ML1C

15 5 10 1 pc. 2 pcs.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

40 35 190 190 190 190 190 190 190 10 10 10 10 10 10 10 10 10 10 10 10 10 10 90 80 65 50 45 40 35 60 50 50 40 40 30 20 17 23 27 33 37 44 57 36 50 66 68 78 91 115 40 54 60 72 82 95 19 40 54 60 72 82 95 19 21 27 31 37 41 48 61 21 27 31 37 41 48 61 10 20 30 50 70 100 200 Operating angle m: Value of the operating range Lm of a single auto switch converted to an axial rotation angle.

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

RY RT [mm] Bore size [mm] Stroke range [mm] A AL B B1 BN BP BQ C D E F GA GB GC GD GL GR Without rod boot With rod boot 40 Up to 800 20 to 800 30 27 60 22 96 1/4 1/4 44 16 32 10 85 15 26 54 10 10 50 Up to 1200 20 to 1200 35 32 70 27 108 1/4 1/4 52 20 40 10 95 17 27 59 13 12 63 Up to 1200 20 to 1200 35 32 86 27 115 1/4 1/4 64 20 40 10 102 17 26 67 18 15 80 Up to 1400 20 to 1400 40 37 102 32

CLQ

Applicable bore size (mm) 32, 40 UA C d1 d2 H K L UT Weight (g) 25 9 YB-03 32, 40 6.5 10 18 50 80 YU-03 15.8 14 M8 x 1.25 8 7 17 6 11 11 YB-05 50, 63 6.5 12 22 60 120 YU-05 50, 63 19.8 18 M10 x 1.5 10 40 7 17 6 13 YU-08 M16 x 2 80 24.8 23 13 90 9 22 8 20 14 YB-08 80 8.5 16 28 75 230 YU-10 M20 x 2.5 100 29.8 28 14 160 11 26 10 26 18 YB-10 100 10.5 18 36 90 455 9-10-25 25 Series CLQ Proper

Vacuum System Peripherals:

S U D side D U side 2 to 10 stations B Special specifications M 2 to 20 stations Both sides Made to order. When using both types, specify C4 and C6 specifically; do not just use X marking.

EX600-DX_DY_DM_eng

Do not operate in an atmosphere containing flammable or explosive gases. Fire or an explosion can result. This product is not designed to be explosion proof. Do not operate the product outside of the specifications. Do not use for flammable or harmful fluids. Fire, malfunction, or damage to the product can result. Verify the specifications before use.

Cylinder with Lock Series CNS

(mm) Bore size Auto switch model Bore size (mm) Auto switch model 125 140 160 125 140 160 D-A9/A9V D-A9/A9V D-M9/M9V D-M9W/M9WV D-M9AL/M9AVL 12 12.5 11.5 D-M9/M9V D-M9W/M9WV D-M9AL/M9AVL BS5-125 BS5-125 BS5-160 7 6.5 6.5 D-A5/A6/A59W D-F5/J5/F5NTL D-F5W/J59W D-F5BAL/F59F D-Z7/Z80 CLJ2 14 14.5 13 BT-12 BT-12 BT-16 D-A3/A44 D-A5/A6 10 10 10 CLM2 D-A3/A44 D-G39/K39 D-A59W 17 17 17 BS1-125 BS1

CNA

DL DD DA DU DC DX DE DO DR DT DS DH DF B W1 Z A B A + B + 90 CA1-B04 CA1-B05 CA1-B06 CA1-B08 CA1-B10 +0.058 0 11 57 35 65 15 85 10 9 17 8 40 52 60 10 234 10 +0.070 0 11 12 57 35 65 18 85 10 9 17 8 40 52 70 10 261 +0.070 0 13.5 12 60 162 67 40 80 25 105 12.5 11 22 10 50 66 85 10 280 16 +0.084 0 16.5 93 60 100 31.5 130 15 13.5 24 12 65 90 102 12 337 20 +0.084 0 16.5 93 60 100 35.5 130 15 13.5

CNA

DL DD DA DU DC DX DE DO DR DT DS DH DF B W1 Z A B A + B + 90 CA1-B04 CA1-B05 CA1-B06 CA1-B08 CA1-B10 +0.058 0 11 57 35 65 15 85 10 9 17 8 40 52 60 10 234 10 +0.070 0 11 57 35 65 18 85 10 9 17 8 40 52 70 10 261 12 +0.070 0 13.5 12 60 162 67 40 80 25 105 12.5 11 22 10 50 66 85 10 280 16 +0.084 0 16.5 20 93 60 100 31.5 130 15 13.5 24 12 65 90 102 12 337 +0.084 0 16.5 93 60 100 35.5 130 15 13.5

EXxx-OMY0006CN

DO (n+1) 0 V DO (n) FE / Shield N.C.

Thermo-con/Rack Mount Type

capacity [W] Facility water temperature 35C Facility water temperature 20C 1500 1500 1000 1000 Facility water temperature 20C Facility water temperature 10C 500 500 Facility water flow rate: 10 L/min Facility water flow rate: 10 L/min 0 0 0 10 20 30 40 50 60 70 Circulating fluid temperature [C] 0 10 20 30 40 50 60 70 Circulating fluid temperature [C] HECR012-W Circulating fluid: Tap water

15

Selection Graph [Graph 2] Allowable load mass by stroke 10 [Graph 1] Allowable load mass by stroke 6 10 10 Load mass [kg] Load mass [kg] y, z + A 200 y, z + A 300 y, z + A 100 1 1 0 100 200 300 400 500 600 0 100 200 300 400 Stroke [mm] Stroke [mm] [Graph 4] Allowable load mass by stroke 20 [Graph 3] Allowable load mass by stroke 15 100 10 y, z + A = 0 Load mass [kg] Load mass [kg] y, z

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

10 28.4 (Mounting holes) 3.5 25 2.5 5 5 10 22 16.4 10 3.2 222 4 (Mounting holes) Manual override (Non-locking) M3 0.5 (Pilot port) M3 0.5 (Pilot port) A B 11 17.5 1(Bleed port) 1.5 A B 1.5 1.5 5-M3 0.5 (Piping port) 33 36 Manual override (Non-locking) B P R R 7 7 36 2 35 7 13.5 28.5 15 A 21 R2 P R1 13 1(Bleed port) 11 10 4 15 10 10 5-M5 0.8 (Piping port) 14 14 15 (Bracket) 2 Position double

CLA

l~ length 01 thread wnhoul boot With boot --l ~ 40 500 20-500 27 30 60 96 V. y, 44 16 32 10 85 15 26 54 10 10 M8X1.25 100 -750 20750 37 40 11 6 140 V. y, 92 30 52 14 124 21 31 76 25 19 M1 2Xl .75 50 600 20-600 32 35 70 108 Yo V. 52 20 40 10 95 17 27 59 13 12 M 8X 1. 25 63 -600 20-600 32 35 86 11 5 'I, 'I, 64 20 40 10 102 17 26 67 18 15 Ml 0Xl .25 80 750 20750 37 40 102 129 'I.

10

F F 1 2 1 2 MHL2-10DZ MHL2-16DZ MHL2-16D Z MHL2-10D Z 60 60 25 25 Pressure 0.6 MPa Gripping force [N] Gripping force [N] Gripping force [N] Gripping force [N] Pressure 0.6 MPa 50 50 20 20 Pressure 0.6 MPa 0.5 MPa Pressure 0.6 MPa 0.5 MPa 40 40 15 15 0.4 MPa 0.5 MPa 0.5 MPa 0.4 MPa 0.4 MPa 30 30 0.4 MPa 10 10 0.3 MPa 20 20 0.3 MPa 0.3 MPa 0.3 MPa 0.2 MPa 5 5 10 10 0.2 MPa 0.2 MPa 0.2 MPa 10

Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

Note 1) In cases when K2 or J2 (supply valve normally open) is selected for the solenoid valve combination, when vacuum is stopped for long periods of time (10 minutes or more), do not continue to energize the supply valve, and shut off the air supply.

Guide Cylinder Series MGG

(Assuming approximately 30% dispersion) There may be the case to change substantially depending on an ambient environment. 4 4 4.5 5 6 6.5 6.5 7 8 10 9 10 10 11 D8 10 9 10 10 11 5 5 5.5 6 7 7.5 7.5 8 11 11 13 13 14 14 14 17 35 40 40 45 45 45 45 50 16 18 -X 8 10 9 10 10 11 Individual -X 387 Series MGG Auto Switch Mounting Bracket: Part No.

Magnetically Coupled

10, 15, 20, 25, 30, 40 5, 10, 15, 20, 25, 30, 40 5, 10, 15, 20, 25, 30, 40 5, 10, 15, 20, 25, 30, 40 1/4" 6 12 3/8" 10 20 5/8" 15 40 3/4" 20 60 1" 25 80 32 1-1/4" 80 1-1/2" 40 80 2" 50 80 2-1/2" 63 80 Note) The longer the stroke, the larger the amount of deflection in a cylinder tube.

Low Profile Guide Type

Bore size (mm) 10 15 25 No. RB0805-X552 RB1006-X552 2.

Guide Cylinder/Compact Type Series MGC

D-G79/K79/K79C D-H7/H7W D-H7BAL/H7NF D-H7C 8 10 9 10 10 BMA2-020 BMA2-025 BMA2-032 BMA2-040 BMA2-050 8 10 9 10 10 13 13 14 14 14 8 10 9 10 10 D-B5/B64 D-B59W D-G5/K59 D-G5W/K59W D-G5BAL/G59F D-G5NTL D-G5NBL 4 4 4.5 5 6 7 8.5 9 10 9.5 BA-01 BA-02 BA-32 BA-04 BA-05 D-G5/K59 D-G5W/K59W D-G5NTL/G5BAL 4 4 4.5 5 6 D-G59F D-G5NBL D-B7/B80 D-B73C/B80C D-G79/K79 D-K79C 5 5 5.5 6 7 35 40 40 45 45