Clean Gas Filter

The element replacement procedure for SFA can be downloaded via the SMC website. -9- Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2018 SMC Corporation All Rights Reserved -10-

PSxx-OMR0001CN

5No.PS-OMR0001CN-J 1 41 LCD VX2 (2 )AR20 () -6No.PS-OMR0001CN-J 2 (0.01 mm0.03 mm0.02 mm0.15 mm0.05 mm0.30 mm) ON()/OFF()() (A)() (B)() (C)(B)() -7No.PS-OMR0001CN-J 2 2 9 0.010.03mm 0.020.15mm 0.050.30mm DIN F G H 7 10 B Rc1/8 4 1 C 6 2 1 3 G1/8 F 3 G1/8 7 NPN1 PNP1 N P L 4 7 5 M SI N 1 2 3 4 5 6 1 2 S 6 7 8 3 4 5 6 6 7 8 T 1F 2GH 3ISO1179-1 4 5kPa 61 7 88 (10 ) 9DIN 101

PSxx-OMT0001CN

5No.PS-OMT0001CN-E 1 42 LCD VX2 (2 )AR20 () -6No.PS-OMT0001CN-E 2 (0.01mm0.03mm0.02 mm0.15 mm0.05 mm0.30 mm) ON()/OFF()() (A)() (B)() (C)(B)() -7No.PS-OMT0001CN-E 2 2 DIN 9 F 0.010.03mm 0.020.15mm 0.050.30mm G H 7 10 B Rc1/8 4 1 6 2 1 3 G1/8 G1/8 3 7 NPN2 PNP2 A B 4 L 7 5 SI N 1 2 3 1 2 3 4 5 6 S 6 7 8 4 5 6 6 7 8 T 1F 2GH 3ISO1179-1 4 5kPa 61 7 88 (10 ) 9DIN 101

101 kPa?1 to ?100 kPa2 l/min (ANR) (Supply pressure: ?101 kPa)24 VDC ?10%, 12 to 15 VDCPower supply voltage 24 VDC type: 0.12 A or less Power supply voltage 12 to 15 VDC type: 0.18 A or less0 to 5 VDC, 0 to 10 VDC4 to 20 mA DC, 0 to 20 mA DCApproximately 10 k Approximately 250 1 to 5 VDC (Load impedance: 1 k or more) Output accuracy: Within ?6% (Full span)Within ?

101 kPa?1 to ?100 kPa2 l/min (ANR) (Supply pressure: ?101 kPa)24 VDC ?10%, 12 to 15 VDCPower supply voltage 24 VDC type: 0.12 A or less Power supply voltage 12 to 15 VDC type: 0.18 A or less0 to 5 VDC, 0 to 10 VDC4 to 20 mA DC, 0 to 20 mA DCApproximately 10 k Approximately 250 1 to 5 VDC (Load impedance: 1 k or more) Output accuracy: Within ?6% (Full span)Within ?

101 kPa?1 to ?100 kPa2 l/min (ANR) (Supply pressure: ?101 kPa)24 VDC ?10%, 12 to 15 VDCPower supply voltage 24 VDC type: 0.12 A or less Power supply voltage 12 to 15 VDC type: 0.18 A or less0 to 5 VDC, 0 to 10 VDC4 to 20 mA DC, 0 to 20 mA DCApproximately 10 k Approximately 250 1 to 5 VDC (Load impedance: 1 k or more) Output accuracy: Within ?6% (Full span)Within ?

C95

A B C D E F G H P U Load (kN) Weight (g) Angle Bore size (mm) JA30-10-125 32 70 2.5 0.5 9 8 8 5 24 19.5 49.5 M10 x 1.25 17 JA40-12-125 40 160 4.4 0.75 13 11 11 6 31 20 60 M12 x 1.25 22 5 27 JA50-16-150 50, 63 300 11 1.0 15 13.5 14 7.5 41 22 71.5 M16 x 1.5 JAH50-20-150 80, 100 1080 18 2.0 18 16 32 24 59.5 11.5 28 31 101 M20 x 1.5 CJ1 CJP CJ2 CM2 CG1 MB MB1 Rod Clevis GKM (ISO 8140), Supplied

Rotary Clamp Cylinder: Standard ø 12, ø 16, ø 20, ø 25, ø 32, ø 40, ø 50, ø 63 MK Series

101 157 189 245 302 402 528 628 825 982 1402 1559 0.3 25 34 45 60 60 94 113 147 181 241 317 377 495 589 841 935 IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT 12 6 Clamp part Non-rotating accuracy 0.7 to 1.4 16 8 During clamping (Retraction end) 20 12 25 12 Made to Order: Individual Specifications (For details, refer to pages 401 and 402.) 32 16 Symbol Description 40 16 -X2071 -

Modular F.R.L. Unit

29.5 5.5 3.2 65 2 Note 1) 141 123 36 60 126 55 57 41 35 14 7 71 28.5 7 4 64 0 194 153 38 80 167 55 57 41 35 14 7 7 4 71 66 30.5 3.5 194 153 38 80 167 72.5 75 50 40 18 9 9 4 88 74 35 3.5 226 187 40 110 220 77.5 80 50 40 18 9 88 35 9 4.6 74 3 226 187 38 110 235 93 96 70 50 20 11 115 44.5 11 6.4 84 3.3 303 264 43 110 282 98 96 70 50 20 11 11 6.4 117.5 84 44.5 3.3 318 279 45 110 292 98 101

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

Hs Auto switch 12 15 22.5 A B 33 101 Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA Proper auto switch mounting positions (mm) Auto switch type D-A5, D-A6 D-A3, D-A44 D-G39, D-K39 D-F5, D-J5 D-F5W, D-J5W D-F5BAL D-A59W D-F5NTL D-F5F D-B5, D-B64 D-B59W Bore size (mm) A B A A A A A B A B B B B B 40 10.5 11.5 14.5 14 21 17 22 23 11 12 15 15.5 22 18 50 11 13

Compact Cylinder with Lock Series CLQ

46 9 9 80 92 108 38 8 33.5 60 46 101 75, 100 43.5 107.5 10 to 50 80 117.5 53.5 11 11 99 116 134 43 10 43.5 77 53.5 117.5 75, 100 53 126 10 to 50 Rod end nut L1 100 136 63 11 11 117 136 154 50 12 43.5 94 63 136 75, 100 Double clevis type: CLQD/CDLQD Double clevis type (mm) CT 4-N Cap bolt Stroke range Without auto switch With auto switch Bore size (mm) CD CT A A B CL B CL 10 to 50 75, 100

Modular Type Regulator Series AR

Pressure gauge port M Q N F J K P E Bracket (option) AR50, 60 Port size Square embedded type pressure gauge (option) A D C L OUT IN G Pressure gauge (option) B Pressure gauge port M N Bracket (option) Q K P F E J Standard specification Accessory specification With pressure gauge Bracket mounting size Panel mount Model Port sizes A 25 40 53 53 70 75 90 95 J 25 30 30 41 50 50 70 70 B 58 94 101

Single Axis Electric Actuator Series LJ1H

Page 101 Clean room specification . 104 Dust seal specification . 110 TSUBAKI CABLEVEYOR specification . 122 Construction . 134 Mounting . 140 Non-standard Motor Mounting Dimensions . 143 Deflection Data . 145 LJ1H/High Rigidity Guide .

Single Axis Electric Actuator Serriies LJ1S Slider Guide

Single Axis Electric Actuator Series LJ1S Series LJ1S Slider Guide Lead screw lead mm Mounting Page Model Series Guide type Motor type orientation Slide screw 20 20 20 20 20 20 LJ1S10 LJ1S20 LJ1S30 LJ1S10 LJ1S20 LJ1S30 88 Standard 90 motor 92 Slider guide LJ1S Horizontal 94 Standard 96 motor 98 Option specifications Page 100 Made to Order 101 Dust seal specification 116 TSUBAKI CABLEVEYOR

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

specification Dust seal specification TSUBAKI CABLEVEYOR specification Clean room specification (-X60) LJ1H 10/20/30 (Horizontal mount/Vertical mount) Page 104 Dust seal specification (-X70) LJ1H 10/20/30 (Horizontal mount/Vertical mount) 110 LJ1S 10/20/30 (Horizontal mount) 116 TSUBAKI CABLEVEYOR specification (-X40) LJ1H 10/20/30 (Horizontal mount) 122 LJ1S 10/20/30 (Horizontal mount) 128 101

One-touch Fittings Series KQ2

13.2 7 8.4 15.3 14.3 12.7 2.5 8 18 2.7 1 8 1 4 21.5 25.5 13.7 22.5 24.5 15.3 10 14 7 8 10 14 7 8 10 14 17 12 14 17 2.5 3 9.6 17.5 15.5 10 M5 0.8 M6 1.0 9.3 12.7 10.4 3.5 3.5 15.6 15.6 18 12.7 12.7 16 15.3 23 25 17.4 17.4 25.5 27.5 29 14.7 22 26 14.7 15.7 23 27 29 4 1 8 1 4 10 19 3.2 4.2 4.2 10 M5 0.8 M6 1.0 3.5 11.6 13.5 3.5 16.1 16.1 13.5 13.5 6 1 8 12 22 33 13 21 35 25 26 36 63 28 38 65 101

MXW Series Long Stroke Slide Table

26 103 26 Y L 5H9 +0.03depth 4.5 0 10 15 15 K A 35 20 26.5 A Z Bottom through hole 4.2 N-M5 x 0.8 thread depth 10 (N-1) x H G M5 x 0.8 thread depth 10 GG H 6 depth 4.5 5H9 +0.03 Bottom through hole 4.2 0 F E 5H9 +0.03depth 4.5 0 G F E Model J H GG Z N L K 82.5 123 91 MXW12-100 114 35 30 280 5 51 35 102.5 158 111 MXW12-125 137 35 32.5 330 6 76 60 127.5 182 136 MXW12-150 164 40 47.5 380 6 101

5 Port Solenoid Valve SY Series

characteristics Weight (g) Valve model Type of actuation Valve model Type of actuation 14/2 (PA/B) 4/25/3 (A/BEA/EB) Grommet Cv b C (kdm3/ 14/2 (PA/B) 4/25/3 (A/BEA/EB) Grommet Cv b C (dm3/ L, M plug W M8 L, M plug W M8 1, 5, 3 4, 2 (A, B) 1, 5, 3 4, 2 (A, B) DIN terminal (sbar)) Cv b C (kdm3/ (sbar) ) Cv b C (dm3/ (P, EA, EB) (P, EA, EB) connector 51 53 68 74 connector 57 82 connector 101

5 Port Solenoid Valve, Series VQC

RED ON: MAC_ID duplication error, or BUSOFF error (major communication abnormality). 11 11 Base-Mounted Type Plug-in Unit Series VQC4000 1in = 25.4mm VV5QC41 S Kit (Serial Transmission Kit: EX240) L2 (1 input block: 8 inputs) 14.5 (128.5) L1 8 6.5 Indicator light 54 P = 25 65.5 Manual override Min.0 to Max. 4 unit (0 to 216mm) 9 9 163 A B A B A B A B A A A B 10 143 32 98.8 143 101 Mounting

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

Dimensions Formulae L1 = 16n + 53 L2 = 16n + 87 n: Stations (max. 16 stations) L n 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 L1 L2 (L3) (L4) 85 119 150 160.5 101 135 162.5 173 117 151 175 185.5 133 167 187.5 198 149 183 212.5 223 165 199 225 235.5 181 215 237.5 248 197 231 262.5 273 213 247 275 285.5 229 263 287.5 298 245 279 300 310.5 261 295 325 335.5 277 311 337.5 348 293 327 350 360.5 309