Smooth Cylinder

Rubber bumper & Rod end male thread CM Action D Double acting Applicable Auto Switches / For detailed auto switch specifications, please refer to page 5.3-2 of Best Pneumatics Vol. 2. For the specifications of D-M9, please refer to SMC Information '02-E500.

DOC1001322

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-13 Connection of RS-232C HRS Series 3.3 Installation 3-27 DOC1001322 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.

Air Fittings Fitting Series For Special Environment

D .

Vacuum Unit Ejector / Vacuum Pump System

The purity class of compressed air quality based on ISO8573-1:2010 2 : 6 : 3 Solid particle Moisture Oil Max number of particles per m3 Oil concentration (mg/m3) 0.1 < d 0.5 0.5 < d 1.0 1.0 < d 5.0 Pressure dew point Particle size d (m) Class Class (oC) at air pressure Class of 0.7 MPa 1 20,000 400 10 1 -70 1 0.01 2 400,000 6,000 100 2 -40 2 0.1 3 Not specified 90,000 1,000

Digital Pressure Switch

. -8No.PS-OMH0003-F Model Indication and How to Order For Air : I S E For Fluid : I S E Option Indications Pressure specification 70 0 to 1 MPa 02 43 M S 70 02 43 A 75H L M Pressure specification Option 2 75 0 to 10 MPa Nil No option 75H 0 to 15 MPa A Bracket : Mounting screws are not included.

VFR2000 series manifold, metric, Plug-in and non plug-in styles, Wiring types (non plug-in): grommet, grommet terminal, Conduit terminal, DIN connector, L plug connector M plug connector, Wiring types (plug-in): terminal block, multi-connector, D-sub connector, Maximum stations: 17 (depending on style), MFLD, VFR2*10 SERIES, VALVE, VV*FR* MANIFOLD VFR SERIES, UM, VV*FR* BUILT IN FITTINGS

E-P HYREG ® VY1 Series

2) Not conforming to ISO1179-1. 24 V 2 4 to 20 mA 120 3 0 to 20 mA 5 1 to 5 V 67 k 10 k 6 0 to 10 V 12 V 7 4 to 20 mA 120 8 0 to 20 mA Symbol Symbol B (Bracket) F (Foot) G (Pressure gauge) N (Silencer) Body size Port size Rc Option Mounting Port 1(P), 2(A) Port 3(R) Applicable pilot valve (4) 00 M5 00 M5 01 00 01 02 00 02 03 04 M5 01 02 02 03 04 04 06 10 10 12 14 20 Without sub-plate M5

VFR2000 series manifold, metric, Plug-in and non plug-in styles, Wiring types (non plug-in): grommet, grommet terminal, Conduit terminal, DIN connector, L plug connector M plug connector, Wiring types (plug-in): terminal block, multi-connector, D-sub connector, Maximum stations: 17 (depending on style), MFLD, VFR2*00 SERIES, VALVE, VV*FR* MANIFOLD VFR SERIES, UM, VV*FR* BUILT IN FITTINGS

High-precision Digital Pressure Switch ( compatible)

[January 2018] D: Contents are added. [March 2018] E: Contents revised in several places. [June 2018] F: Contents revised in several places. [October 2018] G: Contents revised in several places. [March 2020] H: Contents revised in several places.

High-precision Digital Pressure Switch

[March 2020] D: Contents revised in several places. [August 2021] E: Contents revised in several places.

33

(per unit) Applicable model A B C D HRSE012-AHRSE018-AHRSE024-A240 (335) 505 (540) HRW HRS-TK003 HECR HRSE012-A--T HRSE018-A--T HRSE024-A--T 240 (335) 555 (590) HEC HEB HED HEA IDH Anchor bolt (M8) D C (Prepared by user) Anti-quake bracket Material: Zinc steel plate Mounting view A B w Bypass Piping Set Note) To be mounted by user.

VXA31/32

LVQ 1 (1.5 mm) 2 (2.2 mm) 3 (3 mm) 4 (4 mm) VXA31 VXA32 LQ 01 ( ) 1 8 02 ( ) 1 4 02 ( ) 1 4 03 ( ) 3 8 LVN TI/ TIL Ordering example (Example) Series VXA31, Orifice size 1.5 mm, Rc 1/8 (Part no.) VXA3114-01 PA PAX PB 17-3-103 The VX series will be revised shortly.

S

E R NCJP P I N C Y L I N D E R-D O U B L E A C T I N G D Note: Pre-wired Switches with 3/4 Pin Connectors available, please consult SMC Customer Service AUTO SWITCH SPECIFICATIONS L D-90 D-97 D-90A D-93A Switch Model NCDJP Relay/PLC, Sequencer, IC Circuit Applications <24V 24VDC <24V 100VAC 24VDC 100VAC Voltage Rating L E A D W I R E L E N G T H A U T O S W I T C H 50MA 5~40MA 50MA 20MA 5

LG1H

A: Acceleration time B: Constant velocity time C: Deceleration time D: Resting time (0.4sec.)

Digital Flow Switch (Remote type sensor unit)

Bracket (ZS-33-M) Bracket (ZS-33-MS) -37No.PF-OMJ0016-J Lead wire and connector (ZS-33-D) Connector cover (ZS-33-F) -38No.PF-OMJ0016-J Revision history A: Contents revised in several places. B: Contents revised in several places. C: Modified errors in text. D: Contents are added. E: Contents revised in several places. F: Contents revised in several places.

3 Port Solenoid Valve Rubber Seal Series SY100 1

Type 31 How to Order Applicable solenoid valve Note) SY113--M3 SY113A--M3 SY123--M3 SY123A--M3 Applicable blanking plate assembly SY100-77-1A SS3Y1 31 05 Stations 02 2 stations P R 20 20 stations R port M5 x 0.8 P port M5 x 0.8 Note) SY113(A) and SY123(A) cannot be mounted on the same manifold.

Digital Flow Switches

CM01-8DP4S DDK Ltd. 10 Series PF2A Dimensions PF2A703H, 706H, 712H D E Internal circuits and wiring examples to are terminal numbers.

Model Selection 1

Main sealing Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Main sealing D side sealing A side sealing A seal is formed when the tubing is inserted, with its insert bushing, and its compression against the internal nut.

ISO Interface

C US How to order ISO 5599/2 Plug-in Manifold VV8 1 5 02 03 D T Size 1 Size 1 2 Size 2 3 Size 3 Port Thread Rc(Pt) T NPTF F G(PF) Number of Stations 1 1 Station Location of P, EA, EB port D Bottom U Top 10 10 Station Note) SU and TBU require one station.

NARM Series

NARM 2500 05 A 02 G1 Optimal for central pressure control. Accessory Regulator for manifold Pressure easily set using the new handle. One-touch lock system.