Precision Regulator Series IR1000/2000/3000

Panel When mounting on a panel, refer to page 561 in Specific Product Precautions. 4.5 M5 x P0.5 8.5 M6 x P0.5 5.5 71 11 18 124 46 53 92 10 10 9.5 Bleed Bleed 63 Exhaust SUP(1) OUT(2) 30 OUT(2) SUP(1) 43 35 2 x Rc 1/8 Port size EXH 43 50 50 2 x Rc 1/4 Port size 2 x Rc 1/8 35 60 2 x Rc 1/8 Pressure gauge port Pressure gauge port 50 Mounting hole IR300-0 IR2120-02 36 2 Bracket (Option) 30

Stainless Steel 316 Fittings

-01 KFG2L0604-02 KFG2L0806-01 KFG2L0806-02 KFG2L0806-03 KFG2L1075-02 KFG2L1075-03 KFG2L1075-04 KFG2L1008-02 KFG2L1008-03 KFG2L1008-04 KFG2L1209-02 KFG2L1209-03 KFG2L1209-04 KFG2L1210-02 KFG2L1210-03 KFG2L1210-04 KFG2L1613-03 KFG2L1613-04 1/8 1/4 1/8 1/4 1/8 1/4 1/8 1/4 3/8 1/4 3/8 1/2 1/4 3/8 1/2 1/4 3/8 1/2 1/4 3/8 1/2 3/8 1/2 10 14 10 14 12 16 20 24 27 38 41 51 37 41 50 41 45 57 42 43 53

Step Motor Controller

(N.C.) 53 Series LECP6 Step Data Setting 1. Step data setting for positioning 2. Step data setting for pushing In this setting, the actuator moves toward and stops at the target position. The following diagram shows the setting items and operation. The setting items and set values for this operation are stated below.

KS/KX

KXH10-03S KXH10-04S KXH12-03S KXH12-04S M5 x 0.8 M6 x 1 38.5 11 13 39 35 8 10.4 16 2.5 4.0 4.0 4 40 39.5 40 42 45 46 49 50 58 59 62 60 63 16 36 1 8 M5 x 0.8 M6 x 1 12 2.5 3 4.0 4.0 5.6 5.6 15 8 36 6 12.8 15 17 1 8 1 4 1 8 38 39 42 43 44 20 26 28 34 42 68 76 94 88 14 4 10.4 10.4 8 17 1 4 15.2 18 18.5 6 26.1 18.0 3 8 Connection thread 1 4 52 18.5 23.5 21 10 3 8 1 2 3 8 1 2 22 7 36.3 29.5 53

Digital Flow Switch (Integrated display type)

. : When hysteresis mode is not used, "Input set value" (page 53) is displayed. : The set value and hysteresis settings limit each other. : For more detailed setting, set each function in function selection mode (page 30). -29No.PF-OMW0007-E Function Setting Function selection mode In measurement mode, press the SET button between 2 to 5 seconds, to display [F 0].

Title not found

1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 Auto Switch (N)CDQ2 Series 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60 61 62 63 64 65 66 67 68 69 70 71 72 73 74 75 76 77 78 79 80 81 82 83 84 85 86 87 88 89 90 91 92 93 94 95 96 97 98 99 100 101

Air Cylinder Series CA2

D-Y69 D-Y7PV D-Y7WV D-P4DWL D-A3 D-G39 D-K39 D-A44 D-A5 D-A6 D-A59W D-A3C D-G39C D-K39C D-A44C Bore size (mm) Ht Hs Hw Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Hs Hs Hs Ht Hs Ht Hs Hw Hs 40 50 63 80 100 30 30 32 30 35 30 30 30 30.5 30 43 33.5 38 72.5 80.5 40 31 38.5 31 73 69 81 69 34 34 36.5 34 39 34 34 34 35 34 47 38 43.5 78 86 43.5 35 42.5 35 78.5 77 86.5 77 41 41 43.5 41 46 41 41 41 42.5 41 53

KA

1 8 KAU06-U01 3 8 KAU06-U03 46 45 43.5 12.8 39.5 17 14 12.8 13 6 1 4 KAU06-U02 39 13.4 13.4 17 H 40 25 1 8 1 4 KAU08-U01 KAU08-U02 50.5 52 46.5 46 26 24 2-applicable tubing D 15.2 8 15.2 KAU08-U03 17 18.5 17.7 17.7 3 8 51.5 45.5 27 MS 1 4 3 8 KAU10-U02 KAU10-U03 38 51.5 19 18.5 57.5 10 18.5 36 21 28.4 28.4 1 2 KAU10-U04 59 51 51 22 T 1 4 3 8 KAU12-U02 KAU12-U03 53

Remote Type Pressure Sensors/Pressure Sensor Controllers Series PSE

Terminal 8 Yellow : Auto-shift input DC (+) 7 Green : CH4_OUT1 DC () 6 Red : CH3_OUT1 5 Gray : CH2_OUT1 CH1_OUT1 4 White : CH1_OUT2 CH1_OUT2 3 Black : CH1_OUT1 CH2_OUT1 2000 2 Blue : DC () CH3_OUT1 1 Brown: DC (+) CH4_OUT1 Auto-shift input 843 Series PSE200 Dimensions Front protective cover + Panel mount 53 47 9.4 (2) 42.4 MPa kPa 46.4 OUT1 OUT2 1 2 3 4 CH PRESSURE SET Panel mount adapter

VM

Mushroom) Push button (Extended) Push button (Flush) Twist selector (2 position) Key selector (2 position) Twist selector (3 position) Foot pedal Push-pull P . 5-6-8 P . 5-6-12 P . 5-6-20 Effective area (mm2) Number of ports 1 2, 3 Poppet 2.5 2, 3 Poppet 19 2, 3 Poppet Function 5-6-2 Mechanical Valves Series VM Mechanical Valves SA VA VM400 VZM500 VZM400 VFM300 VFM200 VM800 SA 21 x 35 x 53

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

to Order Manifold Base VV5FS3-31 VV5FS3 31 1 05 03 Part no. for mounting bolt and gasket BG-VFS3030 Thread type Series VFS3000 Manifold Nil N Rc NPT NPTF G T F Option Exploded View of Manifold P, EA, EB port size 03 3 8 Rc Manifold block assembly VVFS3000-1A-30 Symbol Stations Passage Porting specifications 3(R2), 5(R1) 1(P) 2(B), 4(A) 02 2 stations Hexagon socket head cap screw: M4 x 53

Compressed Air Cleaning Filter Series

The lubrication grease for O-ring and gasket is changed to white vaseline. 53 Odor Removal Filter Series AMF How to Order AMF650/850 AMF 650 10 Made to Order (How to Order and the applicable models are different from those shown on this page. Be sure to refer to Made to Order.)

Compact Cylinder

Stroke Width across flats K M: Rod end male thread D H Hexagon width across flats B1 Rod end nut H1 C X L1 Rod End Male Thread (mm) Bore size (mm) B1 C D H H1 K L1 X 17 17 19 19 6 6 7 7 16.5 16.5 19.5 19.5 16 16 20 20 M10 x 1.25 M10 x 1.25 M12 x 1.25 M12 x 1.25 14 14 17 17 26 26 30 30 19 19 22 22 32 40 50 63 Basic Style (mm) Bore size (mm) A B C D E F H I J K L M N OA OB Q RA RB T Z 51 52 53

Digital Flow Switch (Integrated display type)

Operating fluid 28 F4 Reference condition 29 F5 Response time 30 F6 Display mode 31 F7 External input 32 F8 Display resolution 35 F9 Auto-preset 36 F10 Accumulated value hold 38 F11 Analogue output filter 39 F12 Power saving mode 40 F13 Security code 41 F98 Setting of all functions 42 F99 Reset to the default settings 44 Other Settings 45 Maintenance 49 Troubleshooting 50 Error indication 53

CKZ2N

78.4 78 113.7 19 22 30 8 10 12 M8 x 1.25 M10 x 1.5 M12 x 1.75 Bore (mm) PA PB PC PD R RA RB RC RD RR W XA XC XB 50 63 80 78.4 78 113.7 45 55 70 45 45 75 5 10 15 20 25 32 92.8 105.3 148.3 141.8 154.4 197.3 137.3 150.4 192.8 40 55 65 45 52 70 88 104 140 20 25 32 45 50 68 48 54 76 7 Series CKZ2N Dimensions Straight-Plain Arm / 50 20 mm Offset-Plain 20 0.03 20 0.03 A M6 x 1.0 M6 x 1.0 R45 33 53

Electric Actuator

Motor (24 VDC)/Step Motor (Servo/24 VDC) LEFS LEFB 38 LEFS LECS: LECA6 LECP6 LEC-G LECP1 LECPA LEFB 36.2 85 4.5 for body mounting 18.1 1.2 4.5 110 101 86 4.5 for body mounting CN4 I/O connector CN3 encoder connector CN2 motor connector CN1 power supply connector DIN rail mounting (LEC;1;;D-;) 38 36.2 85 (11.5) SL 24.2 35 127.3 (When locking DIN rail) 133.2 (When removing DIN rail) 110 86 53

3

PF3W511 PF3W521 0.5 2 5 10 30 4 A A 16 40 100oC 0oC 10oC 110oC 0 Flow rate Minimum Maximum Fluid temperature 100 250 flow flow 19 Digital Flow Switch for Water Series PF3W3 3-color display Dimensions 3-Color Display Digital Flow Switch for Water 40.1 (7.5) Sensor connector (4P) 40 2.5 6 NC/IN <36.8 40 PF3W Power supply/ output connector (5P) Front protective cover + Panel mount adapter 53

0.4

pressure release manual override Stations 1 2 3 n D side U side 2 x C3, C4, C6, M5 C3: 3.2 one-touch fitting C4: 4 one-touch fitting C6: 6 one-touch fitting M5: M5 thread 2n x C3, C4, C6, M5 C3: 3.2 one-touch fitting C4: 4 one-touch fitting C6: 6 one-touch fitting M5: M5 thread Dimensions Formula L1 = 11n + 20 n: Station (Maximum 24) n L 1 2 3 4 5 6 7 8 9 10 11 12 L1 L2 L3 97 130 152 31 42 53

Size/Port: 53 [Male Thread Type, Port Size: R1/4, Flow: 130 L/min (ANR)]

Fitting Type: H (Straight), Size Combination: 53 (Tubing: 19 x 16; Thread: 3/4"), Piping Type: M (Male), Thread: N (NPT)