Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY Temperature specifications Symbol Nil M9N (L) M9P (L) M9B (L) A90 (L) A93 (L) M9// Symbol Nil H0 Temperature range 5 to 60C 5 to 150C Without auto switch (without built-in magnet) Remarks Auto switch D-M9N (L) D-M9P (L) D-M9B (L) D-A90 (L) D-A93 (L) Solid state switch 6. No. of auto switches/Detecting position Quantity Without auto switch 2 pcs. 1 pc. 1 pc.
3 (R) 1 (P) 3 (R) Pilot pressure (MPa) Pilot pressure range 0.5 N.C.
control Port 1 0: L+ ON, 1: L+ OFF 1 L+ control Port 2 0: L+ ON, 1: L+ OFF 5 2 L+ control Port 3 0: L+ ON, 1: L+ OFF 3 L+ control Port 4 0: L+ ON, 1: L+ OFF 4..7 Reserved 0 -105No.EX-OMX1011 Configuration format (EX600-LAB1 / EX600-LBB1) Byte 6 to 45 EX600-LAB1 / EX600-LBB1 (46 byte) Byte Bit Parameter Setting value PortConfig Port 1 0: Deactivated 1: IOL_Manual 2: IOL_Autostart 3:
M4 mounting hole A B 1 0 A B 1 0 A B 1 0 A B 1 0 9 61.5 A A A A R4.5 26 62.5 97 = 4.5 (5.5) (35) (L3) (5.2) 52 (L4) Stations D side U side 1 2 3 4 5 6 7 8 n 2-C6 P(SUP) port P A P A A A A A A A 24.5 (11) 13.5 R B R B B B B B B B (7.5) 7 2-C6 R(EXH) port 19.2 P = 11 2n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 threads Broken
MHR3-10R/MDHR3-10 MHR3-15R/MDHR3-15 0.6 L L L L 0.6 Pressure ( MPa) Pressure ( MPa) 0.5 0.5 Gripping point 0.4 L: Distance to the gripping point 0.4 Internal grip 0.3 0.3 0.2 0 10 20 30 40 50 0.15 0.2 0 10 20 30 40 50 Gripping point L (mm) Gripping point L (mm) Gripping point Effective Gripping Force Guidelines for the selection of the gripper with respect to component mass Selection of
As this product has pressure balanced construction, the exhausting direction is free. 8 XL*-OMI0013-B 5.Dimensions 26 41 K J 72 53010 OPERATION INPUT K J V L C B 39 C B 69 XLS-**-P*G (with control power supply) XLS-**-P*G () L G1/2 D XLS-**-** (without control power supply) DIN terminal (D) DIN( D ) XLS-**-** () E D F K2 J L 27010 J M 29010 J K 33 25 G1/2 G1/2 C G C C B B B A A Terminal (
(p)3R2R5R1 3(R2 3(R2 3(R2 3(R2 R) R) R) R) 5(R1) 5(R1) 5(R1) 5(R1) 1 1 1 1 P P P P) ) ) ) VQZ100/1000 KQ2H06-M5 AN120-M5 KJS04-M5 VQZ200/2000 KQ2S06-01S INA-25-46 IN-457-32(6 ) VQZ300/3000 KQ2H08-02S AN101-01 KQ2H06-01S 3 3 3 3 VQZ VQZ VQZ VQZ 82 82 82 82 ,N.C.
E EtherCAT 9 EtherNet/IP P PROFINET D DeviceNet L IO-Link Mounting 7 Screw mounting 8*1 DIN rail *1 The DIN rail is not included. It must be ordered separately. (Refer to page 7.) * Only the step motor type is applicable.
/See 2.1 Specifications on p.9 /See 3.1 Specifications on p.12 Use within specification range. 3) Load/resistance more than /See 2.1 Specifications on p.9 specified range is being applied /See 3.1 Specifications on p.12 to the actuator.
L 2-1/8 PILOT EXH PORTS 15 33.5 A A B B 29.5 29.5 5-1/4 PORTS M12 CONNECTOR (OPTIONAL) 2-7 MOUNTING HOLES 43.5 23 23 11.5 14 14 4 2 12 12 25 17 18 25 5 1 3 46.5 12 12 2-3/8 EA,EB PORTS 22.5 22.5 L = 1/4 23.5 15 30.5 45 3/8 27 EA EB P 1/2 30.5 49.5 1/4, 3/8,1/2 P PORT 152.5 165.5 ALL DIMENSIONS ARE IN MILLIMETERS 11 Series VS R8b S ISO SIZE 2-3 SUB-BASE VS8w 03/04/06/10w SIZE 2 3/8, 1/2, 3
Bore size 20, 25/MLGPM20/25 (Slide bearing) Operating Range as Stopper for MLGPM20/25 100 25 l = 50 mm l = 50 mm Weight of transferred object: m (kg) m m 20 5 10 10 20 30 40 50 Transfer speed: (m/min) Bore size 32 to 100/MLGPM32 to 100 (Slide bearing) Operating Range as Stopper for MLGPM32 to 100 1000 Weight of transferred object: m (kg) l = 50 mm l = 50 mm 100 m m 80 63 50 40 32 100
Symbol x 50 001 005 010 020 050 075 100 002 004 006 013 q q w w 0.01 0.01 e r e 0.005 0.005 r 0.002 5 10 50 100 0.002 10 50 100 Flow rate l/min (ANR) Flow rate l/min (ANR) Note) The recommended flow rate is the rate for an initial pressure drop of 0.01 to 0.02 MPa. 2 Series FQ1 How to Order Filters Element and Seal Part Numbers 1.
Symbol x 50 001 005 010 020 050 075 100 002 004 006 013 0.01 0.01 0.005 0.005 0.002 5 10 50 100 0.002 10 50 100 Flow rate l/min (ANR) Flow rate l/min (ANR) Note) The recommended flow rate is the rate for an initial pressure drop of 0.01 to 0.02 MPa. 2 Series FQ1 How to Order Filters Element and Seal Part Numbers 1.
Without bracket Air pressure supply (P) port Thread size: Q R J K Note 1) 4 x Sa Thread depth Sb 2 x L O H I N G A M Vacuum flow Dust bag When dust bag is mounted T F E D Suction air Discharge air Suction air U C C B Hose band V (mm) A 73 B 34 C 19 D 10 E 13.2 F 16.2 G 69.8 H 31 I J 35 K 27 L 4.5 M 35 N 18 O P 13 Q Rc1/8 R 28 Sa M3 x 0.5 Sb 5 T 300 U 150 V 190 Model ZH10--X185 ZH20--X185
When selecting a model with a longer l dimension, be sure to choose a bore size which is sufficiently large.
(A) 2 L: L style (VQ20 Only ) 1 1 (p) Note) Consult SMC if N.O. is desired. Note) If ordering both options, indicate "LF".
2 position SYJ3000 Double Single Double D4.5 (0.25) 2 position VZ3000 P.1652 Single -X 12.5 (0.7) VZ5000 2 position Double Single Double Individual -X 16 (0.9) 2 position VF3000 P.1658 1643 Series MVGQ Precautions 1 Be sure to read before handling.
Model Weight (g) N L A Q M D (mm) 4 6 8 10 12 KQGT04-00 KQGT06-00 KQGT08-00 KQGT10-00 KQGT12-00 10.6 20.6 28.7 4.1 18 6.4 28 3.2 13 22.4 31.4 4.9 18.8 10.6 42 M N D L A 15 25.5 36.3 6.1 20.9 25.6 57 D 4.2 18 28.6 40.6 7.1 23 40 95 Q 20.8 31.4 44.5 8.1 24.8 57.4 129 M M L L Note 1) D is maximum diameter.