Plug-in/Plug Lead: Single Unit

VQ0 Flow Characteristics at the Number of Manifold Stations (Operated individually) VQ4 Model Passage/Stations Station 5 Station 1 Station 10 VQ5 C [dm3/(sbar)] 11 11 11 1 4/2 (P A/B) 0.24 b 0.24 0.24 VQZ 2 position metal seal VQ5 00 2.7 Cv 2.7 2.7 1 2 C [dm3/(sbar)] 12 12 12 VQD 4/2 5/3 (A/B EA/EB) b 0.14 0.14 0.14 Cv 2.9 2.9 2.9 C [dm3/(sbar)] 12 12 12 1 4/2 (P A/B) b 0.33 0.33 0.33

IDX-OM-W014

R 11 R 11-1 11-2 1 AC100V AC200V, AC230V INOUT IDU3E/4E/6E-10-R IDU3E/4E/6E-20/23-R (A) 10 5 (mA) 30 11-3 M5 9.5mm 2 1.25mm L ,N N L () () IDU Series 11-1 11 1 IDX-OM-W014 11 R AC100V M4 () AC200V, AC230V (M3) 11-4 () () ONOFF 11-5 1-1 IDU Series 11-4 11 2 IDX-OM-W014 12.S 12 S IDU3E/4E/6E-10 12-1 IDU Series 12-1 12-1 IDX-OM-W014 12.S 12-2 L N PE M3 6.5mm 2

IDX-OM-W022

Specification for Option R 11 1 Safety instructions .11 1 11 2 Specifications .11 1 11 3 Power supply connection procedure .11 2 11 4 Cautions for handling the GFCI .11 3 11 5 Electric circuit .11 3 Chapter 12 Specification for Option S 12 1 Safety instructions . 12 1 12 2 Specifications . 12 1 12 3 Electric circuit . 12 1 Chapter 13 Specification for Option T 13 1 Safety instructions .

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

B Counter bore depth C T Y HT 2-P (Piping port) L 0 -0.1 22 HP 8 TC X F WP 12.5 19.5 D GW 7 GP QW PW 4-LD Plug 2 x 4-MM Thread depth M Switch rail HS W K Plug CY3RG15 CR HR G G Q + Stroke Z + Stroke CY3RG25, 32, 40 CY3RG20 (mm) Model CY3RG15 CY3RG20 CY3RG25 CY3RG32 CY3RG40 J x E M5 x 0.8 x 7 M6 x 1 x 8 M6 x 1 x 8 M8 x 1.25 x 10 M8 x 1.25 x 10 B 8 9.5 9.5 11 11 HP 11 14.5 20 25 HR 30 36 41

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

13 13 8 10 10 53 8 9 40 25 to 500 21 40 24 24 41 18 16 21 12 17 17 11 16 16 54 10 11 48 25 to 500 21 (mm) Bore size (mm) K NN P S T V W ZZ MM NB IA NA -0.020 -0.053 -0.020 -0.053 -0.025 -0.064 -0.025 -0.064 20 5 M22 x 1.5 1/8 81 9.5 4.5 6.5 138 M8 x 1.25 15 23f8 17 25 5.5 M24 x 1.5 1/8 81 11 3.5 5.5 143 M10 x 1.25 15 25f8 17 32 7.5 M30 x 1.5 1/8 87 13 3 4 159 M14 x 1.5 15 31f8 18 40 7.5

Pin Clamp Cylinder Series CKQ/CLKQ

224 29 222 5.6 6 16 7 11 31 224 29 222 6.1 7 18 8 36 12 229 34 227 7.1 8.5 20 8 36 13 229 34 227 8.6 10.5 25 8 36 15.5 229 34 227 10.6 P (Port thread size) P1 (Lock release port thread size) Nil G1/4 TN TF Nil TF TN Rc1/4 NPT1/4 Rc1/8 G1/8 NPT1/8 11 Series CKQ/CLKQ Dimensions CLKQEC50 (The mounting side and the port position of CLKQED50 is .) 10 (The effective length of D section) 0 -0.05

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

11 11 23 11 23 SOL.A SOL.B SOL.B Light/Surge voltage suppressor Station 10 Station 10 SOL.A SOL.A 10 10 Light/Surge voltage suppressor Light/Surge voltage suppressor 15 15 15 SOL.B SOL.B SOL.B Station 2 Station 2 Station 2 2 2 SOL.A SOL.A SOL.A Light/Surge voltage suppressor Light/Surge voltage suppressor Light/Surge voltage suppressor 2 SOL.B SOL.B SOL.B 14 Station 1 Station 1 14 14 Station

One-touch Fittings

16.5 10 13.9 11 4.5 19.5 3/8 KQ2LU06-03GS 17 10.4 9.7 16.5 29.8 35 29.9 13.3 10.4 6 4.2 16.5 10 13.9 11 4.5 31.5 N Q1 O 8 1/8 KQ2LU08-01GS 14 13.2 13 18.2 25.7 32.3 29.2 14.2 13.2 8 4.2 18.2 13.1 26.3 18.2 6 16.4 1/4 KQ2LU08-02GS 14 13.2 13 18.2 30.1 36.7 32 14.2 13.2 8 4.2 18.2 13.1 26.3 18.2 6 21.5 3/8 KQ2LU08-03GS 17 13.2 13 18.2 31.5 38.1 33 14.2 13.2 8 4.2 18.2 13.1 26.3 18.2 6 33.3

CG5-S

RR S U 0.040 0.076 0.040 0.076 0.040 0.076 0.040 0.076 0.050 0.093 0.050 0.093 0.065 0.117 0.065 0.117 20 8 132 141 7 9 2 14 30 27.6 21 3 56.5 42 30 153 CG-E020SUS 9 83 13 25 8 137 146 7 9 2 14 30 27.6 21 3 56.5 42 30 158 CG-E020SUS 9 83 13 32 10 141 7 11 4 22 40 38.4 29 4 70.5 56 40 170 152 CG-E032SUS 11 85 15 40 10 159 7 11 4 22 40 38.4 29 4 70.5 56 40 188 170 CG-E032SUS 11 93 15 50 14

PF-OMN0009_C

21 0.5~4 L/min 2~16 L/min 5~40 L/min 10~100 L/min 50~250 L/min 2 04 20 40 11 21 R 04 20 40 11 21 S 250L/min G L/min(gal/min) / : SI : G : 1[L/min]=0.2642[gal/min] 1[gal/min]=3.785[L/min] 1=9/5+32 L/min 100L/min250L/min Rc N NPT F G IS0228 1 N M8(3m) 04 20 40 11 21 03 3/8 04 1/2 06 3/4 10 1/1 12 11/4 14 11/2 / OUT1 OUT2 1 1~5 V 2 4~20 mA 1T 1~5 V 1~5 V (PF3W3)1~5V (-1-1T) 4~20mA(

HRX-OM-T004

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 3 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 4 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Low level in tank 1 High circulating fluid discharge temp. 2 Circulating fluid discharge temp. rise 3 Circulating fluid discharge

LEF-OM007xx

-LEFS16 11-LEFS16 Without cable Nil Without cable Nil 11-LEFS25 11-LEFS25 Robotic type cable R Robotic type cable R 11-LEFS32 11-LEFS32 Standard cable S* Standard cable S* 11-LEFS40 11-LEFS40 *Only Step motorcan be selected AC Servo motor 11-LEFS 25 B A1 100 2 S S2 ize I/O connector 25 25 None None Nil Nil 32 32 With connector With connector D D 40 40 Motor Controller type Vacuum

SFOD-OMT0005CN

No.SFOD-OMT0005CN-C EtherNet/IP (DC24V) / / JXC91 1 . 4 2 . 6 2.1. . 6 2.2. . 7 2.3 . 8 2.4 () . 9 (1) . 9 (2) . 9 (3) . 9 (4)PLC . 9 (5) . 9 (6) . 10 (7) . 10 (8) () . 11 (9) . 11 3 . 12 3.1. . 12 3.2 . 13 3.3. . 14 (1)(JXC917-) . 14 (2)DIN (JXC918-) . 15 3.4. . 16 (1) . 16 (2) . 16 (3) . 17 4 . 18 4.1 (IP ) . 18 4.2 . 19 TMEtherNet/IP TM . 20 4.3 RSLogix5000 4.4 EtherNet/

Table of Contents

SET-ON 10 Start readiness signal CN2 24V DC + COM 1 COM 11 NO. 0 Indicates operation in progress when ON. ON when program is being executed and when returning to the home position. 2 BUSY 11 Operating signal NO. 1 12 NO. 2 3 When this signal is OFF, an alarm is being generated for the actuator/controller.

AS-FG/ASD-FG

(ANR) Flow rate l/min (ANR) Effective area mm Effective area mm 12 10, 11 1000 10, 11, 12 08, 09 10 15 8 500 06, 07 10 6 500 4 5 2 0 0 5 10 0 5 10 0 Number of needle revolutions Number of needle revolutions 11 Series ASD-FG Construction ASD230FG ASD330FG/430FG ASD530FG/630FG ASD530FG-02 Parts list Material Note Description Note Description No. 12 Material No. 1 Body A Elbow body Knob Body

SZ3000

Weight (g) 17.6 19.9 24.4 28.9 33.4 37.9 22.1 26.6 31.1 35.6 10 11 12 13 14 15 16 17 18 19 No. Terminal no.

VQ5000

How to Calculate the Flow Rate SOL.A VQZ100-47-A For obtaining the flow rate, refer to pages 2-1-8 to 2-1-11.

Air Slide Table Series MXJ

Clean Series 11 Standard model no. MXJ Clean Series 11: Vacuum type External dimensions are identical to the standard model.

Non-rotating Double Double Power Power Cylinder Cylinder (without Series MGZ Series MGZR non-rotating mechanism)

13 20 26 22 31 41 50 59.5 79 6 7.5 9.5 11.5 14 11 14 19 24 30 11 13.5 16 20 22 22 27 32 41 46 0.75 1 1.25 2 2.5 6000 11000 18000 28000 54000 1300 3100 5000 7900 15300 Individual -X 443 Series MGZR Minimum Stroke for Mounting (mm) 20 25 32 40 50 63 80 Model No. of auto switches 2 pcs.

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

Description Body class Type LQ-GP J Type 3 03 03 10 10 10 12 12 12 19 19 19 25 25 1/8" 03 03 03 03 3/16" 05 05 1/4" 07 07 07 3/8" 11 11 1/2" 13 13 3/4" 19 19 1" 25 6 06 06 06 8 08 4 04 04 04 04 Insert pin holder assembly (with the parts case) Insert pin/ Holder type 1 2 1 2 3 4 5 6 J Insert pin material (J/K type only) Nil N Metric sizes Inch sizes Nil S Resin Stainless steel