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8370: JIS B 8361: JIS B 9960-1: -(1 :) JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4.2 -2No.VFR2000-OMM0001 1 1 3) 3) 1 1 () -3No.VFR2000-OMM0001 5 5 5 5 ( ) () () 3 3 EXH VVFS2000-R-01-1,2 VVFS2000-R-02-1,2) ( ) ( ) 3 1 DC 3 () -4No.VFR2000-OMM0001 5 5 5 5 0.1 2 C-R () C-R DC 3% AC 20% (SSR )AC 1) (C-R )OFF 2)() ZNR 1V -10 -5No.VFR2000-OMM0001 5 5 5 5 1.5~2 1) 2)1 ()ISO VG32 MSDS

Analog Output Flow/Analog output Output A B C Voltage output 1 V 1.1 V 5 V Current output 4 mA 4.4 mA 20 mA C Model Rated flow [L/min] Minimum Maximum LFE1 0.5 20 LFE2 2.5 100 LFE3 5 200 B A Outside the range 0 Min.

A B For details about certified products conforming to international standards, visit us at www.smcworld.com.

A B For details about certified products conforming to international standards, visit us at www.smcworld.com.

A B For details about certified products conforming to international standards, visit us at www.smcworld.com.

A B For details about certified products conforming to international standards, visit us at www.smcworld.com.

A B For details about certified products conforming to international standards, visit us at www.smcworld.com.

(process data) a: Inclination b: Intercept [Inclination and intercept to the unit specification] Series Unit Flow range Inclination a Intercept b 1000 L 0.25 0 L/min 2000 L 0.50 0 PF3A7#H 1000 L 0.0088275 0 cfm 2000 L 0.0176575 0 [Calculation example] (1) Conversion from the process data to the flow measurement value (For PF3A701H series, unit L/min, flow range 1000 L and PD = 2800) Pr =

8370: JIS B 8361: JIS B 9960-1: (1) JIS B 8433: *2) 1. 2. 3. 1. 2. 3. 4. 4 - LEC-G Series/ / 11.5 5 - 2. 2.1 TM 1 (GW)(LEC)DeviceNet *1(LEC) 8 *1 12 2.2 DIN D DIN DN1 DeviceNetTM G 6 - 2.3 PLC LEC-T1-G TM DeviceNet LEC-W2 LEC-GDN1 LEC (RS485) Modbus LEC Series LE Series 7 - 2.4() (1) 1 (LECGDN1) 1 (2) 3.4 (3)(LEC) (LEC)4.3 (LEC) (4) (LEC) 4 (5) (CN1CN3) 5. 8 - (6) DC24V

A B PF3W504 0 4 PF3W520 0 16 PF3W540 0 40 PF3W511 0 100 Display A Set A and B to the values shown in the table on the left.

JIS B 8370: General rules for pneumatic equipment. JIS B 8361: General rules for hydraulic equipment. JIS B 9960-1: Safety of machinery Electrical equipment of machines. (Part 1: General requirements) JIS B 8433-1993: Manipulating industrial robots Safety. etc. 2) Labor Safety and Sanitation Law, etc. Caution: Operator error could result in injury or equipment damage.

Drive data value is wrong (048) B Input RESET Set the "speed" to the "pushing speed" or higher.

Work 1 Work 2 Work n Atmosphere A = Maximum pressure value B = Minimum pressure value P-1 = A (A B) / 4 H-1 = (A B) / 2 For compound pressure PSE533 PSE543 PSE563 For low differential pressure For low pressure For vacuum For positive pressure Pressure range C Display calibration function This function eliminates slight differences in the output values and allows uniformity in the numbers

How to Order X15 AMG Body size Optional specifications Accessories Thread Port size Dimensions Model Connection A 240 260 300 380 B 256 300 349 496.5 B, FF, 10K 1B, FF, 10K AMG450 AMG550 AMG650 AMG850 3/4 1 1/2 B, FF, 10K 2B, FF, 10K 4.4-6

0.31 0.26 0.27/0.33 0.29/0.41 0.35 0.42 0.36/0.34 0.29/0.30 0.29 0.23 0.18/0.23 0.19/0.18 b 0.34 0.27 0.31/0.30 0.31/0.25 0.41 0.43 0.36/0.41 0.41/0.42 0.36 0.25 0.27/0.27 0.26/0.28 b 0.47 0.40 0.38/0.40 0.57/0.21 0.34 0.36 0.30/0.26 0.17/0.14 0.31 0.22 0.25/0.24 0.24/0.23 b 0.38 0.28 0.37/0.37 0.25/0.23 0.42 0.43 0.35/0.32 0.22/0.21 0.36 0.29 0.25/0.24 0.22/0.24 VP342 (Body ported) 1/8 1

. / . 01$ 2 0 VXR239 2 0 17-3-53 2 The VX series will be revised shortly. Series VXR21/22/23 Normally Closed (N.C.)

, 5, 6 Front nose mount (B) 12 32 32 40 Rear pivot mount (C) 40 Double end mount (E) Note) Minimum stroke for mounting auto switches: 0.6 inch for 2 switches, 0.4 inch for one switch. 2 Stainless Steel Body Cylinder Series NCM-A Dimensions ZB + STROKE A K W 0.50 2-ZD NE ZC MM E N KK UNF-2A N B -0.003 0.000 PILOT YC WA WB D ACROSS FLATS Y NN MOUNTING NUT Bore MM KK A B D E K N 075 (3/4") 0.250

Regulator Series AR-B 1021Series ARK-B 1021Regulator with Backflow Function How to Order Clean series K F 10 AR B 30 03 BG 1N K F 21 AR B 30 03 BG 1N Copper, fluorine and silicone-free + Low particle generation q r t y w e Regulator Option/Semi-standard: Select one each for a to g.

Be careful not to exchange the power cable (brown) with the output cable (black). 9-15-37 38 Solid State Switch Direct Mounting Style D-Y59 /D-Y69 /D-Y7P(V) A B A B For details about certified products conforming to international standards, visit us at www.smcworld.com.