Main Line Filter

OPERATING PRESSURE 0.05MPa (With auto drain : 0.1MPa) AMBIENT TEMPERATURE 5 to 60 FLUID TEMPERATURE 5 to 60 FLOW RATE (m3/min) 12.4 23.7 30 45 CAPACITY (m3) 0.023 0.023 0.038 0.054 WEIGHT (kg) 50 50 72 88 3m (FILTRATION EFFICIENCY 99) for FILTRATION RATING Symbol Nil FILTRATION RATING 0.3m (FILTRATION EFFICIENCY 99) for FILTRATION RATING Symbol X13 ELEMENT LIFE One year or when pressure

PSxx-OMF0005CN

0.50.6Nm 0.50.6Nm + M3 0.50.6Nm A-A () -9No.PS-OMF0005CN-E * 30 * 1 2 3 O 4 (0.40.5 Nm) (AR ) * 0.020.2 MPa 0.2 MPa 0.2 MPa ([]) ([] ) ()60mm -10No.PS-OMF0005CN-E N P R 1 IISA2 C S L 6 5 D E 2 IISA2 *1 16 1~6 C +2 *2 *A V 2 E2 (MPa) 0.2MPa 0.4MPa G2 (MPa) *P2 (MPapsi) SR *Z2 (psi) SL E4 (MPa) PR G4 (MPa) PL *P4 (MPapsi) * *Z4 (psi) * *1psi *21/8 B D DIN + 2 C 1 AC100V

SY3000-OMH0002

0.8Nm SY7000 M4 1.4Nm SY9000 M3 0.8Nm 13 No.SY3000-OMH0002 SY series 1) P 2) P 3) (2 ) 1 0.5MP 4) 5) AB (P AB )0.25MPa (PB PA)(Cv ) 14 No.SY3000-OMH0002 () (E) () () (PE) 15 No.SY3000-OMH0002 No. 1(ISO VG 32) (R) E 16 No.SY3000-OMH0002

SI unit for CC-Link

Applicable solenoid valve series Representative series Applicable series SQ series SQ1000, 2000 series SZ series SZ3000 series -18No.EX-OME0011-H Dimensions -19No.EX-OME0011-H Revision history B: New format C: Error correction D: Add the precautions and change into the latest format E: Terminal screw change F: Modified errors in text.

EXxx-OMP0004CN

SI () SI SI SI () ()SI SI SI IP67 M12/M8 SI ( ) SI SI ()SI CE -6No.EX-OMP0004CN-I SI SI PLC PLC SI IP -7No.EX-OMP0004CN-I EX260-SMJ 1 1 M12 32 /PNP() 2 M12 32 /NPN() 3 M12 16 /PNP() 4 M12 16 /NPN() MJ CC-Link -8No.EX-OMP0004CN-I 1 (BUS OUT) CC-Link () 1 (M12 5 A code) 2 (BUS IN) CC-Link (IN ) 1 (M12 4 A code) 3 SI 1 (M12 5 B code) 4 (M3

Industrial Filters Replacement Procedure

Pressure Control Equipment (c) Good condition (d) Bad condition (e) Good condition (f) Bad condition Fig. 5 Tightening condition 7. Adjustment Method for Mounting Other Elements 7-1.

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

16 20 25 Female threads Male threads Fluid Proof pressure Maximum operating pressure Minimum operating pressure Air 1.5MPa 1.0MPa Rod end threads Rod end thread tolerance Stroke tolerance Vacuum port, relief port Ambient and fluid temperature +1.0 0 0.03MPa 0.025MPa Without auto switch: 10 to 70C With auto switch: 10 to 60C Piston speed Piston rod diameter 1 to 200mm/s 0.5 to 200mm/s 6 M3

Stopper Cylinder Adjustable Mounting Height Type Series RSG

Correct mounting Incorrect mounting Auto switch Auto switch mounting screw M3 x 0.5 x 14l Auto switch mounting band (with brackets) 1. Wrap the mounting band around the cylinder tube, and place it in the approximate auto switch mounting position. 2.

Multi-Channel Controller Series PSE200, Pressure Sensor Series PSE530

A Mounting screws (M3 x 8L) (accessory) Waterproof seal (accessory) Panel mount adapter Power supply/Output connection cable ZS-26-A Panel Front protective cover + Panel mount B Mounting screws (M3 x 8L) Front protective cover (accessory) Waterproof seal (accessory) Panel mount adapter Panel Options When only optional parts are required, order with the part numbers listed below.

Peltier-type Chiller Thermo-con/ Compact Type

Circulating fluid : Tap water Density : 1 x 103 kg/m3 Specific heat C : 4.2 x 103 J/(kgK) Refer to the information shown below for the typical physical property values by circulating fluid. Water bath Q = T x V x x C h x 60 x 1000 10 x 2 x 1 x 103 x 4.2 x 103 20C V = 15 x 60 x 1000 After 15 min, = 93.3 W cool 30C down to 20C.

In-line Air Filter

ZFC1 ZFC3 ZFC5 ZFC7 1 2 V 2 3.2 V V 3 4 V V 4 6 V V 5 8 V 6 10 V 7 12 V Option Nil None B With bracket Inch size A 1/8" V V B 5/32" V V D 1/4" V V E 5/16" V F 3/8" V Max. Operating Pressure and Operating Temperature Specifications Model ZFC1l ZFC3l ZFC5l ZFC7l Max. operating pressure [MPa] 1.0 Port size (Applicable tubing O.D.)

Series: KQ2, Model: F (Female Connector), Applicable Tubing O.D.: Ø4, Port Size/Applicable Tubing O.D.: M3 (Screw Connection M3 X 0.5), Thread Material/Surface Treatment: A (Brass)

Series: KQ2, Model: F (Female Connector), Applicable Tubing O.D.: 23 (Ø3.2), Port Size/Applicable Tubing O.D.: M3 (Screw Connection M3 X 0.5), Thread Material/Surface Treatment: A (Brass)

Series: KQ2, Model: F (Female Connector), Applicable Tubing O.D.: 23 (Ø3.2), Port Size/Applicable Tubing O.D.: M3 (Screw Connection M3 X 0.5), Thread Material/Surface Treatment: N (Brass + Electroless Nickel Plated)

Series: KQ2, Model: F (Female Connector), Applicable Tubing O.D.: Ø4, Port Size/Applicable Tubing O.D.: M3 (Screw Connection M3 X 0.5), Thread Material/Surface Treatment: N (Brass + Electroless Nickel Plated)

Series: KQ2, Model: F (Female Connector), Applicable Tubing O.D.: Ø4, Port Size/Applicable Tubing O.D.: M3 (Screw Connection M3 X 0.5), Thread Material/Surface Treatment: A (Brass), Sealant: None, Release Button: 1 (Oval Type)

HRX-OM-W058

Model number: HRS0-F-0 The transition connector from Rc to G is enclosed as an accessory. For G piping, be sure to use this connector.

HRX-OM-X027

Model number: HRS0-F-0 The transition connector from Rc to G is enclosed as an accessory. For G piping, be sure to use this connector.

HRX-OM-W038

Model number: HRS040-F-20 The transition connector from Rc to G is enclosed as an accessory. For G piping, be sure to use this connector.

HRX-OM-O021

Model number: HRS050-F-20 The transition connector from Rc to G is enclosed as an accessory. For G piping, be sure to use this connector.