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For each additional input block, add 21mm.) n: Stations (maximum 24 stations) n L L1 L2 L3 L4 1 73 192 212.5 223 2 89 208 237.5 248 3 105 224 250 260.5 4 121 240 262.5 273 5 137 256 275 285.5 6 153 272 287.5 298 7 169 288 312.5 323 8 185 304 325 335.5 9 201 320 337.5 348 10 217 336 362.5 373 11 233 352 375 385.5 12 249 368 387.5 398 13 265 384 400 410.5 14 281 400 425 435.5 15 297 416 437.5

S = 5.0 600 500 400 300 200 100 VDW304 S = 8.0 900 800 700 600 500 400 300 200 Flow rate Q l/min (ANR) Viewing the graph The sonic range pressure to generate a flow rate of 300l/min (ANR) for orifice 2.3 (VDW20) is P1 approx. 0.77MPa, for orifice 3 (VDW30) is P1 approx. 0.45MPa, for orifice 4 (VDW30) is P1 approx. 0.24MPa.

Thermo-chiller with exhaust from the side: Body space: W15.7in (400 mm) x D 33.3 in (845 mm) Ventilation space: 3.9 in (100 mm) 15.0 (380) HRW008-H : Body space: W15.0 in (380 mm) x D 26.2 in (665 mm) Ventilation space: 0 15.7 (400) 3.9 (100) 33.3 (845) 26.2 (665) 10.0 ft2 (0.93 m2) 5.5 ft2 (0.51m2) 98 High Performance Easy Maintenance Temperature stability: 0.54F (when a load is stable)

alarm monitoring start time Alarm buzzer sound ON WRN / FLT 600 000 HITEM LOFL ALARM ALARM BUZZ INP1 ALARM READY START REF PRSLO / / / / TEMP READY Time when it goes away Contact input signal 1Delay timer of reading / 40 Offset mode OFF Setting of low flow rate alarm 3 5 0 LOFL OFSET MODE READY OVER INP2 INP1 DELAY Upper limit of circulating fluid temperature monitoring function 400

600 800 1000 0 0 200 400 600 800 1000 Kv value Volume ratio (Kv) (2) If your operating conditions are different from these basic conditions, apply a correction factor.

500 100 200 300 400 500 100 200 300 400 500 Elimination ratio (%) Elimination ratio (%) Elimination ratio (%) 75 70 60 50 40 30 20 10 0 1 5 10 50 30 100 1 5 10 50 100 Flow-back count Flow-back count Flow-back count Explanation of graph Explanation of graph Example: Elimination ratio and concentration after using the FHM-100 for one hour under the following conditions.

Fluoropolymer Fittings LQ series 20C 100C 200C 260C 0.5 0.19 0.09 0.04 2.0 400 290 0.7 0.26 0.12 0.05 2.8 220 160 1.0 0.43 0.20 0.08 4.6 95 60 1.0 0.62 0.28 0.12 6.7 60 30 1.0 0.73 0.34 0.14 7.9 35 20 1.0 0.62 0.28 0.12 6.7 25 20 1.0 0.92 0.42 0.17 9.9 10 6 1.0 0.59 0.27 0.11 6.4 20 12 0.6 0.24 0.11 0.05 2.6 220 160 0.7 0.27 0.12 0.05 2.9 130 110 0.9 0.33 0.15 0.06 3.6 100 65 1.0 0.43 0.20

L2 = 16n + 73 n: Station (Maximum 24 stations) 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 L1 L2 (L3) (L4) 85 101 117 133 149 165 181 197 213 229 245 261 277 293 309 325 341 357 373 389 405 421 437 105 121 137 153 169 185 201 217 233 249 265 281 297 313 329 345 361 377 393 409 425 441 457 137.5 150 162.5 187.5 200 212.5 225 250 262.5 275 300 312.5 325 337.5 350 375 387.5 400

Operate under the following conditions to avoid malfunction. < N.O. type > Operating pressure: 15 psi [0.1 MPa] or more Operate the compressor at 3.7 kW (14 scfm [400 L/min (ANR)]) or more.

Description Material Note ALF400, 400-06 ALF500, 600 ALF800, 900 Platinum silver painted Body Housing Aluminum die-casted Aluminum casted Aluminum die-casted 1 2 Platinum silver painted Replacement Parts No. Description Material Part no. Qty.

Made to Order How to Order 2 F 06 A 200 AS Lubricant: Vaseline -X12 Example) AS2002F-04A-X12 Body size Made to Order Grease-free (Seal: Fluorine-coated) + Restrictor (Without check valve) -X21 100 M5 standard 200 1/8 standard 205 1/4 standard 300 3/8 standard 400 1/2 standard Push-lock type Example) AS2002F-04A-X21 * Not particle-free Applicable tubing O.D.1 Metric size Inch size 23 3.22

Characteristics AS101FS-M5, AS111FS-M5 AS201FS-01, AS211FS-01 AS201FS-02, AS211FS-02 600 300 AS-FS AS-FSG Uni-AS-FS Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 100 500 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] 06, 07, 08, 09, 10 06, 07, 08, 09, 10 01, 23, 03, 04, 06, 07 01, 23, 03, 04, 06, 07 08, 09, 10, 11 08, 09, 10, 11 03, 04 400

Relief port size M5 x 0.8 Piston speed 50 to 400 mm/s Mounting Basic style, Axial foot style, Rod side flange style Head side flange style Auto switch can be mounted.

-X 20Data Table (1) 100 Total operation cycles (10,000) 50 40 30 20 10 100 200 300 400 500 700 1000 Stroke (mm) Inner Cover Holding Screw Tightening Torques [Nm] Tightening torque Model Screw size CYV15 0.3 M3 x 0.5 CYV32 2.45 M6 x 1 Plate Stroke adjustment screw (inner cover) Hexagon wrench Inner cover holding screw direction + direction 8-18-11

Dimensions [Separately installed power transformer] C E IDF-TR7000-8 G B D 4 x F A Specications/Dimensions in (mm) Transformer Applicable dryer Capacity Type Inlet voltage Outlet voltage A B C D E F G Weight 14.2 (360) 21.3 (540) 15.7 (400) 10.2 (260) 11.8 (300) 0.43 (11) 1.18 (30) 207 lb (94 kg) IDF-TR7000-8 IDF100FS 7 kVA Three-phase Compound winding 220, 240 380, 400, 415 440 V (50/60

Made to Order How to Order 2 1 F 06 200 AS S Lubricant: Vaseline -X12 Example) AS2002FS-04-X12 Made to Order Body size Grease-free (Seal: Fluorine-coated) + Restrictor (Without check valve) -X21 100 M5 standard 200 1/8 standard 205 1/4 standard 300 3/8 standard 400 1/2 standard Applicable tubing O.D.1 Example) AS2002FS-04-X21 * Not particle-free Metric size Inch size 23 3.22 04 4 06 6 08

Cushion Rubber bumper, Air cushion Piston speed 30 to 400 mm/s DRelief port size M5 x 0.8 Mounting Basic, Axial foot, Rod flange, Head flange -X Auto switch can be mounted. The basic type is B type only. However, no trunnion mounting female thread is provided.

Without auto switch: 10C to 70C With auto switch: 10C to 60C (With no condensation) Ambient and fluid temperature Mounting bracket Bore size (mm) 10 16 Foot bracket Flange CJ-L016C CJK-L016C CJ-F016C CJK-F016C Piston speed Stroke length tolerance +1.0 0 50 to 400 mm/s Mounting style Grease Particle generation grade (Refer to front matter 13 for details.)

Piston speed Caution The cylinder speed upper limit that retains the particle generation grade is 400 mm/s. Back matter 5 Clean series: Common Precautions 3 Be sure to read before handling. Refer to the main text for detailed precautions for every series.

Relief port size M5 x 0.8 Piston speed 50 to 400 mm/s Mounting Basic style, Axial foot style, Rod side flange style Head side flange style Auto switch can be mounted.