Air Cylinder: Standard Type Double Acting, Single Rod Series CM2 ø20, ø25, ø32, ø40 How to Order Mounting style Cylinder stroke (mm) T B Basic style (Refer to “Standard Stroke” on page 129.) Head side trunnion style Clevis integrated style Axial foot styl

D-A9/M9/M9W auto switches are shipped together (not assembled). (However, auto switch mounting brackets are assembled when being shipped.) Solid state auto switches marked with are produced upon receipt of order. D-A9V/M9V/M9WV and D-M9A(V)L cannot be mounted. Do not indicate suffix N for no lead wire on D-A3A/A44A/G39A/K39A models.

2 Finger, 3 Finger, 4 Finger Air Gripper Parallel Type Series MHS

Z (Example) F9BZ D-F9BA is available only as "L". Auto switches marked with a "" symbol are produced upon receipt of order. Note 1) Take note of hysteresis with 2 color indication type switches. Note 2) Refer to pages 53 through 65 for detailed auto switch specifications. Cylinder Bore Size MHS 2 D 50 32 to 63 Y59A Number of auto switches Nil S 2 pcs. 1 pc.

PFxx-OMS0001CN

-35No.PF-OMS0001CN-A d.

ISA2

Leakage voltage Take special precautions if a resistor is used in parallel with the switching element or a C-R element (for surge voltage protection) is used for protection of the switching element. The valve may fail to turn off due to leakage current flowing through the resistor or C-R element. PF2 IF Data Switching element OFF Caution R C Leakage voltage Power supply 1.

EXxx-OMY0006CN

/PL / OSSD SIL 2 2 2 3 3 3 3 3 SIL CL 2 2 2 3 3 3 3 3 * 2 2 4 3 4 ** 4 3 Cat. 3 PL d d d e d e e d *:Cat. 3 EN13849-2 2 N.O. **:Cat. 18 No.EX##-OMY0006CN 3.3.8. SI 0 SI 0 A SI 1. 2.I/O 3.SI 4. 5. 10 0 I/O 0 "0"= SI 72 72 SI 72 SI SI 16 SI SI SI SI 0 16 19 No.EX##-OMY0006CN SI SI SI 16 SI SI 20 D 3.3.9. GSDMLFDCML 3.4.

Coolant valve

Warning Push-turn locking slotted type [D type] While pressing, turn in the direction of the arrow (90 clockwise). If it is not turned, it can be operated the same way as the non-locking type. Caution When you operate the D type with a screwdriver, turn it gently using a watchmaker's screw driver.

C76

5 Cylinder: Standard/Non-rotating Type Double Acting, Single/Double Rod Series C76 32, 40 How to Order CJ1 C Double acting Single rod K R2 76 J D E C A 32 100 CJP CJ2 C Double acting Double rod W 76 D E 32 100 C JJ B CM2 Auto switch mounting type CG1 Rail mounting Band mounting A B Built-in magnet MB None Built-in magnet Nil D Applicable auto switches and bands are shown on pages 6-10-45

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

mm 600 mm 1000 mm 1500 mm 2000 mm 3000 mm 10 mm (Semi-standard) 52-SY9000 Manual override Non-locking push type Push-turn locking slotted type Push-turn locking lever type Nil D E L type has 300 mm and 600 mm only. 3 C ATEX Compliant 5 Port Solenoid Valve Series 52-SY Safety Instructions Specifications 1) This product is not suitable for Zone 0.

Air Cylinder: Standard Type Lube, Non-lube Type, Air-hydro Type Series CS1 Lube, Non-lube: ø180, ø200, ø250, ø300 Air-hydro: ø125, ø140, ø160

Air Cylinder: Standard Type Lube, Non-lube Type, Air-hydro Type Series CS1 Lube, Non-lube: 180, 200, 250, 300 Air-hydro: 125, 140, 160 How to Order CS1 L 300 160 Made to Order (Refer to page 413 for details.)

Air Cooled Aftercooler Series HAA 1

HAA15 HAA22 HAA37 HAA7 1000 Model Max. flow capacity (l/min (ANR)) (1) 5700 2200 3300 70 0.7 32 40 Compressed air 5 to 100 Rated performance Operating range Electrical specifications Inlet air temperature (C) Inlet air pressure (MPa) Ambient temperature (C) Outlet air temperature (C) Fluid Inlet air temperature (C) Inlet air pressure (MPa) Ambient temperature (C) Installation features 0.05

        Series VKF300

Applicable cable O.D.: 4 to 6.5 (Reference) 0.5 mm2 2 core and 3 core wires equivalent to JIS C 3306 NL: Neon bulb R: Resistor LED: Light emitting diode R: Resistor D: Protective diode LED: Light emitting diode R: Resistor How to Calculate the Flow Rate For obtaining the flow rate, refer to front matters 44 to 47.

High Vacuum L Type Valve

E (KF flange) Fn C E D J H B A G A Unit: (mm) Model A B C D E Fn Fd G H J XLC-16-2 40 108 38 20 30 17 44 19 XLC-25-2 50 121 48 27 12 40 26 44 21 XLC-40-2 65 171 66 39 11 55 41 67 29 12 XL-OMV0007 5-3.Dimensions Size 50, 63, 80 E C C E E (KF flange) (K flange) Fd Fn D K J H B A G A Unit: (mm) Model A B C D E Fn Fd G H J K XLC-50-2 70 185 79 46 11 75 52 72 29 9 XLC-63-2 88 212 100 55 11 87

VG342

Flow Characteristics With DIN terminal block With terminal block Port size Flow characteristics 2 3 (A R) b Cv C [dm 3/(sbar)] 1 2 (P A) b Cv C [dm 3/(sbar)] 26 38 0.38 0.30 7.0 9.8 27 38 0.37 0.32 7.4 9.8 27 40 0.36 0.22 7.3 9.8 25 40 0.37 0.20 6.8 9.6 2 1 (A P) b Cv C [dm 3/(sbar)] 3 2 (R A) b Cv C [dm 3/(sbar)] 1/2 3/4 Port size Effective area (mm2) 2 3 (A R) 1 2 (P A) 235

VVXA21/22

402 384 276 264 356 338 240 228 310 292 204 192 264 246 168 156 218 200 132 120 172 154 96 84 126 108 VVXA31 VVXA32 Symbol Model A 40 44 B 20 22 C 9 10 D 22 24 E 59 66 F 33 34 G 24 25 H 30 40 J 36 46 K 6 9 M 45.5 50.5 N 69 76 VVXA31 VVXA32 17-3-108

JIS Standard Hydraulic Cylinder Double Acting/Single Rod

D-A9, M9, M9W, M9A auto switches are shipped together. (not assembled).

High Vacuum L Type Valve

E (KF flange) Fn C E D J H B A G A Unit: (mm) Model A B C D E Fn Fd G H J XLG-16-2 40 108 38 20 30 17 44 19 XLG-25-2 50 121 48 27 12 40 26 44 21 XLG-40-2 65 171 66 39 11 55 41 67 29 12 XL-OMV0003 5-3.Dimensions Size 50, 63, 80 E C C E E (KF flange) (K flange) Fd Fn D K J H B A G A Unit: (mm) Model A B C D E Fn Fd G H J K XLG-50-2 70 185 79 46 11 75 52 72 29 9 XLG-63-2 88 212 100 55 11 87

PF3A7xxH-L.eng

(For accumulated increment) [H_1 ] Setting of Hysteresis [ 300] 300 L/min (PF3A706H) Do not use the product in a place where static electricity is a problem. Otherwise it can cause failure or malfunction of the system.

Compact Cylinder Double Acting, Single Rod Bore size: 056(9/16”), 075(3/4”), 106(1 1/16”), 150(1 1/2”), 200(2”), 250(2 1/2”), 300(3”), 400(4”) Series NCQ8

Body option Cylinder stroke (in) Standard (Female rod end) Rubber bumper Male rod end Nil C M Symbol 012 025 037 050 Symbol 062 075 087 100 Symbol 125 150 175 200 Symbol 250 300 350 400 Stroke (in) 1/8" 1/4" 3/8" 1/2" Stroke (in) 5/8" 3/4" 7/8" 1" Stroke (in) 1 1/4" 1 1/2" 1 3/4" 2" Stroke (in) 2 1/2" 3" 3 1/2" 4" Note 2) Stroke will be reduced by 0.06" for rubber bumper type.

99

Filtration efficiency 99.9% Membrane FGH200 to 300 0.2 m EB ES X40 0.4 m Port size Element classification Note) 03 04 06 10 Rc3/8 Rc1/2 Rc3/4 Rc1 Element HEPO 2 Membrane Symbol J D Note) Refer to pages 70 to 73 for details about specifications, models, dimensions, etc. regarding the elements.

Series CG1 precision air cylinder has 8 bore sizes and can meet any application need. The tube is impact extruded aluminum to produce an extraordinarily smooth finish, allow low break-away pressure and smooth stroke action. Eight mounting options are available. Auto switch capable. Cylinder with lock, CNG series, Double acting, single rod, Cushion: rubber bumper, air cushion, Bore sizes