Series VCL

Valve model Port size VCL2 VCW20-12-01 1/8, 1/4 34 40 25 30 12.8 12.8 5 4.5 6 13 VCW30-12-02 1/4, 3/8 42 52 30 40 19 19 6 5.5 7 19 VCL3 VCW30-12-04 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-02 1/4, 3/8 42 52 30 40 23 23 6 5.5 7 19 VCW30-12-04 VCL4 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-06 3/4 56 65 44 53 28.2 28.2 6 5.5 7 26 Bracket material: Stainless steel 3 Series VCL Direct Operated

T/TIA

(mm) 2.5 3 4 4.5 6 7.5 9 13 2.18 3.48 4.57 6.99 9.56 Black (B) Max. operating pressure (MPa) White (W) TIA Series Red (R) Blue (BU) T1613 Yellow (Y) Green (G) T0403 Other metric size Nominal size (inch) 5 32" 5 16" 1 4 3 8 " 3 16" 1 8 " 1 2 " " Nominal size (mm) 0.0 40 20 0 20 40 60 80 100 Specifications 3.2 Operating temperature (C) Fluid Air/Water 20C or less 40C 60C 80C 100C 3.3 2.3 1.65

Low Friction Cylinders Metal Seal Type

Low Friction Cylinders Metal Seal Type 30, 40 newly added Compact Low Friction Cylinder Series MQQ Bore size (mm) 10 16 20 25 30 40 Operating pressure range (MPa) Actuation speed (mm/s) Series MQQT Standard type 0.005 to 0.5 0.3 to 300 0.5 to 500 MQQL Lateral load resisting type (Built-in ball bushing) 0.005 to 0.7 Lateral Load Resisting Low Friction Cylinder Series MQM Series Bore size

Process Valve

(without light), 2 W (with light) 4 W (without light), 4.2 W (with light) Non-locking push type Other (Semi-standard) Non-locking push type Power consumption DC Holding Inrush Apparent power AC VNB11V VNB12V TQ 12 (P1) 12 (P1) External pilot solenoid Manual override Note 1) For How to Order pilot solenoid valves, refer to page 570.

Soft Start-up Valve

Rated coil voltage [V] AC 50/60Hz 100, 200, 110[115], 220[230] *1 DC 24V 10% of the rated voltage 12V 10% of the rated voltage 100V 10% of the rated voltage Allowable voltage fluctuation 10% of the rated voltage 110V *1 [115V] [-15% to +5% of the rated voltage] AC 200V 10% of the rated voltage 220V *1 [230V] 10% of the rated voltage [-15% to +5% of the rated voltage] Power consumption [W]

Fieldbus system (DeviceNet compliant)

Valve series Power consumption SY3000/5000/7000/9000 Standard: 0.4 W (approx. 17 mA) With power saving circuit: 0.1 W (approx. 4 mA) SYJ3000/5000/7000 Standard: 0.4 W (approx. 17 mA) With power saving circuit: 0.1 W (approx. 4 mA) VQZ1000/2000/3000 Standard: 1.0 W (approx. 42 mA) Low wattage: 0.5 W (approx. 21 mA) Refer to "Wiring of the branch cable and connector for connecting load" on

Soft Start-up Valve AV2000/3000/4000/5000 1

/50 Hz, 2.3 VA (1.5 W)/60 Hz Type D DIN terminal Current consumption DC 1.8 W Electrical entry Grommet, Type D DIN terminal, Type Y DIN terminal Indicator light/Surge voltage suppressor (2) Option specifications Non-locking push type (Flush), Locking type (Tool required), Locking type (Lever) Pilot valve manual override Note 1) Use dry air when operating at a low temperature.

Thermo-chiller Series HRS Compact Type (Except HRS050)

fluid system Facility water system Electrical system Temperature range setting Note 2) (C) Cooling capacity Note 4) (50/60 Hz) (W) Temperature stability Note 6) (C) Pump capacity Note 7) (50/60 Hz) (MPa) Rated flow Note 8) (50/60 Hz) (L/min) Tank capacity (L) Port size 5 to 40 1100/1300 1500/1700 0.1 0.13/0.18 (at 7 L/min) 7/7 Approx. 5 Rc1/2 Stainless steel, Copper (Heat exchanger brazing

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

40 3 position 28-1co (2-7kgl / cm,) Ambient and fluid temperature Max.120"F(50"C) Lubrication Not required 1 0 2 0 3 0 4 0 5 0 6 0 7 0 Mounting position Free Supply 0ressure [PSl] 15G/3C. (8s^,roooll, 1rp""YMl""tb" *"i"t.

Electric Actuator / Slider Type 《 AC Servo Motor 》

90 or less (No condensation) Motor output [W] / size [mm] 100/40 200/60 400/60 specificatio Type of Motor AC servo motor (100/200VAC) Electric [Type of Motor: S2,S3,S4] Incremental 17bit encoder (Resolution: 131072 p/rev) n [Type of Motor: S6,S7,S8] Absolute 18bit encoder (Resolution: 262144 p/rev) Encoder [Type of Motor: T6,T7,T8] [With LECSB-T/LECSS-T] Absolute 22bit encoder (Resolution

25

Comparison of potential amplitude between AC type and dual AC type (Installation height of sensor: 300 mm) 40 AC type Surface potential of workpiece (V) 20 25 V or less Dual AC type IZS42 0 20 40 Time Independent Dual AC type is implemented.

Solid State Auto Switches

Applicable Cylinders Weight (g) Cylinder series Bore size (mm) D-G5NB Auto switch model CDM2-Z, CDM2, CDBM2, CDVM3, CDVM5, CDLM2, CDLG1, MLGC CDG1-Z, CDG1 CDA2-Z, CDA2, CDBA2, CDV3, CDVS1, CDL1 MGC, MGG 20, 25, 32, 40 3 m (L) 79 Lead wire length 20, 25, 32, 40, 50, 63, 80, 100 5 m (Z) 125 40, 50, 63, 80, 100 20, 25, 32, 40, 50 Operating Range Bore size (mm) 20 Cylinder series 35 25 40 32

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

When rod end female thread is used, use a thin wrench when tightening the piston rod. 708 Series CM2W-Z 10-/1121-/2220, 25, 32, 40 Double Rod Cylinder RoHS How to Order Clean series 10 11 Relief type Vacuum suction type 10 C D M 2 W L 40 150 F Z M9BW 21 C D M 2 W L 40 150 F Z M9BW Nil Built-in magnet Number of auto switches No Cylinder stroke (mm) D With auto switch (Built-in magnet) Nil

Air Cylinder Series CS1

32 40 8 60 55 34 39 28 4 5 M36 x 1.5 4 x 40 110 86.5 76.5 +0.1 0 0.1 0.3 0.080 0.142 40 50 8 67 70 44 32 4 5 M40 x 1.5 4 x 40 125 94.5 84.5 42.5 CG1 +0.1 0 0.1 0.3 0.080 0.142 40 50 8 67 70 44 40 4 5 115 105 M45 x 1.5 4 x 55 125 180, 200 250 300 42.5 +0.1 0 0.1 0.3 0.080 0.142 50 63 9 86 66 M56 x 2 53 50 5 6 144 132 5 x 65 160 75.5 MB +0.12 0 0.1 0.3 0.100 0.174 63 80 9 71 M64 x 2 66 63

Series VS

Pilot valve assembly SF4-w F-30 SF4-w F-30 SF4-w F-30 SF4-w F-30 SF4-w F-30 SF4-w F-30 SF4-w F-30 SF4-w F-30 SF4-w F-30 6. Return spring B 7. Detent assembly SF4-mF-30 SF4-mF-30 8.

Precautions 1

2 M14 x 1.5 32 42.5 21.5 (mm) ZZ Z TZ TY TX TT TD S QY Bore size (mm) 20 25 32 40 116 36 52 32 32 10 8 62 14 D120 40 60 40 40 10 9 62 14 122 40 60 40 40 10 9 64 16 -X 154 44.5 77 53 53 11 10 88 16 Individual -X 1571 Series CVM5 Head Side Trunnion Style (T) CVM5T Bore size Stroke Max. 21 Min. 18 Manual override Width across flats B2 Width across flats B1 Width across flats NA S + Stroke Z

3 Port Solenoid Valve Rubber Seal Series SY100 1

VKF Energy-saving type Rated voltage 0.22 W 5 6 VQZ 24 VDC 12 VDC 0 W 62 ms VZ VS Applied voltage VFN 24 V 0 V High flow type 0.8 W Energy-saving type 0.3 W 0 W 62 ms Low Wattage Specifications (0.45 W) How to Order SY1 X200 Entry is the same as standard products. 4-3-15

3 Port Solenoid Valve Rubber Seal Series SY100

VKF Energy-saving type Rated voltage 0.22 W 5 6 VQZ 24 VDC 12 VDC 0 W 62 ms VZ VS Applied voltage VFN 24 V 0 V High flow type 0.8 W Energy-saving type 0.3 W 0 W 62 ms Low Wattage Specifications (0.45 W) How to Order SY1 X200 Entry is the same as standard products. 4-3-15

CG5-S

10 M10 x 1.25 24 22 19.5 17 20 32 12 18 12 40 6 38 M5 x 0.8 5.5 10 16 3.5 35.5 1/8 to 300 40 10 M14 x 1.5 24 30 27 19 26 40 16 19 13 50 8 47 M6 x 1.0 6 14 16 4 44 1/8 to 500 50 14 M18 x 1.5 40 35 32 27 32 50 20 21 14 58 11 58 M8 x 1.25 7 18 22 5.5 55 1/4 to 600 63 14 M18 x 1.5 40 35 32 27 38 60 20 21 14 58 11 72 M10 x 1.5 7 18 22 7 69 1/4 to 600 80 22 M22 x 1.5 60 40 37 32 50 75 25 28 20

Series IDG

40 P1= 0.7MPa P1 = 0.7MPa 50 50 60 60 70 70 0 0 20 40 60 80 100 160 40 80 120 Outlet air flow rate l/min (ANR) Outlet air flow rate l/min (ANR) IDG75L IDG60L 0 0 P1 = 0.3MPa Outlet air atmospheric pressure dew point C Outlet air atmospheric pressure dew point C P1 = 0.3MPa 10 10 20 20 P1 = 0.5MPa P1 = 0.5MPa 30 30 40 40 P1 = 0.7MPa P1 = 0.7MPa 50 50 60 60 70 70 0 0 40 80 120 160 200 100