ZP3

Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet M5 x 0.8 Effective thread depth 4 3 40 22.5 1.2 11 6 46 25 14.5 10 56 29 20.5 04 A J K 3 40 22.5 1.8 11 6 46 25 14.5 10 56 29 20.5 06 08 N S U F GN GS HS 18 11 15 59 42.5 1.2 10 20 66.5 50 06 08 15 59 42.5 1.8 20 66.5 50 04 JB K ZP3 Y UM B5 3 41 23.5 11 6 47 26 14.5 10 57 30 20.5 JB K 15 60 43.5 10 20 67.5 57 J K 4 10 13 16 D

Digital Flow Monitor

(increment of 1 sec.), 20 sec., 30 sec., 40 sec., 50 sec. and 60 sec.

Electric Actuator / Guide type 《 Battery-less absolute (Step motor 24VDC) 》

. -3- 1Specification 1.1 How to Order L E G 32 M D G B 30 C R1 C5H73 Size Motor type Motor mounting position Bearing type 25 32 40 Symbol Motor Compatible Nil Top mounting M Sliding bearing controller D In-line JXC5H JXC6H JXC9H JXCPH JXCEH High performance G Battery-less absolute Step motor 24 VDC Lead [mm] Actuator cable type/length [m] Symbol LEG25 LEG32/40 Robotic cable[mm] 6 8 Nil None

Electric Actuator / Slider type 《 Battery-less absolute encoder type (Step motor 24VDC) 》

Therefore, SMC products cannot be used for business or certification ordained by the metrology (measurement) laws of each country. 3 - 1Specification 1.1 How to Order L E K F S 32 E A 300 R1 CD17T Motor type Size Motor mounting position Lead[mm] 16 25 32 40 Nil In-line Size E Battery-less Absolute Symbol R Right side parallel 16 25 32 40 (Step Motor 24VDC) L Left side parallel H 20 24 30

LUBRICATOR

DIMENSIONS Bracket (Accessory) (Port size) Maintenance space Model Standard specifications M5X0.8 1/81/4 AL10-A 25 51.5 25.5 12.5 35 12.5 AL20-A 40 79.3 35.9 20 60 20 AL30-A 53 104.1 38.1 26.7 30 80 26.7 AL40-A 70 136.1 39.8 35.5 38.4 110 35.5 AL40-06-A 75 138.1 37.8 35.5 38.4 110 35.5 AL50-A 90 209 41.2 45 110 45 AL60-A 95 223 44.7 47.5 110 47.5 1/43/8 1/43/81/2 3/4 3/41 1 Bracket mount

REGULATOR

AR25K-B 40/42 AR25K-B 2.50.2 Nm AR30K-B 52/55 AR30K-B 3.50.3 Nm AR40K-B 52/55 AR40K-B 4.00.4 Nm When mounting with bracket, set nut tightened manually is adequate fir general used. Assembly 1) Mount the product to the bracket. AR50K-B AR60K-B (Bracket assembly) Two mounting screws are tightened by hexagon spanner for holding.

Compact Guide Cylinder

6.6 6 42 93 32 59.5 37.5 10 12 138 154 34 50 9 9 48 112 40 66 44 10 12 146 162 40 60 9 9 54 120 50 72 44 12 16 178 198 46 65 11 10 64 148 63 77 49 12 16 192 212 58 75 11 10 78 162 80 96.5 56.5 16 24 238 262 54 90 13.5 16 91.5 202 100 116 66 19 31 280 308 62 100 15.5 22 111.5 240 Caution Do not use this cylinder as a stopper.

KS/KX

D2 L A M D1 Nylon Urethane M5 X 0.8 M6 X 1.0 38.5 KXH04-M5 KXH04-M6 KXH04-01S KXH06-M5 KXH06-M6 KXH06-01S KXH06-02S KXH08-01S KXH08-02S KXH08-03S KXH10-02S KXH10-03S KXH10-04S KXH12-03S KXH12-04S 11 13 39 35 8 16 10.4 2.5 4.0 4.0 4 40 39.5 40 42 45 46 49 50 58 59 62 60 63 16 36 12 1 8 M5 X 0.8 M6 X 1.0 2.5 3 4.0 4.0 5.6 5.6 15 8 36 6 17 15 12.8 38 39 42 43 44 1 8 1 4 1 8 20 26 28 34 42 68

3 Port Direct Operated Poppet Solenoid Valve Series VKF300 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VT Type 42 Type S42 1 (P) 3 (R) (Valve leakage: 0.03 cm3/s He or less) Can be used in vacuum/release circuits VP VG Universal porting Type 40 VP N.C.

FILTER REGULATOR

87.6 72.4 26 40 26 5 28 37.5 62.5 37.5 1/81/4 1/8 M38X1.5 M42X1.5 M42X1.5 75.7 67.9 AW30K-B 53 115.1 85.6 29.4 55 29.4 3.5 28 37.5 66.9 37.5 1/43/8 1/8 38.4 AW40K-B 70 147.1 91.7 37.3 80 37.3 1.5 28 42.5 75.7 42.5 1/43/81/2 1/8 1/8 44.3 38.4 80.8 75.7 AW40K-06-B 75 149.1 93.2 37.3 80 37.3 1.2 28 42.5 75.7 42.5 3/4 AW60K-B 95 234.1 175.5 47.5 30 47.5 3.2 28 42.5 80.8 42.5 1 1/8 Optional

60

(100.5) (69.5) (127) 3, 4.5, 6, 8 Note 1) (64) (138) (103.5) (72.5) (136.5) 3, 4.5, 6, 8 Note 1) (66.5) (143.5) (106) (75) (142.5) Note 1) An orifice size of 8 is only available with the N.C. spec.

NVKF

Fl 20 stafrons r (Not mounled) Base mounted / Type 40 (A porl: bottom porting) NVV3KF3-40-OD.01T stations^ --'11--t -o Applicable valves NVKF334O OOO Applicable blank plate ass'y vK300-42-1A 2 stations oplional accessory .

Process Pump

Air consumption (L/min [ANR]) SUP = 0.7 MPa 40 35 30 SUP = 0.5 MPa 25 20 SUP = 0.35 MPa Caution 15 SUP = 0.2 MPa 10 1.

3-Screen Display Multi-channel Digital Sensor Monitor Up to 4 pressure sensors can be connected!

Analog voltage 1 to 5 V Analog voltage 1 to 5 V Or IO-Link hub (Commercially available) Process Data Bit offset 79 78 77 76 75 74 73 72 71 70 69 68 67 66 65 64 Item CH11 measured value: 16-bit signed integer Bit offset 63 62 61 60 59 58 57 56 55 54 53 52 51 50 49 48 Measurement data of sensors for 4 channels are combined and cyclically sent as a process data.

VS7-6

B06 Bottom piping: 3 4 Ordering source area code Code Japan, Asia Australia areas E Europe N North America Dimensions Symbol Model VS7-2A03 A04 VS7-2B03 B04 VS7-2-A06 Port size Piping Side A B C D E F G H J K L M N O P Q R S T U V W X Y 62 4-M6 Depth 10 , 3 8 1 2 75 98 30 50 49 32 23 42 31 36 88 10 16 12 16 10 38 16 23 112 15.5 47.5 Bottom Side 4-M6 Depth 12 72 3 4 86 42 63 62 42 30 55 42

Series CM2X-Z 10- ø20, ø25, ø32, ø40 Low Speed Cylinder 11- Double Acting, Single Rod

Nil S n G Rubber bumper only Cylinder stroke (mm) Rod end thread Nil F Male rod end Female rod end Model Cushion Bore size (mm) 20 25 32 40 20 25 32 40 Action Standard stroke (mm) Auto switch mounting Port size Lubrication Model Rubber 10-CM2X20 10-CM2X25 10-CM2X32 10-CM2X40 11-CM2X20 11-CM2X25 11-CM2X32 11-CM2X40 Relief type Vacuum suction type 1/8 25, 50, 75, 100, 125, 1/4 Non-lube Double

Series 10-MGF ø40, ø63, ø100 Guide Table

Cylinder stroke (mm) Model Cushion Bore size (mm) 40 63 100 Standard stroke (mm) Auto switch mounting Action Port size Lubrication Model Rubber Air 1/8 10-MGF40 10-MGF63 10-MGF100 Relief type (Both sides) Double acting 30, 50, 75, 100 1/4 Non-lube Non-standard intermediate strokes (in 5 mm increments) are available by attaching a spacer of 5, 10, 15, 20 or 25 mm width.

Series 10-MGF Guide table ø40, ø63, ø100

Series 10-MGF Guide table 40, 63, 100 How to Order 10 M G F 63 50 Y59B Number of auto switches 2 pcs. 1 pc. 10 Clean series Relief type Nil S Bore size (mm) Reed switch Type of auto switch Port type Z73 Solid state switch Y59A,Y59B Type Rc NPT G Bore size Symbol Nil TN TF 40, 63, 100 Cylinder stroke (mm) Model Cushion Bore size (mm) 40 63 100 Standard stroke (mm) Auto switch mounting Action

Stainless steel High Vacuum Angle/In-line Valve Normally Closed/Bellows Seal XMA, XYA Series

XMA XYA M9N 16 A A M9N 25 Angle type In-line type q w e r t y u w Flange type q Flange size XMA Type KF (NW) K (DN) CF Symbol Nil D C Applicable flange size 16, 25, 40, 50, 63, 80 63, 80 16 (034), 40 (070), 63 (114) XMA XYA Size 16 25 40 50 63 80 XYA Nil D K (DN) KF (NW) 25, 40, 50, 63, 80 63, 80 e Indicator/Pilot port direction XMA Rear flange surface XYA Symbol Rear flange surface Right

Pressure Switch/Reed Switch Type

Example) IS10M-6LP 0.1 0.3 0.2 0.4 MPa C q V B Symbol Description Body size 30 40 20 50 60 Nil Set pressure 0.1 to 0.4 MPa 0.1 to 0.6 MPa V V V V V V V V V V a 6 Note 1) range Semi-standard + Lubricator Nil 0.5 m V V V V V V V V V V V V V V V Lead wire w V L Z b 3 m 5 m A D Regulator Air filter length + Applicable model A 11 13 15 17 22 B 74 85 93 97 91 C 61 67 72 75 64 D 28 30 36 44 53 Nil