SMC

70 FF 38 24.5 6H9 depth 6 +0.030 0 F 31 6-M6 x 1 thread depth 10 N 1 x F 2 6H9 depth 6 +0.030 0 55.5 2-M8 x 1.25 thread depth 15 40.5 M 0.5 58.5 62 Z ZZ G H (NN1) x H 16 34 16 34 A B 11 12 6.6 12 38 2 7 A B NN-M8 x 1.25 thread depth 16 6H9 depth 6 +0.030 0 6H9 depth 6 +0.030 0 GA HA Section AA Section BB (mm) Model ZZ 133.5 133.5 133.5 143.5 156.5 197.5 238.5 296.5 336.5 M 92 92 92 102 115

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Example 1 Example 2 Rotation range for block D = 135 (195) Point zero Single flat Set range of Block D Max. 115 (Size: 10, 40) Max. 120 (Size: 15, 20, 30) Rotation range for block C Max. 115 (Size: 10, 40) Max. 120 (Size: 15, 20, 30) End r End w Rotation range for block C = 90 CRB2 End q End q End w Single flat CRBU2 (45) B port A port B port A port A port B port A port

Rotary Actuator/Vane Type

Set range of Block C = 135 (195) Single flat Point zero CRB2 CRB2 Set range of Block C Max. 115 (Size: 10, 40) Max. 120 (Size: 15, 20, 30) Set range of Block D Max. 115 (Size: 10, 40) Max. 120 (Size: 15, 20, 30) End r End w CRB1 End e Set range of Block D = 90 MSU End w End q Single flat CRJ End q (45) A port B port A port B port CRA1 B port A port B port A port Clockwise

Slider Type/Ball Bushing Bearing

Horizontal Operation (Load, Lateral offset Lo) Bore size (mm) Allowable load mass (WA) (kg) 6.48 3.6 + 2 (1.6 + Lo) sin 15 5 + 2 (1.95 + Lo) sin 45.5 6.5 + 2 (2.4 + Lo) sin 115 8 + 2 (2.8 + Lo) sin 180 9 + 2 (3.1 + Lo) sin 330 11 + 2 (3.95 + Lo) sin 624 13 + 2 (4.75 + Lo) sin Lo: Distance from mounting surface to load center of gravity (cm) 6 10 15 20 25 Lo: Distance from center of side block

3 Port Air Operated Valve

N.O. 40 12 NC 51.5 115.1 107.1 107.1 115.1 86 24 1P 51.5 NO 12 1/2 1(P) port 1/8 12(PA) port (Pitch) P = 41 8 37 M5 x 0.8 (Breathing hole) L1 L2 (Station n) (Station 1) 1/8 12(PA) port 12 127 94.5 78.2 2A 2A 63 19 1/2 2(A) port (Pitch) P = 41 37 2 stations 115 99 156 140 197 181 238 222 279 263 320 304 361 345 402 386 443 427 484 468 525 509 566 550 607 591 648 632 689 673 730 714 771 755

WRF100

Switch mounting bracket Note 2) 0.2 25 25 13 Fulcrum 12 12 20 10 10 2 x M10 x 1.5 through 45 F 30 90 110 107 Note 3) 2 x 4 x M10 x 1.5 depth 12 70 0 2 x 2 x 8H7( ) depth 12 0.015 1 193 25 52 380 (58.7) 95 133 70 0.05 (70) 85 75 270 0.3 (173) Rc1/ 4 (10) 100 100 Unclamp side port (30.2) (30.2) 306 139 360 Limit switch Note 1) Rc1/ 4 Clamp side port 0 4 x 8H7( ) through 0.015 82 0.05 143 115

100

. * There is no S option for AC voltage valves because the generation of surge voltage is prevented by a rectifier. u Manual override H: Lead wire length 600 mm LN: Without lead wire LO: Without connector MO: Without connector Nil Non-locking push type D Push-turn locking slotted type AC (50/60 Hz) CE-compliant 1 100 VAC 2 200 VAC 3 110 VAC [115 VAC] 4 220 VAC [230 VAC] * LN and

MY1

Therefore, check the allowable load for the selected conditions. 16 20 25 32 40 50 63 16 20 25 32 40 50 63 6.0 3.0 1.0 18 7 2.1 10 5.2 1.7 26 10.4 3 15 9.0 2.4 38 15 4.5 MY1MW 30 15 5.0 57 23 6.6 59 24 8.0 84 33 10 115 38 15 120 48 14 140 60 19 180 72 21 6.0 3.0 2.0 18 7 2.1 10 5.0 3.0 25 10 3 15 8.5 5.0 35 14 4.2 30 14 10 49 21 6 MY1CW 60 23 20 68 30 8.2 115 35 35 93 42 11.5 150 50 50 130

CRB2/CRBU2/CRB1

Rotation range for block (C) = 135 (195) Single flat Point zero Rotation range for block (C) Rotation range for block (D) End of rotation Max. 115 (Sizes: 10, 40) Max. 120 (Sizes: 15, 20, 30) End of rotation Max. 115 (Sizes: 10, 40) Max. 120 (Sizes: 15, 20, 30) End of rotation Rotation range for block (C) = 90 End of rotation End of rotation End of rotation Single flat (4 5) B port A port

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com High precision type/MSQA Size 1 2 3 7 Allowable kinetic energy (mJ) Rotation time adjustment range for suitable operation (s/90) 1 0.2 to 0.7 1.5 JIS Symbol 2 6 0.2 to 1.0 Weight (g) 1 2 3 7 Size 75 105 150 250 Basic type 80 115 165 265 High precision

Compact Cylinder with Air Cushion

Mounting bolt C D Mounting bolt Mounting bolt D 65 70 75 85 95 120 145 85 95 105 130 155 90 100 110 135 160 105 115 140 165 120 130 155 180 Model C D 50 55 60 65 75 85 55 60 65 70 80 90 60 65 70 80 90 115 140 Model C R(D)QB20-15 -20 -25 -30 -40 -50 R(D)QB25-15 -20 -25 -30 -40 -50 R(D)QB32-20 -25 -30 -40 -50 -75 -100 R(D)QB40-20 -25 -30 -40 -50 -75 -100 R(D)QB50-30 -40 -50 -75 -100 R(D)QB63

Table of Contents

Example 1 Example 2 Rotation range for block D = 135 (195) Point zero Single flat Set range of Block D Max. 115 (Size: 10, 40) Max. 120 (Size: 15, 20, 30) Rotation range for block C Max. 115 (Size: 10, 40) Max. 120 (Size: 15, 20, 30) End r End w Rotation range for block C = 90 CRB2 End q End q End w Single flat CRBU2 (45) B port A port B port A port B port A port B port

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Example 1 Example 2 Rotation range for block D = 135 (195) Point zero Single flat Set range of Block D Max. 115 (Size: 10, 40) Max. 120 (Size: 15, 20, 30) Rotation range for block C Max. 115 (Size: 10, 40) Max. 120 (Size: 15, 20, 30) End r End w Rotation range for block C = 90 CRB2 End q End q End w Single flat CRBU2 (45) B port A port B port A port B port A port B port

Compact Cylinder

Fix the cylinder by using the OA thread that are provided with the cylinder tube. 50 55 60 65 70 75 80 85 90 95 55 60 65 70 75 80 85 90 95 100 110 130 150 M5 x 55 l x 60 l x 65 l x 70 l x 75 l x 80 l x 85 l x 90 l x 95 l x 100 l x 110 l x 130 l x 150 l 60 65 70 75 80 85 90 95 100 105 115 135 155 M6 x 60 l x 65 l x 70 l x 75 l x 80 l x 85 l x 90 l x 95 l x 100 l x 105 l x 115 l x 135 l x 155

Free Mount Cylinder

Model Bore size (mm) Cylinder stroke (mm) 5 63 (68) 103 (128) 180 (214) 304 (358) 514 (587) 49 (54) 79 (104) 145 (179) 259 (313) 421 (494) 10 15 20 25 30 40 50 69 (79) 115 (145) 204 (244) 343 (402) 574 (652) 53 (63) 86 (116) 159 (198) 279 (338) 451 (529) 75 (85) 127 (157) 228 (267) 382 (441) 634 (712) 57 (67) 93 (123) 173 (212) 299 (358) 481 (559) 81 (91) 139 (169) 252 (292) 421 (480) 694

RQ

Mounting bolt C D Mounting bolt Mounting bolt Model C D 50 55 60 65 75 85 55 60 65 70 80 90 60 65 70 80 90 115 140 Model C D 65 70 75 85 95 120 145 85 95 105 130 155 90 100 110 135 160 105 115 140 165 120 130 155 180 R(D)QB20-15 -20 -25 -30 -40 -50 R(D)QB25-15 -20 -25 -30 -40 -50 R(D)QB32-20 -25 -30 -40 -50 -75 -100 R(D)QB40-20 -25 -30 -40 -50 -75 -100 R(D)QB50-30 -40 -50 -75 -100 R(D)QB63

CXWM/CXWL

x 2-11 counterbore depth 6.5 (8H7 hole pitch) -X 20Data 8H7 depth 6 +0.015 0 4-M8 x 1.25 thread depth 15 4 positions for set screws for fixing shock absorbers (M5) 2-Rc 1/8 Plug (R 1/8) (Cylinder port) 8H7 depth 12 +0.015 0 (mm) ZZ 263 313 363 413 463 513 Z 223 273 323 373 423 473 SS 146 171 196 221 246 271 S 77 102 127 152 177 202 Q 243 293 343 393 443 493 P 70 95 120 145 170 195 L 90 115

MLGP

/MVGPL Extension locking Retraction locking IC Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB GC H HA IA ID IE IH J K L IB 52 64 77 40 46 58 M6 27 32 39 34 35 38 11 13 16.5 4 7 6.5 10 14 34.5 40 50 63 100 120 148 162 16 20 20 14 44 12 16 16 44 47 50 54 64 78 14 19 19 6.5 6.8 7.5 27 32 39 25, 50, 75, 100, 125, 150 175, 200, 250, 300, 350 M8 11 12 39.5 107 14 44 M10 13.5 16.5 46 115

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

TB 18 22 TA 13 17 T 23 29 R 45 79.5 QW 48 87 N 4.5 7.5 Q 105 138 M 6 8 PB 60 100 MM M4 x 0.7 M6 x 1 PA 25 50 LW 69 115 P M5 x 0.8 Rc 1/8 LD 5.6 8.6 Model CYP15 CYP32 Note 1) These dimension drawings indicate the case of piping port location Nil.

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

PA 25 50 P 5/16-24 UNF 7/16-20 UNF N 4.5 7.5 M 6 8 MM M4 x 0.7 M6 x 1 LW 69 115 Model CYV15 CYV32 Note) Refer to Cushion Effect (Sine Cushion) and Stroke Adjustment under Specific Product Precautions on page 8-18-11. 8-18-9 9 Series CYV Specific Product Precautions 1 Be sure to read before handing.