.: 2.63 mm E D F L J K 2 J K L 270 10 290 10 M J K J 33 25 C B 39 G G1/2 G1/2 C B B C A B C 6 to 9 G1/2 A DIN terminal (D) Terminal (T) Conduit (C) Grommet (G) XLS/With control power supply 41 26 J K 530 10 72 OPERATION V INPUT

Electric Actuators

24 66 to 400 110 104 LJ1H102NH-K 28 70 to 400 LJ1H202PA-K 34 76 to 500 112 106 LJ1H202NA-K 38 80 to 500 LJ1H102PB-K 26 68 to 600 145 110 104 LJ1H102NB-K 30 72 to 600 LJ1H202PF-K 32 74 to 250 112 106 LJ1H202NF-K 36 78 to 250 LJ1H303PA-K 40 82 to 500 114 108 LJ1H303NA-K 42 84 to 500 Page Standard stroke (mm) and Speed (mm/s) Nonstandard motor Model Standard motor Deflection 100 200 300

Air Cylinder Series CM2

Grease pack part no.: GR-S-010 (10 g) Nickel plated Nickel plated Technical data 151 Series CM2W Basic Style (B) CM2WB Bore size Stroke Effective thread length 2 x FL H1 H2 Width across flats B2 Width across flats B1 2 x P (Rc, NPT, G) 2 x NN G G MM I Width across flats KA Width across flats KA 2 x Eh8 NA D D AL A K AL A K F N H F N MM NA S + Stroke ZZ + 2 x Stroke H + Stroke l 8 8 Width

Hydraulic

d (H8) M A B C D G L F E K J H N Applicable cylinder type Bore size (mm) Spring pin P Order no.

Rotary Actuator/Vane Type

shaft length XA48 XA49 Change of short shaft length Y* Y* Y* XA49 XA50 Change of double shaft length Y* Y* XA50 XA51 Change of long shaft length K,T* J* K,T* J* K* XA51 XA52 Change of short shaft length K* K* K* K* K* K* K* K* XA52 XA53 Change of double shaft length K* K* K* K* K* K* XA53 XA55 Change of short shaft length J* J* J* J* J* J* XA55 XA57 Change of double shaft length

5-Port Solenoid Valve

K Round head combination screw (Drop prevention type*1) !

Table of Contents

40 MK(2) Angle coefficient (k): k = [up to 45 (= )] = 1, [up to 60] = 0.9, [up to 75] = 0.8, [up to 90] = 0.7 Lo: Distance from mounting surface to load center of gravity (cm) 20 36 2.9 + Lo 10 5.25 2.2 + Lo 15 17.5 2.7 + Lo Bore size (mm) RS Q G Allowable load weight WA (kg) RS H A 5.

NCQ2/CQ2

UA C d1 d2 H K L UT Weight (g) Part no.

Compact Cylinder

D D 25 M E 2.5 through-hole 2 x 4 x OA thread depth RA K 4 pcs.

Pin Clamp Cylinder Series C(L)KQG/C(L)KQP

CLKQ K G P G P Table 2.

Aluminum High Vacuum Angle Valve

0 Body Valve side exhaust Refer to the back of page 465 for Maintenance Parts. 457 XLS Series Dimensions XLS/Without control power supply D E D F L J K 2 J K L 270 10 290 10 M J K J 33 25 C B 39 G G1/2 G1/2 C B B C A B C 6 to 9 G1/2 A DIN terminal (D) Terminal (T) Conduit (C) Grommet (G) XLS/With control power supply 41 26 J K 530 10 72 OPERATION V INPUT C B L (mm) Grommet (G) A B C

CA2

C0.5 file chamfer R sphere TP R sphere H W1 T H H Symbol: A12 Symbol: A13 Symbol: A14 Symbol: A15 Symbol: A16 Symbol: A17 Symbol: A18 Symbol: A19 MM 30 MM 30 MM 30 H A H A H A MM 30 30 L RD C B A H A L K H W MM DA 30 MM DA 30 MM MM AL H LB K A AL H AL L K H L A H Symbol: A28 Symbol: A29 Symbol: A30 30 DA 30 30 MM L W MM W A L H AL A H A T T MM H 65 Series CA2 Made to Order Specifications

AR20-B to AR60-B

AR20K-B to AR60K-B Series Construction AR10-A AR20(K)-B/AR25(K)-B AC AF+AR+AL AW+AL AF+AR AF+AFM+AR AW+AFM AF Attachment AFM / AFD AR AL AW t e q IN OUT t e q r IN OUT w r w AR30(K)-B/AR40(K)-B q t AR50(K)-B/AR60(K)-B e IN OUT q t r w e IN OUT r w Component Parts No.

Table of Contents

(4 locations) (Except 10) E D1 B D2 Model A End boss assembly 0.016 0.043 MHZJ2-10S C K 7 12f8 40 11 15 D2 0.016 0.043 MHZJ2-16S C K 10 16f8 43.5 15 20 0.020 0.053 MHZJ2-20S C K 12 20f8 51.7 19 22 D1 0.020 0.053 MHZJ2-25S C K 15 25f8 61.3 24 25 Other dimensions and specifications correspond to the standard type.

Series KDM Rectangular Multi-connector

D K 8 8 0 P 0 1 M D K 9 0 S 0 1 M D K KDM20 8 / 1 1 0 P 0 2 M D K 1 0 S 0 2 M D K 2 . 3 3 2 P 0 2 M D K 1 0 S 0 2 M D K e u l B 2 3 / 5 3 0 P 0 2 M D K 3 0 S 0 2 M D K 4 4 0 P 0 2 M D K 3 0 S 0 2 M D K 0 2 d e R 4 / 1 7 0 P 0 2 M D K 7 0 S 0 2 M D K 6 6 0 P 0 2 M D K 7 0 S 0 2 M D K 6 1 / 5 9 0 P 0 2 M D K 9 0 S 0 2 M D K 8 8 0 P 0 2 M D K 9 0 S 0 2 M D K Applicable Tube Material

CRBU

Applicable shaft configurations shafts K, T Applicable shaft configurations Shaft J, K, T (mm) L2max W L1max X (mm) (mm) Shaft form 15 20 30 Size J K T J K T J K T J K T Size Size Thread Thread Shaft form 15 20 30 6.5 to 14 8 to 18 9 to 20 11.5 to 22 10 15 20 30 L11 L11 L11 L12 X3 X4 X4.5 X5 0.5 to 2 0.5 to 2.5 0.5 to 3 0.5 to 4 K T K T K T M3 X 0.5 M4 X 0.7 M5 X 0.8 2.5 2.5 3.3 2.5 3.3

Made to Order

FL1 (A) F1 K (mm) (H) A F1 H FL1 16.5 K 3 Bore size Stroke range 24 32 40 51 21 Up to 1000 22 18 54.5 3 22.5 Up to 1000 : Same as the standard model. 1896

Table of Contents

K-F-X60 LJ1H202NAStroke K-F-X60 Without motor Specifications Combinations other than the above cannot be manufactured.

Air Cylinder Series CA2

72 215 80 65 21.5 81 224 100 Long stroke (a stroke of 1001 mm or larger) 2 x P (Rc, NPT, G) G G FT With rod boot 2 x cushion valve Width across flats KA MM E RY FB FY D e C H1 f l 10.2 B1 C B h + l AL RT N N K A ZZ + l + Stroke M S + Stroke H FX FZ ZZ + Stroke (mm) Bore size (mm) Stroke range (mm) A AL FB B B1 C D E FD FT FX FY FZ G H1 J K KA 1001 to 1200 50 35 32 88 70 27 52 20 40 9.0 20

Rotary Actuator

shaft length Change of long shaft length Change of short shaft length Change of double shaft length Change of short shaft length Change of double shaft length XA44 $ $ XA45 $ $ $ $ XA46 $ XA47 $ $ $ $ XA48 $ $ $ $ $ $ Y Y Y Y Y XA49 $ $ $ XA50 $ $ K,T K K J J K K K K,T K K XA51 $ $ $ $ $ $ $ $ K K K K K K K K XA52 $ $ $ $ $ XA53 $ $ J J J J J J J J J J J J J J J J J XA55 $ $ $ J XA57 $ $