ZQ-OM01401

30 -100 -80 25 [L/min (AMR) ] -80 [L/min (AMR) ] [kPa] [kPa] 20 -60 -60 15 -40 -40 10 -20 -20 5 0 0 0 0.2 0.3 0.4 0.5 0 1 2 3 4 5 6 [MPa] [L/min (AMR) ] ZQ07A 0.43MPa -100 40 -100 35 -80 [L/min (AMR) ] -80 [L/min (AMR) ] 30 [kPa] [kPa] -60 25 -60 20 -40 -40 15 10 -20 -20 5 0 0 0 0 2 4 6 8 10 12 0.2 0.3 0.4 0.5 [MPa] [L/min (AMR) ] ZQ10A 0.43MPa -100 70 -100 60 -80 [L/min (AMR)

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

Bore size/Stroke (mm) 6 10, 20, 30, 40, 50 8 10, 20, 30, 40, 50, 75 12 10, 20, 30, 40, 50, 75, 100 16 10, 20, 30, 40, 50, 75, 100, 125 20 10, 20, 30, 40, 50, 75, 100, 125, 150 25 10, 20, 30, 40, 50, 75, 100, 125, 150 Adjuster option Nil Without adjuster Functional option AS Extension end adjuster AT Retraction end adjuster Nil Standard A Both ends adjuster P Note) Axial piping CS Extension

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type

pressure: 0.5 MPa Inlet pressure: 0.5 MPa 100 200 3 400 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) 6 Effective area (mm2) Effective area (mm2) Effective area (mm2) 06, 08 08, 10 1.0 300 06 04 2 4 50 100 200 0.5 1 2 100 0.0 0 0 0 0 0 0 5 10 0 5 10 0 5 10 Number of needle rotations (turns) Number of needle rotations (turns) Number of needle rotations (turns) ASG520F

MXF

A2 10 11 12 17 Model A1 6 10 10 11 MXF8 MXF12 MXF16 MXF20 A3 6 10 10 11 A4 21 23 28 34 A5 21 23 28 34 A6 10 11 12 17 Graph (2) Allowable Moment Coefficient: Note) Note) MXF8 MXF12 MXF16 MXF20 1.0 Allowable Moment Coefficient: Note) 16 mm for MXF8-10 only. 0.7 Stroke (mm) Table (4) Maximum Allowable Moment: Mmax (Nm) 0.5 0.4 Model 10 0.56 100 18.27 75 7.96 13.70 50 3.34 5.69 9.14 30 0.98

Cylinder with Turntable Series MGT ø63, ø80, ø100 1

10 30 205 4 3 2 20 Data 10 20 30 40 50 100 200 300 1 1 2 3 4 5 10 20 304050 100 200300400 Eccentric distance l (mm) 10 400 Eccentric distance l (mm) MGTL100 300 200 300 MGTM100 200 P = 0.5 MPa 100 P = 0.5 MPa Load weight m(kg) Larger than 75st Load weight m(kg) 40 50 100 Larger than 50st 50st 25st 30 25, 50st 20 50 40 10 30 5 4 3 2 20 1 10 20 30 40 50 100 200 300 1 2 3 4 5 10 20 304050 100

MHZ2/MHZJ2

, 0.7MPa 0.6MPa, 0.7MPa 20 20 MHZ2/Standard 10 10 0 10 20 30 40 50 60 0 10 20 30 40 50 60 Gripping point L mm Gripping point L mm H H MHZ 2-20 MHZ 2-20 Gripping point 100 L 80 Pressure 0.2MPa 80 Pressure 0.2MPa Overhang H mm Overhang H mm 60 MHZJ2/With dust cover 60 0.6MPa 0.3MPa 0.7MPa 40 0.4MPa 0.5MPa 0.3MPa 0.4MPa 0.5MPa 0.6MPa 0.7MPa 40 20 20 0 20 40 60 80 0 20 40 60 80 100 Gripping point

Air Slide Table Series MXJ

MXJ4 MXJ4L 4.5 MXJ6 MXJ6L 6 MXJ8 MXJ8L 8 60 500 50 Theoretical output (N) MXQ / MXS 40 MXQ 100 Height (mm) 30 50 20 MXJ 10 MXJ 10 50 5 20 30 150 Stroke (mm) 0 1 10 100 1000 Allowable moment (Nm) Operating pressure: 0.5 MPa when operating direction is OUT.

Rotary Gripper Series MRHQ

0.7MPa 0.5MPa 40 Gripping force N 0.6MPa 40 Gripping force N 0.5MPa 0.4MPa 0.4MPa 30 30 0.3MPa 0.3MPa 20 20 0.2MPa 0.2MPa 10 10 L L 0 10 20 30 40 50 60 0 10 20 30 40 50 60 Gripping point L mm Gripping point L mm MRHQ20D MRHQ20D Internal gripping Pressure 0.7MPa Pressure 0.7MPa 60 100 Pressure 0.7MPa Pressure 0.7MPa 0.6MPa 0.6MPa 0.6MPa 0.6MPa 50 80 0.5MPa 0.5MPa Gripping force N 0.5MPa 0.5MPa

Pilot Operated

COM. 2 to 10 10 to 25 1.5 to 4 N.C./N.O. 1/8 to 1/2 N.C.

Microspeed Cylinder

, 15, 20 25, 32 40, 50, 63 CY1S, CY1L: 6 to 40 12, 16, 20 25, 32, 40 50, 63, 80 100 6, 10 15, 20 25, 32 12, 16, 20 25, 32, 40 50, 63, 80 100 10, 16 20 25, 32 12, 16 20, 25 32, 40 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 20, 25 32, 40 50, 63 12, 16 20, 25 6, 10 16 20, 25, 32 40, 50 10, 15 25 6, 10 16 20, 25 32, 45 Bore size (mm) 5 to 50mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50mm/s Piston speed

ML2B

For details about auto switches with pre-wire connector, refer to page 10-20-66. 10-13-8 6 Stroke Reading Rodless Cylinder with Brake Series ML2B Cylinder Specifications 25 32 40 Bore size (mm) Fluid Air Double acting Spring and pneumatic 0.1 to 0.8 MPa 0.3 to 0.5 MPa 1.2 MPa 0.75 MPa 5 to 60C (No freezing) 100 to 1500 mm/s (During the positioning 100 to 500 mm/s) Air cushion on both sides

ML2B

For details about auto switches with pre-wire connector, refer to page 10-20-66. 10-13-8 6 Stroke Reading Rodless Cylinder with Brake Series ML2B Cylinder Specifications 25 32 40 Bore size (mm) Fluid Air Double acting Spring and pneumatic 0.1 to 0.8 MPa 0.3 to 0.5 MPa 1.2 MPa 0.75 MPa 5 to 60C (No freezing) 100 to 1500 mm/s (During the positioning 100 to 500 mm/s) Air cushion on both sides

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

13 13 5 5 10 10 5-M5 X 0.8 10 10 5-M5 X 0.8 28 (Piping port) 28 (Piping port) [ ] for AC Other dimensions are the same as the grommet style. [ ] for AC Other dimensions are the same as the grommet style. 1.2-16 Series SYJ3000 3 Position Closed Center/Exhaust Center/Pressure Center 3 4 5 G H Grommet (G), (H): SYJ3 40-l ll-M5 10 9 5 10 SY 16.5 33.5 SYJ 2-1.8 (Mounting holes) Manual override

3

Allowable Moment of Inertia (32, 40) 10-1 New MK series Current MK series Current MK2 series Allowable moment of inertia [kgm2] New MK series (Standard) 10-2 Current MK2 series (Heavy-duty type) 10-3 Current MK series Overall Length Dimensions Standard arm Bore size Shortened dimensions (compared to the current MK2 series) 20 25 32 40 50 63 MK series overall length (at 20st) 10-4 50 100 200

Step Motor Controller (Servo/24 VDC) Incremental / Battery-Less Absolute Encoder compatible

(Using Step No.2) [Normal mode] Step data example Pushing Trigger Pushing Moving Move Accele Decele Speed Position Area1 Area2 In position No. ration ration force L V speed mm/s force ment MOD mm/s mm mm mm mm mm/s2 mm/s2 % % % 0 1 Absolute 100 100.00 1000 1000 50 40 10 100 0 0 5 2 Absolute 50 50.00 1000 1000 0 0 0 100 0 0 0.1 Flow chart (example) Controller Parallel I/O signal (1) Select

Guide Table Series MGF

5 1 10 20 30 40 50 100 200 300 400 1 5 4 10 20 30 40 50 100 200 300 400 5 10 50 100 10 50 100 Eccentric distance l (mm) Eccentric distance l (mm) Stroke (mm) Stroke (mm) l = 300mm Graph 4 l = 200mm Graph 3 v = 150mm/s or less Graph 7 v = 200mm/s or less Graph 8 20 300 300 200 200 MGF100 MGF100 20 100 100 MGF100 10 50 40 50 40 MGF63 MGF100 Load weight m0 (kg) MGF63 Load weight m0 (kg) Load

ML2B

RE A B REC ML2B/W1 ML2B/W2 ML2B/W3 ML2B/W4 CX 50 10 10 CY 20 3 4 5 3 4 5 10 Load weight (kg) Load weight (kg) Load weight (kg) 10 Load weight (kg) MQQ M 5 4 3 2 2 5 2 1 1 RHC 1 0.5 0.4 0.3 0.5 0.4 0.3 ML2B40 ML2B40 ML2B40 ML2B32 ML2B32 ML2B32 1 ML2B40 ML2B40 ML2B40 ML2B32 ML2B32 ML2B32 MK(2) ML2B40 ML2B40 ML2B40 ML2B32 ML2B32 ML2B32 ML2B25 ML2B25 ML2B25 100 200 300 400 500 1000 1500 ML2B40

Compact Hydraulic Cylinder Double Acting/Double Rod Series CH
QWB ø 20, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

Standard Strokes Standard strokes (mm) Bore size (mm) 20 32 40 50 63 80 100 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 JIS symbol 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Double acting/Double rod 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25,

Compact Electric Actuator Series LG1

67 4-M8 x 1.25 thread depth 10 20 0.02 8H10 depth 10 Encoder signal line Motor power line 8H10 depth 8 85 210 A (Table movement range) 78.5 (78.5) 107 10 95 Work mounting reference plane 55 Body mounting reference plane 52.5 1 D 125 8(4)-M6 x 1 thread depth 10 3(2)-8H10 depth 10 30 95 95 8(4)-6.2 C 100 () () (170) 95 95 B 110 20 (150) () () Dimensions A 329 429 529 629 729 829 929 1029 1129

Low Profile Slide Table Series MXF

MXS (mm) B E MXQ Stroke Stroke Model A 75 20 50 10 20 10 30 100 30 50 75 100 MXF MXF8 13.5 9 14 14 1 4 4 MXF12 16 17.1 33.1 17.1 7.1 7.1 23.1 MXW MXF16 21.2 29.8 19.8 50.8 9.8 19.8 40.8 MXF20 23.4 MXJ 26.7 24.7 74.7 50.2 14.7 16.7 40.2 64.7 Solid State Auto Switch: D-M9BV, D-M9NV, D-M9PV, D-M9BWV, D-M9NWV, D-M9PWV MXP (mm) B B E MXY Stroke Stroke Model A 20 20 10 30 50 75 100 10