5 Port Air Operated Valve hole M5 x 0.8 [4 (A), 2 (B) port] 9.3 27.8 17.8 20.3 20.3 4A 2B P P P 55.5 4A 2B 4A 2B 4A 2B 4A 2B 4A 2B 34 17 6 10 8.2 (Not used.) 5 2 x 5.5 (For mounting) (Pitch) P=27.5 23.5 1/8 [4 (A), 2 (B) port] (Station 1) (Station n) 1/8 [Pilot port: Lateral (-P)] 61.5 43 25 EB EA EB EA 11 M5 x 0.8 [5 (EA), 3 (EB) port] 18 (Pitch) P=27.5 Dimensions (Common to Type 30 and Type 31) n: Stations 20 11
Dimensions n L 2 39 31 3 50 42 4 61 53 5 72 64 6 83 75 7 94 86 8 105 97 9 116 108 10 127 119 11 138 130 12 149 141 13 160 152 14 171 163 15 182 174 16 193 185 17 204 196 18 215 207 19 226 218 20 237 229 L1 L2 1.13-11
SAFETY INSTRUCTIONS 1-5 2. APPLICATION 6 3. SPECIFICATIONS 6 4. HOW TO ORDER 7 5. OPTIONAL BRACKET ASSEMBLY 8 6. MAXIMUM APPLICABLE FLOW RATE 9 7. TROUBLESHOOTING 9 8. CONSTRUCTION / PARTS LIST 10 9. SPECIFICATIONS OF BOWL ASSEMBLY 11-18 10. REPLACEMENT PROCEDURE 19-22 11. DISASSEMBLY DRAWING 23 12.
SAFETY INSTRUCTIONS 1-5 2. APPLICATION 6 3. SPECIFICATIONS 6 4. HOW TO ORDER 7 5. OPTIONAL BRACKET ASSEMBLY 8 6. MAXIMUM APPLICABLE FLOW RATE 9 7. TROUBLESHOOTING 9 8. CONSTRUCTION / PARTS LIST 10 9. SPECIFICATIONS OF BOWL ASSEMBLY 11-18 10. REPLACEMENT PROCEDURE 19-22 11. DISASSEMBLY DRAWING 23 12.
SPECIFICATIONS -5-1 5.1 SPECIFICATIONS OF HEC001 -5-1 TABLE5-1 SPECIFICATIONS OF HEC001 -5-1 5.2 SPECIFICATIONS OF HEC003 -5-2 TABLE5-2 SPECIFICATIONS OF HEC003 -5-2 5.3 PERFORMANCE CHART -5-3 5.3.1 PERFORMANCE OF HEC001 -5-3 1) COOLING CAPACITY -5-3 2) HEATING CAPACITY -5-4 3) PRESSURE LOSS OF RADIATING WATER -5-5 5.3.2 PERFORMANCE OF HEC003 -5-6 1) COOLING CAPACITY -5-6 2) HEATING CAPACITY
6.5 5 3 24 5 3 24 6 3 5 4.5 24 4 4 4 33 33 33 (mm) I 4 5 5 Model MHS2-16D MHS2-20D MHS2-25D G 25 27 28 FZ 3 3 5 FY 11 13 14.5 FX 12.5 14.5 17 CB 11 13 15 EC 10 12 14 EO 14 16 20 NB 5h9 6h9 6h9 DC 30 36 42 NA 8 10 12 DO 34 40 48 K 4 5 6 B 30 36 42 Q 6 7 8 J 10 12 14 AA 35 38 40 AB 32 35 37 O 2 2.5 3 P M3 x 0.5 M5 x 0.8 M5 x 0.8 0 -0.030 0 -0.030 0 -0.030 Model MHS2-16D MHS2-20D MHS2-25D VA
NP (5) The "BUSY" output turns ON. OUT0 (4)(6)(9)(11) (INP) Output (6)When the traveling is completed, "OUT0" (INP) output turns ON. (5)(7)(10)(12) BUSY (7) The BUSY output turns OFF. Traveling to target position 1 is completed. (8) Enter pulse input signals.
Monitor unit Monitor unit Monitor unit Monitor unit 3% F.S. (15 to 35C) 5% F.S. (0 to 50C) 5% F.S. (0 to 50C) 2% F.S. (15 to 35C) 5% F.S. (0 to 50C) (15 to 35C) 0.5% F.S. (0 to 50C) 0.5% F.S. (0 to 50C) 0.5% F.S. (0 to 50C) 0.5% F.S. (0 to 50C) 5% F.S. (0 to 50C) 5% F.S. (0 to 50C) 5% F.S. (0 to 50C) Repeatability 1% F.S.
Users equipment 2 1 2 Circulating fluid outlet Oscillator CH1 2 2 Circulating fluid return port 3 5 4 5 Circulating fluid outlet Optical system CH2 5 5 Circulating fluid return port No. Description Size Recommended part no.
> I A, ' Y.POO6 I 6 5 6 3g 040 112 3,5 M3XQ,5 5 3 5 I ~POO6 6 5 6 I 3 I-g040 112 3,5 M3 x Q,5 5 3 5 1 4 -1 -11'(51.0,1 '10 $,~ ~o ! 5+ g"'" 116 5:5 M4XO,7 YPOIO , '10 6.S 10 sg04I 16 5.5I M,4 XQ,7 71' 5 a 6.3 7 I 5 a 1 6.3 YP015 I 15 7 12 ~-g.048 19 7 M5XO,a 9 I 6 10 ,7.8 10 7,a ...!:!'.015 l 15 7 12 6 -g~ 19 9 I 6 7 M5 x O.B . ~I ~--~~ K ~~ P~ ' ~k I -TFunnion Pin' . , nue ' :e In .
Enable Val165000 5 ON/OFF ON/OFF 10 4 Disable ON/OFF ON/OFF 0 11 83 1( 2Hold/Clear Via software 3PLC 4 5x1000 -48No.EX-OMS0026CN No.
Note 5) Refer to cautions on page 9 if IZN10E-11-(Female threads for piping) is used.
Bore size Standard stroke (mm) MM YY L X K W J V H GA GB TA TB U G T F S DA R C Z NN Q B ML P PW YL (mm) 12 16 20 25 18 50 13 5 16 40 58 5 7.5 5 36 29 56 8 22 6 48 29 12 14 39 7 10, 20, 30, 40, 50, 75, 100 M4 x 0.7 10 M4 x 0.7 M5 x 0.8 7 M4 x 0.7 11 22 54 15 7 18 42 64 2.5 8 5.5 38 33 62 8 25 8 52 33 13 16 43 8 10, 20, 30, 40, 50, 75, 100 M5 x 0.8 13 M5 x 0.8 M5 x 0.8 5 M5 x 0.8 11 20, 30
output 1 to 5 V (within the flow rate range) Linearity: 5% F.S. or less; allowable load resistance: 100 k or more.
When bank 2 is selected 0 Decimal no. 1 2 3 4 5 6 7 8 9 Bank 2 Bank 3 Bank 4 16 17 18 19 20 BCD 0 0001 0010 0011 0100 0101 0110 0111 1000 1001 11 12 13 14 15 Ex.) 1294.53 is expressed as follows. 0001 0010 1001 0100 0101 0011 6 7 8 9 10 Bank 1 1 2 3 4 5 RS-232C 1 2 3 4 5 6 7 8 9 10 Output terminal This is the interface standard for the serial transmission method, which is standard equipment
5 DPiston nut Rolled steel Joint seal 40 to 63 NBR #5 !6 Port joint Stainless steel Valve seal NBR 40 to 63 #6 !
Metric size Inch size 3.2 01 03 05 07 09 11 23 04 06 08 10 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" Control type 4 6 8 10 0 1 Meter-out Meter-in Use 1/8" tube.
Flow Direction Symbols on Body Flow Rate and Effective Area Meter-out type Meter-in type AS221F-01 AS231F-01 AS221F-02 AS231F-02 AS321F AS331F AS421F AS431F AS121F AS131F Model Symbol JIS Symbol Metric size 3.2, 4, 6 3.2, 4 6, 8, 10 8, 10 4 6 6 8 10 12 10, 12 Tubing O.D. 1/8", 5/32" 1/8" 3/16", 1/4" 1/4", 5/16" 3/8" 1/4" Inch size 5/32" 3/16" 5/16" 3/8" 1/2" 5/32" 5/16" 3/8" 3/16", 1/4" Controlled
Analog output Response time*6*7 0.25 s/0.5 s/1 s/2 s/5 s Voltage output Output voltage: 1 to 5 V Output impedance: 1 k Current output Output current: 4 to 20 mA Max. load impedance: 600 Hysteresis Variable Display method 2-screen (Main screen: 4-digit, 7-segment, 2-color, Red/Green; Sub screen: 6-digit, 11-segment, White) Display values updated 5 times per second Status LEDs Output 1, Output
eccentricity U Maximum operating tensile and compressive force N Applicable cylinder bore size Model Nominal size Pitch Center of sphere R M A B D E F G H Weight kg 20 25 32 32, 40 40 32, 40 50 50, 63 44 49.5 49.5 60 60 60 71.5 71.5 17.5 19.5 19.5 20 20 20 22 22 21 24 24 31 31 31 41 41 4.5 5 5 6 6 6 7.5 7.5 7 8 8 11 11 11 14 14 7 8 8 11 11 11 13.5 13.5 13 17 17 22 22 22 27 27 30.5 34 34