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SW RESET RUN2 RUN1 OV INPUT 6 7 5 8 4 + 9 3 SET UP A 2 B 1 0 C D 1 E F 0 to 10V V R 1 OUTPUT SET UP BALANCE CONTROLLER VYU5-D 2 V R 2 OV ERR.

R: Right (OUT side) L: Left (IN side) Made to Order Specifications (For details, refer to pages 1955 to 2021.) MXP L R MXY Theoretical Output Dual rod cylinder produces double the thrust of standard cylinder.

JAS Series How to Order Port size M3 M3 x 0.5 M5 M5 x 0.8 U10 10-32UNF JAS L E A 04 M5 JAS L E A S 04 01 Seal method Type L Elbow Nil Without sealant S With sealant Control type1 Port size E Meter-out S Meter-in 01 1/8 1 Meter-out and meter-in types can be visually identified by the color of the knob.

No.: IZ-OMR0035 IZF21--S (with Automatic cleaning unit) IZF31--S (with Automatic cleaning unit) IZF21--W (with Louver) IZF31--W (with Louver) IZF21--U (with Filter) IZF31--U (with Filter) 32 Doc. No.: IZ-OMR0035 Power supply cable IZS41-CP Product No.

Leakage voltage Take note that the leakage voltage will increase when a resistor is used in parallel with a switching element or when a C-R circuit (surge voltage suppressor) is used for protecting a switching device because of the leakage voltage passing through the C-R circuit. The suppressor residual leakage voltage should be as follows.

Leakage voltage Take note that the leakage voltage will increase when a resistor is used in parallel with switching element or a C-R circuit (surge voltage suppressor) is used for protecting a switching device because of the passing leakage voltage through the C-R circuit. The suppressor residual leakage voltage should be as follows.

XL1A16-2-101-XN1 Suffix for seal materials Seal material EPDM Barrel Perfluoro R Kalrez R Chemraz R VMQ FKM for PLASMA Combination No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 Symbol -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 Note 1) Barrel Perfluoro R is a registered trademark of MATSUMURA OIL Co.,Ltd. Kalrez R is a registered trademark of E.

01-1,2 VVFS2000-R-02-1,2) ( ) ( ) 3 1 DC 3 () -4No.VFR2000-OMM0001 5 5 5 5 0.1 2 C-R () C-R DC 3% AC 20% (SSR )AC 1) (C-R )OFF 2)() ZNR 1V -10 -5No.VFR2000-OMM0001 5 5 5 5 1.5~2 1) 2)1 ()ISO VG32 MSDS 3)2 ()ISO VG32 M5 1/61/4 1.5Nm Rc Rc1/8 79 Rc1/4 1214 -6No.VFR2000-OMM0001 5 5 5 5 ( ( ( ( ) ) ) ) 5m 3 30 () 1 VG32 2 ()ISO VG32 -7No.VFR2000-OMM0001 G : DC +(+)(-) E T D Y

Nut assembly (9) XL1A50-10-1 XL1A80-10-1 Suffix for seal materials Seal material EPDM Barrel Perfluoro Kalrez Chemraz VMQ FKM for R R R PLASMA Combination No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 Symbol -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 Note 1) Barrel Perfluoro is a registered trademark of MATSUMURA OIL Co.,Ltd. R Kalrez is a registered trademark of E.

Ejector stations Port & silencer position 1 station 01 Right side Left side Both sides R L S 10 stations (Max.) 10 Note) Left and right as viewed with the VAC port in front Thread type Common exhaust port size 1/2 3/4 ZZMA dedicated silencer (ZZM-SA) 04 06 S Rc NPTF G Nil T F When placing an order, include the single type ejector models to be manifolded together with the manifold part

Ejector stations Port & silencer position 1 station 01 Right side Left side Both sides R L S 10 stations (Max.) 10 Note) Left and right as viewed with the VAC port in front Thread type Common exhaust port size 1/2 3/4 ZZMA dedicated silencer (ZZM-SA) 04 06 S Rc NPTF G Nil T F When placing an order, include the single type ejector models to be manifolded together with the manifold part

suppressor Nil Z S None With light/surge voltage suppressor With surge voltage suppressor S is not available for AC.

M5 Port size M5 x 0.8 fluid contact Materials in Pressure-sensing part Silicon part Piping port PBT, CB156, PPS, epoxy resin, O-ring: Silicone rubber Weight Body 25 g Lead wire with connector +39 g Cable specifications Conductor area 0.15 mm2 (AWG26) Insulator Outside diameter 1.0 mm Color Brown, Blue, Black, White, Gray (5 core) Sheath Finished outside diameter 3.5 -76No.PS-OMX1005 Dimensions

EVS1 01 3 M0 Valve Thread type Size Nil F T 01 02 Rc Size 01 G Size 02 NPTF Passage symbol Port size (A) 4 (B) 2 Size 02 Size 01 Piping specifications Symbol Nil A01 A02 FG Without sub-plate 1 (P) 5 (R1) 3 (R2) Side-ported 1/8 (A) 4 (B) 2 Side-ported 1/4 FHG Number of solenoids 1 (P) 5 (R1) 3 (R2) Sealing type S D (A) 4 (B) 2 Single Nil R Metal seal Double FJG Rubber seal 1 (P) 5 (R1

M5 M5 M5 M5 1)When using SMCs fitting, etc. After tightening by hand, give it additional 1/6 turn with a wrench. (1/4 turn for miniature fittings.) In case that two gaskets are equipped such as universal elbow or universal tee, give it additional 1/2 turn with a wrench.

Port size (A port) Option M5 M5 x 0.8 01 1 8 Nil None With bracket (Not assembled) P, R port: M5 Note1) Applicable only for DIN terminal type Note2) For other rated voltages, please consult with SMC. F Thread type Rc G NPT NPTF Nil F N T Option Part No. Description Part no.

Auto switches are shipped together (not assembled). 92 Air Slide Table Series MXQ Specifications 6 8 12 16 20 25 Bore size (mm) M5 x 0.8 Rc 1/8, NPT 1/8, G 1/8 Piping port size Air Fluid Double acting Action 0.15 to 0.7 MPa Operating pressure MXH 1.05 MPa Proof pressure 10 to 60C Ambient and fluid temperature MXU 50 to 500 mm/s (Adjuster option/Metal stopper: 50 to 200 mm/s) Piston speed

ASD Body size Port size M5 M5 x 0.8 U10/32 10-32UNF 1 M5 x 0.8 10-32UNF AS AS-FE 2 F A 1 AS 1 M5 06 0 E KE Body size 1 AS-FG F A 1 AS 2 01 06 2 0 S Body size 2/3/4 AS-FP AS-FM Body size Made to Order Refer to page 562 for details.

Body size Port size M5 M5 x 0.8 U10/32 10-32UNF 1 M5 x 0.8 10-32UNF AS 2 0 F A 1 1 M5 06 G Body size 1 AS 2 0 S F A 1 2 01 06 G Body size 2/3/4 Body size Made to Order Refer to page 678 for details. 2 1/8, 1/4 3 3/8 4 1/2 Push-lock type Type 2 Elbow 3 Universal Seal method Nil Without sealant S With sealant Note) Face seal method is used for the G thread type.