Clean One-touch Fittings and Tubing Series KP/KPQ/KPG

Male Run Tee: KPY Effective area mm Note 1) D1 Model L1 TPH TPS A H (width across flats) 2-Applicable tubing Applicable tubing O.D. mm Connection threads R Weight g L1 M L2 D2 1/8 1/4 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 12 14 12 23.2 27.2 24.4 28.4 26.6 29.4 32.1 33.1 34.3 38.3 40 42 43 45.5 49 50 56 56.5 59.5 62.5 6 7 8 9 12 13 19 20 21 24 KPY04-01 KPY04-02 KPY06-01 KPY06-02 KPY08-01 KPY08-02

EXxx-OMN0035CN

mA (NPN +24 V ) (PNP 0 V ) 0.081.5 mm 2(AWG1628) 50 mA 55 mA IP40() -1050 1 -2060 3585RH() AC500 V1 FE DC500 V10 M FE 3(UL508) CE UL(CSA)RoHS 300 g 300 g 1UL 050 -29No.EX-OMN0035CN-A (EX600-DXB) 0 1 2 3 2 Bit 1 Bit 3 Bit 5 Bit 7 4 Bit 0 Bit 2 Bit 4 Bit 6 (EX600-DXC) 0 1 2 3 4 5 6 7 4 Bit 0 Bit 1 Bit 2 Bit 3 Bit 4 Bit 5 Bit 6 Bit 7 (EX600-DXD) 0 1 2 3 4 5 6 7 2

CRQ2

Thread type Port type Port type Nil Nil TF TN TT Size 10, 15 Number of auto switches Port type Nil Nil TF TN TT Size 10, 15 M5 Rc 1/8 G 1/8 NPT 1/8 NPTF 1/8 M5 Rc 1/8 G 1/8 NPT 1/8 NPTF 1/8 Nil S 2 pcs. 1 pc. 20, 30, 40 20, 30, 40 Applicable Auto Switch/Refer to page 11-11-1 for further information on auto switches.

Angle Seat Valve /

M5, 1/8, 3.2 to 6 1, 1.6, 2.3, 3.2 N.C.

I

Repetition Accuracy + 1%F.S.

Miniature Fittings M3, R(PT) 1/8, M5 Series M

I.D. 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 KFT04-01 KFT04-02 KFT06-01 KFT06-02 KFT06-03 KFT08U-01 KFT08U-02 KFT08U-03 KFT08N-01 KFT08N-02 KFT08N-03 KFT10U-02 KFT10U-03 KFT10U-04 KFT10N-02 KFT10N-03 KFT10N-04 KFT12U-02 KFT12U-03 KFT12U-04 KFT12N-02 KFT12N-03 KFT12N-04 29 34 32 37 53 49 50 56 46 49 54 46 63 90 57 62 88 79 81 94 75 78 93

HEC-OM-S008

CONTENTS 1 Preparation for Communication . 1-1 2 Specifications of Communication Method . 2-1 3 Communication Format (same as current HEC series) . 3-1 3.1 Control code used for communication . 3-1 3.2 Command code list . 3-1 3.3 Communication procedures and format . 3-2 3.4 Calculation of Check Sum . 3-4 4 Details of Communication Format . 4-1 4.1 Temperature setting (without writing FRAM

07-cv3-e

Contents Bore size (mm) @1 @2 23 @4 @5 26 @7 @8 Lube type Piston seal Rod seal CV3-40-PS 40 50 63 80 100 CV3-40-PS CV3-50-PS CV3-63-PS CV3-80-PS CV3-100-PS CV3-50-PS Cushion seal 23 and 26 are non-replaceable parts, so they are not included in the seal kit.

PSxx-OML0002CN

DC(-) DC(+) OUT1 OUT2 -B PNP 2 Max.80 mA 1 V FUNC DC(-) -19No.PS-OML0002CN-G DC(+) OUT1 -C OUT2 NPN 1 Max.28 V80 mA 1 V 1 k FUNC DC(-) DC(+) -D OUT1 NPN 1 Max.28 V80 mA 1 V 12 V 300 24 V 600 50 OUT2 FUNC DC(-) DC(+) OUT1 -E OUT2 PNP 1 Max.80 mA 1 V 1 k FUNC DC(-) DC(+) -F OUT1 PNP 1 Max.80 mA 1 V 12 V 300 24 V 600 50 OUT2 FUNC DC(-) -20No.PS-OML0002CN-G

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

Cylinder: Non-lube type 1 2 1 2 2 1 2 1 1 1 VY1 3 L L VBA VBAT 2 2 10 AFM AF ARP20K/30K/40K VHS AP100 1 1 12 2 4 14 Solenoid valve: Non-lube type 5 1 3 2 1 2 1 2 1 L L AFM AF ARP 759 Direct Operated Precision Regulator/Modular Type ARP20 to ARP40 Series RoHS Direct Operated Precision Regulator with Backflow Function/Modular Type ARP20K to ARP40K Series Symbol Regulator with backflow function

1

6 1/8 1/4 3/8 Internal External Female thread (Rc, NPT) XSA1 1 x 106 1.3 x 109 1.3 x 1011 XSA2 XSA3 Face seal fitting Compression fitting Female thread (Rc, NPT) 1 Normal Close High Vacuum Solenoid Valve XSA Series *1 *1 Excluding grommet/AC How to Order Face seal fitting Compression fitting XSA 2 1 1 2 S 5 G Face seal fitting Compression fitting 1 1 1 P 5 G XSA 2 Female thread type Female

Series AS Elbow Type/Universal Type Speed Controller with One-touch Fitting 1

40 AS221F-02 AS231F-02 R 1/4 Application to inch size tubing Metric size (Release bushing: White color) 3.2, 4, 6, 8, 10, 12 Inch size (Release bushing: Orange color) 1/8", 5/32", 3/16", 1/4", 5/16", 3/8", 1/2" 40, 50, 63 AS321F-02 AS331F-02 R 1/4 40, 50, 63 AS321F-03 AS331F-03 R 3/8 63, 80, 100 AS421F-04 AS431F-04 R 1/2 Note 1) Elbow type only Note 2) Meter-out and meter-in types can

Digital pressure switch for energy-saving control ejector

digit Hyster esis Hysteresis mode Adjustable (can be set from 0) 1 Display 3 1/2 digits, 7-segment display, color display (Red) Indicator accuracy +/-2%F.S., +/-1 digit (at ambient temperature 25+/-3 oC) Indication LED Light when ON OUT1: Green OUT2: Red Enclosure IP40 Ambient temperature range 5 to 50 oC Environ ment Withstand voltage 1000 VAC for 1 minute between live parts and case insulation

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

Specifications PF2D200/201 Model Applicable flow rate sensor PF2D504--1 PF2D520--1 PF2D540--1 0.25 to 4.50 l/min 1.3 to 21.0 l/min 2.5 to 45.0 l/min Flow rate measurement range Note 1) 0.25 to 4.50 l/min 1.3 to 21.0 l/min 2.5 to 45.0 l/min Set flow rate range Note 1) 0.05 l/min 0.1 l/min 0.5 l/min Minimum set unit Note 1) Accumulated pulse flow rate exchange value (Pulse width: 50ms) Note

Clean Regulator

ITVX Specifications PVQ VY1 SRH30 SRH40 SRH31 SRH41 Model Non-relief Relief Relief mechanism VBA VBAT Rc 1/8, 1/4 URJF 1/4 Rc 1/4, 3/8, 1/2 URJF 3/8 Rc 1/8, 1/4 Rc 1/4, 3/8, 1/2 Port size AP100 Grade A Clean air, N2, Ar, CO2, Pure water Clean air, N2 Fluid Grade B Air, N2, Ar, CO2, Water Air, N2 1.5 MPa Proof pressure 1 MPa Max. operating pressure Low pressure type High pressure type 0.02

NVZ1000//3000/5000 4,5 Port Solenoid Valve/Rubber Seal Type

.:; ;,i=-, ,,.r:,,. ,:: 1::':::,4':::rr.i,;.::'i.ri:;.: 'i.t.i.il:i:i=*1+at=r=i1t:i:i:t:, =!i i:r-i=,, ti ' ' ' ,*r:,:,.r.,:::aa:.:;l.;:i.i.i.tii-,:,'.ar'''ll.'1:1,:,::,1*tlLr:f:fl:a::.:::a::l:a:..:r.:,,::,i,.i,i..,. -r.rLi'g+;,:,=.:11:i:::':itf::1.:i,;=:.:,1 ;,t .,.', , . i:,:*:,'*':,1=]:t*r:1:f?:t:a:l*!a,-,'a*r1]la::1::':..:::.:::.1 . . =r. r::!1::1+ti i:a"a:r:r ia '.

Digital pressure switch for energy-saving control ejector

digit Hysteresis Hysteresis mode Adjustable (can be set from 0) 1 Display 3 1/2 digits, 7-segment display, colour display (Red) Indicator accuracy +/-2%F.S., +/-1 digit (at ambient temperature 25+/-3 oC) Indication LED Light when ON OUT1: Green OUT2: Red Environment Enclosure IP40 Ambient temperature range 5 to 50 oC Withstand voltage 1000 VAC for 1 minute between live parts and case insulation

Slide Unit/Double Rod Type Series CX2 Slide Bearing: ø10, ø15, ø25

Table (1) Air-hydro/Piston Speed Plate mounting Housing mounting Model CX2H15 CX2H25 Refer to the below. Note 1) 5 to 50 mm/s 5 to 40 mm/s 5 to 100 mm/s Note 1) Consult with SMC when the air-hydro type is mounted on a plate.

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

1 i q !4 r e !0 !1 q i !2 o !3 y Component Parts No.

Fluoropolymer Piping Equipment

Refer to back page 50 for Safety Instructions. LQ1 LQ3 Tubing O.D. Body class Metric sizes Inch sizes LVN LVN 4 6 8 10 12 1/8" 3/16" 1/4" 3/8" 1/2" Piping 2 3 4 LQHB Caution TL TIL 1. Connect tubing with special tools. Note) Refer to page 910 for information on changing tubing sizes.