Type of Connector: PG (Flat Cable Connector 20), Connector Outlet Direction: 1 (Connector Top Direction), Stations: 4 Stations, SUP/EXH Block Mounting: U (U Side 2~10 Stations), Pilot: Internal Pilot, A, B Port: N7 (1/4" One-touch Fitting), Mounting Method: D0 (DIN Rail Mount w/o DIN Rail)

Type of Connector: PG (Flat Cable Connector 20), Connector Outlet Direction: 1 (Connector Top Direction), Stations: 5 Stations, SUP/EXH Block Mounting: U (U Side 2~10 Stations), Pilot: Internal Pilot, A, B Port: C6 (ø6 One-touch Fitting), Mounting Method: D0 (DIN Rail Mount w/o DIN Rail)

Type of Connector: PG (Flat Cable Connector 20), Connector Outlet Direction: 1 (Connector Top Direction), Stations: 8 Stations, SUP/EXH Block Mounting: U (U Side 2~10 Stations), Pilot: S (Internal Pilot, Built-in Silencer), A, B Port: N7 (1/4" One-touch Fitting), Mounting Method: D0 (DIN Rail Mount w/o DIN Rail)

Model: 10 (Side Ported), Connector Type: PG (Flat Ribbon Cable, 20 Pins), Connector Entry Direction: 1 (Upward), Valve Stations: 2 Stations, P,E Port Location: U (U Side, 2 to 10 Stations), SUP/EXH Block: Internal Pilot, A,B Port Size: N11 (ø3/8" One-touch Fitting), Mounting: D (DIN Rail Mounting w/o Name Plate), DIN Rail Option: 7 (Longer than Standard DIN Rail)

Series: 5 (JSY5000), Type: 40 (Side Ported), Valve Stations: 20 Stations, P,E Port Entry: U (U Side), A,B Port Size: 02 (1/4), Thread Size: N (NPT), Mounting: D (DIN Rail Mounting), DIN Rail Option: 0 (DIN Rail Mounting, w/o DIN Rail)

Compact and

20 Suction flow rate Suction flow rate 20 20 20 20 10 10 10 0 0 0 0 0 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0 2 4 6 8 14 12 10 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0 5 10 15 20 Suction flow rate [L/min(ANR)] Suction flow rate [L/min(ANR)] Supply pressure [MPa] Supply pressure [MPa] Dimensions 2 x Applicable tubing O.D. 6 10.4 9.7 L1 L2 13.3 12 13.3 2 x Connection thread Rc1/8 13.3 12 L1 One-touch Connection

3 Port Air Operated Valve Series SYJA300 1

Note Symbol 1P Common Common 3R Common Individual 1 Type 41 Type 42 VHS 3 VV3PA3-42-053-02 Stations 02 2 stations ... ... 20 20 stations To order valves and blank plate assembly mounted onto the manifold, list valves and blanking plate assembly with manifold base part number.

Antistatic Tubing TA  Series

Symbol Length 109 Surface resistance 0212 2 1.2 20 20 m roll Antistatic One-touch fittings: KA series Miniature fittings: M and MS series Note) 0425 4 2.5 Recommended fittings 0604 6 4 Color Note) Miniature fittings: Only the following types are available for M and MS series 0805 8 5 Symbol Symbol Color Color 1065 10 6.5 W G M series MS series White (Translucent) Green (Translucent)

LFE-OMZ0012

The proof pressure is double the operating pressure range. -28No.LFE*-OMZ0012 Analogue output Flow/Analogue output Output A B C Voltage output 1 V 1.1 V 5 V C Current output 4 mA 4.4 mA 20 mA Rated flow [L/min] Model B Minimum Maximum A LFE1 0.5 20 LFE2 2.5 100 Flow rate 0 Minimum Maximum rated flow LFE3 5 200 rated flow Out of range -29No.LFE*-OMZ0012 Dimensions 2XPort size Note) The electrical

3 Way Direct Acting NVKF 300 Series

Stations Applicable blank plate ass'y vK300-42-1A Dimuuiun $uies t{U|ff30 Body Ported Grommet (G): NVKF332-"G-M5 inch (mm) Base Mounted Grommet (G) : NVKF334rG-01 T inch (mm) =1 1 .81 (=3001 lld wi'e hQt') Ssis ilUff300 Dimsui Body Ported (Top Ported) lType 20 Manifold NVV3KF3-20-Stations-007 inch(mm L: Dimensions 19 20 14.84 15.59 (377) 't3.78 r4.53115.28 (350) (36s) (388) ( 1 r 1 ) (

For Dry Air, Pilot Operated Series VQ20/30 2 Port Solenoid Valve

Construction 3 1 Component Parts Description Material No. q w e r t y u 4 Solenoid coil Body Fixed armature Armature Return spring Poppet Diaphragm assembly Resin Stainless Steel Stainless Steel Stainless Steel NBR NBR, Resin 2 5 6 7 4.3-5 Series VQ20/30 Dimensions/Series VQ20 In-line style/Grommet(G) VQ21A1-mGm-m Dotted line: Bracket mounting style (-F) 4.3-6 Series VQ20/30 For Dry Air,

Compressed Air Preparation Filter

Symbol Type Nil Rc F G N NPT Micro mist separator Mist separator Symbol Port size Applicable body size 70D 80D 90D 10 1 V 14 1 1/2 V V V 20 2 V Accessory Part Nos. 1 2 Description Model 70D 80D 90D Bracket AM-BM70D AM-BM90D L * Includes mounting bolts (2 pcs.) Construction: AFF, AM, AMD t q IN OUT w Component Parts No.

PFxx-OMS0001CN

[cm] -70No.PF-OMS0001CN-A PFMC7501/7102/7202 2x A B D E F H K L N PFMC7501/7102 Rc1/2NPT1/2 70 30 60.6 41.2 15 14 26 18 13.6 PFMC7202 Rc3/4NPT3/4G3/4 90 35 66.1 46.7 17.5 24 31 28 16.8 PFMC7501/7102 G1/2 76 30 60.6 41.2 15 14 26 18 13.6 S T U V W PFMC7501/7102 24 22 32 40 50 PFMC7202 30 30 42 48 58 -71No.PF-OMS0001CN-A M8 (ZS-40-A) -72No.PF-OMS0001CN-A Revision history A [September 2016]

MHC2

5 Brass Plug Center roller Nitriding Carbon steel u !6 High carbon chrome bearing steel Spring Center pin Nitriding Carbon steel i !7 Cap Resin o Replacement Parts: Seal Kits No. Description Material Kit No. MHC2-16 MHC2-10 MHC2-20 MHC2-25 !8 !9 NBR MHC10-PS MHC16-PS MHC20-PS MHC25-PS Seal kit @0 @1 2.6-5

Pneumatic Positioner IP300/IP3100

0.5% Within 1% Sensitivity Within 0.1% Within 0.5% Within 0.2% Within 1% Within 0.2% Within 1% Air Consumption (lvlax.) less than 0.25 SCFM @ 20 osi 0,7 SCFM @ /u osl 0.25 scFM @ 20 osi 0.7 SCFM @ 70 psi 0.25 SCFIVI @ 20 Dsi 0.7 SCFM @ 70 DSi Supply Pressure Variation Effect (Max.)

Clean Regulator

Flow Rate Characteristics Construction XT13-394-06, 10 Max. operating flow rate It is recommended to be used within the max. operating flow rate (negative) range. ( ) Conditions/ Inlet pressure: 0.5 MPa, Fluid: Water 0.5 82 SMC Outlet pressure MPa 0.4 K P C U O S H L 0.3 0.2 82 0.1 0.0 10 20 30 40 50 60 70 0 Flow rate L/min (ANR) w INA-48-1-06, 10 142 (Max. 146) Conditions/ Inlet pressure

lPSMt

Linearitv Within t 1% Within t 2% Hvsteresis' Within 1% Repeatabilitv Within 0.5% Within 1% Sensitivitv Within 0.1% Within 0.5% Within 0.2% Within 1% Within 0.2% Within 1% Air Consumption (Max.) less than 0.25 SCFM @ 20 osi 0.7 SCFM @ 70 psi 0.25 SCFM @ 20 psi 0.7 SCFM @ 70 osi 0.25 SCFM @ 20 osi 0.7 SCFM @ 70 psi Supply Pressure Variation Effect (Max.)

lPSMt

Linearitv Within t 1% Within t 2% Hvsteresis' Within 1% Repeatabilitv Within 0.5% Within 1% Sensitivitv Within 0.1% Within 0.5% Within 0.2% Within 1% Within 0.2% Within 1% Air Consumption (Max.) less than 0.25 SCFM @ 20 osi 0.7 SCFM @ 70 psi 0.25 SCFM @ 20 psi 0.7 SCFM @ 70 osi 0.25 SCFM @ 20 osi 0.7 SCFM @ 70 psi Supply Pressure Variation Effect (Max.)

Stations: 04 (4 Stations), Piping: D (U Side: Closed; D Side: Open), Thread Type: N (NPT), Flow Switch Type: 7 (Integrated Display), Rated Flow Range: 40 (5 to 40 L/min), Return Unit Components: S (w/Flow Adj.

Large Flow Lubricator AL800/900 Series

2 w u !0 !5 !4 Component Parts Replacement Parts No. Description Material Note No. Description Material Part no. Qty.