VQ7-6/7-8

25 (R1, R2) 2-3/8 P R2 R1 VK A B 14 11 VZ 38 50 62 50 62 A 12 9 VF R2 R1 P (L 500) Cable with connector B A 2-1/8 13 13 VFR Mounting hole 2-6.5 42.5 42.5 34 34 Indicator light Bottom ported drawing (P , A, B) 3-1/4, 3/8 VP4 VZS SMC VFS 93 14 (A, B port) VS4 12 25 (X port) Y 5 3 37 25 VQ7 22 14 1 EVS X(PE) port 1/8 A, B port 2-1/4, 3/8 25 25 9 Y(PE) port 1/8 R1, R2 port 2-3/8 P port 1/4,

OMS0020

Software Specifications . 11 5.1 Serial Communication Specification . 11 5.2 Frame Format . 12 5.3 Command List . 14 5.4 Command Details . 15 (1) Step Data Setting Command "EE" Details . 15 (2) Step Data Save Command "EU" Details . 22 (3) Step Data Reflection Command "AB" Details . 22 (4) Monitor Command "MO" Details . 23 (6) Details on Operation Command "OE"Details . 26 (7) Alarm History

Precision Cylinder Series MTS

0.2 4-M5 x 0.8 Effective length 8 6.5H7 +0.015 0 13h7 0 0.018 30 0.2 30 0.2 40 38 31 32 57.5 109 + Stroke 21 130 + Stroke 22 0.2 4-M5 x 0.8, effective length 8 28 0.2 22 Rod end male threads 0 0.018 13h7 Width across flats 11 M8 x 1.25 M8 x 1.25 12.8 15 13 5 12 14.5 6 41.5 Stud bolt part number: MT-S25 Rod end nut part number: NT-02 12 Width across flats 14 With end lock 3 124.5 + Stroke

High Vacuum Angle Valve, XL Series

G C Electrical options G XSA122-8-4 XSA1 S S L, Z XSA2 1(100V) AC XSA232-8-4 XSA3 5(24V) DC 6(12V) 32 High Vacuum Angle Valve Series XSA Specifications XSA2-32 XSA3-32 XSA3-43 Model XSA1-12 XSA1-22 XSA2-22 Normally closed direct acting 2 port solenoid valve Action Non corrosive gas for stainless steel (SUS405 equivalent) Fluid 2 3 4.5 6 Orifice diameter mm 0.17 0.33 0.6 1.05 Cv factor 0.8

Series VC, Direct Operated, 2 Port Solenoid Valve for Water, Series VCW

(mm) Electrical entry P Port size A B C D E F H K L M Model Grommet: G Conduit: C DIN connector: D Conduit terminal: T Q R Q R Q R S Q R S 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 22 45 44 43 58 40.5 46.5 99 43 66 1/8 VCW21 18 36 67 31 8.5 12.5 28 18 12.8 M4 22 46 44 44 58 41.5 46.5 99 44 66 1/4 22 40 80.5 36.5 11 15 32 20 19 M5 24 56.5 46 54.5 60 52 48.5 101 54.5 68 1/4, 3/8 VCW31 30 50 85.5

CV/MVGQ

Data 3 x 18l Polished round 12 Polished round 16 Polished round 20 Polished round 24 Polished round 12 Polished round 18 Polished round 20 CDP-3A CDP-3A NT-04 NT-05 NT-08 NT-10 3 x 18 3 55.5 3 47.5 4.0 55.5 47.5 M14 x 1.5 22 25.4 4 8 21 0.050 0.093 0.050 0.093 12 12 40, 50, 63 80 100 4 x 25l CVD-06 CDP-5A 4 x 22 4 75 4 65 5.0 76.5 66.5 M18 x 1.5 5 11 27 31.2 26 0.050 0.093 0.050 0.093 16

Rotary Table

Bearing Body Inside of cylinder Fig. 22 Pay attention to the direction of the piston seal and wear ring (size 50 only).

KN Series Nozzles for Blowing

22 17 17 17 17 17 17 R 1/4 R 1/4 R 3/8 R 3/8 R 1/2 R 1/2 4 6 4 6 4 6 35 D H2 H1 L1 A 8.5 Reference dimensions after R thread installation.

Clean One-touch Fittings For Driving Air Piping KPQ/KPG Series

Connection thread size Proper tightening torque (Nm) M R 1/8 7 to 9 R 1/4 12 to 14 H/DL L/LL R 3/8 22 to 24 R 1/2 28 to 30 KC Installation of Threads 3. Tightening tools Tighten with an appropriate wrench using the hexagon wrench flats on the body. Position the wrench on the base as close as possible to the threads.

Line Filter Rated Pressure: 3.5, 7, 14, 21 MPa FH34/44/54/64 Series

22 22 22 30 30 56 65 73 36 40 48 56 65 73 92 103 36 40 48 56 65 73 36 40 48 56 65 73 4 x M12 x 1.75 4 x M16 x 2 4 x M16 x 2 0 50 342 87 435 255 100 56 4.6 106 150 4 x M10 x 1.5 23 40 (1 1/2B) 50 (2B) 0 60 450 94 545 356 120 70 6.4 120 155 4 x M12 x 1.75 28 0 219 62 285 157 60 45 4.5 80 100 2 x M8 x 1.25 14 0 1 0 1 0 1 0 1 0 1 15 (1/2B) 4 x M10 x 1.5 4 x M10 x 1.5 4 x M12 x 1.75 4 x

Series CJ2Y ø 10, ø 16 Smooth Cylinder Double Acting, Single Rod

D-M9V D-M9MV D-M9AV D-A9V Hs Hs Auto switch Auto switch 16.5 16.5 A B A B 22 20 (22) ( ): Dimension of the D-M9AV A and B are the dimensions from the end of the head cover/rod cover to the end of the auto switch. A and B are the dimensions from the end of the head cover/rod cover to the end of the auto switch.

CL

S + Stroke ZZ + Stroke With rod boot l h + l ZZ + l + Stroke Bore size (mm) Stroke range A B1 BC BN BZ C D E GA GB GC GD GK GL GQ GR I J K KA MM NA AL 20 25 32 40 26 31 38 47 4 7 7 8 4 7 7 8 5.5 9 9 11 3.5 4 4 4 54 62 62 67 19 20 21 23 12 12 11 12 85 95 95 103 12 14 18 25 14 16.5 20 26 57.5 69 69 76 91 101 102 111 38 45 45 52 13 17 17 19 24 29 36 44 18 22 22 30 M8 x 1.25 M10 x 1.25 M10 x

1

This is for reference. *8 Indicates case of grommet type Flow Rate Characteristics Face seal fitting/Compression fitting XSA1-12 XSA1-22 XSA2-22 XSA2-32 XSA2-43 XSA3-32 XSA3-43 Flow rate characteristics C[dm3/(sbar)] 0.55 1.07 1.07 1.51 2.78 1.54 2.89 b 0.41 0.36 0.34 0.24 0.21 0.24 0.21 (Rc, NPT) Female thread XSA1-11 XSA1-21 XSA2-22 XSA2-32 XSA3-33 XSA3-43 Flow rate characteristics C[dm3

Auto Switch Guide Reed Switches/Solid State Switches For Rotary Actuators (Air Grippers) 1

500 (3000) 20 2.7 OUT Black 3.2 DC () Blue 2.6 9.5 6 Most sensitive position 22 500 (3000) 4 D-M9B, D-M9BV OUT (+) Brown Precautions Be sure to read before handling.

REA/REB

64 5.6 M4 x 0.7 7 Rc 1/8 38 95 7 107 11 62 5 REAR25 20 21.5 40 28 72 5.6 M5 x 0.8 6.5 Rc 1/8 43 105 7 117 15 70 6 REAR32 26 24 50 35 79 7 M6 x 1 8.5 Rc 1/8 54 116 7 130 13 76 7 REAR40 34 26 60 40 93 7 M6 x 1 11 Rc 1/4 64 134 7 148 15 90 8 10-2-22 22 Sine Rodless Cylinder Basic Type Series REAR Proper Auto Switch Mounting Position (Detection at stroke end) A B RE A B REC C D CX 10 to 20 CY

Auto Switch Guide

CS1 Auto Switch Internal Circuit D-B53 C76 C85 C95 Weight Reed switch LED OUT () Blue OUT (+) Brown Resistor (g) CP95 D-B53 D-B54 D-B64 Auto switch model Zener diode NCM 22 22 22 0.5 Lead wire length (m) 78 78 78 3 NCA 126 126 5 D-B54 DDimensions Zener diode -X Choke coil Resistor OUT () Blue OUT (+) Reed switch LED 20Surge absorber Data Indicator light DB64 without indicator light D-B64

Auto Switch Guide

500 (3000) 20 2.7 OUT Black 3.2 2.6 DC () Blue 9.5 6 Most sensitive position 22 500 (3000) 4 D-M9B, D-M9BV Precautions OUT (+) Brown Be sure to read before handling.

MGQ

Applicable series MGQM Slide bearing MGQL Ball bushing bearing 12, 16, 20, 25, 32 40, 50, 63, 80, 100 Bore size (mm) Bearing type How to Order D By-pass port dia. 20 M Stroke Bore size MGQ Bearing type Slide bearing Ball bushing bearing M L D (mm) MGQL 8 10 12 15 18 18 22 22 28 33 Bore size (mm) A (mm) B (mm) C (mm) Hexagon socket head cap screw Copper-free MGQM 10 12 14 18 22 22 27 27 31

EXxx-OMY0004

16 Date Signature (editor) Date Signature (test engineer) 108 No.EX##-OMY0004 22.

EXxx-OMY0006CN

()UT1/UT2 . 16 3.4. . 20 4. . 21 5. . 22 5.1. . 22 5.2. . 23 6. . 24 7. . 25 7.1. . 25 7.2. . 27 8. . 33 8.1. . 33 8.2. . 36 9. . 44 9.1. IO . 44 9.2. . 48 10. SI . 49 10.1. . 49 10.2. . 51 10.3. . 53 10.4. I/O . 53 10.5. I/O . 54 10.6. . 54 10.7. . 59 10.8. Output status unit . 59 10.9. LED . 61 10.10. . 65 10.11. DIP . 65 2 No.EX##-OMY0006CN 10.12. . 68 11.