Process Valve

GS Grommet with surge voltage suppressor G Grommet DZ E Grommet terminal EZ Grommet terminal with light/surge voltage suppressor T Conduit terminal TZ Conduit terminal with light/surge voltage suppressor D DIN terminal DZ DIN terminal with light/surge voltage suppressor Accessory Function plate for VO307 (D sealing, with thread): DXT152-14-5A Construction N.C. N.O.

3 Port Air Operated Valve

x 0.8 (Breathing hole) VFA 7.5 L2 L1 VFRA (Station n) (Station 1) 1/8 12(PA) port VPA4 12 SYJA 73.5 54 VZA 37.5 11 2A 2A VTA 1/4 2(A) port (Pitch) P = 27.5 28 VGA 2 stations 83.5 68.5 111 96 138.5 123.5 166 151 193.5 178.5 221 206 248.5 233.5 276 261 303.5 288.5 331 316 358.5 343.5 386 371 413.5 398.5 441 426 468.5 453.5 496 481 523.5 508.5 551 536 578.5 563.5 3 4 5 6 7 8 9 10 11 12 13 14

VZA2000

4.5 Mounting hole 18 14 3 x Rc , 2 x Rc 18 2 x M5 x 0.8 sub-plate side Pilot port (A side) (R1, R2 port) (P , A, B port) Pilot port (B side) Sub-plate side 1761

Manifold Specifications

Unused Lead wire assy (13 stations) U side 6 stations Pin (14 stations) (n) Confirm an insertion of the lead wire assy after the insertion of pin by light pulling of the lead wire. 4. Mount the end plate !2 and !3 and tighten the bolt !1. 7 stations (15 stations) Note 1) Be careful that the packing and the O-ring do not fall out of the groove. Note 2) The tightening torque of bolt !

XM, XY

XMA series with KF (NW) flange A (mm) Model Weight (kg) Conductance (L/s) B (mm) CYV XMA-16 40 103 0.33 5 XMA-25 XMA-40 XMA-50 50 113 0.61 14 B 65 158 1.40 45 70 170 2.00 80 A 160 XMA-63 XMA-80 88 196 3.60 90 235 6.20 200 A : Common to all series. 479 Series Variations Operating pressure Flange size Shaft seal system Models Valve type Angle type In-line type Options Application Switch Indicator

Compact and Lightweight

Applicable model A B C D E F G H J L t AS-10D ZH05/07/10DA 11 18 3.5 3.4 18.2 23.2 45 6.2 11.2 14 1.6 AS-25D ZH13/15DA 17 25.8 4.4 4.5 22 27 20 AS-30D ZH18/20DA 22 30.8 27.2 32.2 22 231 ZH Series Circuit Examples Caution Handling of Circuits Select the related air preparation equipment with applicable size in reference to the circuit example below.

Ejector Valve Unit Series ZYY/ZYX

Attaching and detaching connectors ZSE1-14, -15 The ON pressure is set with the pressure setting trimmer. High vacuum settings are obtained by turning it clockwise. When setting, use a flat head screw driver which fits the slot in the trimmer, and turn it gently with your finger tips.

Related Products: Heavy Duty Auto Drain Series ADH4000 1

Refer to pages 14-21-3 to 4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and pages 14-14-6 to 8 for Precautions on every series. Caution on Design Mounting Caution Caution 1. Install with out port down in a vertical position. Inclination from the vertical line should be less than 5. 2.

CJ2X/CUX/CQSX/CQ2X/CM2X

RHC Nil Without auto switch (Built-in magnet) Stroke MK(2) For the applicable auto switch model, refer to page 10-3-14.

MGQ

MGQM, MGQL Common Dimensions Bore size (mm) Standard stroke (mm) B Z G NN F MM ML DA L R C H K Q X GA GB J P PW S T TA TB V W YY YL 32 40 50 63 80 100 1/8 1/8 1/4 1/4 3/8 3/8 16 17 17 19 21 25 51 51 59 72 92 112 12.5 14 14 16.5 19 23 114 96 48 112 80 100 8 8 10 10 16 16 20 20 25 25 30 35 16 16 20 20 25 30 38 38 44 44 56 62 37.5 44 44 49 56.5 66 26 26 30 36.5 46.5 56.5 30 30 40 50 60 80 47.5

Cylinder with Turntable Series MGT ø63, ø80, ø100 1

18.5 23.5 Proper Mounting Position (mm) a b 14 18 17 c 20 24 23 d D-A9 type D-M9 type D-F9 W type 2 6 5 8 12 11 In order that adjacent switches do not misoperate, they should be set within 1 mm of the proper mounting positions indicated in the table above.

EXxx-OMQ0015CN

Content 0 10 1 11 2 12 3 13 4 14 5 15 6 16 7 17 Unit diagnostic status 1 7 6 5 4 3 2 1 0 Byte 3 Bit No.

Sensor Monitor

[January 2022] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2016-2022 SMC Corporation All Rights Reserved. No.PS-OMU0012-C

PFxx-OMJ0005CN

No.PF-OMJ0005CN-I () // PFM7## 2 10 13 14 14 16 17 20 22 22 F0 23 F1 OUT1 24 F2 OUT2 27 F3 28 F4 29 F5 30 F6 31 F7 32 F8 35 F9 36 F10 38 F11 39 F12 40 F13 41 F98 42 F99 44 45 49 50 53 54 54 57 59 73 -1No.PF-OMJ0005CN-I (ISO/IEC)(JIS) *1) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules

PFxx-OMO0004CN

B AC (83) C A B -16No.PF-OMO0004CN-E 0.450.55 Nm ,, (ZS-33-M) (ZS-33-MS) M34 (84) M3 M3 -17No.PF-OMO0004CN-E M3(2) 0.350.45 Nm (84) M3 DIN DINDIN DIN0.350.45 Nm () DIN DIN F02(G/14)DIN DIN -18No.PF-OMO0004CN-E IN8cm 2F.S.

Digital Flow Switch

No.PF-OMP0002-H PRODUCT NAME Digital Flow Switch MODEL / Series / Product Number PFMB7501 PFMB7102 PFMB7202 Contents Safety Instructions 2 Model Indication and How to Order 10 Summary of Product parts 11 Definition and terminology 12 Mounting and Installation 14 Installation 14 Piping 16 Wiring 17 Outline of Settings [Measurement mode] 21 Flow Setting (set value only) of OUT1 OUT2 [3 step

PFxx-OMP0001CN

No.PF-OMP0001CN-F // PFMB7501 PFMB7102 PFMB7202 2 10 11 12 14 14 16 17 [] 21 OU1OUT2 {3 ] 22 22 [] 24 25 F0 26 F1 OUT1 28 F2 OUT2 36 F3 41 F10 42 F13 43 F20 44 F22 45 F30 46 F31 47 F80 OFF 48 F81 49 F90 50 F98 52 F99 53 54 58 59 61 62 62 65 67 -1No.PF-OMP0001CN-F (ISO/IEC)(JIS) *1) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems

PFxx-OMS0001CN

[cm] -70No.PF-OMS0001CN-A PFMC7501/7102/7202 2x A B D E F H K L N PFMC7501/7102 Rc1/2NPT1/2 70 30 60.6 41.2 15 14 26 18 13.6 PFMC7202 Rc3/4NPT3/4G3/4 90 35 66.1 46.7 17.5 24 31 28 16.8 PFMC7501/7102 G1/2 76 30 60.6 41.2 15 14 26 18 13.6 S T U V W PFMC7501/7102 24 22 32 40 50 PFMC7202 30 30 42 48 58 -71No.PF-OMS0001CN-A M8 (ZS-40-A) -72No.PF-OMS0001CN-A Revision history A [September 2016]

PFxx-OMU0002

Flow direction Rotation of the display 14 No.PF-OMU0002-D Installation Direct mounting Install the product with 4 screws suitable for the product number according to the required tightening torque.

Digital Flow Switch (Remote type sensor unit)

No.PF-OMO0010-C PRODUCT NAME Digital Flow Switch (Remote type sensor unit) MODEL / Series / Product Number PF2A5## Table of Contents Safety Instructions 2 Model Indication and How to Order 10 Summary of Product parts 12 Definition and terminology 13 Mounting and Installation 14 Installation 14 Piping 15 Wiring 16 Troubleshooting 20 Cross-reference for troubleshooting 20 Specification 21 Specifications