Fluoropolymer Piping Equipment

Body Needle V seal Lock nut Adjustment handle Insert bushing Nut Collar A 1 2 3 4 5 6 7 8 PFA PCTFE PTFE PVDF PVDF PFA PFA PFA Body class 2 y u y u B Dimensions A (B) (max.S) D H Port A 2 x G SMC (J) SMC C E F K Port B E A B C D E F G H J K S Model 48 60 72 LVN20 LVN30 LVN40 24 30 36 12 18 22 88 110 124 34.5 43 52 6 9 11 4 5 6 14 25 25 20 26 33 18 24 30 2.4 7.5 8.0 940 LQ1/LQ3/LVN/LQHB Series

Table of Contents

Actuation Plug Plug (A) 4 (B) (2) Number of solenoids (A) (4) (B) 2 Single 5 (EA) 1 (P) 3 (EB) 5 (EA) 1 (P) 3 (EB) Plug Plug (A) (4) (B) 2 (A) 4 (B) (2) Manual Override Operation Double Warning 5 (EA) 1 (P) 3 (EB) 5 (EA) 1 (P) 3 (EB) Light/Surge Voltage Suppressor Handle carefully, as connected equipment can be actuated through manual override operation.

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

2.5 3.0 4.0 3.5 0 5 10 15 20 25 30 40 35 0 2 4 6 8 10 12 16 14 18 20 Flow rate (l/min) Flow rate (l/min) Flow rate (l/min) Construction PF2D504/520 Parts list Material Number Parts o !

Series SY100 3 Port Solenoid Valve Rubber Seal

Station L 2 20.5 3 31 4 41.5 5 52 6 62.5 7 73 8 83.5 9 94 10 104.5 2.1-12 Series SY100 31 Type Manifold: Top Ported/SS3Y1-31Station Grommet (G), (H) 11.5 P=10.5 (Pitch) n-M3 X 0.5 (A port) 27.5 5 Manual override SY 3 5 G: 300 H: 600 SYJ 28 (In case of DC) R R 9 (Lead wire length) 15.6 34.5 (In case of AC) 21.5 10 25 VK P P + + + + + VZ 4-M5 X 0.8 (P/R port) VT L2 3 2-3.5 (Mounting holes)

Series MHL2 11- ø10, ø16, ø20, ø25, ø32, ø40 22- Parallel Type Wide Opening Air Gripper

S n Nil 2 fingers 2 Number of fingers Bore size 10 mm 16 mm 20 mm 25 mm 32 mm 40 mm Auto switch 10 16 20 25 32 40 Without auto switch (Built-in magnet) Nil Open/Close stroke (mm) Symbol Bore size 10 16 20 25 32 30 60 80 40 100 160 200 Nil 1 2 40 80 100 20 40 60 50 100 120 70 120 160 Copper, fluorine and silicone-free + Low particle generation 22 Vacuum suction type Action Port thread type

Check Valve Series AK 1

4 6 8 10 12 3 5 10 17 25 2.8 6.5 14 24 34 9.3 11.6 15.2 18.5 21.7 33.5 37.1 53.3 63.6 70.2 2-Applicable tubing D Inch Size Weight (g) Effective area (mm2) D L M Model Applicable tubing O.D.

Series 11-MXJ Air Slide Table

Reed Auto Switch: D-A93 (mm) Stroke B A Stroke C Auto switch operating range Stroke Model 5 10 15 20 5 10 15 20 5 10 15 20 11-MXJ4 11-MXJ6 11-MXJ8 14 14 0.5 0.5 9 4 4 3 14 14 18 0.5 0.5 0.5 9 4 10 5 25 14 14 25 0.5 0.5 0.5 0.5 9 4 Solid State Auto Switch (Lead Wire, In-line Entry): D-M9 (mm) Stroke B A Stroke C Stroke Auto switch operating range Model 5 10 15 20 5 10 15 20 5 10 15 20

Rotary Table Series MSU

Dimensions (mm) 1in = 25.4mm MSUA1 MSUA1-S, SE Scale: 70% C 8-M3 x 0.5 depth 5 51 31 38 23.5 B 25 4-M4 x 0.7 depth 4 22.5 4.5 +0.025 0 2.5H9 A Long groove depth 4 (positioning pin hole) 35h9 0 0.062 22.5 +0.025 0 +0.043 0 3-3H9 depth 3 ( A , B , C ) 17 H9 27 2.5 2 2-4.5 through 3-R1.5 12.5 37 8 6.5 10.3 6.5 36h9 0 0.062 31 4.2 2 31.5 2 27 16 9 5 Angle adjustment bolt 4.5 2-4.5 through 3-R1.5

VNC

LQ Valve specifications Pilot Solenoid Valve Specifications VNC1 SF4--23 VNC2 to 9 Fluid VNCA Model Pilot solenoid valve Coolant 5 to 60C LVN VO301-00T-X302 Grommet Grommet terminal Conduit terminal DIN terminal Fluid temperature 5 to 99C (Air operated type only) VNCB TI/ TIL Conduit terminal Electrical entry 5 to 50C (Air operated type: 60C) Ambient temperature Proof pressure 1.5 MPa 0

Low Friction: Double Acting Single Rod Series CM2Q ø20, ø25, ø32, ø40

5 !6 !7 !

Microspeed Cylinder: Double Acting/Single Rod Series CUX ø 10, ø 16, ø 20, ø 25, ø 32 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

32 Double acting/Single rod Min. operating pressure (MPa) 0.06 0.06 0.05 0.05 0.05 Standard Strokes Standard strokes (mm) Bore sizes (mm) 5, 10, 15, 20, 25, 30 10, 16 5, 10, 15, 20, 25, 30, 40, 50 20, 25, 32 Specific Product Precautions Be sure to read before handling.

CYV

5 !1 !9 #4 #8 E @7 o !0 i @8 !8 !6 $2 #2 !3 #3 !7 !2 @5 @4 r @3 e @6 @1 @2 #1 t y $1 u w q E' Section E-E' CYV32 t !9 $0 @1 @2 y @4 @3 u @6 #9 @5 Description Material Note Parts list Description Material Note No. No.

Process Valve

type B (tool required) Note) Note 1) Electrical entry: D or DZ only Note 2) Semi-standard Note 3) For other rated voltages, please consult with SMC. 2 15A 1 2 15 14 3 20 16 20A 3 4 25 4 25A 1 Nil: Non-locking push type Valve size 5 to 7 32A 22 11 4 5 32 1 B 32F 22 32 28 40 6 28 40 1 4 Flange 11 2 40A Note) Semi-standard 1 2 1 B 40F Flange Electrical entry/With light/surge voltage suppressor

Digital pressure switch for energy-saving control ejector

+/-3 oC) Indication LED Light when ON OUT1: Green OUT2: Red Enclosure IP40 Ambient temperature range 5 to 50 oC Environ ment Withstand voltage 1000 VAC for 1 minute between live parts and case insulation resistance Insulation resistance 50 M or more at 500 VDC Between lead block and case Temperature characteristic 2%F.S. (25 oC reference) cable 5 cores 3.5, 2 m Lead wire Sectional area of

06-cbg1-e

Contents Bore size (mm) Series CBG1N20-PS 20 25 32 40 CBG1N20-PS CBG1N25-PS CBG1N32-PS CBG1N40-PS Above no. @5, @6, @7, @8. And a grease pack. CBG1N Rubber bumper type CBG1N25-PS Locking at head or rod end CBG1N32-PS CBG1A20-PS 20 25 32 40 CBG1A20-PS CBG1A25-PS CBG1A32-PS CBG1A40-PS Above no. @5, @6, @7, @8, $0, $1. And a grease pack.

Large Type Vacuum Unit Series ZR

M Lead wire length 0.3m MO Without connector Series ZR How to Order Vacuum Pump Systems ZR100 M Z 5 K1 D1 25 Supply valve/Release valve combination Supply valve Symbol Release valve Double SOL.

Power Valve: Economy Valve Series VEX5

VEX5511-062EZ-BG Body size 5, Select, External pilot solenoid Port size 3/4 200 VAC, Grommet terminal, with light/surge voltage suppressor OptionBracket, with pressure gauge 5 3 4 200 VAC 50/60 Hz 1 1 1 110 VAC 50/60 Hz 4 7 220 VAC 50/60 Hz 24 VDC 12 VDC 11 4 11 4 5 6 11 2 9 2 2 7 240 VAC 50/60 Hz Other 9 Option Thread type Nil F N T Rc G(1) NPT NPTF Note 1) Not conforming to ISO1179-1.

Parallel Style Air Gripper/2-Finger Type Series MHS2 ø16, ø20, ø25, ø32, ø40, ø50, ø63 How to Order Bore size 20 MHS2 D M9BW ø16 to ø25 Number of fingers Number of auto switches 2 Nil 2 pcs. 2 fingers Auto switch Bore size S 1 pc. Nil Without auto switch

Parallel Style Air Gripper/2-Finger Type Series MHS2 16, 20, 25, 32, 40, 50, 63 How to Order Bore size 16 to 25 M9BW 20 MHS2 D 2 fingers Number of fingers 2 Number of auto switches Nil S 2 pcs. 1 pc. Auto switch Bore size 16 20 25 Nil Without auto switch (Built-in magnet) 16 mm 20 mm 25 mm Made to Order Refer to page 545 for details.

Speed Controller with One-touch Fittings

L5 L6 L7 L8 M1 1/8" 5/32" 1/4" 5/32" 1/4" 1/4" 5/16" 1/4" 5/16" 3/8" 3/8" 1/2" 8.4 9.3 12 9.3 12 13.2 15.2 13.2 15.2 18.5 18.5 21.7 36 37 39.5 40.7 42.6 53.4 57.2 59 65 69.8 76.9 81.3 4.5 5.2 6.1 5.2 6.5 6.9 8 7.4 8.2 9.8 10.3 11.3 11.2 11.9 12.8 12.3 13.6 16.5 17.6 19.3 20.1 21.7 22.7 23.7 23.8 24.5 25.5 28.9 30.2 33.4 34.5 38.6 39.4 41 51.6 52.6 21 21.7 22.7 25.4 26.7 28.4 29.5 33.6 34.4

Refrigerated Air Dryer

Refer to page 5 and 8. 4 Model determination Refer to page 2. Refer to page 5. 5 Selecting accessories sold separately.