High Vacuum L Type Valve

As this product has pressure balanced construction, the exhausting direction is free. 8 XL*-OMI0013-B 5.Dimensions 26 41 K J 72 53010 OPERATION INPUT K J V L C B 39 C B 69 XLS-**-P*G (with control power supply) XLS-**-P*G () L G1/2 D XLS-**-** (without control power supply) DIN terminal (D) DIN( D ) XLS-**-** () E D F K2 J L 27010 J M 29010 J K 33 25 G1/2 G1/2 C G C C B B B A A Terminal (

XMA/XYA Series

110 83 96 D G C XYA Series / Straight Valve C B Fd (K Flange) 45 H Fn (KF Flange) A E Unit: mm Model n Fd XYA-25 100.2 79.5 48 1 23.5 40 26 64 XYA-40 130 106 66 2 38 55 41 84 XYA-50 178 119 79 2 53 75 52 95 XYA-63 209 149 100 3 61 87 95 70 118 XYA-80 268 178 117 3 80 114 110 83 142 9 XM-OMP0001-A 5.

Title not found

MEM MEM 5/8 41/64 27/32 1 1/8 3/8 MEM 1/4 Typ. Slim line coupler not shown 5/8 27/32 1 1 C6 C2-SL C2 C4 C8 C6 C3 C1 C5 C2 1/2 C7 C3 1/2 Reducing Couplings not shown Note not shown not shown 1 1/8 7/16 Dia. 3/8 Dia. Typ. 3/8 Dia. 5/16 Dia. Typ. 1/4 Dia.

1.63

MGPWM Common Dimensions (mm) A E Standard stroke (mm) Bore size (mm) B C DA DB FA FB G GA GB H J K L 50 st or less Over 50 stroke 50 st or less Over 50 stroke 20 25 32 40 50 63 44.5 47 52 56 60.5 67.5 34 35 37 41 42 49 10 10 14 14 18 18 10 12 16 16 20 20 7.5 9 10 10 12.5 12.5 3 3 5 5 6 6 36 42 48 54 64 78 9.9 10.3 11.4 13.5 14 15.5 7.5 8.7 9 10.5 11.1 13.5 137 157 190 206 258 286 18 21 24

MHC2

MHT 41 mm x 20 mm x 10 mm 19 g Port MHY With 4 hose nipple MHW MRHQ Misc. Port MHCM2-7S Smallest size and lightest weight in MHC series.

180 ° Angular Type Air Gripper Rack & Pinion Type MHW2 Series ø 20, ø 25, ø 32, ø 40, ø 50

M5 x 0.8 thread depth 7 (Mounting thread) 17 60 4 x M5 x 0.8 thread depth 10 (Mounting thread) Bottom through hole dia. 4.2 (Mounting hole) 45 2 x M5 x 0.8 thread depth 10 (Mounting thread) 35 23 26 27 36 18 23 7 2 21H9 +0.052 depth 3 0 +0.2 +0.1 12 16 36 26 4 x M4 x 0.7 thread depth 5 M5 x 0.8 (Finger closing port) (Thread for mounting attachment) Auto Switch Mounting Groove Dimensions 41

ML2B

For details, refer to page 10-20-41. Reed switch D-X 20Data 10-13-17

Transfer

Hexagon socket head taper plug) F I B + Stroke 2 x PA (Port for operating cylinder) J J J J D D II 2 x MB, Depth LB II 2 x PB (Hexagon socket head taper plug) 2 x PB (Hexagon socket head taper plug) JJ 28 32 36 A 110 140 170 B 220 280 340 C 206 264 322 D 42 51 59 E 138 168 204 G 30 37 45 H 73 88 106 I 76.5 91 110 J 40 46.5 55 K 46 58 68 L 45.5 54 64 M 30.9 32.4 41.5 N 16 15 19 O 69 84 102 P 41

MU

18 Plate Cylinder Series MU Accessory Bracket Dimensions Single Knuckle Joint Double Knuckle Joint Z + Stroke ZZ + Stroke Z + Stroke ZZ + Stroke (mm) (mm) ZZ 116 127 138 171 175 Z 107.5 117 127 155 159 Z 107.5 117 127 155 159 LX RR 8.5 10 11 16 16 LX RR 8 10 10 16 16 LD LU 11 14 15 20 20 LD LU 13 14 17 23 23 LC 16 18 20 28 28 LC 18 22 26 32 32 LB 27 31 36 46 46 LB 27 31 36 46 46 LA 35.5 41

Secondary Batteries

LEHZ Series E-MY2 Front matter 17 a C O N T E N T S Product name Series Page Product name Series Page Directional Control Valves Air Grippers Directional Control Valves Air Preparation Equipment Vacuum Equipment Detection Switches Auto Switches Flow Control Related Products Air Filters/Pressure Control Equipment Actuators Air Grippers 90-SV 90-MHZJ2 90-MHZL2 MHL2 90-MHS P.38 P.39 P.40 P.41

Low Friction: Double Acting Single Rod Series CM2Q ø20, ø25, ø32, ø40

9 Rod seal NBR Basic (B) CM2QB Bore size Stroke (mm) Stroke range 1 to 300 1 to 300 1 to 300 1 to 300 S 65 65 67 91 N 15 15 15 21.5 Bore A 18 22 22 24 B2 26 32 32 41 D 8 10 12 14 H2 8 8 8 10 I 28 33.5 37.5 46.5 ZZ 119 123 125 157 NA 24 30 34.5 42.5 AL 15.5 19.5 19.5 21 E F 13 13 13 16 K 5 5.5 5.5 7 NN M20 X 1.5 M26 X 1.5 M26 X 1.5 M32 X 2 B1 13 17 17 22 G 8 8 8 11 MM M8 X 1.25 P 1/8 1/8 1

CRQ2

38 47.5 Reed switches A 6.5 9.5 9.5 13.5 22 28 29 37 34 43.5 Rotation angle Size Operation range m Operation range m Switch actuation range Switch actuation range B 13 22.5 18 30.5 34.5 53.5 45 68 53 81.5 B 17 26.5 22 34.5 38.5 57.5 49 72 57 85.5 90 63 12 75 3 10 180 90 52 9 69 3 15 180 A 90 B 41 9 56 4 20 180 90 32 7 43 3 30 180 90 Operating range at proper mounting position (Lm/2) 24 5

CU

Contact protection box OUT(+) Brown [Red] Lead wire length: 0.5m 7 7 6 7 8 8 Resistor Reed switch Lead wire length: 3m 35 35 30 35 41 41 Zener diode CD-P11 OUT() Blue [Black] Contact Protection Box CD-P12 Blue [Black] D-A96(V) Contact protection box internal circuits Type D-A9 switches do not have built-in contact protection circuits.

Electric Actuator with Integrated Guide

Refer to page 66 for part numbers. 37 41 Non-standard Motor 10mm/6mm lead Series LTF6 Motor Output Rolled Ball Screw 100W Horizontal Mount How to Order Motor/switch entry direction Stroke E LTF6 NF 1 G X10 Left entry Power supply voltage Motor specification Switch specifications Right entry Matsushita Electric Industrial Co., Ltd.

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8 1

75.6 77.7 84.2 85.8 84.2 85.8 84.2 85.8 12.8 15.2 12.8 15.2 15.2 18.5 15.2 18.5 15.2 18.5 18.5 20.9 18.5 20.9 18.5 20.9 69.9 71.8 69.9 71.8 81.1 83.2 81.1 83.2 81.1 83.2 88.2 89.8 88.2 89.8 88.2 89.8 63.9 65.8 63.9 65.8 73.6 75.7 73.6 75.7 73.6 75.7 82.2 83.8 82.2 83.8 82.2 83.8 17 19 17 19 19 21 19 21 19 21 21 22 21 22 21 22 19 21 19 21 21 23 21 23 21 23 23 24 23 24 23 24 22 23 30 31 39 41

MHC2

MHT 41 mm x 20 mm x 10 mm 19 g Port MHY With 4 hose nipple MHW MRHQ Misc. Port MHCM2-7S Smallest size and lightest weight in MHC series.

ARJ310

CAT.ES40-41 A Miniature Regulator Series ARJ310 Improved flow characteristics 0.7 Conditions: Upstream pressure 0.7MPa 0.6 Downstream pressure MPa 0.5 ARJ310-01 0.4 0.3 0.2 ARJ210-M5 0.1 0.0 0 100 200 300 400 500 Flow rate l/min (ANR) Compact and light weight Allows smaller mounting pitch 18.3mm A Accommodates two types of threads Inside: Female thread (M5 x 0.8) Outside: Male thread (1/8

Flow Control Equipment

AS22l 1FG-02 AS32l 1FG-03 AS42l 1FG-04 / 1 8 / 1 4 4.1-38 / 3 8 / 1 2 Applicable tube O.D Applicable cylinder bore size (mm) Page Metric size (mm) Inch size (Inch) Model Port size in cylinder side / 1 8 / 5 32 / 3 16 / 1 4 / 5 16 / 3 8 / 1 2 3.2 4 6 8 10 12 With One-touch Fittings/Elbow 6 to 20 20 to 32 20 to 40 AS12l1FM-M5 AS22l1FM-01 AS22l1FM-02 M5 Flow Control Equipment / 1 8 / 1 4 4.1-41

MK

Model A G I J Q U X T B H K L O V Yh9 Z C P D E R F 0 0.062 0 0.062 0.1 0.2 0.1 0.2 0.1 0.2 0.1 0.2 0.15 0.15 MKB32 31.5 9 Depth 7 M10 X 1.5 93.5 71.5 Rc(PT)1/8 37 45 5.5 12 16 3 7.5 60 18 6.5 34 4.5 54 14 0.15 20 0.15 7 30 MKB40 65 29.5 35 9 Depth 7 M10 X 1.5 94.5 Rc(PT)1/8 52 5.5 12 16 3 8 69 18 6.5 40 5 61 14 24 7 30 0 0.062 0 0.062 0.15 0.15 MKB50 11 Depth 8 M12 X 1.75 112 76.5 34 10.5 41

MLGP

122 124 124 40 50 63 M10 x 1.5 M10 x 1.5 MLGPL (ball bushing)/Dimensions A, DB, E MLGPM (slide bearing)/Dimensions A, DB, E (mm) (mm) A E A E Bore size (mm) Bore size (mm) DB DB st50 5041