HRX-OM-Y098

Configuration One thermo-chiller for one controller. 2 2 R D R D 3 3 S D S D 5 5 S G S G Controller Master This product Do not connect any wire to other PIN numbers. Fig. 3-13 Connection of RS-232C 3.3.10 Ethernet Modbus/TCP Communication wiring This product can operate the following by Ethernet Modbus/TCP communication.

SMC Pneumatic Clean Series

MM H1 AL A N B C 18 K N FT H S + Stroke M FX ZZ + Stroke FZ (mm) AL Bore size Stroke range Symbol B B B1 C D E FV FD FT J FX FY MM M FZ A GAGB H P S ZZ H1 K KA N 60 12 80 42 11 22 M8 x 1.25 27 44 40 33 15 51 16 Up to 1000 8 6 14 1/4 32 30 60 27 9 71 100 102 164 M14 x 1.5 70 12 90 50 11 27 M8 x 1.25 30 52 50 35 17 58 20 Up to 1000 11 7 18 3/8 40 35 70 32 9 81 110 108 177 M18 x 1.5 85 15 59

3 Port Solenoid Valve

Flow Characteristics Port size 12 Flow characteristics Manifold 23 Port 1, 2, 3 C[dm3/(s bar)] C[dm3/(s bar)] b 0.13 0.10 0.26 0.16 b 0.26 0.16 0.13 0.10 Cv 0.007 0.016 0.012 0.020 Cv 0.012 0.020 0.007 0.016 V114 V114A V124 V124A 0.032 0.070 0.050 0.085 0.050 0.085 0.032 0.070 Type VV100-S41 M5 x 0.8 Note) Values when mounted on the manifold base (5 stations).

Booster Regulator Series VBA1110 to 4200 1

Then, the charging time (T) for a 100 l tank, T = t x = 49 x = 49 (s). V 10 10 10 T = t x = 110 x = 110 (s). V 10 10 10 T = t x = 2.4 x = 24 (s).

High Vacuum L Type Valve

Disassembly procedure Step 1 Step 2 Bolt c 3 Bolt b S valve seal assembly 1 2 O-ring 4 Bonnet assembly Heater Pilot port M Bolt a Cover Pilot port S Body The heater is removed by loosening bolt a. Bolt a is behind the cover. Remove the cover using a watchmaker's screwdriver. Apply 0.2MPa of air pressure to the pilot port M.

CE

phase J 24-M3 x 0.5 A B C D t A COM COM COM B DC12V GND F.G.

HRX-OM-W060

(B contact). Contact output signal 5selects Signal type and N.O. (A contact ) or N.C. (B contact). Contact output signal 6selects Signal type and N.O. (A contact) or N.C. (B contact).

modular-press-e

Contact SMC regarding the specifications for psi unit and F. 229 Filter Regulator with Built-in Pressure Gauge with Backflow Function AWG20K/30K/40K Construction AWG20K AWG30K/40K B D P A A K U C C C S O P H L to K U C S O H L to B D D-D C-C A-A B-B !0 o !1 !0 o !1 y y !2 !

Modular F.R.L. Pressure Control Equipment

Contact SMC regarding the specifications for psi unit and F. 229 Filter Regulator with Built-in Pressure Gauge with Backflow Function AWG20K/30K/40K Construction AWG20K AWG30K/40K B D P A A K U C C C S O P H L to K U C S O H L to B D D-D C-C A-A B-B !0 o !1 !0 o !1 y y !2 !

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

Box type (Built-in silencer) B S 07 ZH 06 06 Body ported type (Without silencer) D S 07 ZH 01 01 01 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com EXH. port size Note) Nozzle diameter Symbol Size Style One-touch One-touch One-touch One-touch One-touch Screw-in Screw-in

Vacuum gripper

152.9 ZP 13 C 152.9 ZP 16 C 153.4 ZP 20 C 154.9 ZP 25 C 154.9 ZP 32 C 155.4 ZP 10 B 156.9 ZP 13 B 159.4 ZP 16 B 160.9 ZP 20 B 164.4 ZP 25 B 164.9 ZP 32 B 169.9 ZP 20 UT 150.9 ZP 16 J 164.9 ZP B25 J 183.4 ZP B30 J 189.9 ZP3P 20 JT2 SF 169.1 ZP3P 20 JT2 SF M 169.1 ZP3P 32 JT2 SF 180.5 ZP3P 32 JT2 SF M 180.5 ZP3P 20 JT5 SF 182.6 ZP3P 25 JT5 SF 186.4 ZP3P 32 JT5 SF 200.9 0 0 Note

VCA

S = 6mm 5. S = 15mm 4. S = 10mm 7. S = 27mm 5. S = 15mm 7. S = 27mm 10. S = 38mm VCA21 200 300 400 500 600 700 VCA21 VCA31 VCA31 VCA41 VCA41 VCA41 Other 200 400 400 600 800 1000 1200 1.

10

K LL B RJ RJ RB With cap Cap MM h Cap bracket E G H S Z LL Basic type Dimensions Hexagon nut With cap Model B h C E LL Z D 6 H 46.8 LL 40.8 S MM 5 G 7 K RJ0806U RJ1007U RJ1412U RJ2015U RJ2725U RJ0806 RJ1007 RJ1412 RJ2015 RJ2725 2.8 M8 x 1.0 12 4 6.8 55.3 8.5 13.9 7 52.3 45.3 7 9 3 M10 x 1.0 14 4 8.7 62.3 10 16.2 12 79.1 67.1 8 12 5 M14 x 1.5 19 6 12 92.6 13.5 21.9 15 88.2 73.2 10 17 6 M20

Compact Cylinder with Air Cushion

Hs A B A B 32 to 100 D-A73C D-A80C D-J79C D-A79W D-F7V D-F7WV D-F7BAVL Approx.

AIR COMBINATION

AC-OMT0014-A PRODUCT NAME AIR COMBINATION MODEL/ Series AC10(A,B)-A AC20(A,B,C,D)-B AC25(B,C)-B AC30(A,B,C,D)-B AC40(A,B,C,D)-B AC50(A,B)-B AC55(B)-B AC60(A,B)-B Contents PAGE 1. PRECAUTION FOR SAFETY 18 2. APPLICATION 9 3. SPECIFICATIONS. . . 9 4. SERIESMAP AND COMBINATION OF EQUIPMENT. . . 10 5. HOW TO ORDER 1118 6. ATTACHMENTS / ACCESSORIESOPTIONSPART NUMBER 19 7.

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

M4 mounting hole A B 1 0 A B 1 0 A B 1 0 A B 1 0 9 61.5 A A A A R4.5 26 62.5 97 = 4.5 (5.5) (35) (L3) (5.2) 52 (L4) Stations D side U side 1 2 3 4 5 6 7 8 n 2-C6 P(SUP) port P A P A A A A A A A 24.5 (11) 13.5 R B R B B B B B B B (7.5) 7 2-C6 R(EXH) port 19.2 P = 11 2n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 threads Broken

ZQ-OM01301

B Slotted locking type O.D.

Air Cylinder Series MB

Note 1) In case of types with no air cushion, a rubber bumper is used. 4 Series MB Without Mounting Bracket Cushion valve Basic/(B) WV Port G 2-RcP MM G With rod boot E E D e MB Effective thread 2 x 4-J C B A K F N MA 13 9 f l N h S + Stroke H ZZ + Stroke Without air cushion Bore size (mm) Bore size (mm) S ZZ S ZZ Model without air cushion is designed to include rubber bumpers.

Pressure Relief 3 Port Valve with Locking Holes

N)02~(F,N)04(-B,S)(-K,M,R,Z)-D VHS40W-(F,N)06(-B,S)(-K,M,R,Z)-D VHS50W-(F,N)06~(F,N)10(-B,S)(-K,M,R,Z)-D Contents Page 1.

ZQ

ZF Left Right 15 -60 -60 ZP 10 -40 -40 Air consumption ZCU -20 -20 5 S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U NL HL H S 1 S 2 R U NL HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP