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When the conduit type is used as equivalent to an IP65 enclosure, install a wiring conduit, etc. 9. When an impact, such as water hammer, etc., caused by the rapid pressure fluctuation is applied, the solenoid valve may be damaged. Give an attention to it. 3. Corrosive gas Cannot be used since it will lead to cracks by stress corrosion or result in other incidents. 4.

Vacuum Gripper

Do not If using the product in an interlocking circuit Provide a double interlocking system, for example a mechanical system. Check the product for proper operation. Otherwise malfunction can result, causing an accident.

76

101.5 psi (0.7 MPa) with an air compressor, then cooled down to 77F (25C).

MXS

(Unit: mm) A 2 2.5 4 5 5.5 10 B Model MXS 6 MXS 8 MXS12 MXS16 MXS20 MXS25 3 3.11-5 Air Slide Table Series MXS How to Order MXS 12 50 F9N S Air slide table Number of auto switches Bore size (Stroke mm) 2 1 n 6 8 12 16 20 25 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 10, 20, 30, 40, 50, 75, 100, 125 10, 20, 30, 40, 50, 75, 100, 125, 150 10, 20, 30, 40, 50, 75, 100

Aluminum High Vacuum Angle Valve

15 63 70 183 79 2 11 75 52 20 17.5 68 88 217 100 3 11 87 95 70 20 20 72 90 256 117 3 11 114 110 83 20 26.5 98 108 321 154 3 11 134 130 102 20 38 133 138 335 200 3 11 190 180 153 30 40 114 Note 1) Dimension E applies when heater option is included.

Vacuum Unit Ejector / Vacuum Pump System

Do not If using the product in an interlocking circuit Provide a double interlocking system, for example a mechanical system. Check the product for proper operation. Otherwise malfunction can result, causing an accident.

EX510

EX510-VSS EX510-VSQ L 20 20 L 20 20 2.8 2.8 B C A How to Order EX510-V + 10 S S EX510-VWS EX510-VWQ Output Valve connector L 20 20 L 20 20 S W 1 point 2 points Nil S Q None For SY, SYJ series For VQ, VQZ series Note) Cable length (L) 2.8 2.8 10 30 1 m 3 m B C A + Note) VQ is compatible with the positive common only.

Air Slide Table

, 30, 40, 50 Heat treated metal stopper bolt (Adjustment range: 25 mm) 10, 20, 30, 40, 50, 75 Without built-in auto switch magnet 10, 20, 30, 40, 50, 75, 100 Fluororubber seal 10, 20, 30, 40, 50, 75, 100, 125 Anti-corrosive guide unit 10, 20, 30, 40, 50, 75, 100, 125, 150 EPDM seal 10, 20, 30, 40, 50, 75, 100, 125, 150 Theoretical Output IN OUT The dual rod ensures an output twice that of

Dedicated Controller

Never use in an atmosphere of explosive gases. The construction of auto switches is not intended to prevent explosion. Never use in an atmosphere with an explosive gas since this may cause a serious explosion. 2. Do not use in an area where a magnetic field is generated. Auto switches will malfunction or magnets inside actuators will become demagnetized. 3.

Digital Flow Switch

Reference condition for volumetric flow: 101.3 kPa, 20 C, 65%RH The flow measurement which is converted at normal atmospheric pressure conditions at 20 C, 65%R.H. Standard condition (ANR) An output type that has only 2 conditions, ON or OFF. In the ON condition an indicator LED will turn on, and any connected load will be powered.

Fieldbus system (CC-Link compliant)

O A method for insulation by converting an electric signal to an optic signal once and using an element called opt-coupler which shows "1" and "0" when turned on and off. An opt-coupler has a part to convert an electric signal to an optic signal or opposite of it and so can be separated electrically and insulated.

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

P Bore size (mm) W V U T S Z X Y Q Y R R Q HR HN 20 20 107 (115) 12 (14) 104 11 21 47.5 40 48 82 12 26 157 30 M6 x 1 depth 9 Rc 1/8 25 20 25 107 (115) 12 (14) 25.3 37 104 11 21 48 46 57 100 13 31 175 37 Rc 1/8 M6 x 1 depth 13 32 25 32 110 (118) 12 (14) 28.3 40 106 11 21 49 52 65 114 16 38 201 37 Rc 1/8 M6 x 1 depth 13 40 32 40 121 (130) 12 (15) 31.3 43 123 11 25 53 62 84 138 20 47 238 44

33

HED Polypropylene skid HEA Model Weight [kg] Dimensions [mm] HRSE012-A-10 35 Height 745 x Width 465 x Depth 575 HRSE018-A-10 HRSE012-A-10-T 42 Height 745 x Width 465 x Depth 620 HRSE018-A-10-T HRSE012-A-20 38 Height 745 x Width 465 x Depth 575 HRSE018-A-20 HRSE024-A-20 HRSE012-A-20-T 45 Height 745 x Width 465 x Depth 620 HRSE018-A-20-T HRSE024-A-20-T HRSE012-A-23 41 Height 790 x Width 470

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

bracket Port size Model C B A Drain piping F G H J K L B' D E 6 6 1/4 female thread M3 x 0.5 1 4 2.3 15 12 20 50 73 AMC220 40 56 88 100 22 Depth 8 Body size A B C M3 x 0.5 71 88 101 101 121 55 63 83 96 96 116 1 4 3 8 , 56 75 102 118 135 153 AMC320 75 120.5 140.5 2.3 15 20 30 50 123.5 24 55 2 3 5 6 8 9 Depth 8 M4 x 0.7 1 2 3 4 AMC520 102 173.5 193.5 3.2 Depth 8 20 20 30 70 176.5 , 40 70

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

30 40 Load (N) 0 10 20 30 40 Load (N) 0 10 20 30 50 Load (N) 40 10 10 10 L = 100 mm L = 100 mm L = 100 mm Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) MXP10-10 MXP10-20 MXP10-10 MXP10-20 0.04 0.03 0.08 MXP10-10 MXP10-20 MXP10-10 MXP10-20 MXP10-10 MXP10-20 MXP10-10 MXP10-20 0.03 0.06 0.02 0.02 0.04 0.01 0.01 0.02 0 0 0 80 20 40 60 80 Load (N

ZQ-OM01301

60 -60 40 Air consumption -40 30 -40 Suction flow rate 20 -20 -20 10 0 0 0 0 5 10 15 20 25 0.2 0.3 0.4 0.5 Supply pressure [MPa] Suction flow rate [L/min (AMR) ] The flow characteristics curve shows the relationship between the vacuum pressure and the suction flow of the ejector.

CG1

acting/Spring extend (mm) C95 A B A B Bore size Auto switch model Bore size Auto switch model Hs Hs C92 25 50 75 100 125 150 200 25 50 75 100 125 150 200 All strokes All strokes 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 D-C7 D-C7 55 55 80 80 105 24.5 (27) 45.5 45.5 70.5 70.5 95.5 24.5

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

an M5 female thread is used.)

EXxx-OMZ0016

This doubles as a screw hole for mounting. 8 Connector for an output device x 4 Connector for an output device. (PIN2, PIN4: output) 9 Connector for an input device x 4 Connector for an input device. (PIN2, PIN4: input) -23No.EX-OMZ0016-C LED EXW1-RD* The LED indicators at the top right corner of the compact wireless Remote indicate the power supply, communication and diagnostic status.

Guide Cylinder/Compact Type Series MGC

70 95 125 60 32 M8 x 1.25 1/8 104 12 38 67 4 11 8 7 M12 x 1.75 depth 21 45 82.5 115 150 75 38 M8 x 1.25 1/8 115 12 47 T U V W WH W X Y Z Bore size (mm) 20 25 32 40 30 16 112 53 50 23 30 146 182 30 20 132 63 60 25 37 167 199 25 20 132 63 60 28.5 37 167 202 20 25 162 73 70 33 44 210 227 Without Rear Plate Stroke range (mm) Long Stroke R Z Y Bore size (mm) 20 25 32 40 Bore size (mm) 20 25 32