Oscillation Angle A: 190°, Torque (Range)(N⋅m): 6 to Less than 10 / 10 to Less than 20 / 20 to Less than 50 / 50 to Less than 100, Type: Rotary Actuator Both Sides Shaft Outputs, Main Body Shape: Block Shape, Operation Method: Single Rack, Rigidity Accuracy: Standard, Environment, Applications: Standard, Allowable Kinetic Energy (Range)(J): 1 to Less than 50, Tube Nominal Diameter: 80, Valves

Oscillation Angle A: 190°, Torque (Range)(N⋅m): 10 to Less than 20 / 20 to Less than 50 / 50 to Less than 100 / 100 or More, Type: Rotary Actuator Both Sides Shaft Outputs, Main Body Shape: Block Shape, Operation Method: Single Rack, Rigidity Accuracy: Standard, Environment, Applications: Standard, Allowable Kinetic Energy (Range)(J): 1 to Less than 50, Tube Nominal Diameter: 100, Valves:

Oscillation Angle A: 190°, Torque (Range)(N⋅m): 6 to Less than 10 / 10 to Less than 20 / 20 to Less than 50 / 50 to Less than 100, Type: Rotary Actuator One Side Shaft Output, Main Body Shape: Block Shape, Operation Method: Single Rack, Rigidity Accuracy: Standard, Environment, Applications: Standard, Allowable Kinetic Energy (Range)(J): 0.1 to Less than 1, Tube Nominal Diameter: 80, Valves

Oscillation Angle A: 190°, Torque (Range)(N⋅m): 6 to Less than 10 / 10 to Less than 20 / 20 to Less than 50 / 50 to Less than 100, Type: Rotary Actuator Both Sides Shaft Outputs, Main Body Shape: Block Shape, Operation Method: Single Rack, Rigidity Accuracy: Standard, Environment, Applications: Standard, Allowable Kinetic Energy (Range)(J): 0.1 to Less than 1, Tube Nominal Diameter: 80, Valves

AMP

CAT.ES13-7 A Exhaust Cleaner for Clean Rooms Series AMP An exhaust cleaner that can be used inside a clean room. Series AMP Exhaust Cleaner for Clean Rooms An exhaust cleaner that can be used inside a clean room Exhaust air cleanliness: Equivalent to Class 100 (Consult SMC in advance, as this will differ depending on the operating conditions.)

AMPSeries

This prevents discharge to the outside for a fixed time. Element service indicator (optional specification) With indicator function The element life (standard) can be visually confirmed. First element (main element) Element service indicator Element clogging is detected by a pressure differential, and indicated by a red symbol.

Air Cylinder

For example, the bore size to move a workpiece with a weight of 37 kg requires a bore size of 43 or more.

Fluoropolymer Piping Equipment

Body Needle V seal Lock nut Adjustment handle Insert bushing Nut Collar A 1 2 3 4 5 6 7 8 PFA PCTFE PTFE PVDF PVDF PFA PFA PFA Body class 2 y u y u B Dimensions A (B) (max.S) D H Port A 2 x G SMC (J) SMC C E F K Port B E A B C D E F G H J K S Model 48 60 72 LVN20 LVN30 LVN40 24 30 36 12 18 22 88 110 124 34.5 43 52 6 9 11 4 5 6 14 25 25 20 26 33 18 24 30 2.4 7.5 8.0 940 LQ1/LQ3/LVN/LQHB Series

Series 12-REA ø25, ø32, ø40, ø50, ø63 Sine Rodless Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators 0 L0.1 4 x MM Thread depth J 2 x P (Piping port) A G E H G B NN Effective thread length T (R) D X Mounting nut Width across flats C F N ZZ + Stroke S + Stroke W K N F I NA TT 6 T Model MM L K J I H G F E D C B A S NN NA 34 N R 12-REA25 12-REA32 12-REA40 8 46 32 26.4 2 13 7.5 20.5 8 10 70 15 M5 x 0.8 18.5 30 M26 x 1.5 111 10 8 60 32 33.6 2 16

VBA-OM-S001

No gap Booster regulator Air tank Booster regulator A B C D E F G H I J K L M Grooves There should be no damage or dust O-rings VBAT05A1 VBA10A VBA11A 150 374 370 307 163 160 100 200 Rc 3/8 257 60 Rc 1/4 20 Air tank There is a slight play on the diagonal parts.

,

4 (B) 2 Size 02 Size 01 Piping specifications Symbol Nil A01 A02 FG Without sub-plate 1 (P) 5 (R1) 3 (R2) Side-ported 1/8 (A) 4 (B) 2 Side-ported 1/4 FHG Number of solenoids 1 (P) 5 (R1) 3 (R2) Sealing type S D (A) 4 (B) 2 Single Nil R Metal seal Double FJG Rubber seal 1 (P) 5 (R1) 3 (R2) Rated coil voltage (A) 4 (B) 2 Option 3 4 24VDC FIG 12VDC Nil None 1 (P) 5 (R1) 3 (R2) Voltage

,

4 (B) 2 Size 02 Size 01 Piping specifications Symbol Nil A01 A02 FG Without sub-plate 1 (P) 5 (R1) 3 (R2) Side-ported 1/8 (A) 4 (B) 2 Side-ported 1/4 FHG Number of solenoids 1 (P) 5 (R1) 3 (R2) Sealing type S D (A) 4 (B) 2 Single Nil R Metal seal Double FJG Rubber seal 1 (P) 5 (R1) 3 (R2) Rated coil voltage (A) 4 (B) 2 Option 3 4 24VDC FIG 12VDC Nil None 1 (P) 5 (R1) 3 (R2) Voltage

MR Unit (Regulator with Mist Separator) AMR3000 to 6000 Series

Outlet pressure (MPa) Outlet pressure (MPa) Set point Set point Flow rate (L/min (ANR)) Inlet pressure (MPa) 688 Regulator with Mist Separator AMR3000 to 6000 Series Dimensions AMR4000/5000/6000 M N H ARJ E AR425 to 935 G D ARX F 2 x V 2 x V AMR AMR AMR3000 R A Compact pressure switch ARM (Option) S Bracket ARP Adapter assembly (Option) T IR-A B J B L P C K PT elbow IR 2 x U IRV VEX SRH SRP

Solenoid Valve (with M Connector) Conforming to ISO 15407-1 Series EVS1-01, 1-02

4 (B) 2 Size 02 Size 01 Piping specifications Symbol Nil A01 A02 FG Without sub-plate 1 (P) 5 (R1) 3 (R2) Side-ported 1/8 (A) 4 (B) 2 Side-ported 1/4 FHG Number of solenoids 1 (P) 5 (R1) 3 (R2) Sealing type S D (A) 4 (B) 2 Single Nil R Metal seal Double FJG Rubber seal 1 (P) 5 (R1) 3 (R2) Rated coil voltage (A) 4 (B) 2 Option 3 4 24VDC FIG 12VDC Nil None 1 (P) 5 (R1) 3 (R2) Voltage

High Purity Fluoropolymer Needle Valve Series LVN 1

S) D H VX Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VX3 VXA VN A port LVC 2-G LVA LVH SMC LVD SMC (J) C LVQ LQ E LVN TI/ TIL PA F K B port E PAX PB A B C D E F G H J K S LVN20 LVN30 LVN40 Model 48 60 72 2.4 7.5 8.0 18 24 30 20 26 33 14 25 25 4 5 6 6 9 11 34.5

Exhaust Cleaner for Clean Rooms AMP Series

This prevents discharge to the outside for a fixed time. Element service indicator (optional specification) With indicator function The element life (standard) can be visually confirmed. First element (main element) Element service indicator Element clogging is detected by a pressure differential, and indicated by a red symbol.

Speed Controller with One-touch Fittings

Series Proper tightening torque (Nm) AS1002F-02 AS1002F AS2002F AS2052F AS3002F AS4002F 0.07 0.2 0.3 1 2 4 618 AS Series Speed Controller with One-touch Fittings In-line Type Dimensions L-bracket DIN rail mounting bracket Bracket on a single side Bracket on a single side AS-F AS-F L9 L16 L17 TMH L14 L15 ASD L12 L13 AS1002F AS2002F L22 L24 L23 AS L11 t1 2 x D6 t2 AS-FE 2 x D5 L19 KE AS-FG

SY

SS5Y52, #2 50 Type20P SY7000: SS5Y7-20PStations Note) [ ]: Values for AC Scale: 35% L1 2n1-Rc 1/4 (A, B port) 4-4.5 (mounting hole) 10 Manual override L2 (Pitch) P = 20.5 13.5 + + 16.5 11.5 22.8 20 9.4 B B B B B 19.5 21 20.5 19 69.8 76 P EA EB P EB EA 16 60 30 21 21 154.2 20 110 141.2 93.8 A A A A A 6-Rc 1/4 (P, EA, EB port) + + + + + Triangle mark 2n2-One-touch fitting (A, B port) Applicable

V100

1) (Station n) 48.5 [55.5] + + + + + 48.5 [55.5] 33.1 + + + + + 20 A A 33.1 20 5.1 (Pitch) P=10.5 18.5 One-touch fitting (A port) Applicable tubing O.D.: 4, 5/32" A A 5.1 (Pitch) P=10.5 18.5 M5 x 0.8 (A port) Station n L1 L2 3 58 50 Station 20 236.5 228.5 6 89.5 81.5 8 110.5 102.5 10 131.5 123.5 Station 2 47.5 39.5 4 68.5 60.5 5 79 71 7 100 92 9 121 113 11 142 134 12 152.5 144.5 13 163 155

SX

B port) 2n2-One-touch fitting (Pitch) Applicable tubing O.D.: 8 (A, B port) 2n1-Rc 1/4 (Mounting hole) 4-4.5 P = 20.5 13.5 10 16.5 9.4 21 19.5 76.8 22.4 11.5 SV B A B A B A B A B A B A B A 19 20.5 EA EB P SZ EB EA P 20 20 21 21 SY 62.5 60 (5.5) 141.1 93.8 30 SYJ 128.1 SX Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside