3 Port Air Operated Valve Series SYJA300 1

M5 x 0.8 Body side VZA222-P-M5 M5 x 0.8 0.13 0.35 0.52 0.15 0.43 0.60 N.O. M5 x 0.8 Body side VZA214-1P-01 M5 x 0.8 0.22 0.35 0.85 0.25 0.30 1.0 N.C. Rc 1/8 Sub-plate side VZA214-2P-01 M5 x 0.8 0.22 0.35 0.85 0.25 0.30 1.0 N.C. Rc 1/8 Body side VZA224-1P-01 M5 x 0.8 0.22 0.35 0.85 0.21 0.25 0.90 N.O. Rc 1/8 Sub-plate side VZA224-2P-01 M5 x 0.8 0.22 0.35 0.85 0.21 0.25 0.90 N.O.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

: One-touch fitting for 4 C6: One-touch fitting for 6 10 10 (2) M5: M5 thread 53 13.8 6 A 2 10 16 4.3 2-3.2 mounting hole 24.5 7.8 (For C3, C4, C6) (For M5: 5.7) Manual override Cover dia. 1.6 Cross section 0.34 mm2 (Lead wire length) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com

Antistatic One-touch Fittings Series KA

M5, M6 M5, M6 KAL23-M5 15 9.6 16 15.5 M5 0.8 M6 1.0 7 6 8 8 15.5 19.5 21 3.4 2.9 8 4 5 3.2 1 8 KAL23-M6 KAL23-U01 10 17.5 10 KAL04-M5 15.5 M5 0.8 M6 1.0 16 8 3.5 3.5 8 KAL04-M6 16 10.4 16 18 4 1 8 KAL04-U01 20 20.5 4.2 4.2 8 14 10 10 1 4 KAL04-U02 22 21.5 14 KAL06-M5 16 M5 0.8 M6 1.0 9 5 6 18 8 3.5 3.5 8 KAL06-M6 16.5 Uni thread 17 1 8 KAL06-U01 3 8 KAL06-U03 24 23 21.5 20 14 12.8 6 10 23.5

0.55

Tightening Torque of Mounting Screw Symbol 1 2 VP344 1/8 1/4 VP544 1/4 3/8 VP744 3/8 1/2 9 Gasket HNBR VP700-217-1 VP300-217-1 VP500-217-1 VP300-202-l VP700-202-l VP500-202-l 10 Sub-plate Aluminum die-casted M3: 0.8 Nm M4: 1.4 Nm M5: 2.9 Nm Hexagon socket head bolt (1 pc.)

SMC Pneumatic Clean Series

Nil S n No D With auto switch (Built-in magnet) Model Cushion Action Standard stroke (mm) Auto Switch Mounting Tube Bore size (mm) 6 10 16 6 10 16 Port size Lubrication Model Rubber Air 10-/21-CJ26 10-/21-CJ210 10-/21-CJ216 11-/22-CJ26 11-/22-CJ210 11-/22-CJ216 Relief type Vacuum suction type 15, 30, 45, 60 15, 30, 45, 60, 75, 100, 125, 150 Band mounting only Except 6 M5 x 0.8 15, 30,

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

ASS Dimensions ASR AS220M-01 02 AS120M ASF H 8 (Hexagon width across flats) L1 T2 24.8 (MAX. 29.8) 28.2 (MAX. 33.2) M5 x 0.8 L2 A L3 D1 9 10.3 10 M5 x 0.8 10-32 UNF D2 T1 9 Dimensions A L2 L3 T1 T2 H L1 D1 D2 Model Min. Min. Max. Max.

KA

Soft nylon Polyurethane KAT23-M5 15 9.6 16 15.5 M5 X 0.8 M6 X 1.0 8 8 8 15.5 19.5 21 3.4 2.9 9 3.2 17.5 1 8 KAT23-M6 KAT23-U01 10 10 15.5 KAT04-M5 M5 X 0.8 M6 X 1.0 8 17 6 4.3 4.3 8 KAT04-M6 16 10.4 16 18 4 1 8 20 KAT04-U01 6.0 6.0 9 14 10 10 21.5 1 4 KAT04-U02 22 15 16 KAT06-M5 M5 X 0.8 M6 X 1.0 18 4.3 4.3 8 7 8 KAT06-M6 16.5 17 1 8 20 3 8 KAT06-U03 24 23 21.5 14 12.8 KAT06-U01 10 10 6 23.5

Pin Cylinders Series CJP2/CJP

I-P006A I-P010A I-P016A Y-P006A Y-P010A Y-P016A 5 +0.040 0 0.020 0.045 +0.040 0 3 3 3 6 9 12 3.5 M3 x 0.5 3 5 4 5 6 5 6 12 3.5 M3 x 0.5 3 5 4 5 6 6.5 +0.048 0 0.030 0.060 +0.048 0 5 5 5 10 13.6 16 5.5 M4 x 0.7 5 8 6.3 7 10 6.5 10 16 5.5 M4 x 0.7 5 8 6.3 7 10 7 +0.048 0 0.030 0.060 +0.048 0 6 6 6 12 15.8 19 7 M5 x 0.8 6 10 7.8 9 16 7 12 19 7 M5 x 0.8 6 10 7.8 9 16 Knuckle pin Trunnion pin

LX

/Without Motor Brake Series LXS Dimensions/LXSH2BD Scale: 25% F G x I 5H9 +0.030 0 depth 5 +0.030 0 depth 5 D-5.1 through 5H9 10 7.5 E-M5 thread depth 10 Refer to Cross section C-C, bottom view. 6 LJ1 LG1 LC1 LX LC6D/LC6C Switches 38 76 46 Motor wire (300mm) Photo micro sensor wire (300mm) 2-M2.5 thread depth 4 3 10 8 J 25 25 27 J x K Stroke + 220 10 13 15 Stroke + 127 3.5 (5) 0.5 46.5 2-

3 Port Solenoid Valve Metal Seal Series VZ200 1

x 0.8 (Pilot EXH) DIN terminal: VZ4 5-D(Z)L plug connector: VZ4 5-L(Z)01 02 1 2 01 02 1 2 (Lead wire length) 300 With light/surge voltage suppressor Applicable code O.D. 3.5 to 7 Pg7 With light/surge voltage suppressor M5 x 0.8 (Pilot EXH) 83 75.8 53.5 01 02 1 2 M plug connector: VZ4 5-M(Z)23 300 15 10 10 With light/surge voltage suppressor (Lead wire length) 3-Rc1/8, 1/4 M5 x 0.8 Max.10

S Couplers Series KK/KKH/KK13

KK2S-23H -04H -06H KK3S-04H -06H -08H -10H KK4S-06H -08H -10H -12H KK6S-12H -16H KK2P-23H -04H -06H KK3P-04H -06H -08H -10H KK4P-06H -08H -10H -12H KK6P-12H -16H 3.2 4 6 4 6 8 10 6 8 10 12 12 16 3.2 4 6 4 6 8 10 6 8 10 12 12 16 M5 M5 1/8 1/8 1/4 1/4 1/2 1/2 Elbow type with One-touch fitting Elbow type with One-touch fitting Body size Applicable tubing O.D. mm Part no.

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

N7 10-SZ360-85 3 position 4 position 81 69 75 2 position 10-SZ360--M5 M5 x 0.8 79 3 position 75 4 position 382 Cassette Type Manifold 10-SZ3000 Manifold Option SUP block disk Blanking block assembly SZ3000-55-1A By installing a SUP block disk in the pressure supply passage of a manifold valve, it is possible to supply two or more different high and low pressures to one manifold.

Vacuum Pad: Ball Joint Type, Series ZPT/ZPR

Standard Specifications Weight Table (g) Pad diameter (mm) Vacuum entry (One-Touch fitting) Lateral Vacuum entry direction Mounting female thread 6 tube 4 tube 8 tube Connection Vacuum entry Connection M5 x 0.8 19 18 Female thread One-Touch fitting 10 to 16 M5 x 0.8 22 23 4 tube M5 x 0.8 20 to 32 10 to 16 M8 x 1.25 21 22 6 tube Pad diameter M5 x 0.8 58 60 6 tube M5 x 0.8 40, 50 (mm) M8

4 Port Solenoid Valve Series VQD1000

(Initial value) 3 1 (R) (P) Flow characteristics 14/2(PA/B) 4/25/3(A/BEA/EB) Flow characteristics Port size C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv Valve model Body ported 10-VQD1121-L M-M5 10-VQD1121 -L M-M5 10-VQD1151-L M-M5 10-VQD1151W-L M-M5 0.22 0.27 0.22 0.27 0.16 0.24 0.10 0.25 0.05 0.07 0.05 0.07 0.19 0.28 0.22 0.27 0.31 0.28 0.31 0.28 0.05 0.07 0.06 0.07 Base mounted (With sub-plate

Electric Actuator

[mm] Step motor Servo motor Stroke range (mm) C B D EH EV H J K L M O1 R S T U Size A 10 to 100 166.3 167 92 16 16 34 34.3 M5 x 0.8 18 14 10.5 25.5 M4 x 0.7 7 35 35.5 0.5 10 101 to 300 186.3 187 112 15 to 100 195.4 191.6 115.5 25 M8 x 1.25 M5 x 0.8 20 44 45.5 24 17 14.5 34 8 45 46.5 1.5 13 101 to 400 220.4 216.6 140.5 20 to 100 216.9 128 32 M8 x 1.25 M6 x 1 25 51 56.5 31 22 18.5 40 10 60

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

Aluminum die cast Body q Stainless steel Spool/Sleeve Metal seal w Aluminum/NBR Spool valve Rubber seal Resin Piston e Pilot valve r 2.10-7 VQZ100/200/300 Body Ported Dimensions: VQZ100 Valve single unit C6: One-touch fittings for 6 C4: One-touch fittings for 4 C3: One-touch fittings for 3.2 2-C3, C4, C6, M5 Grommet (G): VQZ115-lGl-C3, C4, C6, M5-PR 10 10 (2) M5: M5 thread 53 13.8 6 A 2

ITV

Right angle type cable connector 3 m 52 10 (33) Straight type cable connector 3 m 52 12.5 Setting part 10 M12 x 1 Cable connection thread (Plug type) 5.5 8 111 11 Digital pressure display M5 x 0.8 Solenoid valve EXH Breathing M4 x 0.7 depth 8 F.G.

7.4

31.2 31.2 7 11.5 10 M5 x 0.8 2(B) port With plug connector/light 5.7 S07 5(R)-mM(O)-M5 2 A B C 8.4 18.6 19.5 M5 x 0.8 4(A) port M3 x 0.5 External pilot port (External pilot type only) 748 Base Mounted Single Unit S0700 Series Plug Lead Type Dimensions 3-Position Closed Center Grommet: S0735(R)-mG-M5 M5 x 0.8 1(P) port 21.2 SJ 11.4 5.2 7.7 M5 x 0.8 3(R) port SY 3 1 SY S0700 S0700 S0700 Manual

LJ1H

20 12 10 20 20 20 40 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 2 Horizontal 8 25 25 18 Standard motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room

Air Cylinder Series CM2

0.8 8 M4 x 0.7 M6 x 1.0 10 M5 x 0.8 M8 x 1.25 12 M6 x 1.0 M10 x 1.25 M5 x 0.8 Female thread Male thread Rod end thread Note 1) Only 5 stroke comes with M5 x 0.8 in the case of no auto switch on 32. +1.0 0 mm Stroke tolerance Port size Vacuum port, Relief port M5 x 0.8 M5 x 0.8 1162 Series 10-, 11-CM2X Microspeed Cylinder for Clean Room 10-,11CM2X Series How to Order Clean Series 10 11 Relief