Exhaust Cleaner for Clean Rooms AMP Series

Thread type Rc NPT G Nil N F Port size Body size 4 Port size 3 Symbol 2 02 03 04 06 1/4 3/8 1/2 3/4 Models AMP220 AMP320 AMP420 Model 1000 (35) 200 (7) 500 (17.5) Max. flow capacity l/min (ANR)(SCFM) 1/2, 3/4 1/4, 3/8 3/8, 1/2 Port size (nominal size B) 1.15 (2.54) 0.43 (0.95) 0.68 (1.50) Weight kg (lb) Specifications Fluid Compressed air Element upstream pressure 0.1MPa or less (14.5 psi

One-touch installation and removal Series DM

(d) 1.6 3 1.6 3 DM6-04N DM6-06N DM6-04NU DM6-06NU DM12-04N DM12-06N DM12-04NU DM12-06NU 5 29 6 31 71

Digital Flow Switches Series PF2A

How to Order Integrated Display Type PF2A7 H M Flow rate range Unit specification High flow rate type 03 06 12 150 to 3000 l/min 300 to 6000 l/min 600 to 12000 l/min Lead wire (Refer to page 35.)

Digital Flow Switch Series PFA For Air Series PFW For Water

Load Load + 38 12 to 24VDC PFA313-(-M) 10 For Air Digital Flow Switch/High Flow Rate Type Series PFA How to order Integrated display type PFA7 H Unit specification Flow rate range Wiring specification High flow rate type Nil M With unit switching function Fixed SI unit Note) 150 to 3000l/min 300 to 6000l/min 600 to 12000l/min 03 06 12 Port specification 3m lead wire with connector Without

VH Series, 4 Way Hand Valve

3 4 2 1 VH422-N02 to N06 VH432-N02 to N06 2 (Position) Flow direction 2 Flow direction 4 Flow direction 2 Flow direction 4 90 45 45 3/4" 185(10.2) 1 2 21.34 (9.7) VH6 VH600-N06,N10 3 (Closed center) 3/4", 1" 1" 194(10.5) 3 4 2 How To Order Series VH How to Order VH 2 0 1 02 N Options Hand valve R In/Out Reverse Valve model (Cv) Port size (NPT) 2 3 4 6 (0.4) (1.1) (3.2) (10.5) 02 03 04 06

Direction: Left to Right, Drain Cock w/Barb Fitting: None, Pressure Units: Product: MPa, °C; Pressure Gauge: MPa, D: D

to Right, Drain Cock w/Barb Fitting: None, Pressure Units: Product: MPa, °C; Pressure Gauge: MPa, D: D

D

to Right, Drain Cock w/Barb Fitting: None, Pressure Units: Product: MPa, °C; Pressure Gauge: MPa, D: D

, Flow Direction: Flow Direction: Left to Right, Drain Cock w/Barb Fitting: None, Pressure Units: Z [Product: psi, °C; Pressure Gauge: psi (and MPa)], D: D

1/4), Exhaust Mechanism: Relieving Type, Flow Direction: Flow Direction: Left to Right, Drain Cock w/Barb Fitting: None, Pressure Units: ZA (Digital Pressure Switch w/Unit Selection Function), D: D

Type, Flow Direction: R (Flow Direction: Right to Left), Drain Cock w/Barb Fitting: None, Pressure Units: Z [Product: psi, °C; Pressure Gauge: psi (and MPa)], D: D

Stations: 06 (6 Stations), Piping: D (U Side: Closed; D Side: Open), Thread Type: N (NPT), Supply Unit Components: P (w/o Flow Adj. Valve; w/Stop Valve), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 04 (0.5 to 4 L/min), Return Unit Components: W (w/Flow Adj.

The use of 34 pin connectors allows up to 16 stations with double solenoids.Tie rod base manifold for SV2000 valve, D-sub connector or flat ribbon cable, Number of connectors (D-sub): 25 pins, Number of connectors (flat ribbon): 26, 20, 10 pins, Maximum 20 stations available as standard, Optional DIN rail mount, 6 port sizes available, SS5V 06 Station Manifold, Tie-Rod Base, 4/5 PORT SOLENOID

The use of 34 pin connectors allows up to 16 stations with double solenoids.Tie rod base manifold for SV2000 valve, D-sub connector or flat ribbon cable, Number of connectors (D-sub): 25 pins, Number of connectors (flat ribbon): 26, 20, 10 pins, Maximum 20 stations available as standard, Optional DIN rail mount, 6 port sizes available, SS5V 06 Station Manifold, Tie-Rod Base, 4/5 PORT SOLENOID

Series: SS5Y3 (SY3000 Manifold), Model: 10S (Side-Ported, Serial Interface), SI Unit Specification: FA (PROFINET - 32 Outputs - Connector M12), SI Unit Output Polarity: Positive Common, NPN or w/o SI Unit, Valve Stations: 06 Stations, P, E Port Location: D (D Side), SUP/EXH Block: S (Internal Pilot, Built-in Silencer), A, B Port Size: N7 (ø1/4" One-touch Fitting), Mounting: B (DIN Rail Mounting

Series: SS5Y3 (SY3000 Manifold), Model: 10S (Side-Ported, Serial Interface), SI Unit Specification: NA (PROFIBUS DP - 32 Outputs - Connector M12), SI Unit Output Polarity: Positive Common, NPN or w/o SI Unit, Valve Stations: 06 Stations, P, E Port Location: D (D Side), SUP/EXH Block: S (Internal Pilot, Built-in Silencer), A, B Port Size: N7 (ø1/4" One-touch Fitting), Mounting: B (DIN Rail

Series: SS5Y3 (SY3000 Manifold), Model: 10S (Side-Ported, Serial Interface), SI Unit Specification: EB (EtherNet/IPâ„¢ - 16 Outputs - Connector M12), SI Unit Output Polarity: N (PNP), Valve Stations: 06 Stations, P, E Port Location: D (D Side), SUP/EXH Block: S (Internal Pilot, Built-in Silencer), A, B Port Size: N7 (ø1/4" One-touch Fitting)

Series: SS5Y3 (SY3000 Manifold), Model: 10S (Side-Ported, Serial Interface), SI Unit Specification: DA (EtherCAT - 32 Outputs - Connector M12), SI Unit Output Polarity: N (PNP), Valve Stations: 06 Stations, P, E Port Location: D (D Side), SUP/EXH Block: S (Internal Pilot, Built-in Silencer), A, B Port Size: C6 (ø6 One-touch Fitting)

Series: SS5Y3 (SY3000 Manifold), Model: 10S (Side-Ported, Serial Interface), SI Unit Specification: FB (PROFINET - 16 Outputs - Connector M12), SI Unit Output Polarity: N (PNP), Valve Stations: 06 Stations, P, E Port Location: D (D Side), SUP/EXH Block: Internal Pilot, A, B Port Size: N7 (ø1/4" One-touch Fitting)