Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

Metric size ZFC7 ZFC5 Symbol Applicable tubing O.D. 4 6 8 10 12 3 4 5 6 7 Option Nil B None With bracket Inch size B D E F 5/32" 1/4" 5/16" 3/8" Max.

VZ3000

Description With foot bracket Note For VZ312 0 3 DXT170-34-1B AN120-M5 Noise reduction: 21dB or more (8 x 17 mm) Silencer 3-3-18 5 Port Solenoid Valve Body Ported Series VZ3000 Flow Characteristics/Weight Flow characteristics Note) Port size Valve model Type of actuation Weight (g) 1 4/2 (P A/B) 4, 2 (A, B) 1, 5, 3 (P , EA, EB) 4/2 5/3 (A/B EA/EB) b C [dm3/(sbar)] b C [dm3/(sbar)] Cv

OMS0020

Position 2 The AREA signal is output for both the AREA A and AREA B set configuration. AREA B Set as AREA 1AREA 2. Position 1 AREA B Position 2 21 (2) Step Data Save Command "EU" Details Use after executing Step Data setting comand "EE".

CNG

CNS D-H7C D-B5, D-B6, D-B59W CLS HS HS Auto switch Auto switch 12 8.5 CLQ 24.5 16 MLGP A B A B 33 38.2 RLQ MLU Proper Auto Switch Mounting Position Auto Switch Mounting Height ML1C Auto switch model D-C7/C80 D-H7 D-H7W D-H7NF D-H7BAL D-H7 D-H7C D-H7W D-H7BAL D-H7NF D-C7/C80 D-C73C D-C80C D-B5/B64 DD-B5/B64 D-B59W D-G5NTL D-H7C D-C73C D-C80C D-G5NTL D-B59W -X Bore size (mm) A B A B A B A B

Rotary Gripper Series MRHQ

8 42 Side A Side B Scale: 40% 12 Rotary Gripper Series MRHQ Construction Description Material Note Parts list No.

High-precision Digital Pressure Switch ( compatible)

Normal output Reversed output P_1(P_2)=A-(A-B)/4 n_1(n_2)=B+(A-B)/4 A = Maximum pressure H_1(H_2)= (A-B)/2 H_1(H_2)= (A-B)/2 B = Minimum pressure If setting is not necessary press the UP and DOWN buttons simultaneously for 1 second or longer. -36No.PS-OMV0004-H [F 6] Fine adjustment of display value This function is to manually perform a fine adjustment of the displayed pressure value.

Transfer

C D Side support B MY-SB 2 x J A B C D A 61 70 87 B 75 84 105 C D E F G H J Part no.

High-precision Digital Pressure Switch

Normal output Reversed output P_1(P_2)=A-(A-B)/4 n_1(n_2)=B+(A-B)/4 A = Maximum pressure H_1(H_2)= (A-B)/2 H_1(H_2)= (A-B)/2 B = Minimum pressure If setting is not necessary press the UP and DOWN buttons simultaneously for 1 second or longer. -39No.PS-OMV0009-E [F 6] Fine adjustment of display value This function is to manually perform a fine adjustment of the displayed pressure value.

Multi-channel Digital Sensor Monitor ( compatible)

Normal output Reversed output P_1(P_2)=A-(A-B)/4 n_1(n_2)=B+(A-B)/4 A = Maximum pressure H_1(H_2)= (A-B)/2 H_1(H_2)= (A-B)/2 B = Minimum pressure If setting is not necessary press the UP and DOWN buttons simultaneously for 1 second or longer. -46No.PS-OMW0012-C [F 6] Fine adjustment of display value This function is to manually perform a fine adjustment of the displayed pressure value.

High-precision Digital Pressure Switch ( compatible)

Normal output Reversed output P_1(P_2)=A-(A-B)/4 n_1(n_2)=B+(A-B)/4 A = Maximum pressure H_1(H_2)= (A-B)/2 H_1(H_2)= (A-B)/2 B = Minimum pressure If setting is not necessary press the UP and DOWN buttons simultaneously for 1 second or longer. -37No.PS-OMY0007-A [F 6] Fine adjustment of display value This function is to manually perform a fine adjustment of the displayed pressure value.

C95Series

DFSIIWDJ59W> lmm) DA59W DF5BA:DE5NT (mm) DF5BA A B A B A .B A B A B , 32 0.5 0 4.5 2 7 4.5 11 8.5 12 9.5 , 40 0.5 0 4.5 2 7 4.5 11 8 .5 12 9.5 , SO 1 0 5 2.5 7.5 5 11 .5 9 12.5 10 Ht H~ HI Hs 32 24.S 35 25 32.5 t 40 27.S 38.5 27.5 36.5 I SO 34.5 43.5 34 41 ; 80 4 2.5 6 6 .5 10.5 9 14.5 13 15.5 14 , 100 4 2.5 8 6.5 10.5 9 14.5 13 15.5 14 J 63 39.5 46.5 39 46 '. 63 1 0 5 2.5 7.5 5 11 .5 9 12.5

A_HEC-OM-I009

This item is U n i t N u m b e r M O D E < 0 applicable only when multiple units are used. 2. Baud Rate B a u d R a t e M O D E < 1 2 0 0 b / s Setting range : 600, 1200, 2400, 4800, 9600, 19200b/s Indicated content : Baud rate (Ex. : 1200b/s) Function : Sets baud rate for communication. 3.

Mist Separator Regulator

R U V W Y Z B B B B B B B AWM20-D 30 34 43.9 5.4 15.4 55 2.3 29.7 28.5 14 6 117.9 104.4 100.4 106.9 AWM30-D 41 40 46 6.5 8 53 2.3 31.3 38.5 19 7 157.1 123.9 122.2 117.8 122.3 137.8 142.3 AWM40-D 50 54 54 8.5 10.5 70 2.3 35.5 42.5 21 7 186.9 155.6 153.9 149.6 154.1 169.6 174.1 The dimension C is the length when the filter regulator knob is unlocked. -40- 13-2.

Ｍ icro Mist Separator Regulator

R U V W Y Z B B B B B B B AWD20-D 30 34 43.9 5.4 15.4 55 2.3 29.7 28.5 14 6 117.9 104.4 100.4 106.9 AWD30-D 41 40 46 6.5 8 53 2.3 31.3 38.5 19 7 157.1 123.9 122.2 117.8 122.3 137.8 142.3 AWD40-D 50 54 54 8.5 10.5 70 2.3 35.5 42.5 21 7 186.9 155.6 153.9 149.6 154.1 169.6 174.1 The dimension C is the length when the filter regulator knob is unlocked. -40- 13-2.

Compact Vacuum Ejector Series ZA

C () White Reset (Vacuum suspension) B DC negative common Lead wire colors Set (Vacuum generation) Simultaneous energization protection circuit COM. (+) Red () Black SOL. A C (+) White Reset (Vacuum suspension) B AC type Lead wire colors 100 VAC, 200 VAC Set (Vacuum generation) Yellow Yellow A 3.

VXZ

Option Symbol and Composition Option Symbol and Composition Main body, shading coil material Holder material (in core ass'y) Option symbol Seal material Coil insulation type Main body, shading coil material Standard A B D E F G H J L N P T X Option symbol Seal material Coil insulation type NBR FKM Standard A B D E F G H J L N P T X NBR FKM B Polyacetal B FKM EPDM Brass or BC6, Copper FKM

VQ20/30

VX B 1 2 1 2 VX3 A VXA B NL R VN R LED B NL: Neon light R: Resistor LED: Light emitting diode R: Resistor LVC Caution LVA Valve Mounting After confirming the gasket is correctly placed under the valve, tighten the mounting screws with the appropriate torque (0.2 to 0.23 Nm).

3 Port Solenoid Valve, VQ100 Series, Base Mounted Type

Note2) A (set) side energization : A light (orange) illuminates, B-(reset) side energization : B light (green) illuminates.

Ionizer

Power supply 24 VDC B B B Ground with a ground resistance of 100 or less without connecting the DC1 () lead (Blue) of the power supply cable to the power supply 0 V. Red A A +24 V Black Blue Charged object Charged object 0 V Reduced-wiring Fieldbus System F.G. (mm) Ground with a ground resistance of 100 or less. A B When using the autobalance sensor (body-mounting type) 10 20 20 40 3.

4-channel Flow Monitor ( compatible)

(2) Conversion formula from the measurement value to the process data: (PD) = (Pr b) / a Pr: Measurement value and directive value PD: Measurement value (process data) a: Inclination b: Intercept [Inclination and intercept to the unit specification] Applicable products Unit Range Inclination a Intercept b 4 L/min 0.004 0 16 L/min 0.016 0 L/min 40 L/min 0.04 0 100 L/min 0.1 0 250 L/min 0.25