SYJA3000 3.2 (0.18) 3 position closed center SYJA5320-M5 M5 X 0.8 M5 X 0.8 3.6 (0.2) [2.7 (0.15)] 3 position exhaust center SYJA5420-M5 70 PA,B: 4.0 (0.22) [2.7 (0.15)] A,BR1,R2: 3.4 (0.19) 3 position pressure center SYJA5520-M5 2 position single 4.5 (0.25) 79 (45) SYJA5140-01 Base mounted 2 position double 4.5 (0.25) 94 (60) SYJA5240-01 3 position closed center 3.4 (0.19) SYJA5340-01 M5 X 0.8 1/8 104
depth N L K (mm) Electrical entry P Port size Model Grommet: G Conduit: C Conduit terminal: T M L K H F E D C B N A U S R Q R Q R Q M4 12.8 14 28 12.5 6.5 31 64 28 4.5 13.5 83 66 50 99 50 44 59 22 1/8 VCB21 M4 12.8 18 28 12.5 8.5 31 67.5 36 6 18 86 66 53 99 53 44 62 22 1/4 M5 19 20 32 15 11 36.5 81.5 40 8 22 99 68 66.5 101 66.5 46 76 24 1/4, 3/8 VCB31 M5 23 25 32 15 13.5 36.5 86 50 8 30 104
G Conduit: C DIN terminal: D Conduit terminal: T P Port size Rc A B C D E F H K L M N Model Note) U Q V R Q R Q R S Q R S 83 22 23 45 44 43 58 40.5 46.5 99 43 66 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 4.5 1/8 VCL21 86 22 23 46 44 44 58 41.5 46.5 99 44 66 18 36 67 31 8.5 12.5 28 18 12.8 M4 6 1/4 99 24 25 56.5 46 54.5 60 52 48.5 101 54.5 68 22 40 81.5 36.5 11 15 32 20 19 M5 8 1/4, 3/8 VCL31 104
Electrical entry P Port size B C D E F H K L M N A Model Grommet: G Conduit: C Conduit terminal: T Q R Q R Q R S U 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 4.5 22 59 44 50 99 50 66 83 1/8 VCS21 18 36 67.5 31 8.5 12.5 28 18 12.8 M4 6 22 62 44 53 99 53 66 86 1/4 22 40 81.5 36.5 11 15 32 20 19 M5 8 24 76 46 66.5 101 66.5 68 99 1/4, 3/8 VCS31 30 50 86 36.5 13.5 15 32 25 23 M5 8 24 80 46 71 101 71 68 104
18.5 R P R P 11.5 18 37 11.5 18 37 67.5 59 Max .10 71.5 Pg.7 Manual override (non-locking) 4Rc(PT) 1/8 (ports P, R) 18 25 31 53.5 Approx. 300 (lead wire length) Light (DZ type only) 4Rc(PT) 1/8 (ports P, R) 75.5 83 Manual override (non-locking) nRc(PT) 1/8 (port A) Applicable cord O.D. 4 to 6.5 A A P = 19 20 L: Dimension table n: Stations n L L1 L2 1 38 28 2 57 47 3 76 66 4 95 85 5 114 104
SY SYJ (L5) Plug assembly (L4) VK 2-4.5Mounting hole 1 2 3 VVQ100-12A(L3) 88 (8.5) L2 VZ 48.7 L1 VT VT (45) (35) 33 25 (5.5) VP 23.5 12.3 VG R11 Manual override 21.5 (Min. bending inner radius) (29.3) VP 104 VQ VQZ Stations 1 2 3 4 5 n Dside Uside VZ 2-M5 X 0.8(E port) VS 2-M5 X 0.8(P port) 42.9 A A 20 (8.5) 1.5 5 n-M5 X 0.8 (A port) 5 (7.5) 15 P=10 38 Equation: L1=10n+32 L2=10n+43
#8 Valve 2 position single SV5Q11V, #9 2 position doubleSV5Q11V, #10 3 position SV5Q11V, #10 16 212.5 240.5 262.5 273 15 202 230 250 260.5 14 191.5 219.5 250 260.5 13 181 209 237.5 248 12 170.5 198.5 225 235.5 11 160 188 212.5 223 10 149.5 177.5 200 210.5 9 139 167 187.5 198 8 128.5 156.5 187.5 198 7 118 146 175 185.5 6 107.5 135.5 162.5 173 5 97 125 150 160.5 4 86.5 114.5 137.5 148 3 76 104
3 4 5 6 7 Stations D-side 8 U-side M12 Female thread 2-C8 3(R) port 0 DIN rail clamp screw 1 62.5 60 (12) 40.5 25 9.5 7.5 18.5 M12 Male thread 20.5 (7.5) 2n-C3, C4, C6, M5 C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread 2-C8 1(P) port 34 P = 10.5 Formulas: L1 = 10.5n + 45, L2 = 10.5n + 93.5 n: Stations (maximum 16 stations) n L L1 L2 L3 L4 1 55.5 104
Station (Max. 20) Dimensions L n 2 30.5 43.5 75 85.5 18 198.5 211.5 237.5 248 19 209 222 250 260.5 20 219.5 232.5 262.5 273 13 146 159 187.5 198 14 156.5 169.5 200 210.5 15 167 180 200 210.5 16 177.5 190.5 212.5 223 17 188 201 225 235.5 10 114.5 127.5 150 160.5 11 125 138 162.5 173 12 135.5 148.5 175 185.5 5 62 75 100 110.5 6 72.5 85.5 112.5 123 7 83 96 125 135.5 8 93.5 106.5 137.5 148 9 104
Dimensions Equation L1=10.5n+9.5 L2=10.5n+17.5 n: Station (Max. 20 stations) L n 2 30.5 38.5 62.5 73 18 198.5 206.5 237.5 248 19 209 217 237.5 248 20 219.5 227.5 250 260.5 15 167 175 200 210.5 16 177.5 185.5 212.5 223 17 188 196 225 235.5 10 114.5 122.5 150 160.5 11 125 133 162.5 173 12 135.5 143.5 175 185.5 13 146 154 175 185.5 14 156.5 164.5 187.5 198 7 83 91 112.5 123 8 93.5 101.5 125 135.5 9 104
Cover diameter 1.5 Cross section 0.23mm2 R1 R2 R1 R2 5 3 5 3 < >: AC < >: AC Equation L1=10.5n+9.5 L2=10.5n+17.5 n: Station (Max. 20 stations) Dimensions L n 2 30.5 38.5 62.5 73 20 219.5 227.5 250 260.5 17 188 196 225 235.5 18 198.5 206.5 237.5 248 19 209 217 237.5 248 12 135.5 143.5 175 185.5 13 146 154 175 185.5 14 156.5 164.5 187.5 198 15 167 175 200 210.5 16 177.5 185.5 212.5 223 9 104
L1=10.5n+9.5 L2=10.5n+22.5 L n 2 30.5 43.5 75 85.5 18 198.5 211.5 237.5 248 19 209 222 250 260.5 20 219.5 232.5 262.5 273 13 146 159 187.5 198 14 156.5 169.5 200 210.5 15 167 180 200 210.5 16 177.5 190.5 212.5 223 17 188 201 225 235.5 10 114.5 127.5 150 160.5 11 125 138 162.5 173 12 135.5 148.5 175 185.5 5 62 75 100 110.5 6 72.5 85.5 112.5 123 7 83 96 125 135.5 8 93.5 106.5 137.5 148 9 104
P 500 150 144 400 104 100 300 P 66 43 26 16 90 200 50 56 34 22 14 8 5 100 0 0 20 30 40 50 60 70 80 90 100 10 20 30 40 50 60 70 80 90 100 10 Bore size (mm) Bore size (mm) 1.15-33 Series VY511/VYU5 Precautions Be sure to read before handling. Refer to p.0-26 and 0-27 for Safety Instruction and common precautions on the products mentioned in this catalog.
Valve side exhaust 29 Series XLS High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm XLS/Without control power supply Grommet (G) D Conduit (C) J K 27010 E D G B C G(PF)1/2 Terminal (T) J K2 J H 29010 L 25 33 B C G(PF)1/2 DIN terminal (D) J K L C B F A 29.5 39 B C G(PF)1/2 6 to 9 22 A (mm) A B 104 L 48 62 C D F G H J E K 41 60 95 43 Model XLS-16G XLS-16C XLS-16D XLS-16T XLS-25G XLS-
Model Bore size (mm) Cylinder stroke (mm) 5 63 (68) 103 (128) 180 (214) 304 (358) 514 (587) 49 (54) 79 (104) 145 (179) 259 (313) 421 (494) 10 15 20 25 30 40 50 69 (79) 115 (145) 204 (244) 343 (402) 574 (652) 53 (63) 86 (116) 159 (198) 279 (338) 451 (529) 75 (85) 127 (157) 228 (267) 382 (441) 634 (712) 57 (67) 93 (123) 173 (212) 299 (358) 481 (559) 81 (91) 139 (169) 252 (292) 421 (480) 694
40 50 40 50 57 86 160 224 Pad type 63 63 80 80 U Urethane rubber H Heavy duty F Fluoro rubber 100 100 E EPR Add NBR weight to the table on the right for other materials. 125 125 Dimensions ZP H 40 50 ZP H 63 80 ZP H 100 125 (mm) (mm) (mm) Model A 63 ZP63H B 65 80 ZP80H 82 C 14.5 16.5 D 50 61 Y 3.5 4.5 B 42 50 ZP50H 52 Model A 40 ZP40H C 32 42 Model A 100 ZP100H B 103 125 ZP125H 128 C 80 104
When used in stopper application mounting hole, diameter should be 2d or more = E b o I il Cro.z Compact Guide Cylinder:Series MGQ Permissible lateral load (Ordinary-use load) F + 12 t6 ' i 4 : : : 49 25 51 F t 108 A6 104 176 3 3 206 686 343 80. : . l ' s s i 1070 lN=OlO2kql r(N.m) Bore size Modd to 20 r 3 B ' .50 75 .t( P , 0.29 o.24 o.21 0.18 0.16 0.48 o.39 0.31 o.37 0.33 -^ I McoM 0.51
(H) < In Caee ot B:lT) 0 18 (4.5) Oia 6 6 i=o.ar (ro.5i0a5(115) TUpe 532,r Side Ported L Type Plug Connector (L) M Type Plug Connector(M) NVVsJ3-532staiions -M5, B3T \ | s l ATTI T \i.1 J_ 19 1 e : 9 6 t ' ' i 5 _ 3 ^i :n l ' g r018 (4 5) oLa 11.81 {300) Stationsn) 2 3 5 6 7 a 9 1 0 l1 12 13 a4 '15 16 17 1a 't9 20 L1 1.63 2.05 (41.5) (b2) 2.45 (62.5) 2.47 (731 3.29 3.70 (835) (s4) (104 5)
NVM NVM220-N02-01 230-N02-01 230-N02-02 F O F , I 529 lbs (2+kg) F O F 4,85 lbs (2 2ko ) P T 2 7 6 i n ( 7 m m ) O T 0 197 in (smm) T T O 47 in (12mm) P T 0 256 in (6 5mm) O T O 177 in (4 smm) T T 0 433 in (1 1mm) .75 PSIG (5 Kgl/cm2) .75 PSIG (5 Kgf/cm2) A B c D E F G H 3.31 (84) 1 . 9 3 (49) 2.05 (s2\ 1.26 (321 2.24 (57) 1.39 t35.4) 0.96 124.5) 0.31 (81 A B c D E F G H 0.31 (8) 4.09 (104
(H) < In Caee ot B:lT) 0 18 (4.5) Oia 6 6 i=o.ar (ro.5i0a5(115) TUpe 532,r Side Ported L Type Plug Connector (L) M Type Plug Connector(M) NVVsJ3-532staiions -M5, B3T \ | s l ATTI T \i.1 J_ 19 1 e : 9 6 t ' ' i 5 _ 3 ^i :n l ' g r018 (4 5) oLa 11.81 {300) Stationsn) 2 3 5 6 7 a 9 1 0 l1 12 13 a4 '15 16 17 1a 't9 20 L1 1.63 2.05 (41.5) (b2) 2.45 (62.5) 2.47 (731 3.29 3.70 (835) (s4) (104 5)