Pressure Sensor Controller

PSE3 Applicable pressure sensor For compound For vacuum For low pressure For positive For low differential Rated pressure range -100 to 100 kPa 0 to -101 kPa 0 to 100 kPa 0 to 1 MPa 0 to 500 kPa 0 to 2 kPa Set pressure range 1 -101 to 101 kPa 10 to -101 kPa -10 to 100 kPa -0.1 to 1 MPa -50 to 500 kPa -0.2 to 2 kPa Set pressure resolution 0.2 kPa 0.1 kPa 0.1 kPa 0.001 MPa 1 kPa 0.01 kPa

3

(Refer to page 403 for details of the MK2T series.) 12, 16 20, 25 103 101 MK 102 (MK2T) Allowable moment of inertia [kgm2] Allowable moment of inertia [kgm2] 104 MK 103 105 16 Standard arm single unit 104 20, 25 Standard arm single unit 12 Standard arm single unit 106 105 50 100 200 50 100 200 Maximum piston speed [mm/s] Maximum piston speed [mm/s] 32, 40 50, 63 101 101 (MK2T) MK (MK2T) Allowable

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

Max. 3.5 6 x Rc 3/8 6 x Rc 3/8 6 x Rc 3/8 3 position (229) 3 position (229) 3 position (193) Double (219) Single (143) Double (219) Double (182) Single (143.5) Single (125) (With light/surge voltage suppressor: 91.5) (With light/surge voltage suppressor: 108.5 (110.5)) (With light/surge voltage suppressor: 96) (With light/surge voltage suppressor: 101) (With light/surge voltage suppressor

PSxx-OMG0005CN

IP65 -1060 -2070 () 3585RH() AC250 V1 50 M(DC50 V) 2F.S.(050 25)3F.S.(-1060 25) CEUL/CSARoHS 01 02 C01 N01 N02 A2 B2 R1/8 M50.8 Rc1/8 NPT1/8 R1/4 NPT1/4 M50.8 URJ1/4 TSJ1/4 M50.8 M50.8 C3604SUS316L PSE563 5.1 3 m 2 0.2 mm 1.12 mm PSE56--28: 2 5.1 3 m 2 0.2 mm 1.12 mm 193 g 200 g 194 g 201 g 187 g 203 g 193 g 101 g 108 g 102 g 109 g 95 g 111 g 101 g -12No.PS-OMG0005CN-E [mA]

PF2A/PF2W

Unit switching Real-time switch output ( ) ZSE ISE For Air Hysteresis mode Display Real-time flow rate l/min Accumulated flow l ON PSE YES CFM x 102, CFM x 101 ft3 x 101 OFF P-1 P-2 High flow rate Z I SE3 CFM = ft3/min P Window comparator mode H: Hysteresis High Flow Rate Type (For Air) PS H H Display Real-time flow rate l/min Accumulated flow l, m3, m3 x 103 ON Z I SE1 2 NO OFF P-1 P-

2-Color Display

P Rated pressure range: 0.0 to 101.0 kPa 0 101 kPa Expanded pressure range for positive-pressure type to the vacuum range.

PF-OMM0004_C

ON-OFF 1 L/min ,10 11 12 1 L/min () SI SI PF3W ON-OFF () ON 0 PVC -15No.PF-OMM0004-D IN IN (75 ) 9022545 -16No.PF-OMM0004-D (PF3W704/720/740 ) (M44 ) 8 1.5 mm (81 ) (PF3W711 ) (M54 ) 2 mm (81 ) -17No.PF-OMM0004-D (PF3W704/720/740 ) 3.04 8 0.50.7 Nm (81 ) ,, (4 ) (PF3W711/721 ) ,(4.0,4 ) 1.01.2 Nm (81 ) (4 ) -18No.PF-OMM0004-D () M8 3/8 24 mm 1/2 27 mm 3/4 32 mm 1 41

Fieldbus system (PROFIBUS DP compliant)

Specifications 41 Specifications 41 Dimensions 42 Output Unit Summary of Product Parts 43 Mounting and Installation 44 Installation 44 Wiring 45 Specifications 48 Specifications 48 Dimensions 48 -1No.EX-OMI0032-G Input Unit Summary of Product Parts 49 Mounting and Installation 50 Installation 50 Wiring 52 Specifications 56 Specifications 56 Dimensions 56 Maintenance 57 Troubleshooting 58

MHF2

(mm) MHZ2-20D3 42 Height Bore size 19 25 33 41 8 12 16 20 MHF2-12D 72.8 52 25 50 The low profile design saves space and reduces bending moments. Improved accuracy with smooth operation Low profile design Reduced bending moment and vibration Stroke selection is available. 3 standard stroke lengths are available for each bore size.

Series CE1

34 5.5 M6 X 1 56 30 14 Rc(PT) 1/8 64.5 41 40 5.5 M6 X 1 62 30 14 Rc(PT) 1/4 76.5 49 50 6.6 M8 X 1.25 61.5 35 19 Rc(PT) 1/4 89.5 49 60 9 M10 X 1.5 64 35 19 * Refer to p.4.4-8 regarding the rod end nut which is included. * Dimensions for auto switch model D-F79W. 4.4-12 Stroke Reading Cylinder Series CE1 Foot CE1L Bore size Stroke LT LE MK/MK2 LH 3.2 RSQ/RSG LB LA 4-O (Special cap bolt) 4-

CNG

I-G02 I-G03 I-G04 Y-G02 Y-G03 Y-G04 34 41 42 10.3 12.8 12 25 30 30 10.3 12.8 12 + 0.058 0 -0.2 -0.4 8 8 -0.2 -0.4 10 -0.3 -0.5 18 16 20 22 34 41 42 11.5 14 14 20 25, 32 40 8.5 10.5 14 M8 x 1.25 M10 x 1.25 M14 x 1.5 16 20 22 8 10 10 16 20 36 21 25.6 41.6 11.5 14 14 M8 x 1.25 M10 x 1.25 M14 x 1.5 25 30 30 8.5 10.5 16 + 0.4 + 0.2 8 IY-G02 IY-G03 IY-G04 20 25, 32 40 + 0.058 0 10 + 0.058 0 10

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

18.5 29.5 55.3 23 9.8 49.3 R 1/4 1.2 19 21.8 AS321F-02-10SD AS321F-N02-07SD 1/4" 13.2 27.8 39.3 17 10 18.5 43.3 21 31.8 AS321F-02-12SD AS321F-N02-09SD NPT 1/4 19 23 9.8 21.8 55.3 1.2 49.3 12 5/16" 15.2 29.5 41 18.5 20.9 44.3 22 32.8 AS321F-03-06SD AS321F-N02-11SD 6 17.9 31.8 43.3 21 3/8" 12.8 39.3 17 27.8 AS321F-03-08SD AS321F-N03-07SD 8 15.2 41 18.5 29.5 1/4" 13.2 27.8 39.3 17 53.7 23 9.8

Auto Switch Guide Reed Switches/Solid State Switches For Air Grippers (Rotary Actuators) 1

D-A90V OUT() Brown Contact protection box CD-P11 CD-P12 Reed switch OUT () Blue (g) Weight D-A93V D-A96 D-A96V D-A90 D-A90V D-A93 D-A93V Model 8 8 Lead wire length: 0.5 m 6 6 6 6 LED Brown (Red) OUT (+) Brown Contact protection box CD-P11 CD-P12 41 41 Lead wire length: 3 m 30 30 30 30 Resistor Reed switch Zener diode Dimensions OUT () Blue D-A90, D-A93, D-A96 Blue (Black) D-A96V DC (+)

MHF2

(mm) MHZ2-20D3 42 Height Bore size 19 25 33 41 8 12 16 20 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com MHF2-12D 72.8 52 25 50 The low profile design saves space and reduces bending moments.

High Purity Fluoropolymer

Model (L) 3 E J M H W ( T ) L N LQ1F41 LQ1F42 LQ1F51 LQ1F52 LQ1F61 LQ1F62 12 10 19 12 25 19 60 53 34 SMC 30 12 33.1 28 21 65.2 58 (M) W N J SMC 58 41 36 14 40 32 26 3/4 19 63.2 (E) (T) H 69 51 81.5 36 14 49 39.5 Class 4, 5 JIS 10K flange Inch sizes H Applicable tubing O.D.

MHF2

(mm) MHZ2-20D3 42 Height Bore size 19 25 33 41 8 12 16 20 MHF2-12D 72.8 52 25 50 The low profile design saves space and reduces bending moments. Improved accuracy with smooth operation Low profile design Reduced bending moment and vibration Stroke selection is available. 3 standard stroke lengths are available for each bore size.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 300 (53) 27.5 16.3 18 1.2 13.8 13.6 7 (24.5) (7.8) 23.4 mounting hole 41 Foot bracket For the bracket assembly model, refer to page 4-14-19.

SZ3000

double solenoid For 3 position type For 4 position type [SOL.B] () Coil : SX100-41-4DCOM (+) How to Order Lead wire length 2000 mm SZ3160-5MO-M5 SX100-40-4S-20 Include the connector assembly part number together with the part number for the plug connectors solenoid valve without connector.

VM

12 x 17 Miniature pneumatic indicator VR3200 Pneumatic-electric relay Dimensions VR3200: 17 x 49 x 71 VR3201: 25 x 86 x 89 VR3201 VR4151 Relay valve 7 5 Metal Spool Dimensions Side piping: 30 x 53 x 91 Bottom piping: 30 x 48 x 91 VR4152 INDEX Mechanical Valves Page Series VM1000 P . 5-6-8 Series VM100 P . 5-6-12 Series VM200 P . 5-6-20 Series VM400 P . 5-6-26 Series VZM500 P . 5-6-41

Low Profile Air Gripper Series MHF2

(mm) MHZ2-20D3 42 Height Bore size 19 25 33 41 8 12 16 20 MHF2-12D 72.8 52 25 50 The low profile design saves space and reduces bending moments. Improved accuracy with smooth operation Low profile design Reduced bending moment and vibration Stroke selection is available. 3 standard stroke lengths are available for each bore size.