MB1 Bore size (mm) Part No. d l Cotter pin d m H B Dd9 L C D (Cut through) Note 1) 3 x 18l 4 x 25l 4 x 35l 10 14 22 32, 40 50, 63 80, 100 32 40 50, 63 80 100 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 36 51 72 4 4.5 5 6 8 11 13 16 17 22 27 32 41 44 60 82 19.6 25.4 31.2 37.0 47.3 16.5 21 26 31 39 CD-M03 CD-M05 CD-M08 NT-03 NT-04 NT-05 NT-08 NT-10 0.040 0.076 0.050 0.093 0.065 0.117 3 4
(SI unit side) Valve manifold Output No. 1 3 5 7 9 17 29 31 Solenoid on side B Accessories Bit No. 1 3 5 7 1 1 5 7 Replacement of the SI unit Remove the M3 hexagon screw from the SI unit and release the SI unit from the valve manifold. Replace the SI unit.
(M3 thread) (It is recommended to ground with resistance of 100 ohms or less) Accessories Hexagon socket head cap screw (M3 x 30): 2 pcs. Connects the SI unit and the valve manifold. Seal cap: 1 pc.
(M3 screw) 5 Output connector Output signal interface for valve manifold. 6 LED display LED display to indicate the status of the SI unit. 2 7 Mounting hole Mounting hole for connection to the valve manifold. Accessories Hexagon socket head cap screw 2 pcs. M3 x 30 screw for connection to the valve manifold.
(M3 screw) 5 Output connector Output signal interface for valve manifold. 6 LED and switch LED display to indicate the status of the SI unit 2 7 Mounting hole Mounting hole for connection to the valve manifold. Accessories Hexagon socket head cap screw 2 pcs. M3 x 30 screw for connection to the valve manifold.
(M3 thread) (It is recommended to ground with resistance of 100 ohms or less) Accessories Hexagon socket head cap screw (M3 x 30): 2 pcs. Connects the SI unit and the valve manifold. Seal cap: 1 pc.
Part number Description Note ZS-40-A Lead wire with M8 connector Length: 3 m ZS-42-A Bracket With mounting screws for PFMC7501/7102 (M3 x 5, 2 pcs.)
BUS IN BUS OUT DRAIN 1 1 1 5 4 3 2 5 4 3 2 V+ 2 2 2 0 0 0 Bit No. 6 4 6 4 3 VSolenoid on side A Output No. 0 2 4 6 8 16 28 30 CAN_H 4 Side D 5 CAN_L (SI unit side) To obtain more detailed information about operating this product, please refer to the SMC website (URL http://www.smcworld.com) or contact SMC directly. 4 5 Solenoid on side B 1 3 5 7 9 17 29 31 Output No.
M3 hexagon screw Tightening torque 0.6 Nm Troubleshooting If using the product in an interlocking circuit: Provide a double interlocking system, for example a mechanical system. Check the product regularly for proper operation.
Series ZSE60F/ISE60 Confirmation of atmospheric pressure of load lock Special fitting types are used in semiconductor production equipment (metal gasket seal fittings) Leak rate: 1 x 10 -10Pa. m3/s ZSE/ ISE60(F)-A2 ZSE/ ISE60(F)-B2 URJ 1/ 4 TSJ 1/ 4 ZSE50F ISE50 ZSE60F ISE60 Model Standard thread type Special fittings for the semiconductor industry (metal gasket seal fittings) Variations
With One-touch fitting Port size M3 M3 x 0.5 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 Thread type M5 Metric thread (M3, M5) Unified thread (10-32 UNF) R NPT AS U10/32 01 02 03 04 Nil ASP N ASN Needle Valve/Flow Characteristics AQ AS1201F-M3, AS1211F-M3 AS1301F-M3, AS1311F-M3 AS1201F-M5-02, AS1211F-M5-02 AS1201F-M5, AS1211F-M5 AS1301F-M5, AS1311F-M5 AS2201F-01, AS2211F-01 AS2301F-01, AS2311F-01
Metric thread (M3, M5) Unified thread (10-32 UNF) R NPT M3 x 0.5 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 ASN M5 Nil U10/32 01 02 03 04 AQ N ASV AK Needle Valve/Flow Characteristics Note) The flow characteristics are representative values.
1.25-3 6.5mm M3 :0.63Nm M3 :0.631Nm IDF Series 2-2 2 3 IDX-OM-W026 2 2-3 ()2 2 2-2-3 4 IDF Series 2-3 2 4 IDX-OM-W026 3 / 3 / 3-1 INOUT 3-2 ON INOUT 5 ONOFF 0.15MPa N.O.IN IDF Series 3-1 3 1 IDX-OM-W026 3 / 3-3 OFF 3-4 3 3 5 3-5 OFF 3-6 24H IDF Series 3-3 3 2 IDX-OM-W026 4 4 4-1 5 310 4-2 4-2-1 () 4-2-2 1.
Clip Approx. 80 to 90 or b Auto switch mounting band Fig. 1-5 Fig. 1-4 a Switch holder Enlarged view of clip M2.5 set screw (Accessory) e i Auto switch r Reinforcing plates w q y u c M3 set screw 5.1 or more 0 to 5 t Reinforcing plates M3 set screw Nut M3 set screw Nut The end of the set screw is protruding.
How to Order Sub-plates 04 P VQ5000 Electrical entry Port size Replacement of pilot valve assembly (Voltage) Refer to pages 2-6-40 to 2-6-41 for pilot valve assembly part numbers. Refer to page 2-6-3 for replacement method. 04 Rc 1/2 Porting specifications P S Plug-in conduit terminal Plug lead Note1) For bottom ported, port size is Rc 1/2.
38 31 40 28.5 25.5 31.5 25.5 34 25.5 36.5 27.5 38.5 27.5 71.5 27.5 81.5 27.5 29.5 26 30 26 39 25.5 42 33 50 33.5 31 36 31 38.5 31 41 34 43.5 34.5 77 87 33.5 31 34.5 31 43 31 46.5 39 63 38.5 36 40.5 36 43 36 46 39 48.5 39.5 83.5 93.5 39 36 40 36 48 36 51.5 44 80 46.5 45 49 45 52 45 52.5 46.5 55 46.5 92.5 103 47.5 45 48.5 45 56.5 45 58 51.5 100 54 53.5 57 53.5 59.5 53.5 59.5 55 62 55
Contents 30 Damper B 20 Urethane CG1N20-PS 40 is the same as damper A 31 Snap ring 25 Stainless steel CG1N25-PS 32 A set of above Nos. Wear ring 32 Resin CG1N32-PS 33 37, 39, 40 Rod end nut 40 Rolled steel CG1N40-PS Nickel plated 34 BC element Bronze 35 Since the lock section for Series CNG is normally replaced as a unit, replacement seal kits are for the cylinder section only.
(45) 31 (45) 30 24.5 27 27.5 29 24 27 25.5 27.5 20 30 27 27 27.5 29 24 29.5 25.5 30 25 31 30.5 28 28.5 30 25 33 26.5 33.5 32 35.5 35 32.5 33 34.5 29.5 37.5 31 38 40 43 40.5 40 40.5 42 37 43 38.5 43.5 50 43 47.5 40 40.5 42 37 50 38.5 50.5 63 49.5 46.5 48 59 80 49.5 46.5 48 69.5 100 ( ): Long stroke, bore size 20 to 100, Double rod Auto Switch Mounting Bracket and Surface St: Stroke
(40) 1.06 (27\ 1.42 (36) 1.26 432) 1.20 '30.51 ) 2 4 (6) Millimelers in Parentheses 1-N015 151-N01-35 "(@ NVM120-N01-36 130-N01-36 F O , F 3 31 lbs (1 5kg.)
Contents 30 Damper B 20 Urethane CG1N20-PS 40 is the same as damper A 31 Snap ring 25 Stainless steel CG1N25-PS 32 A set of above Nos. Wear ring 32 Resin CG1N32-PS 33 37, 39, 40 Rod end nut 40 Rolled steel CG1N40-PS Nickel plated 34 BC element Bronze 35 Since the lock section for Series CNG is normally replaced as a unit, replacement seal kits are for the cylinder section only.