Electric Actuator/Slider Type

136.5 50 20 85 103 52.3 11 14.5 12.5 5.4 40.3 53.3 30.8 29 M5 x 0.8 6.5 40 to 100 67.5 105 to 120 161.5 125 to 200 84.5 205 to 300 102 25 20 to 35 156 55 25 101 123 63.8 12 18.5 16.5 5.4 50.3 68.3 38.3 30 M6 x 1.0 8.5 40 to 100 68 105 to 120 186 125 to 200 85 205 to 300 102 32 Size Stroke range (mm) OA OB P Q S T U V WA WB WC X XA XB YD Z 15 to 35 35 26 70 54 4 5 47 8.5 40 to 100 50 33.5

CV/MVGQ

6, 8 110 + 35 (n 2) n = 2, 4, 6, 8 20 + 35 (n 2) n = 2, 3, 4 100 + 35 (n 2) n = 2, 4, 6, 8 Different sides n 100 + 100 (n 2) n = 2, 4, 6, 8 110 + 100 (n 2) n = 2, 4, 6, 8 100 + 100 (n 2) n = 2, 3, 4, 5 Same side 10 20 55 100 100 110 90 100 110 90 100 110 1 Different sides 2 Same side 25 + 35 (n 2) n = 2, 3, 4 90 + 35 (n 2) n = 2, 4, 6, 8 100 + 35 (n 2) n = 2, 4, 6, 8 110 + 35 (n

CV/MVGQ

6, 8 110 + 35 (n 2) n = 2, 4, 6, 8 20 + 35 (n 2) n = 2, 3, 4 100 + 35 (n 2) n = 2, 4, 6, 8 Different sides n 100 + 100 (n 2) n = 2, 4, 6, 8 110 + 100 (n 2) n = 2, 4, 6, 8 100 + 100 (n 2) n = 2, 3, 4, 5 Same side 10 20 55 100 100 110 90 100 110 90 100 110 1 Different sides 2 Same side 25 + 35 (n 2) n = 2, 3, 4 90 + 35 (n 2) n = 2, 4, 6, 8 100 + 35 (n 2) n = 2, 4, 6, 8 110 + 35 (n

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

35 40 40 13 17 17 19 27 27 32 41 M8 x 1.25 M10 x 1.25 M10 x 1.25 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 24 29 35.5 44 55 69 80 100 1/8 1/8 1/8 1/8 1/4 1/4 3/8 1/2 20 25 32 40 50 63 80 100 Without rod boot With rod boot on one side With rod boot on both sides Bore size (mm) TA Air-hydro TC H 35 40 40 50 58 58 71 71 ZZ 147 157 159 187 218 218 264 264 e 30 30 35 35 40 40 52 62

SY

or less 41 or less 2 position single 35 or less 35 or less 41 or less 2 position double 62 or less 62 or less 64 or less 3 position 35 or less 2 Body Ported Type Models/Series SY7000 Models/Series SY3000 Port size Effective area mm (Cv factor) Weight g Port size Effective area mm (Cv factor) Weight g Valve model Type of actuation Valve model Type of actuation Grommet L/M type plug connector

Stability of suction position,

9 9 9 9 B A 15 35 B A 35 14.5 Bushing Bushing Bushing M18 x 1.5 M10 x 1 M18 x 1.5 M18 x 1.5 B A M10 x 1 M10 x 1 Seal washer Seal washer Seal washer D D D D D D 40 26.5 31 31 26 26 2 3 53 50 6 40 6 35 32 6 Width across flats 6 2.5 14.5 Width across flats 6 Width across flats 6 43 19 19 19 D-D D-D D-D 16 16 16 8.5 8.5 8.5 Dimensions Dimensions Dimensions Model A B ZP3E-Y32UMlJB10 66.6 110.6

Cylinder with Lock Series CNS

14 16 155 23 25 30 M14 x 1.5 Up to 1000 50 47 161 245 1/2 3/8 128 136 36 90 63 35 14 16 180 28 30 30 M14 x 1.5 Up to 1200 56 53 182 290 1/2 3/8 144 144 40 90 63 43 14 18.5 215 35 35 35 M16 x 1.5 (mm) Bore size (mm) K KA M MA MM N P Q R S T V VA H ZZ 125 140 160 15 31 27 M12 x 1.75 M30 x 1.5 35 1/2 85.5 25 303 87.5 20 23 110 440 15 31 27 M12 x 1.75 M30 x 1.5 35 1/2 93.5 25 343 95 20 28 110

Cylinder with Lock Series CNS

14 16 155 23 25 30 M14 x 1.5 to 1000 50 47 161 245 1/2 3/8 128 136 36 90 63 35 14 16 180 28 30 30 M14 x 1.5 to 1200 56 53 182 290 1/2 3/8 144 144 40 90 63 43 14 18.5 215 35 35 35 M16 x 1.5 (mm) Bore size (mm) K KA M MA MM N P Q R S T V VA H ZZ 125 140 160 15 31 27 M12 x 1.75 M30 x 1.5 35 1/2 85.5 25 303 87.5 20 23 110 440 15 31 27 M12 x 1.75 M30 x 1.5 35 1/2 93.5 25 343 95 20 28 110 480

Air Cylinder Series MB

35 40 40 30 35 40 45 45 55 1/8 1/4 1/4 3/8 3/8 1/2 84 84 94 94 114 114 4 4 5 9 11.5 17 6.5 9 10.5 12 14 15 Dimensions with mounting support is same as the basic style (Double acting single rod).

CNS

14 155 23 25 30 M14 x 1.5 16 Up to 1000 50 47 161 245 1/2 3/8 128 136 36 90 63 35 14 180 28 30 30 M14 x 1.5 18.5 Up to 1200 56 53 182 290 1/2 3/8 144 144 40 90 63 43 14 215 35 35 35 M16 x 1.5 Bore size (mm) K KA M MA MM N P Q R S T V VA H ZZ 125 140 160 15 31 M12 x 1.75 M30 x 1.5 35 1/2 25 303 20 23 110 27 440 87.5 85.5 15 31 M12 x 1.75 M30 x 1.5 35 1/2 25 343 20 28 110 27 480 95 93.5 17

SMC

60 70 70 80 ZZ 121 121 121 131 146 185 238 292 344 M 83 83 83 93 108 147 200 254 306 Z 81.5 81.5 81.5 91.5 106.5 145.5 198.5 252.5 304.5 K 31 41 51 61 71 96 121 146 171 J 44 44 44 54 69 108 113 155 190 I 10 10 10 10 10 10 58 70 87 NA 2 2 2 2 2 2 4 4 4 NN 2 2 2 2 3 4 5 6 7 KA 169 223 275 H 45 45 45 55 35 35 35 38 44 HA 35 35 35 35 35 70 70 76 88 G 15 15 15 15 15 19 37 41 19 GA 25 25 25 35

Compact 5-Port Solenoid Valve

COM. 34 35 Red Red Red (COM.) Red (COM.) Red (COM.) Red (COM.) COM. 41 Red Red COM.

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

60 70 70 80 ZZ 121 121 121 131 146 185 238 292 344 M 83 83 83 93 108 147 200 254 306 Z 81.5 81.5 81.5 91.5 106.5 145.5 198.5 252.5 304.5 K 31 41 51 61 71 96 121 146 171 J 44 44 44 54 69 108 113 155 190 I 10 10 10 10 10 10 58 70 87 NA 2 2 2 2 2 2 4 4 4 NN 2 2 2 2 3 4 5 6 7 KA 169 223 275 H 45 45 45 55 35 35 35 38 44 HA 35 35 35 35 35 70 70 76 88 G 15 15 15 15 15 19 37 41 19 GA 25 25 25 35

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

D-B59W Same side 75 115 115 115 130 140 150 1 pc. 15 Different sides 35 80 80 95 2 pcs.

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Mountable on DIN rail (35 mm) Mountable on DIN rail (35 mm) Applicable Fieldbus protocol: PROFIBUS DP Applicable Fieldbus protocol: EtherNet/IP 31 (35) 31 (35) (87.9) 82 1 (85) 82 1 152.2 170 187.3 (When locking DIN rail) 193.2 (When removing DIN rail) 152.2 170 187.3 (When locking DIN rail) 193.2 (When removing DIN rail) 64.2 35 64.2 35 161 161 (98) (95) Mountable on DIN rail (35 mm)

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

L 8 (35) (25) 5.5 (10) Rail mounting hole pitch: 12.5 0 10 20 1 11 2 12 3 13 4 14 5 15 6 16 7 17 8 18 9 19 No. 98 223 348 110.5 233.5 123 248 135.5 260.5 148 273 160.5 285.5 173 298 185.5 310.5 198 323 210.5 335.5 L dimension 24.8 56.4 88 28 59.6 31.1 62.7 34.3 65.9 37.4 69.1 40.6 72.2 43.8 75.4 46.9 78.6 50.1 81.7 Weight (g) 53.3 84.9 30 40 21 31 41 22 32 23 33 24 34 25 35 26 36 27 37 28

V100

Caution VQ VKF Dimensions VQZ VP3145-DZA1-X81 MAX.10 134 35 VZ 87.4 VS 21 EXH.1 51 VFN EXH.2 71 80 (Non-locking) Manual override 6 to 8 Applicable cable O.D.

Fluoropolymer Piping Equipment

-T-R1 25 19 x 16 8 18 19 39.5 36 69.5 61 35 49 15.8 10 x 8 6 9 10 24 21 43 35 20 Class 2 to 5 12 28 M Inch Size Model A side B side B C D E H L1 L2 L3 M Min. port size Applicable tubing O.D.

Table of Contents

Pressure 0.6 MPa 35 30 External grip 0.5 MPa 0.5 MPa DGripping force (N) Gripping force (N) 30 25 25 20 20 15 15 0.4 MPa 0.4 MPa F 200.3 MPa 0.3 MPa 0.2 MPa 0.2 MPa 10 10 5 5 0 0 5 5 25 25 10 10 15 15 20 20 30 30 35 35 Gripping point L (mm) Gripping point L (mm) F F MHS3-25D MHS3-25D Internal grip 70 60 60 Pressure 0.6 MPa Pressure 0.6 MPa 50 50 Gripping force (N) Gripping force (N) 0.5

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

or less Type R, U Type S, Z 35 or less 41 or less 2 position single 35 or less 35 or less 41 or less 2 position double 62 or less 62 or less 64 or less 3 position 59 Base Mounted 10-SY3000/5000/7000/9000 Flow Rate Characteristics/Weight 10-SY3000 Directional Control Valves Air Grippers Modular F.