Support Guide/11-LEFG Series

-450 580 457 560 10 4 480 35 11-LEFG25-S-500 630 507 610 11-LEFG25-S-550 680 557 660 12 5 600 11-LEFG25-S-600 730 607 710 11-LEFG25-S-150 280 157 260 11-LEFG25-S-200 330 207 310 6 2 240 11-LEFG25-S-250 380 257 360 11-LEFG25-S-300 430 307 410 8 3 360 11-LEFG25-S-350 480 357 460 11-LEFG25-S-400 530 407 510 35 528 Support Guide 11-LEFG Series Dimensions: Ball Screw Drive 11-LEFG32-S 42 70 (122

Series AP3100

Wetted Parts Material S 316L SS secondary remelt Electropolish + Passivation Elgiloy Wetted Parts Body Surface finish Diaphragm Elgiloy is a registered trademark of Elgiloy Specialty Metals. 122 Series AP3260 Diaphragm Valve for Ultra High Purity Manually operated type (Metal seated) AZ AK KT BP Diaphragm Valves Check Valves Vacuum Generators Flow Switches Technical Data/ Glossary of Terms

Basic Type/Direct Mount Type

30 32 CC 32 38 D 7.6 12 16.6 21.6 26.4 33.6 41.6 52.4 65.4 E 4 1.5 2 2 2 2 3 8 8 F 8 9 10 13 13 16 16 2 2 G 5 5 5.5 7.5 7.5 8 11 14 14 H 13.5 12.5 13 20 20.5 22 29 33 33 I 28 34 40 50 58 72 J 4.5 4.5 6 6 8 8 10 12 12 K 5 4 11 8 10 15 16 25 26 N 9.5 11 11 18 18.5 20 26 25 25 Q NN S 62 63 83 106 111 124 150 176 188 V A 4 4 4 8 8 8 10 T C 8 14 14 26 32 32 41 L 35 38 57 66 70 80 92 110 122

Speed Controller: Standard Type Large Flow In-line Type AS Series

Dimensions AS420 AS500 AS600 67.5 74 90 1/4, 3/8, 1/2 3/4 1 38 42 55 122 115 158 112 105 148 50 50 62 L1 L2 L4 Min. L3 (1) Model Port size Max. 1 4 1 2 120 150 AS800 AS900 74 93 204 262 192 250 80 94 1 1 , 2 Note 1) L3: Reference dimensions Note 1) L3: Reference dimensions 655

Related Products

Specifications AC40* 72.5 75 100.5 Piston B Switching Pressure (Close to Open) AC50* 93 96 131 Model AV5000 AV2000 AV3000 AV4000 AC55* 98 96 131 Outlet pressure psi (MPa) 3/4 Port size 1/4 1 3/8 1/2 75 (0.5) AC60* 98 101 131 Proof pressure 225 psi (1.5 MPa) 60 (0.4) Operating pressure range 30 to 150 psi (0.2 to 1 MPa) A1 A2 A3 45 (0.3) Ambient and fluid temp. 32 to 140F (0 to 60C) 30 (0.2) 113 20 122

Series 12-CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40 ø50, ø63 Magnetically Coupled Rodless Cylinder

30 32 CC 32 38 D 7.6 12 16.6 21.6 26.4 33.6 41.6 52.4 65.4 E 4 1.5 2 2 2 2 3 8 8 F 8 9 10 13 13 16 16 2 2 G 5 5 5.5 7.5 7.5 8 11 14 14 H 13.5 12.5 13 20 20.5 22 29 33 33 I 28 34 40 50 58 72 J 4.5 4.5 6 6 8 8 10 12 12 N 9.5 11 11 18 18.5 20 26 25 25 Q NN S 62 63 83 106 111 124 150 176 188 K 5 4 11 8 10 15 16 25 26 V A 4 4 4 8 8 8 10 T C 8 14 14 26 32 32 41 L 35 38 57 66 70 80 92 110 122

Cylinder with Lock

Width across flats KC 32 only 2 x 4 x J Thread depth MC V B C With rod BH2 BH1 BH3 E E C (BY) C B C L BZ BN F BY F [mm] Model Applicable rod size B BH1 BH2 BH3 BN BP BY BZ C E F GA GC GF J KC MC V 32 12 f8 46 23 38.5 46.5 59 1/8 16 101 32.5 30 13 37.5 37.5 13 M6 x 1.0 3 16 3.5 40 16 f8 57 28.5 42.5 48.5 73 1/8 16 115 38 35 13 59.5 44.5 M6 x 1.0 3 16 4.5 50 20 f8 66 33 49 55.5 78 1/8 16 122

Compact Cylinder

144 153 163 173 182 192 25 127 138 148 159 169 180 190 201 211 222 32 199 214 228 243 257 272 286 301 315 330 402 475 40 264 282 299 316 333 351 368 385 403 420 506 593 Additional Mass Unit (g) Size 20 25 32 40 32 32 19 Male thread 19 How to Calculate (Example) CQUD32-50M Basic mass: CQUB32-50 330 g Additional mass: Rod end male thread 42 g Rod end male thread 10 10 4 Nut 4 162 122

Possible to transfer a workpiece at low-speed.

30.4 10 30 M8 x 1.25 11 6.5 3 90, 180 M5 x 0.8 depth 6 68 30 3 69 (11) 14 39 16.5 49 16 34.7 12 32 M10 x 1.5 14 8.5 4 90, 180 M6 x 1 depth 7 76 32 3 78 (13) 16 47 18.5 55 16 40.4 15 36 M10 x 1.5 14 8.6 5 Key dimensions Q S W b L1 US TA TB TC TD TF (H9) TG (H9) TL UW G M N L Size Rotation angle 90 104 4 0 0.03 0 0.1 0 0.1 20 8 9.6 29 11.5 20 59 24.5 1 13.5 27 4 4 2.5 74 15 11 180 130 90 122

Series CXS 10-/11-/12- Dual rod cylinder 21-/22- ø6, ø10, ø15, ø20, ø25, ø32

(mm) Model CXS20-10 S SS ZZ Z 10 92 116 30 20 102 126 40 30 112 136 40 40 122 146 40 21-/2210-/11-/12CXS20-20 CXS20-30 CXS20-40 CXS20-50 21-/2210-/11-/1221-/2210-/11-/1221-/2210-/11-/1250 132 156 60 21-/2210-/11-/12100 182 206 80 CXS20-75 CXS20-100 21-/2210-/11-/1275 157 181 60 21-/2210-/11-/1285 Dual rod cylinder CXSL 1221CXS / 10-/1122Basic style / CXS25, CXSL25 10-/11221221S ZZ 12 12 SS

Slider Type/Ball Bushing Bearing

Piping port surface A B Applicable auto switch Lead wire containment groove D-Z7/ Z80/ Y5/ Y6/ Y7 Cylinder model A B CY1H10 65.5 59.5 CY1H15 72 122 CY1H20 77.5 127.5 CY1H25 86 164 CY1HT25 86 164 CY1HT32 82 183 50 mm is the minimum stroke available with 2 auto switches mounted. Please contact SMC in the case of a stroke less than this.

XLAQ/XLDQ

Material 16 25 40 50 Standard AS568-122V AS568-129V AS568-140V AS568-231V External seal e AS568-122 AS568-129 AS568-140 AS568-231 XLAQ XLDQ Special Standard B2401-V15V B2401-V24V B2401-P42V AS568-227V Valve seal w B2401-V15 B2401-V24 B2401-P42 AS568-227 Special S valve seal assembly r XLD40-2-9-1A XLD50-2-9-1A Standard XLD50-2-9-1A XLDQ XLD40-2-9-1A Special Note 1) Add a suffix for the

MY1

9.5 142 5.6 38.7 49 100 10 M5 x 0.8 66 30 21 63.5 29 M8 x 1.25 150 11 6.5 31.5 19 30 82 27 16 172 6.8 44.2 64 120 13 M6 x 1 80 37 26 79.5 34 M10 x 1.5 180 14 8.5 34.8 23 36.5 98 34.5 15 202 8.6 47.2 79 136 13 M6 x 1 96 45 32 95.5 42.5 NW P Bore size (mm) PA 94 PB 3.5 PG 153 Q QW 48 W 102 Z 180 NH 40 16 20 25 32 40 16.5 56 M5 x 0.8 50 100 4.5 191 45 110 220 21.7 60 M5 x 0.8 60 112 7 206 46 122

CRQ2

JB BC BD BU CA CB F H 90, 180 90, 180 40 90, 180 20 30 10 12 15 8.3 32 30 32 36 M8 x 1.25 M10 x 1.5 M10 x 1.5 6.5 8.5 8.6 2.5 3 3 63 (11) 50 14 34 69 (11) 68 14 39 14.5 16.5 30.4 34.7 4.7 4.9 7 8.1 25 30 11 14 14 16 16 5.2 49 78 (13) 76 16 47 18.5 55 40.4 Size K Q S W Keyway dimensions TF (H9) TG (H9) TL Rotating angle JJ US TA TD UW G L TB TC M N b l 90 180 90 180 90 180 3 29 104 130 122

RSH/RS1H

South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CT CT Y V U FT CD Conveyor lower limit position T R H Stroke 2-Rc P G D A Q Rear pressure port Front pressure port B WB W (width across corners I) E (mm) Bore size (mm) N CD CT CZ D E FT FX FZ G H I L O P Q R B A Stroke 50 30 225.5 103.5 20 8 35.5 32 64 20 73 93 16 122

MK

34 40 50 60 60 69 86 103 12 12 15 15 45 52 64 77 5.5 5.5 6.6 9 31.5 35 41 47.5 9 depth 7 9 depth 7 11 depth 8 Rc / Rc / Rc / Rc / 30 30 37 48 14 14 17 17 20 24 30 35 7 7 8 9 4.5 5 7 7 6.5 6.5 7.5 7.5 14 14 19 19 16 16 20 20 3 3 3.5 3.5 M10 x 1.5 M10 x 1.5 M6 x 1.0 M6 x 1.0 17 17 22 28.5 101.5 76 70 81.5 85 37 29.5 34 35 7.5 8 10.5 10.5 0.15 0.15 Data 102.5 0.15 0.15 M12 x 1.75 M8 x 1.25 122

MVGQ

plug) 4-MM depth ML Solenoid valve: Series VZ5000 4-NN through Speed controller RS Q G RS H A RZQ Rc 1/8 P port MI W S CEP1 CE1 CE2 Rc 1/8 R port C + Stroke B + Stroke A + Stroke ML2B C J G5-S MVGQM, MVGQL Common Dimensions CV Applicable solenoid valve B C DA F G H J K L MM ML NN PW Q R S T V W X YY YL Z Bore size (mm) Standard stroke (mm) MVGQ 40 124 38 M8 x 1.25 20 M8 x 1.25 27 30 106 48 122

C95

16 130 145 155 170 190 205 7 9 9 9 12 14 10 12 12 16 16 20 65 75 80 90 110 140 12 15 15 20 20 25 142 160 170 190 210 230 45 52 60 70 90 110 26 28 32 40 50 60 26 28 32 40 50 60 9.5 12 12 16 16 20 32 36 45 50 63 75 10 11 12 12 14 16 4.5 4.5 5.5 5.5 6.5 6.5 144 163 175 190 215 230 142 161 170 185 210 220 32 36 45 50 63 71 7 10 10 10 12 14.5 17 22 22 28 34 40 73 82.5 90 97.5 110 120 95 106.5 122

Table of Contents

Construction. 112 112 114 115 119 120 120 122 125 127 127 128 128 130 130 133 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 135 135 136 138 144 139 145 145 145 146 146 147 147 149 151 156 157 158 158 159 159 160 162 164 165 166 169 182 182 183 183 186 187 191 199

CQS

style142 g 241 g Weight/Without Auto Switch (g) Cylinder stroke (mm) Bore size (mm) 5 10 15 20 25 30 35 40 45 50 12 39 46 53 60 67 74 16 52 61 69 78 86 95 20 89 102 116 129 143 156 170 183 197 211 25 124 141 157 174 190 207 224 240 257 273 Weight/With Auto Switch (Built-in magnet) (g) Cylinder stroke (mm) Bore size (mm) 5 10 15 20 25 30 35 40 45 50 12 47 54 62 69 76 83 16 63 71 80 88 97 106 20 122